EP2143307B1 - Buse a plasma - Google Patents

Buse a plasma Download PDF

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Publication number
EP2143307B1
EP2143307B1 EP08716278A EP08716278A EP2143307B1 EP 2143307 B1 EP2143307 B1 EP 2143307B1 EP 08716278 A EP08716278 A EP 08716278A EP 08716278 A EP08716278 A EP 08716278A EP 2143307 B1 EP2143307 B1 EP 2143307B1
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EP
European Patent Office
Prior art keywords
nozzle
plasma
channels
process gas
electrode unit
Prior art date
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EP08716278A
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German (de)
English (en)
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EP2143307A1 (fr
Inventor
Martin Willimzik
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Abc-Coron Electronic Entwicklungs-Und Konstruktion
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ABC-coron Electronic Entwicklungs-und Konstruktionsgesellschaft mbH
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Definitions

  • the invention relates to a plasma nozzle according to the preamble of claim 1.
  • the invention further relates to a method for the treatment of surfaces on workpieces according to the preamble of claim 12.
  • plasma activated surface have a higher wettability with polar liquids (see also EP 0497996 B1 ). This is particularly desirable in the case of polymeric surfaces when the adhesion or application of a liquid such as a printing ink is to be improved. It is also known that textile surfaces show particularly advantageous properties in terms of durability and entanglement through appropriate treatment of the surface. For temperature-sensitive surfaces such as polymeric or textile surfaces, however, the high temperature in the plasma leads to a destruction of the surface. This circumstance will after the The prior art is achieved in that not the surface is swept directly with the plasma, but an additional process gas is passed through the arc. This results in a partially ionized reactive gas with a lower temperature than in the arc plasma from the process gas.
  • an arc that extends between a pin electrode and a ring electrode, as in the document EP 0761415 B1 is not stable, but splits at the nozzle opening and can be pressed by the pressure of the effluent working gas from the nozzle outlet on the surface to be treated. This is particularly disadvantageous because the high temperature of the arc plasma can cause damage to the surface to be treated.
  • the object is achieved by a plasma nozzle having the features of claim 1 and a method according to the features of claim 10. Further developments of the plasma nozzle according to the invention can be found in the corresponding subclaims.
  • the plasma nozzle according to the invention serves to specifically change surfaces with regard to the surface energy.
  • at least one further separate nozzle channel is provided to increase the plasma flow instead of a simple enlargement or enlargement of the one nozzle channel, which open into a common nozzle outlet opening of the nozzle tip.
  • the plasma current is multiplied as a function of the nozzle channels assigned to the electrodes.
  • two nozzle channels are provided, whereby the plasma flow is doubled. The from the nozzle channels emerging plasma streams are then combined in the outlet of the nozzle into a single plasma stream.
  • the discharge channel of the arc extends in the nozzle according to the invention in normal operation through the nozzle channels, without the arc jumps to the wall of the nozzle channels, whereby at the same time the service life of the plasma nozzle is increased, since the deposition of Abbrandspuren is avoided in the interior of the nozzle channels. Measurements have now shown that the arc runs between the tips of the pin electrodes and along the nozzle channels.
  • the process gas stream is passed through the preferably two nozzle channels and combined by the special nozzle geometry at the junction of the nozzle channels.
  • This arrangement is particularly advantageous since, in contrast to a simply widened nozzle diameter, a larger volume of process gas interacts with the plasma in the arc and the reactive process gas, but not the arc, exits at the nozzle end.
  • the initial plasma is generated in an arc.
  • the ignition of the arc can be carried out advantageously by a high-frequency AC voltage.
  • typical ignition voltages are, for example, between 3 kV and 25 kV.
  • the voltage required to maintain the arc drops, depending on the nozzle geometry, to a value of about 500 V to 5 KV.
  • Typical frequencies for the AC voltage are between 15 kHz and 50 kHz. Higher frequencies are only conditionally suitable here, as it can then lead to a disruption of the technical environment in terms of radio technology and thus an increased shielding effort is necessary.
  • a nozzle attachment has a through hole and at least one wall of the passage opening is made of an electrically non-conductive material. This also prevents skipping of the arc on the nozzle outlet in any case. It is thus ensured that the arc at no time comes into contact with the surface to be treated.
  • the nozzles are part of a single closed circuit connected in series.
  • the ignition takes place synchronously in all plasma jets.
  • the supply of the arrangement can be made of a single transformer, since the collapse of the output voltage after the ignition of the arcs can not influence the ignition process.
  • FIG. 1 a plasma nozzle according to the invention is shown in detail.
  • the nozzle consists of a housing 1, in which an insulation block 2 and two electrode units 3,3 'are arranged.
  • the electrode units 3, 3 ' serve, on the one hand, to introduce electrical energy for the plasma generation and, on the other hand, to supply the process gas required for plasma generation.
  • a connecting pin 4 is provided in each case, which is screwed to a pin electrode 5.
  • the terminal pin 4 and the pin electrode 5 are each in a sleeve. 6 bordered, which has 4 gas inlet holes 7 on the side of the connecting pin.
  • the sleeves 6 are closed by flow guide 8 for generating a turbulent flow.
  • the electrode units are inserted into receiving bores 9 of the insulation block 2, wherein in each case at the foot of the mounting holes 9, a pressure chamber 10 is formed, in which the process gas flows through supply channels 11.
