EP2196669A3 - Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide - Google Patents
Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide Download PDFInfo
- Publication number
- EP2196669A3 EP2196669A3 EP09014532A EP09014532A EP2196669A3 EP 2196669 A3 EP2196669 A3 EP 2196669A3 EP 09014532 A EP09014532 A EP 09014532A EP 09014532 A EP09014532 A EP 09014532A EP 2196669 A3 EP2196669 A3 EP 2196669A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- motor
- assembly
- operating same
- pumping stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
- F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0208—Power
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0209—Rotational speed
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008062054.8A DE102008062054B4 (de) | 2008-12-12 | 2008-12-12 | Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2196669A2 EP2196669A2 (fr) | 2010-06-16 |
EP2196669A3 true EP2196669A3 (fr) | 2012-07-11 |
EP2196669B1 EP2196669B1 (fr) | 2014-07-23 |
Family
ID=41629114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09014532.7A Revoked EP2196669B1 (fr) | 2008-12-12 | 2009-11-20 | Agencement doté d'une pompe à vide et procédé de fonctionnement d'une pompe à vide |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2196669B1 (fr) |
JP (1) | JP2010138901A (fr) |
DE (1) | DE102008062054B4 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008062054B4 (de) * | 2008-12-12 | 2019-05-29 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe |
EP2640973B1 (fr) * | 2010-11-17 | 2018-10-03 | KSB SE & Co. KGaA | Procédé et dispositif de réglage pour la régulation à vitesse variable d'un groupe pompe volumétrique et ensemble de pompe volumétrique |
DE102011010218B4 (de) * | 2011-02-03 | 2019-09-12 | Robert Bosch Gmbh | Verfahren zum Regeln des Drucks eines mittels einer drehzahlgeregelten Pumpe geförderten Fluids |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6244825B1 (en) * | 1998-10-01 | 2001-06-12 | International Business Machines Corporation | Pump-protecting device, pump-protecting method and pumping apparatus |
DE10359270A1 (de) * | 2002-12-18 | 2004-09-02 | Kabushiki Kaisha Toyota Jidoshokki, Kariya | Steuerung einer Vakuumpumpe |
EP1486673A1 (fr) * | 2002-03-20 | 2004-12-15 | Ricoh Company, Ltd. | Dispositif de regulation de pompe a vide, et dispositif sous vide |
EP1515423A2 (fr) * | 2003-09-10 | 2005-03-16 | BOC Edwards Japan Limited | Systéme de contrôle de moteur et pompe à vide équippée de ce systéme |
DE102006012532A1 (de) * | 2006-03-18 | 2007-09-20 | Pfeiffer Vacuum Gmbh | Dichtungsanordnung für eine Hubkolbenvakuumpumpe |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713286A (en) * | 1980-06-30 | 1982-01-23 | Toshiba Corp | Operating method of vacuum pump |
DE19630384A1 (de) * | 1996-07-29 | 1998-04-23 | Becker Kg Gebr | Verfahren zur Steuerung oder Regelung eines Aggregats und Frequenzumwandler |
JP4365059B2 (ja) * | 2001-10-31 | 2009-11-18 | 株式会社アルバック | 真空排気装置の運転方法 |
JP2003155981A (ja) | 2001-11-21 | 2003-05-30 | Toyota Industries Corp | 真空ポンプにおける運転制御方法及び運転制御装置 |
DE102006032765A1 (de) * | 2006-07-14 | 2008-01-17 | Leybold Vacuum Gmbh | Vakuumpumpe |
DE102006050943B4 (de) * | 2006-10-28 | 2020-04-16 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und Verfahren zum Betrieb derselben |
DE102008062054B4 (de) * | 2008-12-12 | 2019-05-29 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe |
-
2008
- 2008-12-12 DE DE102008062054.8A patent/DE102008062054B4/de active Active
-
2009
- 2009-11-20 EP EP09014532.7A patent/EP2196669B1/fr not_active Revoked
- 2009-12-02 JP JP2009274160A patent/JP2010138901A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6244825B1 (en) * | 1998-10-01 | 2001-06-12 | International Business Machines Corporation | Pump-protecting device, pump-protecting method and pumping apparatus |
EP1486673A1 (fr) * | 2002-03-20 | 2004-12-15 | Ricoh Company, Ltd. | Dispositif de regulation de pompe a vide, et dispositif sous vide |
DE10359270A1 (de) * | 2002-12-18 | 2004-09-02 | Kabushiki Kaisha Toyota Jidoshokki, Kariya | Steuerung einer Vakuumpumpe |
EP1515423A2 (fr) * | 2003-09-10 | 2005-03-16 | BOC Edwards Japan Limited | Systéme de contrôle de moteur et pompe à vide équippée de ce systéme |
DE102006012532A1 (de) * | 2006-03-18 | 2007-09-20 | Pfeiffer Vacuum Gmbh | Dichtungsanordnung für eine Hubkolbenvakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
EP2196669A2 (fr) | 2010-06-16 |
EP2196669B1 (fr) | 2014-07-23 |
JP2010138901A (ja) | 2010-06-24 |
DE102008062054B4 (de) | 2019-05-29 |
DE102008062054A1 (de) | 2010-06-17 |
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