EP2038690A2 - Procédé et dispositif destinés à produire une image d'une couche mince d'un objet - Google Patents

Procédé et dispositif destinés à produire une image d'une couche mince d'un objet

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Publication number
EP2038690A2
EP2038690A2 EP07726163A EP07726163A EP2038690A2 EP 2038690 A2 EP2038690 A2 EP 2038690A2 EP 07726163 A EP07726163 A EP 07726163A EP 07726163 A EP07726163 A EP 07726163A EP 2038690 A2 EP2038690 A2 EP 2038690A2
Authority
EP
European Patent Office
Prior art keywords
illumination
image
light
dark
images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07726163A
Other languages
German (de)
English (en)
Inventor
Peter Westphal
Daniel Bublitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Meditec AG
Original Assignee
Carl Zeiss Meditec AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Meditec AG filed Critical Carl Zeiss Meditec AG
Publication of EP2038690A2 publication Critical patent/EP2038690A2/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens

Definitions

  • the invention relates to a method for producing an image of a thin layer of an object, in particular by means of a wide field optics, as well as a corresponding device.
  • Biological samples or materials are often examined microscopically.
  • corresponding objects for the detection of structures with wide field optics can be examined, which image the object or a thin layer, ideally a plane, of the object onto a spatially resolving detector.
  • imaging examination can be done for example with normal microscopy or fluorescence microscopy.
  • the thin layer may be, for example, a fluorescent layer on a support such as a slide or the bottom of a titer plate containing immobilized cells, tissue sections or DNA fields, preferably arranged in "microarrays".
  • the objects or samples may in particular be biochips which have been produced by photolithographic means or by means of a spotter.
  • the fluorescence radiation from the thin layer should be detected as extensively and quantitatively as possible.
  • radiation, in particular fluorescence radiation which does not originate from the thin layer should be suppressed as well as possible, i. It should be achieved a good depth selection, in which only possible radiation in a layer around the focal plane is detected. Although not necessarily to be in the visible range of the optical spectrum, this optical radiation to be suppressed is also referred to below as a false light.
  • False light is produced, for example, by reflections and by scattered light on surfaces, in glasses, eg due to air inclusions, by intrinsic fluorescence of the glasses used, in sockets or in fluorescence measurements by non-suppressed excitation light. Furthermore, false light can also come from areas of the object or the sample, which lie outside the focal plane, preferably in the thin layer, for example, from fluorescent contaminants on the back of a slide or from one of the thin layer adjacent adjacent layer with a fluorescent liquid.
  • confocal laser scanners One way to avoid stray light is to use confocal laser scanners. With a confocal laser scanner, only a small area of the sample is illuminated by a few ⁇ i 2 , and only this small area is considered during the detection. If this is consistently carried out with the help of a well-matched pinhole, then false light is suppressed from the outset. Laser scanners, however, have a number of disadvantages compared to microscopes with wide-field optics. For example, in fluorescence microscopy excitation saturation and a strong fading of fluorophores due to the high intensity of radiation in focus can occur. Furthermore, there are significant limitations in the choice of wavelength. Many moving components, a high adjustment effort and a low quantum efficiency of the detector, usually a photomultiplier, are further disadvantages.
  • EP 972220 Bl describes a method in which three images of the object with the thin layer are detected, which, with illumination focused on the thin layer, are spatially sinusoidal, in each case one third of a third. period against each other shifted intensity profiles are detected. From the captured images, a picture of the thin layer is calculated.
  • DE 199 30 816 A1 describes a method and a device for depth selection of microscope images in which a one-dimensional periodic grating, e.g. a strip grid, used for lighting. At least n (n> 2) CCD camera images are taken with the structure of the illumination shifted by l / n of the lattice constant. From the at least three images, a confocal section of the sample is then calculated. This method is prone to artifacts when the grid does not produce sinusoidal illumination intensity on the sample.
  • a one-dimensional periodic grating e.g. a strip grid
  • WO 98/45745 A1 (DE 698 02 514 T2) describes an imaging system and method for microscopes, in which a structured illumination is provided by means of superposition of two coherent light beams. The method follows as well as the method described above according to DE 199 30 816 A1 . The main goal is to generate optical sections in different object planes similar to a laser scanning microscope.
  • a device for carrying out a method for eliminating stray light in the imaging of heterogeneous, luminous or illuminated planar objects comprises a radiation source with downstream, the radiation homogenizing illumination optics for the homogeneous illumination of a subsequent field blanket plane, in which a structured field stop is arranged to produce an illumination structure superimposed on the object or the sample.
  • This illumination structure is imaged by first optical means on the sample, wherein said first optical means may comprise a lighting tube, optionally a color splitter, and a lens.
  • second optical means are provided for imaging the sample together with the superimposed illumination structure onto a spatially resolving detector, in particular for optical radiation.
  • the arrangement further comprises adjustment means with which the illumination structure in the object plane can be positioned in a defined manner on the object or the sample.
  • the detector is connected to an evaluation device for detecting and eliminating the stray light. It uses a structured bright field illumination with at least two different illumination patterns, in which dark areas do not overlap. From corresponding images, a dark image and a bright image can be determined. By subtracting the dark image from the bright image, a resulting image can be obtained.
  • the structured bright field illumination provided in this device, in which the object illumination and the imaging of the object take place together with the exposed field diaphragm structure by a single objective,
  • the excitation light in the objective can cause the occurrence of stray light, in particular due to intrinsic fluorescence of the glasses used.