  • the pin electrodes 5 additionally have a central channel 12, through which process gas can escape from the center of the curved end face 13 of the pin electrodes 5.
  • a nozzle tip 14 which has nozzle channels 15 which are aligned with the receiving bores 9 of the insulation block 2, is arranged on the insulation block 2.
  • the nozzle channels have a conical shape and open into a common outlet opening 16.
  • the flow channels formed by the receiving bores 9 and the nozzle channels 15 converge at an acute angle to each other, so that only a narrow web of conductive material remains between the nozzle channels 15.
  • process gas is introduced via the supply channels 11 in the pressure chambers 10 and passes from there through the gas inlet holes 7 in the sleeves 6. From the sleeves 6, a portion of the process gas flows through the center channels 12 of the pin electrodes 5. The majority of the process gas passes through the Flow guide 8 in the nozzle channels 15 and is thereby placed in a turbulent flow.
  • the process gas streams are accelerated by the conical shape of the nozzle channels 15 and unite in the outlet opening 16 of a nozzle attachment 17.
  • the direction of rotation of the flows in the nozzle channels 15 can be selected in the same direction or in opposite directions.
  • an alternating voltage is applied between the electrode units 3, 3 'via the connection pins 4.
  • an arc is ignited between closely adjacent edges of the pin electrodes 5, which connects the electrode units 3, 3 '.
  • the process gas is heated and ionized and exits as a reactive medium from the outlet opening 16.
  • the service life of the plasma nozzle according to the invention is significantly increased.
  • the service life is further increased by the fact that the emerging from the central channels 12 process gas reduces the deposition of Abbrandspuren on the pin electrodes 5.
  • FIG. 2 is an alternative embodiment of the plasma nozzle according to FIG. 1 shown.
  • the nozzle tip 14 is provided with a nozzle attachment 17.
  • the nozzle tip 14 ends with an outlet opening 16, which just connects the two nozzle channels 15 with each other, so that a common outlet opening 16 is given.
  • a nozzle attachment 17, which is detachably provided on the nozzle tip 14, is provided.
  • This nozzle attachment 17 may have different lengths of the through holes. A corresponding adjustment of the length can be selected as a function of the desired function with regard to the mixing and / or calming of the combined plasma streams through the individual nozzle channels 15.
  • the length of the nozzle attachment may be a function of the flow rate of the plasma gas to ensure that the arc does not exit from the nozzle attachment 17 in order to avoid damage to the surface to be treated or possible injuries.
  • the nozzle attachment 17 comprises at least one wall in a passage opening, which is formed of dielectric material.
  • the nozzle attachment 17 may have a circumferential bead, which is designed, for example, as guide skids or skids, in order optionally to guide a surface of the workpiece to be treated therealong or to guide it in a sliding manner along the surface to be treated.
  • the passage opening of the nozzle attachment 17 tapers conically in order to generate an acceleration of the plasma jet generated.
  • a widening the through-hole may be provided to achieve in other applications, a reduction of the flow velocity and a larger impact surface of the plasma.
  • a high-frequency alternating voltage is applied to the pin electrodes 3 and 3 'for the operation of the plasma nozzle via the connection pins 4, an arc is formed when the ignition voltage is reached.
  • the arc runs symmetrically from the tip of a pin electrode 3 through the corresponding nozzle channels 15 across the partition away through the other nozzle channel 15 to the second pin electrode 3 '.
  • the arc has its apex between the two pin electrodes 3,3 '.
  • the voltage required to maintain the arc drops to a value of, for example, 500 V to 5 kV.
  • the process gas flows through the nozzle channels 15 and interacts with the arc.
  • the process gas is at least partially ionized by the electrons and ions in the arc.
  • This ionized, reactive process gas - also called plasma stream - is combined in the outlet opening 16 and advantageously shaped by the geometry of the nozzle tip 14 and the nozzle attachment 17 according to the further application.
  • the plasma stream sweeps over this surface. This surface energy is increased at the swept areas such that polar liquids better wet these surfaces.
  • FIG. 3 an arrangement of plasma nozzles according to the invention is shown schematically.
  • the arrangement consists of four pairs of plasma nozzles 20, each consisting of an insulation block 21, a nozzle tip 22, two nozzle channels 23 and two electrodes 24.
  • the supply lines for the process gas are in this illustration of clarity omitted.
  • an insulation 25 made of a material with high dielectric strength is arranged in each case.
  • the interconnection of the electrodes 24 is designed so that all plasma nozzles 20 are connected in series.
  • the first electrode 24 of the first plasma nozzle is connected to a voltage source 26 in the form of a transformer
  • the second electrode 24 of the first plasma nozzle 20 is connected to the first electrode 24 of the second plasma nozzle 20, etc.
  • the second electrode 24 of the last plasma nozzle 20 is in turn connected to the voltage source 26, whereby the circuit is closed. If the voltage source 26 is activated, an arc is simultaneously ignited in all the plasma nozzles 20, only then does the voltage of the voltage source 26 break down due to the rapidly increasing current. By the series connection of the plasma nozzles 20, the adjacent nozzle tips 22 are at different potentials, therefore, the insulation 25 is required. For each pair of plasma jets 20, a switchable bridging contact 27 is provided. As a result, it is possible to deactivate individual pairs of plasma nozzles 20 of the arrangement in order, for example, to control the processing width of a plasma processing system or the exit pattern of the plasma streams.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Claims (15)

