EP2156462A2 - Mass spectrometer arrangement - Google Patents

Mass spectrometer arrangement

Info

Publication number
EP2156462A2
EP2156462A2 EP08760432A EP08760432A EP2156462A2 EP 2156462 A2 EP2156462 A2 EP 2156462A2 EP 08760432 A EP08760432 A EP 08760432A EP 08760432 A EP08760432 A EP 08760432A EP 2156462 A2 EP2156462 A2 EP 2156462A2
Authority
EP
European Patent Office
Prior art keywords
vacuum
mass spectrometer
housing
outlet
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08760432A
Other languages
German (de)
French (fr)
Inventor
Markus Henry
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2156462A2 publication Critical patent/EP2156462A2/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a mass spectrometer arrangement comprising a mass spectrometer forevacuum chamber with a pre-vacuum outlet and at least two mass spectrometer high-vacuum chambers, and a turbo-vacuum pump connected to the high-vacuum chambers.
  • a turbocharging pump In mass spectrometer arrangements of this type, a turbocharging pump, a backing pump for the turbomolecular pump and a further backing pump for the mass spectrometer are provided for supplying the mass spectrometer with corresponding negative pressures. Pre-vacuum chamber required. Such an arrangement is complicated and costly,
  • the object of the invention is in contrast to provide a low-cost mass spectrometer arrangement.
  • the mass spectrometer arrangement according to the invention has an integrated turbomolecular pump, which is inserted into the housing of the mass spectrometer.
  • the mass spectrometer high-pressure chambers are directly connected to the turbomulsion pump through internal channels of the housing. It is further provided that the pre-vacuum outlet of the mass spectrometer Vorvakuumsch and the pre-vacuum outlet of the Turbomoiekularpumpe open within the mass spectrometer housing in a common pre-vacuum space.
  • the forevacuum chamber finally opens into a single housing outlet, which optionally leads to an external backing pump.
  • turbomolecular pump into the housing of the mass spectrometer realizes a very compact and relatively simple mass spectrometer arrangement.
  • a further constructive simplification is generated.
  • the turbomolecular pump in addition to the high-vacuum compressor stages, has a pre-vacuum compressor stage which opens between the fore-vacuum space into which the fore-vacuum outlets of the mass spectrometer and the turbomolecular pump flow Housing outlet is arranged.
  • a compression of the fore-vacuum pressure of 1-5 mbar to 5-10 mbar or more is already carried out in the mass spectrometer housing.
  • the forevacuum pump to be connected to the fore-vacuum housing outlet can be designed to be correspondingly small.
  • the pre-vacuum compressor stage of the turbomolecular pump can theoretically also be designed so that it compresses to atmospheric pressure, so that an external backing pump is no longer required.
  • the turbomolecular pump can be installed in the mass spectrometer housing by successive incorporation of its individual components. According to a preferred embodiment, however, the turbomolecular pump is designed as a caseless cartridge, which is inserted into the housing of the mass spectrometer. Since the turbomolecular pump is designed as a housing-less cartridge whose housing is formed by the mass spectrometer housing or their structures therein, a separate Turbomoiekularpumpen housing is saved. As a result, not only space and weight are saved, but also the flow resistance of the inlets and outlets of the turbomolecular pump are basically reduced accordingly.
