EP2140226A2 - Module nanorobotique, automatisation et remplacement - Google Patents

Module nanorobotique, automatisation et remplacement

Info

Publication number
EP2140226A2
EP2140226A2 EP08757972A EP08757972A EP2140226A2 EP 2140226 A2 EP2140226 A2 EP 2140226A2 EP 08757972 A EP08757972 A EP 08757972A EP 08757972 A EP08757972 A EP 08757972A EP 2140226 A2 EP2140226 A2 EP 2140226A2
Authority
EP
European Patent Office
Prior art keywords
nanorobotics
module
plug
probe
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08757972A
Other languages
German (de)
English (en)
Inventor
Volker Klocke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200710035761 external-priority patent/DE102007035761A1/de
Priority claimed from DE200710036019 external-priority patent/DE102007036019A1/de
Priority claimed from DE102007035950A external-priority patent/DE102007035950A1/de
Application filed by Individual filed Critical Individual
Publication of EP2140226A2 publication Critical patent/EP2140226A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20—Sample handling devices or methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/2025—Sensing velocity of translation or rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20292—Means for position and/or orientation registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Definitions

  • Nanorobotics module automation and change
  • the invention relates to a nanorobotics module with a drive device and a method for its use, in particular for measuring surface properties, and a system with a vacuum chamber in which a nanorobotics module is arranged.
  • the invention further relates to an exchangeable adapter and a method, in particular for changing nanorobotics modules.
  • nanorobotics modules are understood as actuators with positioning resolution in the nanometer range and strokes up to the mm or cm range, such as linear drives, positioning tables, grippers, for example with movable jaws, or rotary drives, turntables,
  • Various sensors can also be part of this nanorobotics.
  • These nanorobotics modules usually include so-called “end effectors.” These are objects that are moved by these nanorobotics modules, such as tools such as tips, blades, or grippers - or sensors for measuring solution of parameters. End effectors can also be combinations of tools and sensors.
  • Surveying units are usually used to measure spatial surface properties such as contours, topographies, roughness and various coordinates of objects.
  • the measuring units such as profilometers or coordinate measuring machines can usually determine at least part of these parameters.
  • the restriction to one part may, for example, also apply to the reduction to only two or one dimension.
  • the measurement can be carried out in a touching or non-contact manner and contain different sensor principles in the form of different probes for surface measurement.
  • Scanning probe microscopes also have measuring units, but are not suitable for the quantitative measurement of larger sample areas due to their limited image area.
  • Nanorobotics modules can have numerous other measuring or manipulation units - such as linear drives, positioning tables, grippers, for example with movable jaws, or rotary drives, rotary tables, swivel modules with positioning resolution as well as multi-axis drives or manipulators and the combination of such modules for systems with many degrees of freedom of movement.
  • measuring or manipulation units such as linear drives, positioning tables, grippers, for example with movable jaws, or rotary drives, rotary tables, swivel modules with positioning resolution as well as multi-axis drives or manipulators and the combination of such modules for systems with many degrees of freedom of movement.
  • Nanorobotics modules can also have various sensors which are integrated in actuator modules, are moved by actuators or are simply such a component of nanorobotics modules.
  • nanorobotics modules usually have so-called end effectors. These are objects that are moved by the nanorobotics modules. Such objects can be, for example, tools such as tips, blades or grippers - or they are sensors for measuring characteristics. End effectors can also be combinations of tools and sensors.
  • Nanorobotics modules usually require at least one cable for power supply per drive plus a common return line. Usually, however, far more cable connections are needed, especially if sensors are included. Force-measuring cantilevers, for example, already require four cables, and high-resolution position sensors require more than ten cables.
  • Vacuum chambers can be made up of single or multiple Locks and / or valves interconnected cells exist, which can be operated under vacuum of any degree (low-vacuum, high-vacuum, ultra-high vacuum) or under protective gas of any gas type, including clean room-like filtered air.
  • the equipment of these vacuum chambers with various components and devices as well as the control leads to application-oriented systems such as vapor deposition chambers, sputtering chambers, laser ablation chambers, scanning electron and / or scanning ion microscopes, transmission electron microscopes, wafer handling systems in vacuum or inert gas, Reinstraumsy stemen in vacuum, Inert gas or filtered air.
  • nanorobotic modules are usually permanently installed in a vacuum chamber and the sometimes extensive cable sets from these modules are used to carry the chamber through laid. Disadvantage of this solution is that work to be carried out by the operator on nanorobotics module such as the replacement or maintenance of an end effector are associated with very high costs.