  • the back of an object for example a biochip, is irradiated with almost the same excitation intensity as the focal plane. Therefore, due to the contamination of the backside fluorescence intensity can be correspondingly high and give rise to measurement errors. It was therefore proposed to use a structured dark field illumination instead of the bright field illumination in a second method for avoiding these disadvantages.
  • the present invention is therefore based on the object to provide a method for producing an image of a, in particular thin, layer of an object which simultaneously allows good depth selection and high quantitative accuracy in fluorescence measurements, and to provide an apparatus for performing the method.
  • the object is achieved by a method for producing an image of a layer of an object by means of a wide-field optics on a spatially resolving detector, in which the object is illuminated in at least one object plane focused with at least two binary illumination patterns and for each of the illumination patterns corresponding images are detected, the illumination patterns each have dark areas and bright areas, of which the light areas and / or the dark areas completely cover the object when the illumination patterns are superimposed, and from the acquired images a tomogram is determined which comprises subsegments which each reproduce a partial area of the object, then Within a bright region of at least one of the illumination patterns used is that its edges are spaced from the edges of the bright region by at least a predetermined minimum distance, and which in each case at least partially false light correct are determined using at least two
  • the object is further achieved by a device for generating an image of a layer of an object, having a lighting device for focused illumination of the object in an object plane, a device for generating at least two predetermined illumination patterns for illuminating the object in the object plane with one in the beam path after the Lighting device arranged as a structured shutter acting element, the Be each of the bright areas and / or the dark areas completely overlaps the object when the illumination patterns are superimposed, an imaging optics preferably designed as a wide-field optic for imaging the object plane onto an image plane, a spatially resolving detector arranged in the image plane for detection the optical radiation emanating from the object, and an evaluation device for evaluating detection signals of the detector, which is designed to capture images on the basis of the detection signals and to carry out the steps of the method according to the invention following the image acquisition, and in particular to obtain a slice image from the acquired images determining that comprises subsegments each representing a subregion of the object which lies within a bright region of at least one of the illumination patterns used, that the edges
  • the method which can be carried out with the device, is used to produce an image of a layer of an object, preferably of a planar object, in particular of a heterogeneous, luminous or illuminated object.
  • this method may be a microscopy method, preferably a quantitative fluorescence microscopy method or a method using a fluorescence reader.
  • the layer does not necessarily have to be thin; rather, the layer may in particular be a whole layer, and not just a plane in which the illumination radiation is focused.
  • the layer of the object within the scope of the invention, depending on the size of the imageable region in the object plane, is understood to be an entire sample or an entire article or only a partial region of an entire sample or an entire article to be examined or imaged. illuminated with at least two structured, binary illumination patterns.
  • a binary illumination pattern is understood as an illumination pattern in which, for example, in contrast to illumination patterns with an intensity profile in the form of a sine profile, the structuring essential for the method is achieved by substantially interposing into the dark areas, at least in the context of geometric optics no illumination radiation is obtained and the transition from dark areas to light areas is very narrow compared to the extent of these areas (PLEASE SPECIFY QUANTITATIVE LIMIT, IF POSSIBLE).
  • the light and dark areas of the object are those areas of the object that lie in the light and dark areas of the illumination pattern when illuminated with a respective illumination pattern.
  • the illumination device for dispensing of illumination light which in the context of the present invention in addition to visible infrared or ultraviolet radiation is understood, and the means for generating at least two predetermined illumination pattern for focused, in particular structured illumination of the object provided at least in the object layer to be imaged.
  • the device for generating the binary illumination pattern has in particular an element acting as a diaphragm, which preferably acts as a field stop.
  • the element has translucent and opaque areas which correspond in the illumination patterns respectively to bright and dark areas which are adjacent. Accordingly, illuminated and non-illuminated areas appear in or on the object or the examined area with illumination light.
  • the object is sequentially illuminated with a different one of the illumination patterns.
  • the illumination patterns used in the method are chosen so that their dark areas and / or their bright areas completely cover the object in the case of an imagined or fictitious overlapping of the illumination patterns.
  • the object illuminated with the respective illumination pattern is then imaged by means of the imaging optics, which may in particular comprise an objective, onto the spatially resolving detector which serves to capture the images of the object.
  • the imaging optics which may in particular comprise an objective
  • the spatially resolving detector preferably a CCD or CMOS matrix can be used.
  • the signals of the spatially resolving detector are provided by the evaluation device, for example a data processing device with a video interface, a memory in which at least one computer program for carrying out the evaluation and in particular the method steps after the illumination of the object are stored, and a processor for executing the computer program Processed images.
  • the invention is based inter alia on the following observation: When focusing structured illumination radiation, such as illumination radiation with a sinusoidal intensity profile transversely to the beam direction, into a plane of the object, only a distribution of the illumination intensity determined by the properties of the optics used for focusing results along the beam direction , which may have its maximum in the plane, but falls parallel to the beam direction from the point of the maximum.
  • structured illumination radiation such as illumination radiation with a sinusoidal intensity profile transversely to the beam direction
  • a depth response function defined for the particular illumination pattern which indicates the intensity received by the detector as a function of the distance of the source from the plane in the beam direction, also Having maximum in the plane; but in the region of the maximum, the depth response function is also curved, so that the received intensity for a given illumination intensity decreases with increasing distance from the focal plane.