  • the turbomolecular pump distal to its input rotor stage on a suction opening with at least two separate opening cutouts, which are each connected to a mass spectrometer high vacuum chamber.
  • the turbomolecular pump has at least two separate opening cut-outs in the plane of the intake opening.
  • the relatively large suction opening which usually has an annular shape, and immediately adjacent to the input rotor stage is divided into two or possibly more opening cutouts.
  • the division of the suction in two or more opening cutouts is technically associated with relatively little effort.
  • a mass spectrometer assembly 10 having a mass spectrometer 92 with a mass spectrometer housing 86 and a turbomolecular pump 12.
  • the turbomolecular pump 12 is designed as a caseless cartridge 13, which is inserted into the housing 86.
  • the mass spectrometer 92 may be formed, for example, as a quadrupole mass spectrometer, but may be another type of mass spectrometer.
  • the present mass spectrometer has four vacuum chambers 20, 21, 22, 23 through which flows an ion stream represented by dashed arrows.
  • the highest pressure vacuum chamber 20 is a pre-vacuum vacuum chamber into which the ion stream flows through an ion stream housing inlet 94.
  • the turbomolecular pump 12 is designed as a cartridge 13, that is, it does not have its own housing.
  • the turbomolecular pump cartridge 13 is Housing without housing used in the housing 86
  • the pump stators 19 of the high vacuum section of the turbomolecular pump 12 are thus held directly by the housing 86 and the inner structures of the housing 86.
  • the turbomolecular pump 12 has in its high-vacuum section an intermediate inlet 83 and two further high-vacuum Einiquaint forming opening cutouts 81, 82.
  • the opening cutouts 81, 82 are formed by a corresponding division of the suction opening 16, which is arranged distally of the input rotor stage.
  • the suction port 16 abuts directly on the input rotor stage 18 and is formed by the housing 86.
  • the circular suction opening 16 is divided by conduit walls of the housing 86 into the two opening cutouts 81, 82.
  • the opening cutouts 81, 82 are circular in plan view, but may be formed in a sector shape, as concentric annuli or otherwise shaped.
  • the turbomolecular pump 12 has at its Vorvakuum Ausiass 89, which limits the high-vacuum section of the turbomolecular pump to the outlet side, a rotor and stator-free Vorvakuumraum 98, in which on the one hand from the high vacuum section of the Turbomoiekularpumpe 12 coming gas and on the other the pre-vacuum Ausiass 30 from the fore-vacuum chamber 20 gas flows together.
  • the turbomicular pump 12 then has, in the direction of flow to the fore-vacuum chamber 98, a pre-vacuum compressor stage 96 in which the gas from the fore-vacuum chamber 98 is compressed to a pressure of 5-10 mbar or more. Subsequently, the gas exits the housing 86 through a housing outlet 88 and is supplied from there through a conduit to an external backing pump 90.
  • a rotor shaft 14 of the turbomolecular pump 12 supports the rotor stages of the high vacuum section and the pre-vacuum compressor stage 96.