  • the nanorobotics modules are usually difficult to access in relatively small vacuum chambers filled with highly sensitive equipment, and the handling space is extremely limited. In addition, the limited insight into such chambers is additionally hampered by the installed equipment. Space for microscopes to capture details is therefore usually not available. Any wrong hand movement can still damage expensive equipment. The precise adjustment of sometimes very small and extremely sensitive end effectors on the nanorobotics modules is hardly possible under such difficult conditions.
  • the cable sets to the nanorobotics modules can be extended so far that the modules can be suspended from their cables and taken out of the vacuum chamber. All operations must then take place in the open space just before the chamber is opened, a place that hardly provides adequate working conditions with the support of equipment such as lamps, a table, clamps for fixing, microscopes, tools and so on.
  • the excessively long cable set must be relocated somewhere in the vacuum chamber without risking to tangle objects such as moving sample stages. Reports from users of such a solution show that it often comes to damage these too long cable sets. This can lead to severe localized functional disorders as a result.
  • a particular advantage here is when a nanorobotics module has a measuring unit with a measuring probe with a resolution in the nanometer range and a measuring range in the centimeter range, in particular for measuring surface properties. This has the advantage that large surfaces can be measured, while at the same time enabling high resolution at individual points of the object.
  • the nanorobotics module has a manipulation unit with an end effector. If the nanorobotics module simultaneously has an end effector, for example a tool such as a tip, a blade, a gripper, an erosion probe, an abrasive or the like, this end effector can be automatically approximated to an object via the functionality of the measuring unit. without the position of this object being known relative to the end effector to stop at an extremely short distance or in contact with the object, depending on the probe. So the position of this end effector is relative to the ob- ject and the end effector can perform its function, such as editing the object or walking along it.
  • an end effector for example a tool such as a tip, a blade, a gripper, an erosion probe, an abrasive or the like
  • the end effector is a sensor, such as a force sensor or a sensor that can measure other signals such as current, light, magnetic field, temperature or material properties such as hardness or the like, so this sensor as a tool can automatically with the help the drive device can be approximated to an object. This facilitates and shortens the approach of end effectors.
  • the probe can be sensitive in several spatial directions. This not only makes it possible to feel a surface in one spatial direction, but in several.
  • the measuring unit can be movable along several dimensions. This allows the measurement of height differences such as steps or the determination of thicknesses by differential measurement, the creation of profiles along project surfaces, the acquisition of three-dimensional surface profiles, the measurement of inner and outer object contours and the determination of object dimensions such as distances, angles, diameters, intersections and various coordinates and the measurement of object roughness along the above paths and surfaces.
  • the drive device has piezoelectric or comparable drives. These allow a precision of movement in the nanometer range.
  • a drive can be used which, in addition to the limited fine positioning range, has a type of step-mode bridging over long distances.
  • Typical variants are piezoelectrically or comparably driven inertia drives, traveling wave drives, pulse wave drives, so-called crawler or clawing runners according to the inchworm principle. These drives are small and have a high motion resolution.
  • the drive device has position sensors, as these make it possible to position absolutely and assign their probe data to absolute locations.
  • the position sensors can have a resolution in the nanometer range. [31] It is particularly advantageous if the drive device is designed to be thermally compensated in order to reduce thermal drift in directions which are not visible to the position sensors.
  • the nanorobotics module has a volume smaller than 50 ⁇ 50 ⁇ 50 cm 3 . By such a reduction, a greater vibration insensitivity is achieved. If the dimensions are further reduced, the vibration sensitivity is further reduced.
  • a measuring unit is suitable for operation in a vacuum. This opens up completely new possibilities in quality control, research, development and production.
  • the 3D measurement can be meaningful at far smaller object areas than in air, since in air, the poor resolution of light microscopes is a limitation.
  • the SD measurement can be performed on sample sites that have been specifically identified in the SEM by means of the SEM.
  • An example of this is a foreign body identified by X-ray examination or EDX in a basic matrix. A light microscope would not be able to identify such foreign bodies.
  • 3D measurements can be performed on sample structures that are produced in the vapor deposition chamber by coating.
  • the 3D measurement thus offers a novel control of the vapor deposition process.
  • the nanorobotics module can have several probes for measurement or processing. This also makes it possible to measure and process in several spatial directions.
