FI20060389A0 - Sensori - Google Patents
SensoriInfo
- Publication number
- FI20060389A0 FI20060389A0 FI20060389A FI20060389A FI20060389A0 FI 20060389 A0 FI20060389 A0 FI 20060389A0 FI 20060389 A FI20060389 A FI 20060389A FI 20060389 A FI20060389 A FI 20060389A FI 20060389 A0 FI20060389 A0 FI 20060389A0
- Authority
- FI
- Finland
- Prior art keywords
- giver
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20060389A FI20060389L (fi) | 2006-04-21 | 2006-04-21 | Sensori |
US12/226,482 US20090312954A1 (en) | 2006-04-21 | 2007-04-23 | Sensor |
EP07730576A EP2013612A1 (en) | 2006-04-21 | 2007-04-23 | Micro hotplate semiconductive gas sensor |
PCT/FI2007/000107 WO2007122287A1 (en) | 2006-04-21 | 2007-04-23 | Micro hotplate semiconductive gas sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20060389A FI20060389L (fi) | 2006-04-21 | 2006-04-21 | Sensori |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20060389A0 true FI20060389A0 (fi) | 2006-04-21 |
FI20060389L FI20060389L (fi) | 2007-10-22 |
Family
ID=36293783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20060389A FI20060389L (fi) | 2006-04-21 | 2006-04-21 | Sensori |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090312954A1 (fi) |
EP (1) | EP2013612A1 (fi) |
FI (1) | FI20060389L (fi) |
WO (1) | WO2007122287A1 (fi) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7816681B2 (en) * | 2008-12-03 | 2010-10-19 | Electronics And Telecommunications Research Institute | Capacitive gas sensor and method of fabricating the same |
US8410560B2 (en) * | 2010-01-21 | 2013-04-02 | Cambridge Cmos Sensors Ltd. | Electromigration reduction in micro-hotplates |
US8651737B2 (en) * | 2010-06-23 | 2014-02-18 | Honeywell International Inc. | Sensor temperature sensing device |
US8480302B2 (en) * | 2010-09-28 | 2013-07-09 | International Business Machines Corporation | Micro-electro-mechanical-system temperature sensor |
MY174926A (en) * | 2010-12-10 | 2020-05-22 | Mimos Berhad | Micro-hotplate based gas sensor |
CN102313761B (zh) * | 2011-07-11 | 2014-05-28 | 西安交通大学 | 一种用于氢气检测的阵列化气敏传感器结构 |
US9228967B2 (en) * | 2012-07-16 | 2016-01-05 | Sgx Sensortech Sa | Micro-hotplate device and sensor comprising such micro-hotplate device |
US9178032B2 (en) * | 2013-02-15 | 2015-11-03 | Electronics And Telecommunications Research Institute | Gas sensor and manufacturing method thereof |
WO2014191619A1 (en) * | 2013-05-30 | 2014-12-04 | Vaisala Oyj | A dual gas sensor structure and measurement method |
EP2833129B1 (en) * | 2013-07-30 | 2019-10-09 | Sensirion AG | Method and apparatus for analyzing a gas by a conductance-type particulate metal-oxide gas sensor |
EP2833127A1 (en) * | 2013-07-30 | 2015-02-04 | Sensirion AG | Integrated resistive-type sensor array arrangement, each sensor comprising a sensitive metal oxide layer each having a different length between the electrodes |
EP2833128A1 (en) * | 2013-07-30 | 2015-02-04 | Sensirion AG | Integrated metal oxide chemical sensor |
EP2863214B1 (en) * | 2013-10-15 | 2019-12-18 | ams international AG | A thermal conductivity detector having a multi-layer sensing element, a gas sensor, and a method of gas sensing |
DE102013220908B4 (de) * | 2013-10-15 | 2015-09-24 | Continental Automotive Gmbh | Sensorelement |
WO2015066289A1 (en) * | 2013-10-30 | 2015-05-07 | Robert Bosch Gmbh | Metal oxide semiconductor sensor and method of forming a metal oxide semiconductor sensor using atomic layer deposition |
EP3144669A1 (en) * | 2015-09-17 | 2017-03-22 | IDT Europe GmbH | A single gas sensor for sensing different gases and a method using the gas sensor |
CN107167511B (zh) * | 2016-03-07 | 2020-05-26 | 光宝光电(常州)有限公司 | 气体传感器 |
WO2017205146A1 (en) * | 2016-05-27 | 2017-11-30 | Carrier Corporation | Gas detection device and method of manufacturing the same |
US11041838B2 (en) | 2017-04-26 | 2021-06-22 | Nevada Nanotech Systems Inc. | Gas sensors including microhotplates with resistive heaters, and related methods |
US20200306886A1 (en) * | 2017-11-29 | 2020-10-01 | Dm3D Technology, Llc | Powder material mass flow rate measuring apparatus for additive manufacturing |
TWI708303B (zh) * | 2018-02-22 | 2020-10-21 | 國立大學法人大阪大學 | 基板評價用晶片及基板評價裝置 |
CN110455869B (zh) * | 2018-05-07 | 2023-07-25 | 中国石油化工股份有限公司 | 自带采样电阻的气敏传感监测探头及其应用 |
GB2575803A (en) * | 2018-07-23 | 2020-01-29 | Sumitomo Chemical Co | Semiconductor gas sensor |
US20200096396A1 (en) * | 2018-09-26 | 2020-03-26 | Ams Sensors Uk Limited | Gas Sensors |
WO2020117472A2 (en) | 2018-12-03 | 2020-06-11 | Carrier Corporation | Combustible gas sensor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6283641A (ja) * | 1985-10-08 | 1987-04-17 | Sharp Corp | 電界効果型半導体センサ |
US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
US6596236B2 (en) * | 1999-01-15 | 2003-07-22 | Advanced Technology Materials, Inc. | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same |
KR100305660B1 (ko) * | 1999-02-09 | 2001-09-26 | 김희용 | 이중이온빔법을 이용하여 CuO를 첨가한 황화합물계 가스 센서 |
US20040075140A1 (en) * | 2000-12-20 | 2004-04-22 | Henry Baltes | Microsensor and single chip integrated microsensor system |
TW513855B (en) * | 2001-01-15 | 2002-12-11 | Matsushita Electric Ind Co Ltd | Saw device and method for manufacturing the device |
-
2006
- 2006-04-21 FI FI20060389A patent/FI20060389L/fi not_active Application Discontinuation
-
2007
- 2007-04-23 EP EP07730576A patent/EP2013612A1/en not_active Withdrawn
- 2007-04-23 WO PCT/FI2007/000107 patent/WO2007122287A1/en active Application Filing
- 2007-04-23 US US12/226,482 patent/US20090312954A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2007122287A1 (en) | 2007-11-01 |
US20090312954A1 (en) | 2009-12-17 |
FI20060389L (fi) | 2007-10-22 |
EP2013612A1 (en) | 2009-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD | Application lapsed |