Abstract

The invention relates to a mass spectrometer arrangement (10) comprising a housing (86) which encompasses a mass spectrometer forevacuum chamber (20) equipped with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) that is connected to the high-vacuum chambers (21, 22, 23) and has a forevacuum outlet (89). The two forevacuum outlets (30, 89) extend into a common forevacuum space (98) in the housing (86), said forevacuum space (98) extending into a housing outlet (88).

Description

Massenspektrometer-Anordnunq Mass Spectrometer Anordnunq
Die Erfindung bezieht sich auf eine Massenspektrometer-Anordnung, die eine Massenspektrometer-Vorvakuumkammer mit einem Vorvakuum-Auslass und mindestens zwei Massenspektrometer-Hochvakuumkammern aufweist, sowie eine Turbomoiekuiarpumpe aufweist, die mit den Hochvakuumkammern verbunden ist.The invention relates to a mass spectrometer arrangement comprising a mass spectrometer forevacuum chamber with a pre-vacuum outlet and at least two mass spectrometer high-vacuum chambers, and a turbo-vacuum pump connected to the high-vacuum chambers.
Bei derartigen Massenspektrometer-Anordnungen sind zur Versorgung des Massenspektrometers mit entsprechenden Unterdrücken eine Turbomoiekuiarpumpe, eine Vorvakuumpumpe für die Turbomoiekuiarpumpe sowie eine weitere Vorvakuumpumpe für die Massenspektrometer- Vorvakuumkammer erforderlich. Eine derartige Anordnung ist aufwendig und kostspielig,In mass spectrometer arrangements of this type, a turbocharging pump, a backing pump for the turbomolecular pump and a further backing pump for the mass spectrometer are provided for supplying the mass spectrometer with corresponding negative pressures. Pre-vacuum chamber required. Such an arrangement is complicated and costly,
Aufgabe der Erfindung ist es demgegenüber, eine preiswerte Massenspektrometer-Anordnung zu schaffen.The object of the invention is in contrast to provide a low-cost mass spectrometer arrangement.
Diese Aufgabe wird erfindungsgemäß gelöst mit einer Massenspektrometer- Anordnung mit den Merkmalen des Patentanspruches 1.This object is achieved with a mass spectrometer arrangement with the features of claim 1.
Die erfindungsgemäße Massenspektrometer-Anordnung weist eine integrierte Turbomoiekularpumpe auf, die in das Gehäuse des Massenspektrometers eingesetzt ist. Die Massenspektrometer-Hochdruckkammern sind mit der Turbomoiekularpumpe durch gehäuseinterne Kanäle direkt verbunden. Ferner ist vorgesehen, dass der Vorvakuum-Auslass der Massenspektrometer- Vorvakuumkammer und der Vorvakuum-Auslass der Turbomoiekularpumpe innerhalb des Massenspektrometer-Gehäuses in einen gemeinsamen Vorvakuumraum münden. Der Vorvakuumraum mündet schließlich in einen einzigen Gehäuse-Auslass, der gegebenenfalls zu einer externen Vorvakuumpumpe führt.The mass spectrometer arrangement according to the invention has an integrated turbomolecular pump, which is inserted into the housing of the mass spectrometer. The mass spectrometer high-pressure chambers are directly connected to the turbomulsion pump through internal channels of the housing. It is further provided that the pre-vacuum outlet of the mass spectrometer Vorvakuumkammer and the pre-vacuum outlet of the Turbomoiekularpumpe open within the mass spectrometer housing in a common pre-vacuum space. The forevacuum chamber finally opens into a single housing outlet, which optionally leads to an external backing pump.
Durch die Integration der Turbomoiekularpumpe in das Gehäuse des Massenspektrometers wird eine sehr kompakte und relativ einfache Massenspektrometer-Anordnung realisiert. Durch das Zusammenfassen der Vorvakuum-Auslässe der Massenspektrometer-Vorvakuumkammer und der Turbomoiekularpumpe in einen einzigen gemeinsamen Vorvakuumraum in dem Gehäuse wird eine weitere konstruktive Vereinfachung generiert.The integration of the turbomolecular pump into the housing of the mass spectrometer realizes a very compact and relatively simple mass spectrometer arrangement. By combining the fore-vacuum outlets of the mass spectrometer pre-vacuum chamber and the turbomolecular pump into a single common fore-vacuum space in the housing, a further constructive simplification is generated.