  • the nanorobotics modules and their end-effectors in particular a probe, can have a storage device for status information about their size, condition, stroke, state, design, electrical or mechanical parameters. This facilitates the setting of various parameters when installing or changing nanorobotics modules.
  • Another concept of the invention comprises a system with a vacuum chamber in which a nanorobotics module is arranged, wherein the vacuum chamber has a free internal volume with an edge length of less than 60 cm, preferably less than 30 cm. Reducing a gauging unit through the use of a nanorobotics module of this size reduces vibration gating, with simultaneous confinement of the chamber to that size results in a vacuum being able to be generated more quickly.
  • a system with a vacuum chamber, in which a nanorobotics module is arranged, whereby the nanorobotics module is mounted on a chamber flange is attached is covered by the spirit. If the nanorobotics module is mounted on the inside of a chamber flange and if the current feedthroughs necessary for operating the nanorobotics module are also preferably integrated in this flange, then the wiring harness from these current feedthroughs to the nanorobotics module becomes very short and the entire unit is involved Flange and with Nanorobotics module can be easily removed by loosening the flange screws from the chamber.
  • both the vacuum chamber and the nanorobotics module can each have a control and the connection of the control can take place via an interface.
  • the presence of such an interface allows the merging of information from both entities.
  • a common interface makes it possible to connect the control of the two systems.
  • the nanorobotics controller queries information about components or system states of the chamber system.
  • Nanorobotics control alters components or system states of the chamber system.
  • the chamber system controller queries information about components or system states of nanorobotics.
  • the chamber system control alters components or system states of nanorobotics.
  • Nanorobotics controller can interrogate the positions of moving components of the chamber system and therefore knows where obstacles are.
  • the nanorobotics controller can move the sample stage of the chamber system to drive samples on the stage into the nanorobotic module's workspace.
  • These sensor-actuator controls can be combined as desired, thereby increasing the potential of the common system.
  • one of the two system controls (nanorobotics or chamber system) has automation software, it can also take over the automation of the other system as well as the automation of all controllable sensors and actuators of both systems. This enables the automation of an entire system, even if it consists of two individual systems, which mostly come from different manufacturers.
  • Automation also allows the free programming of process flows using the nanorobotics sensors available for automation and preferably absolutely positioning nanorobotics actuators, also in combination with the use of software variables, formula calculations, loops, case distinctions and simultaneous processes ,
  • the response of the interface allows to synchronize both the conditions of the chamber system and the conditions on the nanorobotics module in a single process.
  • the chamber system always contains sensors and often also actuators, which are necessary to fulfill the functionality of this chamber system.
  • Nanorobotics modules also have a large number of sensors and actuators as well as end-effectors. Combining this data and coordinating the assignment of the different modules thus leads to great flexibility in the application.
  • the nanorobotics or their end-effectors may contain state information about their size, condition, stroke, condition, design, electrical or mechanical parameters, they may be automatically evaluated, archived, and stored. special for handling measuring or automation processes can be used.
  • a further aspect of the invention relates to a method for using a nanorobotics module according to the invention, wherein the contact between measuring probe and sample is interrupted during a measurement.
  • This allows the use of probes that also have lateral resolution up to single nanometers.
  • Such probes are either non-contact probes that work extremely close to the surface to be measured, or touching "tactile probes" that come into contact with the specimen to be measured, leaving those probes at the end near the specimen as small as the desired lateral one Resolution at this point.
  • the diameter of the probe determines the lateral spatial resolution of the measurement.
  • a measurement resolution of 10 nm thus requires a probe tip diameter of the same order of magnitude. This makes it clear that lateral high-resolution probes are usually extremely sensitive.
  • any damping system that decouples the drives from the probe and sample will cause measurement results to falsify, for example, by creep or damping, thermal expansion of the damping, or vibration to a slower undefined motion.
  • dampings cause vacuum problems by outgassing of electrical components or, for example, by spontaneous evaporation of trapped air. An integration of a vibration damping would thus destroy the nanometer precision and would be vacuum technically problematic. The resulting vibrations would also lead to a destruction of the probe usually.
  • the distance between the probe and the sample can be increased by a defined distance before a rough approach step is performed by less than this defined distance and the renewed one Reducing the distance between sample and probe takes place.