  • This drop means reduced sensitivity near the focal plane, so that the radiation emanating from the illuminated layer is not completely detected.
  • any illumination pattern in each detected image of the illuminated areas of the object which are illuminated with light areas of the respective illumination pattern, if present, corresponding light portions are directed to the areas of the image of the object corresponding to the dark areas of the respective illumination pattern in the object, ie unlit areas of the object. In these areas of the image, the proportions are then detected as false light.
  • the inventive method is characterized by its simplicity, since only simple summation and selection of intensity values are to be performed. These steps are much faster with computers, but also simpler processors or even unprogrammed circuits than trigonometric operations. rations. Accordingly, the device according to the invention can also be constructed very simply.
  • narrow regions can occur between the subsegments, in which the brightness values can be determined by interpolation between the values of the adjacent subsegments.
  • the sub-segments join each other gapless or overlap.
  • the device is for this purpose preferably designed so that the sub-segments connect to each other gapless or overlap.
  • no interpolation between the sub-segments is necessary, which significantly speeds up the implementation of the method and increases the accuracy of the resulting layer image.
  • the dark areas of the illumination patterns completely cover the object when the illumination patterns are superimposed, a dark image of the entire object containing all of the false light portions to be eliminated can be obtained from the dark areas of the images without interpolation.
  • subsegments or subareas corresponding thereto of the object overlap, it is possible to average over the redundant subareas of the different images. For example, when summing the images of the light regions, a renormalization in the overlapping regions may be performed to correct for double detection effects in those regions.
  • the subsegments of the illumination patterns overlap, they can preferably be made from different images via the redundant subregions of the images of the dark areas.
  • the sub-segments overlap less than 10% of the minimum extent.
  • the device is preferably designed so that the sub-segments overlap less than 10% of the minimum extent. In this way, only a small number of lighting patterns need to be used.
  • the minimum distances can be chosen arbitrarily. However, it is preferred in the method that the minimum distances are greater than 1/5 of the minimum spacing of adjacent boundaries of a light or dark region.
  • the device is then preferably designed so that the minimum distances are greater than 1/5 of the minimum distance of adjacent boundaries of a light or dark area.
  • a light image and a dark image can first be formed from the acquired images to determine the layer image, subregions of the acquired images which respectively reproduce regions of the object being used in a light or dark region during the detection of the image reflect the respective area of the object used in the respective image used and whose edge has the minimum distance from the transitions between the light and dark areas of the illumination pattern.
  • an at least partially corrected layer image can then be generated.
  • the evaluation device to do so designed for determining the layer image first from the captured images to form a light and a dark image, wherein respective areas of the object reproducing sub-segments of the captured images are used, in a light or dark area of an illumination pattern used in the detection of the respective image reproduce lying region of the object and whose edge has the minimum distance from the transitions between the bright and dark areas of the illumination pattern, and to generate by subtraction of the light and the dark image, an at least partially corrected layer image.
  • This variant has the advantage that a smoothing of the light and / or dark images can be easily performed.
  • an even number of illumination patterns may be used.
  • at least partially false-corrected images can then be determined by forming a difference image from acquired images in which the respectively used illumination patterns are complementary to each other, and the slice image can be determined from the images corrected for at least partially false-light.
  • the device is then preferably designed such that an even number of illumination patterns are used, and the evaluation device is designed to firstly determine at least partially false-corrected images by forming a difference image from acquired images in which the respectively used illumination patterns are complementary to one another, and from the at least partially false-corrected images to determine the layer image.
  • This variant has the advantage that an assembly of sub-segments can be made easier. Under a joining is also understood that the segments partially overlap. The joining of the subsegments can also be understood as image montage. The sub-segments are arranged in the assembly according to the arrangement of the corresponding areas on the object relative to each other. The joining can be done for example by adding the pictures.
  • the illumination patterns themselves may have different structures, provided that the dark and bright areas and the sub-segments have the aforementioned properties.
  • illumination patterns with radially extending light and dark regions can be used, each of which is generated by rotating a corresponding basic pattern around a center by a predetermined angle.
  • the illumination patterns are preferably given by a basic pattern which is offset differently in each case relative to the object.
  • the device is preferably designed so that the illumination patterns are given by a basic pattern, which is offset in each case differently relative to the object.
  • the illumination patterns thus have the same structure, but are offset from each other in the object plane. Such illumination patterns are easy to generate.
  • the evaluation of the images generated with the illumination patterns is particularly simple.
  • a basic pattern is used as a basic pattern, wherein the offset basic patterns are obtainable by shifting the basic pattern relative to the object.
  • the device is to is preferably formed so that the basic pattern is a periodic basic pattern, the staggered basic patterns are available by shifting the basic pattern.
  • respective offsets may depend on the period of the basic pattern.
  • the amount of displacement or shifts and the number of shifts and thus the illumination patterns are chosen so that a depth response function in the region of a focal plane in which the illumination patterns are focused, has a plateau.
  • the device can be particularly preferably designed so that the amount of displacement or displacements and the number of shifts and thus the illumination patterns are selected so that a depth response function in the region of a focal plane in which the illumination patterns are focused, a Plateau.
  • the depth response function is understood to mean the previously mentioned function.
  • a plateau is understood to mean that this function assumes a constant value in a not only point-shaped region of the focal plane. Preferably, it falls from the plateau via steep flanks to a value close to zero, preferably to a value of zero.
  • the offset of the illumination patterns relative to the object can be achieved in various ways.