  1. Buse à plasma pourvue d'un boîtier (1), laquelle buse présente une unité d'électrode (3) à laquelle est associé un premier canal de buse (15), le premier canal de buse (15) présentant au moins une paroi électroconductrice et étant isolé par rapport à la première unité d'électrode (3), et lequel boîtier abrite au moins une autre unité d'électrode (3'); et pourvue de moyens (11) permettant d'amener un flux de gaz de processus à chaque unité d'électrode (3, 3'), un canal de buse (15) séparé qui présente une paroi électroconductrice isolée par rapport à l'unité d'électrode (3, 3') respective étant respectivement associé aux unités d'électrode (3, 3'), les canaux de buse (15) séparés étant disposés de telle sorte que les flux de gaz de processus se rejoignent dans un orifice de sortie de buse (16) commun d'une pointe de buse (14) qui comprend les canaux de buse (15), et les parois du premier et du deuxième canal de buse (15) étant directement reliées l'une à l'autre de manière électrique, caractérisée en ce que des moyens permettant d'appliquer une tension entre la première et la deuxième unité d'électrode (3, 3') sont prévus, de telle sorte qu'un canal de décharge de l'arc électrique s'étend entre les deux unités d'électrode (3, 3'), le long des canaux de buse (15) .
  2. Buse à plasma selon la revendication 1, caractérisée en ce que les canaux de buse (15) sont intégrés dans une seule pointe de buse (14) électroconductrice.
  3. Buse à plasma selon la revendication 1, caractérisée en ce que les canaux de buse (15, 23) d'au moins deux buses à plasma voisines débouchent dans une pointe de buse (14, 22) commune.
  4. Buse à plasma selon la revendication 1 ou 2, caractérisée en ce qu'il est prévu des moyens (8) permettant de créer un courant tourbillonnaire dans les canaux de buse (15), lesquels sont de préférence réalisés de manière à produire dans les canaux de buse (15) des courants tourbillonnaires de même sens ou de sens opposé.
  5. Buse à plasma selon l'une des revendications 1 à 3, caractérisée en ce que les canaux de buse (15) se poursuivent, dans le sens inverse des flux de gaz de processus, dans un bloc d'isolement (2), dans lequel sont logées les unités d'électrode (3, 3'), et en ce que de préférence les moyens (8) permettant de créer le courant tourbillonnaire font partie des unités d'électrode (3, 3').
  6. Buse à plasma selon la revendication 1, caractérisée en ce que le boîtier (2) présente des canaux (11) permettant d'amener les flux de gaz de processus.
  7. Buse à plasma selon la revendication 1, caractérisée en ce qu'un élément rapporté de buse (17) peut être fixé de manière amovible sur l'orifice de sortie (16) de la pointe de buse (14).
  8. Buse à plasma selon la revendication 6, caractérisée en ce que l'élément rapporté de buse (17) présente un trou de passage, et en ce qu'au moins une paroi du trou de passage est réalisée en un matériau diélectrique.
  9. Buse à plasma selon la revendication 6 ou 7, caractérisée en ce que l'élément rapporté de buse (17) présente un trou de passage en forme de canal qui est prévu comme section de brassage et de stabilisation pour les flux de plasma provenant desdits au moins deux canaux de buse (15).
  10. Procédé permettant de traiter une surface de pièces à usiner à l'aide d'au moins une buse à plasma selon l'une des revendications précédentes, caractérisé en ce qu'une tension alternative à haute fréquence est appliquée aux unités d'électrode (3, 3', 24) de la buse à plasma, de sorte qu'un arc électrique soit généré entre les unités d'électrode (3, 3') et le long des canaux de buse (15).
  11. Procédé selon la revendication 10, caractérisé en ce que, lors de l'activation d'au moins deux buses à plasma en vue du traitement de surface de pièces à usiner, les électrodes (3, 3', 24) sont montées électriquement en série, et en ce que de préférence les parois des canaux de buse (23) de respectivement deux buses à plasma voisines (20) sont reliées directement l'une à l'autre de manière électrique.
  12. Procédé selon la revendication 10, caractérisé en ce que le gaz de processus amené aux unités d'électrode (3, 3', 24) est réglé à une vitesse de flux telle que l'arc électrique se formant dans la pointe de buse (14, 22) ne sort pas de l'orifice de sortie (16) de la pointe de buse (14) ou du trou de passage de l'élément rapporté de buse (17), et en ce que de préférence la surface à traiter de la pièce à usiner est positionnée à une distance donnée de l'orifice de sortie de la pointe de buse (14, 22) ou du trou de passage de l'élément rapporté de buse (17), et en ce que notamment la surface à traiter de la pièce à usiner est déplacée le long de la pointe de buse (14, 22) ou de l'élément rapporté de buse (17) de la buse à plasma.
  13. Procédé selon la revendication 10, caractérisé en ce que la disposition comportant plusieurs buses à plasma est alimentée par un seul transformateur (26) .
  14. Procédé selon la revendication 10, caractérisé en ce que la disposition se compose d'un nombre pair de buses à plasma qui est supérieur à deux, et en ce que les différentes pointes de buse (14, 22) de la disposition sont isolées les unes par rapport aux autres, et en ce que cette isolation est réalisée notamment par un isolateur (25) à résistance diélectrique élevée, et en ce que l'isolateur (25) utilisé de préférence est du téflon ou de la céramique.
  15. Procédé selon la revendication 10, caractérisé en ce qu'un contact de pontage (27) commutable est respectivement prévu pour deux buses à plasma (20) reliées par les parois de leurs canaux de buse (23).
EP08716278A 2007-03-05 2008-03-05 Buse a plasma Active EP2143307B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007010996A DE102007010996A1 (de) 2007-03-05 2007-03-05 Plasmadüse
PCT/EP2008/001761 WO2008107180A1 (fr) 2007-03-05 2008-03-05 Buse à plasma