  • an approach can be made over many centimeters, without the probe overflowing and ramming into the sample.
  • the probe also contains an additional end effector with additional functionality, this end effector can be automatically approximated to an object using this approximation method, which replaces the otherwise very time-consuming manual procedure which is risky for the end effector.
  • the position value can be stored on the approach line. This later allows a representation of the individual surface points. [71] The position value can still be modulated with the sensor value. This allows a further clarification of the measurement.
  • the distance between probe and sample can be increased by a defined amount and in a third step, the probe can be moved laterally to the sample by a defined distance. This prevents penetration of the probe into the sample even with large variations of the sample surface. In addition, a measurement of larger sample surface areas is possible.
  • the method according to the invention enables a considerably more effective zoom method: only as many points in the space are approached and measured as are necessary for the representation of the currently interesting field. For example, for the first coarse image of a coin, 100 points in the X direction and 20 to 50 scans in the Y direction, which are measured quickly, are sufficient.
  • the scanning method can be used to measure directly in contact with the sample.
  • the method according to the invention and the raster method can be combined. This makes it possible to increase the speed and the resolution in comparison to the pure screen method as well as to the method according to the method according to the invention.
  • a computer can control the individual steps one after the other. This allows automation as well as the collection of more data points in a controlled period of time.
  • the measurement can follow surface contours and surfaces can be scanned through series of measurements.
  • Suitable probes can be used to measure surface contours, inner contours of cavities, undercuts, outer contours, extreme lines, deep trenches or sharp cutting edges with nanometer precision in up to three dimensions. [85] It is advantageous if the determined measurement data provide sufficient roughness. Accordingly, contours and dimensions of objects according to various standard definitions with nanometer precision in up to three dimensions can be determined from the measured data.
  • a further aspect of the invention relates to an exchangeable adapter, in particular for exchanging nanorobotics modules according to the invention, characterized in that it comprises an electrical plug-in system with a plug and a socket and a mechanical fastening unit with a mechanical guide and a carriage.
  • an opposite arrangement of the modules of the electrical plug-in system and the mechanical fastening unit makes sense.
  • the socket of the electrical plug-in system can have a connection with the guide of the mechanical fastening unit and the plug can connect to the carriage of the mechanical fastening unit.
  • a connection of the socket with the carriage and the plug with the guide is conceivable. This attachment allows pre-adjustment of the two units.
  • plug and socket or at least one of them is in each case floating on the parts of the mechanical fasteners. are stored supply unit. These can then move relatively force-free and can safely avoid the shear forces occurring during mating. Of course it is also sufficient if only the straightener or the bush is floating.
  • the parts of the electrical plug-in system can have a fixation with the parts of the mechanical fastening unit.
  • the plug and its counterpart are mechanically fixed once in the ideal position, without any lateral forces occurring again. Since the basic adjustment must be done only once, the effort can be considerably higher.
  • a variant of the power fixation of this optimal position is the use of vacuum-compatible adhesive.
  • This adhesive must be mechanically stable so that it will not be blown away when operating the AC adapter.
  • One solution to this problem is the creation of gaps filled with glue: one side of the splice fixes the plug or its counterpart, the other side closes with a solid block that is not movable.
  • One or more of these irreversible Ren splices hold plug or counterpart in their ideal position and can withstand high setting forces at the same time.
  • the plug and socket may have at least one plug contact. In complex measuring or end-effector systems, however, several plug-in contacts will usually be necessary.
  • the mechanical fastening unit has a fixation for carriage and guide.
  • a simple insertion of the carriage in the guide is possible and connected to the fixation can be done.
  • This makes it possible to quickly and simply insert the nanorobotics module with just one hand and, if necessary, let go, for example, to grasp it with the hand and then fix the nanorobotics module.
  • a particularly simple manufacturing process provides that the mechanical fixation is made of metal. Ceramics manufacture may also be advantageous in the light of vacuum use.
  • Another concept of the invention also includes a method for changing nanorobotics modules, characterized in that a nanorobotics module is first mechanically fixed and electrically connected.
  • a further aspect of the invention comprises a method with an exchangeable adapter, in particular for changing nanorobotics modules, wherein a measuring unit is mechanically fixed and electrically connected.