  • the object is displaced relative to the illumination pattern.
  • a drive with which the object or a slide is movable, controllable by the evaluation so that formed on the object offset by movement of an element of the structured aperture acting as a basic pattern of the illumination pattern, and that means of the evaluation images after each change in position of the object are automatically detectable.
  • drives preferably piezo actuators or eccentric drives can be used, which allow a very accurate positioning.
  • the drive can also be used for the positioning of the object, which is necessary in any case, relative to the optics.
  • an already existing motorized microscope stage can be used.
  • the movement through the drive can be possible in one or two directions along the object plane, depending on the illumination patterns used.
  • the evaluation device can be designed, in particular, to generate a sequence of illumination patterns on or in the object by driving the drive, wherein an image is detected after setting in each case one illumination pattern. Thus, the operation is much easier for the user of the device.
  • the dependence required by the method between the type of illumination pattern and necessary shifts can be automatically taken into account.
  • the basic pattern can preferably be displaced by means of a mechanical device for the variant described above.
  • the element acting as a structured diaphragm is preferably a field stop.
  • a drive with which the FeId Aperture or part of the field diaphragm is movable, can be controlled by the evaluation so that the illumination patterns are irradiated on the object. After each change of the illumination pattern images are automatically detected by the evaluation.
  • a field stop is understood here to mean, in particular, a stop which has rigid, non-transparent or opaque elements for forming the structured illumination.
  • the element acting as a structured diaphragm is a field stop and a movable, light-deflecting element is arranged behind the field stop for generating the at least two illumination structures.
  • the field diaphragm can be firmly positioned.
  • a reflecting surface or a transparent plane-parallel plate which can be tilted about one axis or two orthogonal axes depending on the illumination patterns used can be used as the light-deflecting element.
  • drives preferably piezoelectric drives or eccentric drives can be used.
  • a drive with which the light-deflecting element is movable, can be controlled by the evaluation device so that the illumination patterns are irradiated onto the object. After each change of the illumination pattern by means of the evaluation device images are automatically detected.
  • the field stop has transparent and opaque areas, which are designed so that in the object plane, the desired illumination patterns are obtained.
  • an electrically controllable modulation unit for light can be provided, which is controlled so that the illumination patterns are generated.
  • the element acting as a diaphragm can be designed as such an electronically controllable modulation unit.
  • electrically controllable modulation units for light for example so-called DMDs ("digital mirror devices") or electronically controllable transmitted light or reflection liquid crystal screens or LCDs can be used.
  • the evaluation device is preferably controllable so that the illumination patterns are irradiated onto the area to be examined and images can be automatically detected after each change of the illumination pattern by means of the evaluation device. This embodiment of the invention not only allows to dispense with mechanical drives, but also allows easy switching between different types of illumination patterns.
  • the method can be used as a basic pattern, a periodic stripe pattern with period p, the periodically alternating HeIl- and dark stripes are the same width and from which the other illumination patterns by shifting by the m / n times the period p transverse to the longitudinal direction the stripe being producible, where n is the number of illumination patterns and 0 ⁇ m ⁇ n.
  • the field stop preferably has a strip-shaped structure which differs from one another. has bleached transparent and opaque areas of equal width. The strips preferably extend over the entire examination area or the entire object. The more illumination patterns are used, the less excitation light is used in acquiring a corresponding image.
  • the intensity noise in the background of the resulting image can be reduced almost arbitrarily.
  • the dimensions of the transparent and opaque areas are chosen so that illumination patterns can be generated with the aforementioned parameters.
  • illumination patterns each having a bi-directional array of light and dark regions may be used, the devices being offset from one another in at least one of the directions.
  • the field stop preferably has a two-directional periodic arrangement of transparent and opaque areas, the opaque areas adjoining each other.
  • an electrically controllable modulation unit for generating these illumination pattern sufficient training or programming of the evaluation.
  • the directions may be orthogonal to each other, but this may not necessarily be the case.
  • the marking of a direction is avoided by using stripes, so that the suppression of stray light becomes less directional.
  • the modulation by the structured illumination vanishes faster outside of the focus area. ne or object level, so that light outside the depth of field of the imaging optics: better suppressed.
  • the false light-corrected images are filtered low-frequency before formation layer image.
  • the evaluation device is preferably designed for this purpose such that the images corrected for false-correction are filtered at low frequency before the formation of the slice image.
  • the illumination optics for imaging the element acting as a diaphragm on the object is designed for dark field illumination.
  • the illumination optics should then be designed as an illumination objective with a small aperture, the optical axis of the illumination objective and the optical axis defined by the imaging optics enclosing an angle ⁇ .
  • This training results in a large depth of field.
  • the angle ⁇ should preferably be greater than 50 ° in order to minimize the radiation intensity on the underside of transparent objects or samples.
  • the illumination optics is a Scheimpflug optics.
  • a larger numerical aperture for the dark field illumination can be provided, as the Focal plane of the lighting can be adapted to the top of the sample.
  • the imaging optics for imaging the object on the detector may include a Scheimpflug optics.
  • the optical axis of the illumination lens is perpendicular to the surface of the sample, while the optical axis of the imaging lens is at an angle ⁇ to the optical axis of the illumination lens.
  • Both the method and the apparatus with which this method can be carried out can advantageously be used for reading out biochips, in quantitative fluorescence microscopy and in photometric measurements.