Gemäß einer bevorzugten Ausgestaltung weist die Turbomoiekularpumpe zusätzlich zu den Hochvakuum-Verdichterstufen eine Vorvakuum-Verdichterstufe auf, die zwischen dem Vorvakuumraum, in den die Vorvakuumauslässe des Massenspektrometers und der Turbomoiekularpumpe münden und dem Gehäuse-Auslass angeordnet ist. Auf diese Weise wird in dem Massenspektrometer-Gehäuse bereits eine Verdichtung des Vorvakuumdruckes von 1 - 5 mbar auf 5 - 10 mbar oder mehr vorgenommen. Hierdurch kann die an den Vorvakuum-Gehäuse-Auslass anzuschließende Vorvakuumpumpe entsprechend klein ausgelegt werden. Die Vorvakuum-Verdichterstufe der Turbomolekuiarpumpe kann theoretisch auch so ausgelegt werden, dass sie bis auf atmosphärischen Druck verdichtet, so dass eine externe Vorvakuumpumpe nicht mehr erforderlich ist.According to a preferred embodiment, in addition to the high-vacuum compressor stages, the turbomolecular pump has a pre-vacuum compressor stage which opens between the fore-vacuum space into which the fore-vacuum outlets of the mass spectrometer and the turbomolecular pump flow Housing outlet is arranged. In this way, a compression of the fore-vacuum pressure of 1-5 mbar to 5-10 mbar or more is already carried out in the mass spectrometer housing. As a result, the forevacuum pump to be connected to the fore-vacuum housing outlet can be designed to be correspondingly small. The pre-vacuum compressor stage of the turbomolecular pump can theoretically also be designed so that it compresses to atmospheric pressure, so that an external backing pump is no longer required.
Die Turbomolekuiarpumpe kann durch sukzessiven Einbau ihrer Einzelkomponenten in das Massenspektrometer-Gehäuse eingebaut werden. Gemäß einer bevorzugten Ausgestaltung ist die Turbomolekuiarpumpe jedoch als gehäuselose Kartusche ausgebildet, die in das Gehäuse des Massenspektrometers eingesetzt ist. Da die Turbomolekuiarpumpe als gehäuselose Kartusche ausgebildet ist, deren Gehäuse von dem Massenspektrometer-Gehäuse bzw. deren Strukturen darin gebildet wird, wird ein separates Turbomoiekularpumpen-Gehäuse eingespart. Hierdurch wird nicht nur Bauraum und Gewicht eingespart, sondern werden grundsätzlich auch die Strömungswiderstände von den Einlassen und Auslässen der Turbomolekuiarpumpe entsprechend verringert.The turbomolecular pump can be installed in the mass spectrometer housing by successive incorporation of its individual components. According to a preferred embodiment, however, the turbomolecular pump is designed as a caseless cartridge, which is inserted into the housing of the mass spectrometer. Since the turbomolecular pump is designed as a housing-less cartridge whose housing is formed by the mass spectrometer housing or their structures therein, a separate Turbomoiekularpumpen housing is saved. As a result, not only space and weight are saved, but also the flow resistance of the inlets and outlets of the turbomolecular pump are basically reduced accordingly.
Vorzugsweise weist die Turbomolekularpumpe distal ihrer Eingangsrotorstufe eine Ansaugöffnung mit mindestens zwei voneinander getrennten Öffnungsausschnitten auf, die jeweils mit einer Massenspektrometer- Hochvakuumkammer verbunden sind. Die Turbomolekuiarpumpe weist in der Ebene der Ansaugöffnung mindestens zwei voneinander getrennte Öffnungsausschnitte auf. Die relativ großflächige Ansaugöffnung, die in der Regel eine kreisringförmige Form hat, und unmittelbar an die Eingangsrotorstufe angrenzt, ist in zwei oder gegebenenfalls mehr Öffnungsausschnitte aufgeteilt. Durch Variation der Größe der Öffnungsausschnitte und ihrer radialen Position kann das