  • the method makes it possible, for example, to mechanically fix a nanorobotics module at a reproducible position and at the same time to produce an electrical plug-in contact. By combining both steps, it is possible to fix the nanorobotics module simultaneously vibration-free at a precisely predefined position, without destroying a relative movement and the associated high shear forces plug and socket or at least make tight and increase the wear.
  • the plug connected to the measuring unit is prefixed to the carriage mechanism in an upstream step and the socket connected to the cable strand is prefixed to the cable string on a guide mechanism in an upstream step.
  • This prefixing for example via a very loosely fixed screwed connection, has the advantage that the plug-in units thus remain movable relative to one another.
  • the slide can be inserted into the guide in such a way that the nanorobotics module securely holds its own position. This allows, for example, a grip on installation.
  • the carriage can be further pushed into the guide and thus the plug and socket are electrically connected.
  • the mechanical plug-in system is connected to the mechanical fixation vibration-free at a precisely predefined position.
  • the electrical plug-in modules can still move relatively force-free and thus avoid the shear forces occurring safely.
  • Plug and socket are now pressed together again to make the electrical connection completely and safely. Subsequently, the electrical connector and the socket are mechanically fixed once in this ideal position, without that again shear forces occur.
  • One way of fixing the plug-in system components with the components of the mechanical fastening unit is the connection by gluing at a position determined by a basic adjustment. If the adapter is to be used in vacuum, the use of vacuum-compatible adhesive is advantageous. This adhesive must be mechanically stabilized so that it will not be blown away when the adapter is operated.
  • the final fixation of the nanorobotics module takes place at a reproducible position. This makes direct use of the nanorobotics module in this position possible.
  • a further aspect of the invention comprises a system with an exchangeable adapter and with an additional base part of this interchangeable adapter with guide and socket, with a measuring unit, at least one wiring harness, at least one electronics and a vacuum chamber, wherein attached to the rail with plug and electrically connected measuring unit can be connected to both base parts.
  • a nanorobotics unit can be used both in structures in vacuum chambers and in structures outside of the vacuum.
  • the nanorobotics module can be easily reconnected between vacuum chamber application and air application, preferably without having to be removed harnesses from the vacuum chamber.
  • the extension of the AC adapter principle also on the end effector facilitates in particular the change of end effectors, which selectably require a number of electrical leads.
  • These end effectors may consist of the actual sensor or actuator, which is in each case pre-mounted on a standardized adapter.
  • FIG. 1 shows a schematic structure of a nanorobotics module in a vacuum chamber of a scanning electron microscope or
  • FIG. 2 shows a schematic structure of a nanorobotics module in a vacuum chamber of a vapor deposition chamber for coating materials
  • FIG. 3 shows a schematic structure of a nanorobotics module in a vacuum chamber of an analysis chamber
  • FIG. 4 shows a schematic structure of a nanorobotics module in a vacuum chamber of a clean-room chamber, which can be operated under vacuum, protective gas or as a miniature clean room with filtered air,
  • FIG. 5 schematically shows a construction of several nanorobotics modules in a chamber system with manual control
  • FIG. 6 schematically shows a construction of a nanorobotics module with automated control
  • FIG. 7 schematically shows a construction of a combination of a chamber system and a nanorobotics module via an interface
  • FIG. 8 schematically shows a structure of a combination of both systems via an interface and the automation of the overall system
  • FIG. 9 schematically shows a construction of an exchangeable adapter
  • FIG. 10 shows the individual steps of the functional principle of the woodpecker method for surface measurement along a line
  • FIG. 11 schematically shows the functional principle of the woodpecker method along several lines
  • FIG. 12 schematically shows the functional principle of the woodpecker method applied to an arbitrarily shaped inner contour.
  • FIG. 13 shows an exemplary embodiment of a nanorobotics module.
  • a nanorobotics module 2, 12, 22, 32 and in each case a sample stage 5, 15, 25, 35 are arranged in a vacuum chamber having different functions 3, 13, 23, 33.
  • Figures 1 to 4 show modifications of this basic structure.
  • divergent se analyzers 27, 28, 29 are located in the chamber.
  • nanorobotics module shown in Figure 4 in a vacuum chamber of a clean room which can be operated under vacuum, inert gas or miniature clean room with filtered air, is on the sample table 35, for example, a wafer 38 to be measured.
  • the system depicted in FIG. 5 consists of a chamber system 41 with various nanorobotics modules 42, 46, which can have both actuators and sensors, two controllers of the nanorobotics modules 43, 47, two interfaces between controllers and manual control 44 , 48 and a hand control 45, such as a joystick, game port, keypad, keyboard, graphical user interface, or voice control.