  • Fig.l is a schematic representation of an optical structure of an apparatus for detecting an image of an object according to a first preferred embodiment of the invention
  • FIG. 2 is a schematic partial representation of a device for generating illumination patterns with a field stop with eccentric drive in the apparatus of Fig.l,
  • FIG. 3 shows four illumination patterns obtainable with the field stop of the device from FIG.
  • FIG. 5 shows a representation of total depth response functions in Fresnel's approximation for the illumination patterns in FIG. 4, FIG.
  • FIG. 6 shows a schematic partial representation of a device for generating illumination patterns in a device for capturing an image of an object according to a sixth preferred embodiment of the invention
  • FIG. 8 shows a representation of total depth response functions in the approximation of geometrical optics for an illumination pattern with an intensity varying in two dimensions according to a sine function and a binary illumination pattern with square light and dark stripes repeating the period of the sine function.
  • FIG. 9 shows a schematic partial representation of a device for generating illumination patterns in a device for capturing an image of an object according to a seventh preferred embodiment of the invention
  • FIG. 10 is a schematic diagram of an optical arrangement of an apparatus for detecting an image of an object according to an eighth preferred embodiment of the invention.
  • FIG. 11 is a schematic representation of an optical structure of a device for detecting a Image of an object according to a ninth preferred embodiment of the invention
  • An evaluation 7 is connected via a detector connection to the detector 6 and via a control line to the device 2.
  • the illumination device 1 has a light or radiation source 8 which comprises a filter 9, a shutter 10 and, only optionally, the beam path homogenizing optical elements 11, such as e.g. a light guide rod or an internally mirrored glass hollow rod, and first illumination optics 12 and 13 for homogeneous illumination of a region of a field stop plane 14 are arranged downstream.
  • a light or radiation source 8 which comprises a filter 9, a shutter 10 and, only optionally, the beam path homogenizing optical elements 11, such as e.g. a light guide rod or an internally mirrored glass hollow rod, and first illumination optics 12 and 13 for homogeneous illumination of a region of a field stop plane 14 are arranged downstream.
  • the device 2 has a arranged in the beam path of the illumination device 1, homogeneously illuminable by this, acting as a structured aperture, defined in the beam path in two mutually orthogonal directions in the field diaphragm plane 14 slidably arranged element, in the example a structured field stop 15, and a in FIG. l drive shown only schematically 16, with which the field diaphragm 15 is displaceable.
  • the mechanical structure of the device 2 for generating illumination patterns is shown in more detail in FIG.
  • Eccentric drives 17 and 18 are coupled to the field diaphragm 15 so that it can be laterally displaced in the field diaphragm plane 14 in two mutually orthogonal directions and positioned in this way defined.
  • the field diaphragm 15 has periodically arranged, strip-shaped, opaque areas, which are separated from one another by transparent areas, so that corresponding strip-shaped illumination patterns can be generated in the object plane 3, as will be explained in more detail below.
  • the field diaphragm 15 is imaged onto the object 4 to be examined or imaged, or the object plane 3, by means of a second illumination optical system 19, which comprises an illumination tube 20, a beam splitter 21 and an objective 22 , so that on the object 4 one of the position of the field stop 15 in the field stop plane 14 and its structure corresponding illumination pattern is irradiated.
  • a second illumination optical system 19 which comprises an illumination tube 20, a beam splitter 21 and an objective 22 , so that on the object 4 one of the position of the field stop 15 in the field stop plane 14 and its structure corresponding illumination pattern is irradiated.
  • the imaging optics 5, which represents a wide field optics, in the example comprises the objective 22, the beam splitter 21 and a imaging tube 23, and forms the object 4 illuminated with the respective illumination structure in a high-contrast manner onto the image plane B or the spatially resolving detector 6 for optical radiation.
  • the beam splitter 21 is formed in the example as a color splitter and has filters 24 and 25, with which unwanted or disturbing spectral radiation components can be filtered out.
  • the beam splitter 21 and the filters 24 and 25 are components of a device for incident light fluorescence, wherein it is advantageous if the filters 25 and 26 are inclined by a few degrees, so as to remove disturbing reflections from the beam path.
  • the detector 6 comprises a matrix of CCD or CMOS elements and is in the example part of a CCD camera.
  • the detector 6 is connected to the evaluation device 7, which detects signals of the detector 6, performs the determination or elimination of the stray light in the imaging of the object 4 and generates a resulting slice image.
  • the evaluation device 7 has a processor, a memory and corresponding interfaces. The resulting images may be stored and / or output via a display device or printer not shown in FIG.
  • the evaluation device 7 also serves as a control for the drive 16, with which the illumination structure generated by the structured field stop 15 is displaceable.
  • the evaluation device 7 is designed such that it generates a sequence of illumination patterns by activating the drive 16 and the shutter 10 and detects a sequence of images of the examination area or of the object 4 respectively corresponding to the illumination patterns by detection of the signals of the detector 6. These images are processed after detection of the last image of the sequence in the evaluation device 7.
  • the first illumination pattern is a basic pattern.
  • the other illumination patterns emerge from the basic pattern by shifting the basic pattern by the distance v.
  • the basic pattern has a periodic structure of the period p with stripe-shaped dark regions 26 of width d and stripe-shaped bright regions 27 each arranged between the dark regions 26, which have the same width h as the dark regions 26.
  • the basic pattern is displaced three times by the distance v in a direction aligned orthogonal to the longitudinal direction of the striped dark regions 26 and light regions 27, respectively.