für die jeweilige Hochdruckkammer erforderliche Druckniveau und Pumpvermögen entsprechend eingestellt werden. Die Aufteilung der Ansaugöffnung in zwei oder mehr Öffnungsausschnitte ist technisch mit relativ wenig Aufwand verbunden. Da aüe Öffnungsausschnitte in der Ebene der Ansaugöffnung liegen, sind trotz der gegenüber der Ansaugöffnungs-Fiäche verkleinerten Öffnungsausschnitt-Flächen gute Leitwerte und damit geringe SaugvermögensverJuste realisierbar. Die Aufteilung der Ansaugöffnung in mehrer Ansaugöffnungsausschnϊtte stellt eine kompakte Lösung dar, die die Anzahl von über die Pumpen-Axiale verteilten Zwischeneinlässen der Turbomolekularpumpe entsprechend reduziert.Preferably, the turbomolecular pump distal to its input rotor stage on a suction opening with at least two separate opening cutouts, which are each connected to a mass spectrometer high vacuum chamber. The turbomolecular pump has at least two separate opening cut-outs in the plane of the intake opening. The relatively large suction opening, which usually has an annular shape, and immediately adjacent to the input rotor stage is divided into two or possibly more opening cutouts. By varying the size of the opening cutouts and their radial position required for the respective high pressure chamber pressure level and Pumping capacity can be adjusted accordingly. The division of the suction in two or more opening cutouts is technically associated with relatively little effort. Since all opening cutouts are in the plane of the intake opening, good guide values and thus low pumping speed increases can be achieved despite the smaller opening cutout areas compared to the intake opening area. The division of the intake into several Ansaugöffnungsausschnϊtte represents a compact solution that reduces the number of distributed across the pump axial intermediate inlets of the turbomolecular pump accordingly.
Im Folgenden wird unter Bezugnahme auf die Zeichnung ein Ausführungsbeispie! der Erfindung näher erläutert.In the following, an embodiment will be described with reference to the drawings. the invention explained in more detail.
In der Figur ist eine Massenspektrometer-Anordnung 10 dargestellt, die ein Massenspektrometer 92 mit einem Massenspektrometer-Gehäuse 86 und eine Turbomolekularpumpe 12 aufweist. Die Turbomolekularpumpe 12 ist als gehäuselose Kartusche 13 ausgebildet, die in das Gehäuse 86 eingesteckt ist.In the figure, a mass spectrometer assembly 10 is shown having a mass spectrometer 92 with a mass spectrometer housing 86 and a turbomolecular pump 12. The turbomolecular pump 12 is designed as a caseless cartridge 13, which is inserted into the housing 86.
Das Massenspektrometer 92 kann beispielsweise als Quadrulpol- Massenspektrometer ausgebildet sein, kann jedoch auch ein anderer Massenspektrometer-Typ sein. Das vorliegende Massenspektrometer weist vier Vakuumkammern 20, 21, 22, 23 auf, durch die ein mit gestrichelten Pfeilen dargestellter lonenstrom fließt. Die druckhöchste Vakuumkammer 20 ist eine Vorvakuum-Vakuumkammer, in die der lonenstrom durch einen lonenstrom- Gehäuse-Einlass 94 einfließt. In der Vorvakuum-Vakuumkammer 20 herrscht ein Ionisationsdruck von 1 - 5 mbar. Die in Flussrichtung des lonenstroms dnachfoigenden Hochvakuum-Vakuumkammern 21, 22, 23 weisen Drücke von 10"1 bis 10"7 mbar auf.The mass spectrometer 92 may be formed, for example, as a quadrupole mass spectrometer, but may be another type of mass spectrometer. The present mass spectrometer has four vacuum chambers 20, 21, 22, 23 through which flows an ion stream represented by dashed arrows. The highest pressure vacuum chamber 20 is a pre-vacuum vacuum chamber into which the ion stream flows through an ion stream housing inlet 94. In the fore-vacuum chamber 20 there is an ionization pressure of 1-5 mbar. Pointing in the direction of flow of the ionic current dnachfoigenden high-vacuum vacuum chambers 21, 22, 23 to pressures of 10 "1 to 10" 7 mbar.
