DE112008001080A5 - Nanorobotik-Modul, Automatisierung und Wechsel - Google Patents

Nanorobotik-Modul, Automatisierung und Wechsel Download PDF

Info

Publication number
DE112008001080A5
DE112008001080A5 DE112008001080T DE112008001080T DE112008001080A5 DE 112008001080 A5 DE112008001080 A5 DE 112008001080A5 DE 112008001080 T DE112008001080 T DE 112008001080T DE 112008001080 T DE112008001080 T DE 112008001080T DE 112008001080 A5 DE112008001080 A5 DE 112008001080A5
Authority
DE
Germany
Prior art keywords
nanorobotics
automation
module
change
nanorobotics module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE112008001080T
Other languages
English (en)
Inventor
Volker Klocke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Klocke Nanotechnik GmbH
Original Assignee
Klocke Nanotechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200710035761 external-priority patent/DE102007035761A1/de
Priority claimed from DE102007035950A external-priority patent/DE102007035950A1/de
Priority claimed from DE200710036019 external-priority patent/DE102007036019A1/de
Application filed by Klocke Nanotechnik GmbH filed Critical Klocke Nanotechnik GmbH
Publication of DE112008001080A5 publication Critical patent/DE112008001080A5/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20—Sample handling devices or methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/2025—Sensing velocity of translation or rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20292—Means for position and/or orientation registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Sampling And Sample Adjustment (AREA)
DE112008001080T 2007-04-24 2008-04-24 Nanorobotik-Modul, Automatisierung und Wechsel Ceased DE112008001080A5 (de)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
DE102007019623 2007-04-24
DE102007019623.9 2007-04-24
DE102007022045.8 2007-05-08
DE102007022045 2007-05-08
DE102007035761.5 2007-07-27
DE200710035761 DE102007035761A1 (de) 2007-07-27 2007-07-27 Mechatronischer Wechseladapter
DE102007036019.5 2007-07-30
DE102007035950A DE102007035950A1 (de) 2007-04-24 2007-07-30 3D-Vermessungseinheit in Vakuumkammern
DE102007035950.2 2007-07-30
DE200710036019 DE102007036019A1 (de) 2007-07-30 2007-07-30 Automatisierung von Nanorobotik in Kammersystemen
PCT/DE2008/000699 WO2008128532A2 (de) 2007-04-24 2008-04-24 Nanorobotik-modul, automatisierung und wechsel

Publications (1)

Publication Number Publication Date
DE112008001080A5 true DE112008001080A5 (de) 2010-01-28

Family

ID=39684274

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112008001080T Ceased DE112008001080A5 (de) 2007-04-24 2008-04-24 Nanorobotik-Modul, Automatisierung und Wechsel

Country Status (5)

Country Link
US (1) US20100140473A1 (de)
EP (1) EP2140226A2 (de)
KR (1) KR20100021413A (de)
DE (1) DE112008001080A5 (de)
WO (1) WO2008128532A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8822951B2 (en) 2010-04-07 2014-09-02 Yu Sun Manipulator carrier for electron microscopes
US8973656B2 (en) 2010-11-22 2015-03-10 Guy L. McClung, III Wellbore operations, systems, and methods with McNano devices

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611485B1 (de) * 1992-09-07 1996-04-03 KLEINDIEK, Stephan Elektromechanische positionierungsvorrichtung.
DE9421715U1 (de) * 1994-11-15 1996-07-25 Kleindiek, Stephan, 52070 Aachen Elektromechanische Positioniereinheit
US7162292B2 (en) * 2001-05-21 2007-01-09 Olympus Corporation Beam scanning probe system for surgery
ATE423317T1 (de) * 2002-05-08 2009-03-15 Panasonic Corp Biomolekulares substrat und testvorrichtung
US6891170B1 (en) * 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US20050092907A1 (en) * 2003-11-04 2005-05-05 West Paul E. Oscillating scanning probe microscope
TWI237618B (en) * 2004-06-03 2005-08-11 Ind Tech Res Inst A long-distance nanometer positioning apparatus
WO2007100296A1 (en) * 2006-03-02 2007-09-07 Nanofactory Instruments Ab Control signal for inertial slider
US20080149832A1 (en) * 2006-12-20 2008-06-26 Miguel Zorn Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application

Also Published As

Publication number Publication date
WO2008128532A2 (de) 2008-10-30
KR20100021413A (ko) 2010-02-24
US20100140473A1 (en) 2010-06-10
EP2140226A2 (de) 2010-01-06
WO2008128532A3 (de) 2009-02-05

Similar Documents

Publication Publication Date Title
BRPI0817829A2 (pt) Comunicador
ATE513831T1 (de) Pyridinä3,4-büpyrazinone
DE502006009247D1 (de) Steuermodul
FI20060389A0 (fi) Sensori
BRPI0818373A2 (pt) compostos de pelicetal, síntese e aplicações
DE502007005331D1 (de) Sicherheitsmodul und Automatisierungssystem
BRPI0812916A2 (pt) Chupeta
DK2129588T3 (da) Flaske
DE112008001080A5 (de) Nanorobotik-Modul, Automatisierung und Wechsel
BRPI0807672A2 (pt) Módulo de interface
DE112008004261A5 (de) Schichtabscheidevorrichtung und Schichtabscheideverfahren
ATE477204T1 (de) Wickeleinrichtung
UA15236S (uk) Приймально - передавальний модуль
FI20055414A0 (fi) Kiinteistöautomaatiojärjestelmä
ATE486806T1 (de) Wickeleinrichtung
UA15924S (uk) Футляр до пляшки
EE00607U1 (et) Kandekott
ES1065791Y (es) Cuaderno
FI20060937A0 (fi) Anturi
ITLE20060001A1 (it) Follow sun
CL2007003433S1 (es) Luminaria.
CL2008000814S1 (es) Luminaria.
CL2007002698S1 (es) Luminaria.
FI20075928L (fi) Hoitomoduuli
ITBZ20070037A1 (it) Moschettone

Legal Events

Date Code Title Description
8181 Inventor (new situation)

Inventor name: INVENTOR IS APPLICANT

R012 Request for examination validly filed
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01B0021200000

Ipc: G01Q0090000000

R012 Request for examination validly filed

Effective date: 20150303

R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01B0021200000

Ipc: G01Q0090000000

Effective date: 20150311

R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final