  • the distance v by which the successive illumination patterns resulting from displacement of the basic pattern are offset from one another, has in this example the length of one quarter of the period p.
  • v may be chosen to be p / N in particular.
  • the period p is on the sample side preferably between l ⁇ m and lOO ⁇ m.
  • the examination area or the object 4 is completely covered by the dark areas 26.
  • the object 4 is therefore completely covered by them, so that no interpolation between the dark areas 26 is necessary. The same applies to the bright areas 27.
  • the object 4 in the object plane 3 is successively with the four focused on the object plane 3 illumination patterns illuminated, for which the evaluation device 7 controls the drive 16 and the shutter 10 accordingly.
  • the evaluation device 7 controls the drive 16 and the shutter 10 accordingly.
  • a corresponding image is automatically detected by means of the detector 6 and the evaluation device 7.
  • the captured images optionally have in the areas in which the dark areas 26 are displayed, brightening by false light, which is emitted from illuminated with bright areas 27 sections of the object 4.
  • a slice image of the object 4 is then generated in the evaluation device 7.
  • a light and a dark image are first formed.
  • the subsegments are used which correspond to the subareas 37 and 38 of the light and dark regions 27 and 26, respectively, which form stripes in the center of the light and dark regions, respectively.
  • These sub-segments correspond in this embodiment just the middle 50% of the images of the light and dark areas.
  • the light or dark image is then formed by combining these subregions 37 and 38 corresponding sub-segments.
  • the arrangement of the areas of the captured images one another or the subsegments corresponds to the arrangement of the light or dark regions of the illumination patterns on the object 4 corresponding to the regions of the captured images.
  • the dark image is then smoothed by the evaluation device 7 for noise suppression using a corresponding low-pass filter.
  • the dark image is subtracted from the light image, resulting in a resulting layer image of the object 4, in which false light is suppressed, but the intensity in the layer is detected with high accuracy.
  • an overall depth response function indicating, for points on the optical axis, the detected intensity of optical radiation emanating from a location on the optical axis at a distance z from the object plane, as a function of the irradiated intensity has such a form that a confocal suppression is achieved for planes far away from the object plane, thereby detecting fluorescence radiation arising in a certain depth range around the focal plane at full efficiency.
  • the total depth response function for various structured illuminations can be calculated or estimated as follows. In the event that the structures that are thereby imaged on the object, clearly coarser than the resolution limit of the optical system, more precisely the Imaging optics 5, this calculation can be approximated with the models of geometric optics.
  • Geometric optics models can generally be applied when the optical system's transfer function, also referred to as PSF (Point Spread Function), can be approximated in focus by a delta function.
  • PSF Point Spread Function
  • the light wave field in the pupil plane corresponds to a homogeneously illuminated circle.
  • the numerical aperture of the imaging optics 5 can be calculated.
  • the PSF as a function of the distance to the focal plane then results as a circle whose radius R PSF depends on the distance to the focal plane z, the focal length f of the imaging optics 5 and the pupil radius Rp up iii e as follows:
  • PSF (z) can be understood as a deep response function. Since in this example the imaging optics 5 are used simultaneously for illumination, the overall depth response function is obtained by applying PSF (z) twice.
  • ⁇ x is the spatial frequency in a plane orthogonal to the
  • Direction of the optical axis of the imaging optics 5 and the beam direction or the z-axis and x indicate a location in the plane.
  • This intensity distribution is folded twice with a circle, with a radius dependent on the depth z.
  • the Fourier transform of the PSF (z) therefore corresponds to a modified Bessel function.
  • the square of this function is known as Airyfunktion.
  • the illumination function gives three peaks at zero, + ⁇ x and - ⁇ x . If one multiplies this function by the Airy function, then only at these three places do values differ from zero.
  • the Method of structured illumination only the modulation of the intensity distribution is measured. Due to the two peaks at + a> x and - ⁇ x , only two values are cut out of the Airy function.
  • Airy functions with different scales result from which the Fourier transform of the illumination function cuts out only the values at + ⁇ x and - ⁇ x .
  • the total depth response function for illumination with a sinusoidal intensity distribution and the evaluation algorithms described above corresponds to an airy function.
  • Tresponse ⁇ z l ⁇ (2 ⁇ Z 2 ) 1
  • the method according to the invention leads to a total depth response function which has a plateau with the value 1 in the immediate vicinity of the focus, ie in the immediate vicinity of the object plane.
  • the maximum plateau width is just 2Z for the dots in the middle of the stripes. If more than four recordings are used, the minimum plateau width (the solid line in FIG. 5) can be further increased and achieved theoretically for infinite measurements the maximum plateau width 2Z (long dashed line in Figure 5).
  • the illumination structures are much larger than the optical resolution of the system. In this case, geometric and wave-optical descriptions will give the same results.
  • the illumination structures are not significantly larger than the resolution limit. In this case, a wave-optical calculation for the total depth response function must be applied. Depending on the size of the structures, the plateau of the total depth response function is "rounded off", which reduces the effective plateau width.
  • the size of the illumination structures is close to the resolution limit. In this case, only the first frequency component of the illumination grating is transmitted by the optical system. In this case, no plateau will occur in the overall depth response function.
  • the total depth response function in this case will essentially correspond to the overall depth response function in geometric approximation for sinusoidal stripe illumination.
  • the second case can be simulated wave optically with the models of the paraxial Fresnell employedrung.