Die Turbomolekularpumpe 12 ist als Kartusche 13 ausgebildet, das heißt, sie weist kein eigenes Gehäuse auf. Die Turbomolekularpumpen-Kartusche 13 wird gehäuselos in das Gehäuse 86 eingesetzt Die Pumpenstatoren 19 des Hochvakuumabschnittes der Turbomolekularpumpe 12 werden also direkt von dem Gehäuse 86 bzw. den inneren Strukturen des Gehäuses 86 gehalten.The turbomolecular pump 12 is designed as a cartridge 13, that is, it does not have its own housing. The turbomolecular pump cartridge 13 is Housing without housing used in the housing 86 The pump stators 19 of the high vacuum section of the turbomolecular pump 12 are thus held directly by the housing 86 and the inner structures of the housing 86.
Die Turbomolekularpumpe 12 weist in ihrem Hochvakuum-Abschnitt einen Zwischeneinlass 83 sowie zwei weitere Hochvakuum-Einiässe bildende Öffnungsausschnitte 81, 82 auf. Die Öffnungsausschnitte 81, 82 sind durch eine entsprechende Aufteilung der Ansaugöffnung 16 gebildet, die distal der Eingangsrotorstufe angeordnet ist. Die Ansaugöffnung 16 grenzt unmittelbar an die Eingangsrotorstufe 18 an und wird von dem Gehäuse 86 gebildet.The turbomolecular pump 12 has in its high-vacuum section an intermediate inlet 83 and two further high-vacuum Einiässe forming opening cutouts 81, 82. The opening cutouts 81, 82 are formed by a corresponding division of the suction opening 16, which is arranged distally of the input rotor stage. The suction port 16 abuts directly on the input rotor stage 18 and is formed by the housing 86.
Die kreisflächenförmige Ansaugöffnung 16 wird durch Leitungswände des Gehäuses 86 in die zwei Öffnungsausschnitte 81, 82 unterteilt. Die Öffnungsausschnitte 81, 82 sind in Draufsicht kreisförmig, können jedoch auf sektorförmig, als konzentrische Kreisringe oder anders geformt, ausgebildet sein.The circular suction opening 16 is divided by conduit walls of the housing 86 into the two opening cutouts 81, 82. The opening cutouts 81, 82 are circular in plan view, but may be formed in a sector shape, as concentric annuli or otherwise shaped.
Die Turbomolekularpumpe 12 weist an ihrem Vorvakuum-Ausiass 89, der den Hochvakuum-Abschnitt der Turbomolekularpumpe zur Auslassseite hin begrenzt, einen rotor- und statorfreien Vorvakuumraum 98 auf, in den einerseits das von dem Hochvakuum-Abschnitt der Turbomoiekularpumpe 12 kommende Gas und andererseits das durch den Vorvakuum-Ausiass 30 aus der Vorvakuum- Vakuumkammer 20 kommende Gas zusammenfließt.The turbomolecular pump 12 has at its Vorvakuum Ausiass 89, which limits the high-vacuum section of the turbomolecular pump to the outlet side, a rotor and stator-free Vorvakuumraum 98, in which on the one hand from the high vacuum section of the Turbomoiekularpumpe 12 coming gas and on the other the pre-vacuum Ausiass 30 from the fore-vacuum chamber 20 gas flows together.
Die Turbomoiekularpumpe 12 weist in Strömungsrichtung an den Vorvakuumraum 98 anschließend eine Vorvakuum-Verdichterstufe 96 auf, in der das Gas aus dem Vorvakuumraum 98 auf einen Druck von 5 - 10 mbar oder mehr verdichtet wird. Anschließend verlässt das Gas das Gehäuse 86 durch einen Gehäuse-Ausiass 88 und wird von dort durch eine Leitung einer externen Vorvakuumpumpe 90 zugeführt. Eine Rotorwelle 14 der Turbomoiekularpumpe 12 trägt die Rotorstufen des Hochvakuumabschnittes und der Vorvakuum- Verdichterstufe 96. The turbomicular pump 12 then has, in the direction of flow to the fore-vacuum chamber 98, a pre-vacuum compressor stage 96 in which the gas from the fore-vacuum chamber 98 is compressed to a pressure of 5-10 mbar or more. Subsequently, the gas exits the housing 86 through a housing outlet 88 and is supplied from there through a conduit to an external backing pump 90. A rotor shaft 14 of the turbomolecular pump 12 supports the rotor stages of the high vacuum section and the pre-vacuum compressor stage 96.