  • various nanorobotics modules 42, 46 which can have both actuators and sensors, two controllers of the nanorobotics modules 43, 47, two interfaces between controllers and manual control 44 , 48 and a hand control 45, such as a joystick, game port, keypad, keyboard, graphical user interface, or voice control.
  • Figure 6 shows how the manual control by an automation A, for example in the form of computer programs, PLC control, microcontroller or embedded systems, i. hardware-integrated computer controls.
  • FIG. 7 shows the connection of the chamber system 61 with the manual control 66 of the chamber system and the nanorobotics module 62 with the manual control 65 of the nanorobotics module via an interface 67 between the chamber system controller 66 and the nanorobotics controller 65.
  • This interface 67 allows data to be communicated between the different controllers 65, 66.
  • FIG. 8 shows the various possibilities of incorporating automation as either a component of the two individual systems, as part of the chamber controller A1 or as part of the control of the nanorobotics module A2, or as an independent component at the common interface A3.
  • the automation is realized by a software package of the nanorobotics module 72, ie by module A2 in FIG. 5.
  • This automation has access to the functional units of the nanorobotics 72 in a manner similar to the manual control the chamber system interface 77, and through it, can utilize the functionality of the chamber system 71 in a manner similar to manual control of the chamber system.
  • a user-friendly variant of this system is the integration of the chamber controller 76 functional modules into the user interface of the manual nanorobotics controller 75.
  • the sum of all functionalities of the entire system appears in the user interface of the manual nanorobotics controller 75 programmable control of all the functional modules integrated in the manual nanorobotics control 75, corresponds to the homogenous automation of the entire system.
  • a particularly advantageous embodiment of this automation is a type of recorder that also writes commands to the manual control and later automatically reproduces them. Does such an au- automation software even the basic functions of all program languages such as grouping of commands to functions, creation of loops and case distinctions and the use of variables and formulas, this automation A2 of the overall system can solve arbitrarily complex tasks of the overall system.
  • the interchangeable adapter shown in FIG. 9 consists of a nanobotrobic module 81, a mechanical fastening unit 82 consisting of a guide 83 and a rail 84, a plug 85 on the rail 84 and a socket 86 as a counterpart to the electrical plug 85 with cable set 87 is fastened on the guide 83.
  • the only loosely fastened plug 85 slides when inserting the rail 84 in the guide 83.
  • the only loosely attached plug 85 slides into the likewise only loosely attached socket 86, which are then subsequently completely mechanically fixed. Only in a next step is then the fixation of the rail 84 in the guide 83 by means of the mechanical fastening unit 88th
  • Figure 10 shows the individual steps of the functional principle for surface measurement along a line.
  • step 1 an approach is made without overshooting until the probe recognizes the sample in step 2. Now the position value of the approaching axis is stored. Subsequently, a retreat to a freely definable piece, preferably also in controlled mode without overshooting with movement aborted on contact. These steps of this process can be repeated. Whether probe 1 approaches sample 2 in this process or sample 2 of the probe or both makes no difference in principle.
  • the measuring method can also be applied to any shape of the inner contour.
  • the arrows show the movement of the measuring tip. Analogous to FIG. 8, many scans are performed side by side, so here too a 3D data set of inner and outer contours can be created.
  • FIG. 1 An embodiment of a nanorobotics module is shown in FIG.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un module nanorobotique comprenant un dispositif de mesure servant à mesurer des propriétés d'une surface dans l'espace avec une plage de mesure de l'ordre du centimètre et une résolution de l'ordre du nanomètre, ce module pouvant être disposé dans une chambre à vide, par exemple dans la chambre à vide d'un microscope. Outre cette intégration du module nanorobotique dans une chambre à vide, l'invention concerne l'automatisation du module dans un système de chambre, en particulier la liaison de la commande du système nanorobotique et du système de chambre par création d'une interface entre les deux systèmes. L'invention concerne enfin un adaptateur d'éléments interchangeables mécatronique destiné à stabiliser de manière flexible des modules nanorobotiques à l'intérieur d'une chambre à vide, en particulier un adaptateur d'éléments interchangeables qui relie électriquement un module nanorobotique de préférence en une opération et le fixe mécaniquement sans jeu de façon guidée avec une grande précision.
EP08757972A 2007-04-24 2008-04-24 Module nanorobotique, automatisation et remplacement Withdrawn EP2140226A2 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE102007019623 2007-04-24
DE102007022045 2007-05-08
DE200710035761 DE102007035761A1 (de) 2007-07-27 2007-07-27 Mechatronischer Wechseladapter
DE200710036019 DE102007036019A1 (de) 2007-07-30 2007-07-30 Automatisierung von Nanorobotik in Kammersystemen
DE102007035950A DE102007035950A1 (de) 2007-04-24 2007-07-30 3D-Vermessungseinheit in Vakuumkammern
PCT/DE2008/000699 WO2008128532A2 (fr) 2007-04-24 2008-04-24 Module nanorobotique, automatisation et remplacement