  • the results are shown in FIG. Therein are the result for one Sinusoidal illumination structure shown by a dashed line and the result for the above-mentioned stripe structure of the same period.
  • the transfer function PSF is calculated wave-optically in this case in the vicinity of the focal point and folded in accordance with the equation Iu e Tektor with itself and with the binary stripe pattern.
  • Fig.5 shows the obtained waveform.
  • total depth response functions for sinusoidal and binary illumination structures represented by dashed and solid lines, respectively, are shown as a function of the position of points on the optical axis or z-axis, the zero point corresponding to the focal plane. It can be seen in comparison with FIG. 4 that the plateau of the overall depth response function is clearly rounded off.
  • the frequency of the illumination grid needs to be varied in otherwise unchanged evaluation.
  • This variation has two effects.
  • the confocal suppression of light from non-focal planes becomes the worse the larger the grating period of the illumination grating becomes.
  • the total depth response function and thus the degree of confocal suppression with the grid frequency scales.
  • the width of the plateau also scales in the total depth response function and thus the depth range of the sample, which is mapped onto the detector with intensity efficiency 1, at the frequency of the illumination grid.
  • a second exemplary embodiment differs from the first exemplary embodiment solely in that the generation of the slice image is modified and the evaluation device is modified accordingly. All explanations on the unchanged parts of the first embodiment therefore also apply here and the same reference numerals are used.
  • the partial segments 37 and from the second temporary image the partial segments corresponding to the partial regions 3.8 are then combined to form the tomographic image.
  • a third and a fourth exemplary embodiment differ from the first or second exemplary embodiment in that subregions 37 and 38 corresponding to sub-segments of the images of the light or dark regions do not now have the median strips of width p / 2, but those of width 3 / 4p are used, so that the sub-segments overlap. Since the subsegments overlap, the summation in the overlap areas results in intensity Elevations that are eliminated by referencing or renormalization.
  • the field diaphragm 15 is not moved, but the object 4.
  • a table can be used, on which the object is arranged and by means of a controlled by the evaluation device 7 drive in directions is movable parallel to the object plane 3.
  • the evaluation of the captured images is analogous to the first embodiment.
  • piezoelectric actuators piezoelectric actuators
  • eccentric drives or other suitable adjustment mechanisms can be used, but preferably a motorized microscope stage. Accordingly, the second to fourth embodiments can be modified.
  • a device differs from the device of the first embodiment in that a modified device 28, shown in principle in Figure 6, are used for generating illumination patterns and a correspondingly modified evaluation device. Since the other components are substantially unchanged, the same reference numerals are used for them and the explanations on the first embodiment apply accordingly.
  • the device 28, which is partially shown in FIG. 6, now has, as an element acting as a structured diaphragm, a field diaphragm 29 with a checkerboard structure arranged in the field diaphragm plane 14, which has transparent and opaque square regions formed periodically in the same period with two orthogonal directions (see FIG .7).
  • the device 28 via a structured field stop 29 downstream in the light direction, plane-parallel glass plate 30 which is tiltable about two mutually orthogonal axes.
  • plane-parallel glass plate 30 which is tiltable about two mutually orthogonal axes.
  • piezoelectric actuators 32 which are controlled accordingly by a control of the evaluation device, not shown.
  • tilting the glass plate 30 is known to be an optical beam offset of the beam path and thus a staggered image of the field stop 29 on the object 4.
  • the arrows in Figure 7 marked the tilting directions of the glass plate 30th
  • a basic pattern shown in FIG. 7 is obtained with square light regions 33 and dark regions 34 arranged periodically in two mutually orthogonal directions, which form a checkerboard pattern.
  • the basic pattern points in the first, in the following by the number 1 marked Direction a period pl and in the second, hereinafter indicated by the numeral 2 direction, the period p2, wherein in this embodiment, the periods are selected to be the same size.
  • the basic pattern which itself constitutes a first illumination pattern, is first three times in succession by the distance vi in the direction 1, i. parallel to the in Fig.7 horizontal side of the bright areas 33, shifted, wherein a second, third and fourth illumination pattern arise.
  • a displacement is then made by the distance v2 in a direction 2 orthogonal to the direction of the first displacement, i. parallel to the vertical in Fig.7 side of the bright areas.
  • three further illumination patterns are generated by shifting by the distance vi in the direction of the first displacements.
  • v2 three times by vi, again by v2 and then three times by vi.
  • the periods pl and p2 are in the object plane preferably in the range between l ⁇ m and lOO ⁇ m. You can be chosen different sizes in other embodiments.
  • the method for imaging the object 4 according to the sixth preferred embodiment of the invention is analogous to the first embodiment.
  • the sub-segments correspond Now each square areas 37 and 38 in a square of the checkerboard pattern, the edge of the respective edge of the light or dark area has a distance of one quarter of the side of the bright and dark area.
  • the method has over the method of the first embodiment, i. the use of illumination patterns with stripes, the advantage that the modulation by the structured illumination disappears faster outside the focus plane or object plane, so that light outside the depth of field of the imaging optics is better suppressed.
  • FIG. 8 shows by way of example the total depth response function in the approximation of geometrical optics for the binary illumination pattern with checkerboard pattern-shaped intensity distribution (solid line) and for an illumination pattern with sinusoidal intensity distribution (dashed line) in two dimensions.
