EP2520807A3 - Vakuumpumpe mit Rotor - Google Patents

Vakuumpumpe mit Rotor Download PDF

Info

Publication number
EP2520807A3
EP2520807A3 EP12002241.3A EP12002241A EP2520807A3 EP 2520807 A3 EP2520807 A3 EP 2520807A3 EP 12002241 A EP12002241 A EP 12002241A EP 2520807 A3 EP2520807 A3 EP 2520807A3
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
balancing
state
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12002241.3A
Other languages
English (en)
French (fr)
Other versions
EP2520807B1 (de
EP2520807A2 (de
Inventor
Helmut Bernhardt
Wolfgang Lobach
Herbert Stammler
Anja Stroh
Bernhard Tatzber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2520807A2 publication Critical patent/EP2520807A2/de
Publication of EP2520807A3 publication Critical patent/EP2520807A3/de
Application granted granted Critical
Publication of EP2520807B1 publication Critical patent/EP2520807B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (10) mit einem Rotor (20), welcher Wuchtmittel umfasst, einem den Rotor in Drehung versetzenden Antrieb (38, 40), Lagern (44, 50; 60, 62, 64, 66, 68, 70) zum Unterstützen des Rotors, einem Sensormittel zum Erfassen eines Wuchtzustandes des Rotors und zum Zusammenwirken mit einer Auswerteeinheit (134), welche angepasst ist, eine Änderung des Wuchtzustandes (232) zu erkennen, wobei die Vakuumpumpe angepasst ist, mit einer Rotorlageerkennungseinheit (132) zur Bestimmung einer Rotorlage zusammenzuwirken. Um den Wuchtzustand möglichst einfach ändern zu können, wird vorgeschlagen, dass ein Zuordnungsmittel zur Zuordnung des Wuchtzustands zur Rotorlage vorgesehen ist, so dass ein Anpassen der Wuchtmittel ermöglicht ist, um der Änderung des Wuchtzustands zu begegnen. Die Erfindung betrifft außerdem eine Anordnung mit einer Vakuumpumpe und Verfahren zum Wuchten eines Rotors einer Vakuumpumpe.
EP12002241.3A 2011-05-05 2012-03-28 Vakuumpumpe mit Rotor Not-in-force EP2520807B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011105806A DE102011105806A1 (de) 2011-05-05 2011-05-05 Vakuumpumpe mit Rotor

Publications (3)

Publication Number Publication Date
EP2520807A2 EP2520807A2 (de) 2012-11-07
EP2520807A3 true EP2520807A3 (de) 2014-09-24
EP2520807B1 EP2520807B1 (de) 2017-05-10

Family

ID=46000618

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12002241.3A Not-in-force EP2520807B1 (de) 2011-05-05 2012-03-28 Vakuumpumpe mit Rotor

Country Status (3)

Country Link
EP (1) EP2520807B1 (de)
JP (1) JP6188278B2 (de)
DE (1) DE102011105806A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
DE102014103060B4 (de) * 2014-03-07 2019-01-03 Pfeiffer Vacuum Gmbh Verfahren zum Wuchten eines Rotors einer Vakuumpumpe oder eines Rotors einer Rotationseinheit für eine Vakuumpumpe
EP3244068B1 (de) * 2016-05-10 2020-01-01 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3244067B1 (de) * 2016-05-10 2020-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zum verringern einer restunwucht in einer vakuumpumpe
US11105203B2 (en) 2018-01-29 2021-08-31 Carrier Corporation High efficiency centrifugal impeller with balancing weights
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7363397B2 (ja) * 2019-11-13 2023-10-18 株式会社島津製作所 真空ポンプの振動測定方法および真空ポンプ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064704A (en) * 1975-12-05 1977-12-27 Ird Mechanalysis, Inc. Vibration analyzing apparatus
US5544073A (en) * 1994-06-02 1996-08-06 Computational Systems, Inc. Rotor balancing calculator
EP1273803A2 (de) * 2001-07-05 2003-01-08 BOC Edwards Technologies, Limited Vakuumpumpe
EP1619395A1 (de) * 2004-07-20 2006-01-25 VARIAN S.p.A. Rotationsvakuumpumpe und ihr Auswuchtverfahren

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
DE19627921A1 (de) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh Verfahren zum Wuchten eines Rotors sowie für die Durchführung dieses Verfahrens geeigneter Rotor
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4400348B2 (ja) * 2004-07-09 2010-01-20 株式会社島津製作所 ターボ分子ポンプおよびバランス修正方法
DE102004050743A1 (de) * 2004-10-19 2006-04-20 Pfeiffer Vacuum Gmbh Vibrationsarme Vakuumpumpe
DE102007027711A1 (de) * 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
JP2011012611A (ja) * 2009-07-02 2011-01-20 Shimadzu Corp 回転体のアンバランス修正方法、アンバランス修正装置および真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064704A (en) * 1975-12-05 1977-12-27 Ird Mechanalysis, Inc. Vibration analyzing apparatus
US5544073A (en) * 1994-06-02 1996-08-06 Computational Systems, Inc. Rotor balancing calculator
EP1273803A2 (de) * 2001-07-05 2003-01-08 BOC Edwards Technologies, Limited Vakuumpumpe
EP1619395A1 (de) * 2004-07-20 2006-01-25 VARIAN S.p.A. Rotationsvakuumpumpe und ihr Auswuchtverfahren

Also Published As

Publication number Publication date
JP2012233477A (ja) 2012-11-29
JP6188278B2 (ja) 2017-08-30
EP2520807B1 (de) 2017-05-10
DE102011105806A1 (de) 2012-11-08
EP2520807A2 (de) 2012-11-07

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