Publications (1)

Publication Number Publication Date
EP2140226A2 true EP2140226A2 (fr) 2010-01-06

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ID=39684274

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EP08757972A Withdrawn EP2140226A2 (fr) 2007-04-24 2008-04-24 Module nanorobotique, automatisation et remplacement

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US (1) US20100140473A1 (fr)
EP (1) EP2140226A2 (fr)
KR (1) KR20100021413A (fr)
DE (1) DE112008001080A5 (fr)
WO (1) WO2008128532A2 (fr)

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Publication number Priority date Publication date Assignee Title
CN102971822B (zh) 2010-04-07 2016-03-02 多伦多大学董事局 用于电子显微镜的操纵器载体
WO2012071055A1 (fr) 2010-11-22 2012-05-31 Mcclung Guy L Iii Opérations, système et procédés de forage à l'aide de dispositifs mcnano

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DE69302084T2 (de) * 1992-09-07 1996-09-12 Stephan Kleindiek Elektromechanische positionierungsvorrichtung.
DE4440758A1 (de) * 1994-11-15 1996-05-23 Klocke Volker Elektromechanische Positioniereinheit
US7162292B2 (en) * 2001-05-21 2007-01-09 Olympus Corporation Beam scanning probe system for surgery
EP2031395A1 (fr) * 2002-05-08 2009-03-04 Panasonic Corporation Substrat biomoléculaire et dispositif de test
US6891170B1 (en) * 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US20050092907A1 (en) * 2003-11-04 2005-05-05 West Paul E. Oscillating scanning probe microscope
TWI237618B (en) * 2004-06-03 2005-08-11 Ind Tech Res Inst A long-distance nanometer positioning apparatus
EP1989742A1 (fr) * 2006-03-02 2008-11-12 Nanofactory Instruments AB Signal de commande pour actionneur a inertie
US20080149832A1 (en) * 2006-12-20 2008-06-26 Miguel Zorn Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application

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Publication number Publication date
DE112008001080A5 (de) 2010-01-28
KR20100021413A (ko) 2010-02-24
WO2008128532A2 (fr) 2008-10-30
US20100140473A1 (en) 2010-06-10
WO2008128532A3 (fr) 2009-02-05

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