  • the abscissa describes the distance from the focal plane in scaled, arbitrary units and the ordinate also describes the respective value of the total depth response function in arbitrarily scaled units. Thereafter, a closer approach to a box-shaped profile is achieved.
  • An apparatus for detecting an image of an object according to a seventh preferred embodiment of the invention differs from the apparatus of the first embodiment by another drive for the field diaphragm 15. All other components are unchanged, so that the same reference numerals are used for them and the explanations in connection with the first embodiment according to Fig.l apply accordingly.
  • the drive controlled by the controller in the evaluation device comprises piezo actuators 35 and 36, which are coupled to the field diaphragm 15, so that the field diaphragm 15 can be adjusted by means of the piezo actuators 35 and 36 by lateral displacement along two mutually orthogonal directions in the field stop plane 14 ,
  • piezo actuators 35 and 36 By mapping the field diaphragm 15 set in different positions onto the object 4, different illumination structures in the object plane 3 are generated as before, which are then imaged onto the detector 6 together with the object 3.
  • An eighth preferred embodiment of the invention differs from the previously described embodiments in that the means for generating illumination patterns now neither a field stop nor a drive, but instead acting as a structured aperture element arranged in the field stop plane 14 electrically controllable modulation unit 45 in Shape of a transmitted light LCD has.
  • the modulation unit 45 is connected via a control line to an evaluation device 46, which is modified relative to the evaluation device 7 of the first embodiment such that light-dark patterns stored in the evaluation device are displayed on the transmitted-light LCD, so that corresponding to the object plane 3 corresponding illumination patterns are blasted.
  • a device according to a ninth preferred embodiment of the invention differs from the device of the first embodiment in that the element acting as a diaphragm for dark field illumination is sharply imaged on the object.
  • the second illumination optical system 19 is replaced by a modified second illumination optical system 40, the beam splitter 21 is no longer necessary.
  • the embodiments of the first embodiment apply mutatis mutandis and the same reference numerals are used.
  • the device comprises the illumination device 1 with the light or radiation source 8, optionally the shutter 10 and, advantageously, the beam path homogenizing optical elements 11, such as. a Lichtleitstab or internally mirrored glass hollow rod, and illumination optics 12 and 13 for homogeneous illumination of arranged in the field stop plane 14 in the beam path means 2 for generating illumination patterns, which in the example comprises the structured field stop 15, are arranged downstream.
  • This field diaphragm 15 is arranged positionable defined in the beam path in two mutually orthogonal directions of the field stop plane 14. It can therefore be moved by means of coupled to the field diaphragm 15 drive 16 in this plane 14.
  • modified second illumination optical system 40 which in the example a lighting tube 41, a deflection mirror 42, an excitation filter 43, and an objective 44, which is structured as Aperture acting element, ie here the structured field stop 15, in dark field illumination on the object to be examined or measured 4 or the object plane 3 shown.
  • the second illumination optics 40 forms a so-called Scheimpflug optics whose optical axis is arranged at an angle ⁇ to the perpendicular to the surface of the object 4 and the object plane 3 extending optical axis of the imaging optics 5.
  • the angle ⁇ > 50 °.
  • the imaging optics can also be designed as a Scheimpflug optics in a modified embodiment.
  • the optical axis of the second illumination optical system 40 is perpendicular to the surface of the object 4 or the object plane 3. With this optical axis, the optical axis of the imaging optics then forms the angle ⁇ .

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Abstract

La présente invention concerne un procédé destiné à produire une image d'une couche d'un objet (4) au moyen d'une optique à champ lointain (5) sur un détecteur à résolution spatiale (6). Selon le procédé, l'objet (4) est éclairé de manière focalisée dans au moins un plan d'objet (3) avec au moins deux motifs d'éclairage binaires (26, 27; 33, 34), et pour chaque motif d'éclairage (26, 27; 33, 34), des images correspondantes sont détectées, les motifs d'éclairage (26, 27; 33, 34) présentant respectivement des zones sombres (27; 34) et des zones claires (26; 33), les zones claires et/ou les zones sombres recouvrant l'objet (4) en intégralité lorsque les motifs d'éclairage (26, 27; 33, 34) se superposent. A partir des images détectées, une image de couche est déterminée, ladite image de couche comprenant des segments partiels qui reproduisent respectivement une zone partielle de l'objet (4) qui se trouve à l'intérieur d'une zone claire de l'un des motifs d'éclairage utilisés de sorte que ses bords sont espacés des bords de la zone claire par au moins une distance minimale prédéterminée, et qui sont déterminés respectivement avec correction au moins partielle de la lumière parasite par utilisation d'au moins deux images qui ont été détectées pour des motifs respectivement différents dans lesquels la zone partielle correspondant au segment partiel respectif se trouve en intégralité à l'intérieur d'une zone claire d'un premier des différents motifs d'éclairage ou en intégralité à l'intérieur d'une zone sombre d'un second des différents motifs d'éclairage.
EP07726163A 2006-07-06 2007-06-27 Procédé et dispositif destinés à produire une image d'une couche mince d'un objet Withdrawn EP2038690A2 (fr)

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DE102006031177A DE102006031177A1 (de) 2006-07-06 2006-07-06 Verfahren und Vorrichtung zur Erzeugung eines Bildes einer dünnen Schicht eines Objekts
PCT/EP2007/005662 WO2008003419A2 (fr) 2006-07-06 2007-06-27 Procédé et dispositif destinés à produire une image d'une couche mince d'un objet

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