JPS5713286A - Operating method of vacuum pump - Google Patents

Operating method of vacuum pump

Info

Publication number
JPS5713286A
JPS5713286A JP8775480A JP8775480A JPS5713286A JP S5713286 A JPS5713286 A JP S5713286A JP 8775480 A JP8775480 A JP 8775480A JP 8775480 A JP8775480 A JP 8775480A JP S5713286 A JPS5713286 A JP S5713286A
Authority
JP
Japan
Prior art keywords
vacuum pump
displacement
operating method
pressure switch
suction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8775480A
Other languages
Japanese (ja)
Inventor
Suehisa Sakakibara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8775480A priority Critical patent/JPS5713286A/en
Publication of JPS5713286A publication Critical patent/JPS5713286A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

PURPOSE: To economize energy by changing the displacement of an auxiliary vacuum pump to correspond to the change of the suction amount of a diffusion vacuum pump.
CONSTITUTION: A pressure switch 5 is provided on a suction tube 4a of a diffusion vacuum pump 4. When the value of the vacuum degree in the suction tube 4a is brought to a certain level, the pressure switch 5 is operated to send a signal to an electric motor 2 of an auxiliary vacuum pump 1, and changes the displacement of the auxiliary vacuum pump 1. This construction permits to restrain the excessive consumption of electric power, and consequently economize energy.
COPYRIGHT: (C)1982,JPO&Japio
JP8775480A 1980-06-30 1980-06-30 Operating method of vacuum pump Pending JPS5713286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8775480A JPS5713286A (en) 1980-06-30 1980-06-30 Operating method of vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8775480A JPS5713286A (en) 1980-06-30 1980-06-30 Operating method of vacuum pump

Publications (1)

Publication Number Publication Date
JPS5713286A true JPS5713286A (en) 1982-01-23

Family

ID=13923722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8775480A Pending JPS5713286A (en) 1980-06-30 1980-06-30 Operating method of vacuum pump

Country Status (1)

Country Link
JP (1) JPS5713286A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60138291A (en) * 1983-12-27 1985-07-22 Tokuda Seisakusho Ltd Pressure control device of gas
JPS63178193U (en) * 1986-12-23 1988-11-17
JPH0325873U (en) * 1989-07-24 1991-03-18
JP2007263122A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Evacuating apparatus
JP2007263121A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Evacuating apparatus
JP2007298043A (en) * 1999-11-17 2007-11-15 Nabtesco Corp Vacuum exhaust device
JP2010138901A (en) * 2008-12-12 2010-06-24 Pfeiffer Vacuum Gmbh Device having vacuum pump and operation method of vacuum pump

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60138291A (en) * 1983-12-27 1985-07-22 Tokuda Seisakusho Ltd Pressure control device of gas
JPS63178193U (en) * 1986-12-23 1988-11-17
JPH0325873U (en) * 1989-07-24 1991-03-18
JP2007263122A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Evacuating apparatus
JP2007263121A (en) * 1999-11-17 2007-10-11 Nabtesco Corp Evacuating apparatus
JP2007298043A (en) * 1999-11-17 2007-11-15 Nabtesco Corp Vacuum exhaust device
JP2010138901A (en) * 2008-12-12 2010-06-24 Pfeiffer Vacuum Gmbh Device having vacuum pump and operation method of vacuum pump

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