EP2196669A3 - Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe - Google Patents

Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe Download PDF

Info

Publication number
EP2196669A3
EP2196669A3 EP09014532A EP09014532A EP2196669A3 EP 2196669 A3 EP2196669 A3 EP 2196669A3 EP 09014532 A EP09014532 A EP 09014532A EP 09014532 A EP09014532 A EP 09014532A EP 2196669 A3 EP2196669 A3 EP 2196669A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
motor
assembly
operating same
pumping stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09014532A
Other languages
English (en)
French (fr)
Other versions
EP2196669A2 (de
EP2196669B1 (de
Inventor
Stefan Kallenborn
Wolfgang Losch
Ronald Sachs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41629114&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2196669(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2196669A2 publication Critical patent/EP2196669A2/de
Publication of EP2196669A3 publication Critical patent/EP2196669A3/de
Application granted granted Critical
Publication of EP2196669B1 publication Critical patent/EP2196669B1/de
Revoked legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0208—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Anordnung mit einer Vakuumpumpe (10; 210), welche wenigstens eine Pumpstufe (12; 212) und einen die Pumpstufe antreibenden Motor (14; 214) umfasst, und mit einer Bestromungsbaugruppe (21; 221). Um den Verschleiß der Bauteile der Pumpstufe zu verringern, wird vorgeschlagen, dass die Anordnung eine Messbaugruppe (24; 224) zur Bestimmung einer elektrischen Größe aufweist. Die Erfindung betrifft außerdem ein Verfahren zum Betrieb einer Vakuumpumpe (10; 210) mit einem Motor (14; 214). Hier wird vorgeschlagen, dass die Leistungsaufnahme des Motors gemessen und bei Absinken der Leistungsaufnahme die Drehzahl des Motors gesenkt wird.
EP09014532.7A 2008-12-12 2009-11-20 Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe Revoked EP2196669B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008062054.8A DE102008062054B4 (de) 2008-12-12 2008-12-12 Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2196669A2 EP2196669A2 (de) 2010-06-16
EP2196669A3 true EP2196669A3 (de) 2012-07-11
EP2196669B1 EP2196669B1 (de) 2014-07-23

Family

ID=41629114

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09014532.7A Revoked EP2196669B1 (de) 2008-12-12 2009-11-20 Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP2196669B1 (de)
JP (1) JP2010138901A (de)
DE (1) DE102008062054B4 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
DE102011086572B4 (de) * 2010-11-17 2019-08-14 KSB SE & Co. KGaA Verfahren und Regelvorrichtung zur drehzahlvariablen Regelung eines Verdrängerpumpenaggregates sowie Verdrängerpumpenanordnung
DE102011010218B4 (de) 2011-02-03 2019-09-12 Robert Bosch Gmbh Verfahren zum Regeln des Drucks eines mittels einer drehzahlgeregelten Pumpe geförderten Fluids

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6244825B1 (en) * 1998-10-01 2001-06-12 International Business Machines Corporation Pump-protecting device, pump-protecting method and pumping apparatus
DE10359270A1 (de) * 2002-12-18 2004-09-02 Kabushiki Kaisha Toyota Jidoshokki, Kariya Steuerung einer Vakuumpumpe
EP1486673A1 (de) * 2002-03-20 2004-12-15 Ricoh Company, Ltd. Vakuumpumpensteuervorrichtung und vakuumvorrichtung
EP1515423A2 (de) * 2003-09-10 2005-03-16 BOC Edwards Japan Limited Motorregelungssystem und mit diesem Motorregelungssystem ausgestattete Vakuumpumpe
DE102006012532A1 (de) * 2006-03-18 2007-09-20 Pfeiffer Vacuum Gmbh Dichtungsanordnung für eine Hubkolbenvakuumpumpe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713286A (en) * 1980-06-30 1982-01-23 Toshiba Corp Operating method of vacuum pump
DE19630384A1 (de) * 1996-07-29 1998-04-23 Becker Kg Gebr Verfahren zur Steuerung oder Regelung eines Aggregats und Frequenzumwandler
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
JP2003155981A (ja) 2001-11-21 2003-05-30 Toyota Industries Corp 真空ポンプにおける運転制御方法及び運転制御装置
DE102006032765A1 (de) * 2006-07-14 2008-01-17 Leybold Vacuum Gmbh Vakuumpumpe
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
DE102008062054B4 (de) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6244825B1 (en) * 1998-10-01 2001-06-12 International Business Machines Corporation Pump-protecting device, pump-protecting method and pumping apparatus
EP1486673A1 (de) * 2002-03-20 2004-12-15 Ricoh Company, Ltd. Vakuumpumpensteuervorrichtung und vakuumvorrichtung
DE10359270A1 (de) * 2002-12-18 2004-09-02 Kabushiki Kaisha Toyota Jidoshokki, Kariya Steuerung einer Vakuumpumpe
EP1515423A2 (de) * 2003-09-10 2005-03-16 BOC Edwards Japan Limited Motorregelungssystem und mit diesem Motorregelungssystem ausgestattete Vakuumpumpe
DE102006012532A1 (de) * 2006-03-18 2007-09-20 Pfeiffer Vacuum Gmbh Dichtungsanordnung für eine Hubkolbenvakuumpumpe

Also Published As

Publication number Publication date
JP2010138901A (ja) 2010-06-24
DE102008062054B4 (de) 2019-05-29
DE102008062054A1 (de) 2010-06-17
EP2196669A2 (de) 2010-06-16
EP2196669B1 (de) 2014-07-23

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