Claims

Patentansprüche claims
1. Massenspektrometer-Anordnung (10) mit einem Gehäuse (86), dasA mass spectrometer assembly (10) having a housing (86)
eine Massenspektrometer-Vorvakuum-Vakuumkammer (20) mit einem Massenspektrometer-Vorvakuum-Auslass (30),a mass spectrometer pre-vacuum vacuum chamber (20) having a mass spectrometer pre-vacuum outlet (30),
mindestens zwei Massenspektrometer-Hochvakuum-Vakuumkammern (21, 22, 23), undat least two mass spectrometer high vacuum vacuum chambers (21, 22, 23), and
eine mit den Hochvakuum-Vakuumkammern (21, 22, 23) verbundenen integrierten TurbomoSekularpurnpe (12) mit einem Vorvakuum-Auslass (89) aufweist,an integrated turbomolecular pump (12) having a pre-vacuum outlet (89) connected to the high-vacuum vacuum chambers (21, 22, 23),
wobei die beiden Vorvakuum-Auslässe (30, 89) in einem gemeinsamen Vorvakuumraum (98) in dem Gehäuse (86) münden, der in einen Gehäuse-Auslass (88) mündet.wherein the two pre-vacuum outlets (30, 89) open in a common pre-vacuum space (98) in the housing (86), which opens into a housing outlet (88).
2. Massenspektrometer-Anordnung nach Anspruch 1, dadurch gekennzeichnet, dass die TurbomoiekuJarpumpe (12) eine Vorvakuum- Verdichterstufe (96) zwischen dem Vorvakuumraum (98) und dem Gehäuse-Auslass (88) aufweist.2. mass spectrometer arrangement according to claim 1, characterized in that the TurbomoiekuJarpumpe (12) has a pre-vacuum compressor stage (96) between the pre-vacuum chamber (98) and the housing outlet (88).
3. Massenspektrometer-Anordnung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Turbomoiekularpumpe (12) als gehäuselose Kartusche (13) ausgebildet ist, die in das Gehäuse (86) eingesetzt ist.3. mass spectrometer arrangement according to claim 1 or 2, characterized in that the Turbomoiekularpumpe (12) is designed as a caseless cartridge (13) which is inserted into the housing (86).
4. Massenspektrometer-Anordnung nach einem der Ansprüche 1 - 3, dadurch gekennzeichnet, dass die Turbomolekuiarpumpe (12) distal der Eingangsrotorstufe eine Ansaugöffnung (16) mit mindestens zwei voneinander getrennten Öffnungsausschnitten (81, 82) aufweist, die jeweils mit einer Hochvakuum-Vakuumkammer (22, 23) verbunden sind. 4. Mass spectrometer arrangement according to one of claims 1-3, characterized in that the turbomolecular pump (12) distal to the Input rotor stage has a suction opening (16) with at least two mutually separate opening cutouts (81, 82) which are each connected to a high-vacuum vacuum chamber (22, 23).
EP08760432A 2007-06-11 2008-06-03 Mass spectrometer arrangement Withdrawn EP2156462A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007027352A DE102007027352A1 (en) 2007-06-11 2007-06-11 Mass Spectrometer arrangement
PCT/EP2008/056848 WO2008151968A2 (en) 2007-06-11 2008-06-03 Mass spectrometer arrangement

Publications (1)

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EP2156462A2 true EP2156462A2 (en) 2010-02-24

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EP08760432A Withdrawn EP2156462A2 (en) 2007-06-11 2008-06-03 Mass spectrometer arrangement

Country Status (6)

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US (1) US8106354B2 (en)
EP (1) EP2156462A2 (en)
JP (1) JP5250027B2 (en)
CN (1) CN101681787B (en)
DE (1) DE102007027352A1 (en)
WO (1) WO2008151968A2 (en)

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JP2010529629A (en) 2010-08-26
US8106354B2 (en) 2012-01-31
CN101681787A (en) 2010-03-24
CN101681787B (en) 2012-03-21
WO2008151968A2 (en) 2008-12-18
DE102007027352A1 (en) 2008-12-18
JP5250027B2 (en) 2013-07-31
US20100176294A1 (en) 2010-07-15
WO2008151968A3 (en) 2009-05-07

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