Publications (2)

Publication Number Publication Date
EP2143307A1 EP2143307A1 (fr) 2010-01-13
EP2143307B1 true EP2143307B1 (fr) 2011-06-22

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EP08716278A Active EP2143307B1 (fr) 2007-03-05 2008-03-05 Buse a plasma

Country Status (6)

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EP (1) EP2143307B1 (fr)
AT (1) ATE514319T1 (fr)
DE (1) DE102007010996A1 (fr)
DK (1) DK2143307T3 (fr)
ES (1) ES2368189T3 (fr)
WO (1) WO2008107180A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012103938A1 (de) * 2012-05-04 2013-11-07 Reinhausen Plasma Gmbh Plasmamodul für eine Plasmaerzeugungsvorrichtung und Plasmaerzeugungsvorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE685455C (de) 1934-02-11 1939-12-18 Siemens Schuckertwerke Akt Ges Lichtbogengeblaese
US3770935A (en) * 1970-12-25 1973-11-06 Rikagaku Kenkyusho Plasma jet generator
JPS5546266A (en) * 1978-09-28 1980-03-31 Daido Steel Co Ltd Plasma torch
US5036176A (en) * 1988-03-24 1991-07-30 Kabushiki Kaisha Komatsu Seisakusho Plasma arc cutter and method of controlling the same
US4982067A (en) * 1988-11-04 1991-01-01 Marantz Daniel Richard Plasma generating apparatus and method
US5008511C1 (en) * 1990-06-26 2001-03-20 Univ British Columbia Plasma torch with axial reactant feed
DE19532412C2 (de) 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
US6534921B1 (en) * 2000-11-09 2003-03-18 Samsung Electronics Co., Ltd. Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system
ATE274787T1 (de) 2002-02-09 2004-09-15 Plasma Treat Gmbh Plasmadüse
AU2003221300A1 (en) * 2002-03-28 2003-10-13 Apit Corp. S.A. Atmospheric plasma surface treatment method and device for same

Also Published As

Publication number Publication date
ES2368189T3 (es) 2011-11-15
DE102007010996A1 (de) 2008-09-11
DK2143307T3 (da) 2011-10-10
ATE514319T1 (de) 2011-07-15
EP2143307A1 (fr) 2010-01-13
WO2008107180A8 (fr) 2009-11-26
WO2008107180A1 (fr) 2008-09-12

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