EP1958286A1 - Procédé de fabrication de pile à combustible en couches minces - Google Patents
Procédé de fabrication de pile à combustible en couches mincesInfo
- Publication number
- EP1958286A1 EP1958286A1 EP06842052A EP06842052A EP1958286A1 EP 1958286 A1 EP1958286 A1 EP 1958286A1 EP 06842052 A EP06842052 A EP 06842052A EP 06842052 A EP06842052 A EP 06842052A EP 1958286 A1 EP1958286 A1 EP 1958286A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- catalyst
- electrode
- membrane
- carbon
- fuel cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000446 fuel Substances 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000010409 thin film Substances 0.000 title claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 70
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 68
- 239000003054 catalyst Substances 0.000 claims abstract description 58
- 239000012528 membrane Substances 0.000 claims abstract description 58
- 238000000151 deposition Methods 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000004020 conductor Substances 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims abstract description 7
- 210000004027 cell Anatomy 0.000 claims description 45
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 33
- 230000008021 deposition Effects 0.000 claims description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims description 15
- 229910052697 platinum Inorganic materials 0.000 claims description 15
- 125000004429 atom Chemical group 0.000 claims description 14
- 238000007750 plasma spraying Methods 0.000 claims description 12
- 239000010416 ion conductor Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 229920000557 Nafion® Polymers 0.000 claims description 8
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 210000000170 cell membrane Anatomy 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 150000001721 carbon Chemical class 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- CFQCIHVMOFOCGH-UHFFFAOYSA-N platinum ruthenium Chemical compound [Ru].[Pt] CFQCIHVMOFOCGH-UHFFFAOYSA-N 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- ZMCCBULBRKMZTH-UHFFFAOYSA-N molybdenum platinum Chemical compound [Mo].[Pt] ZMCCBULBRKMZTH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- FHMDYDAXYDRBGZ-UHFFFAOYSA-N platinum tin Chemical compound [Sn].[Pt] FHMDYDAXYDRBGZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000002294 plasma sputter deposition Methods 0.000 abstract description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 21
- 239000007789 gas Substances 0.000 description 16
- 239000007921 spray Substances 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 10
- 239000002243 precursor Substances 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 241000143432 Daldinia concentrica Species 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- -1 protons Chemical class 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 229910000929 Ru alloy Inorganic materials 0.000 description 1
- HJQJQFPYPGRXTQ-UHFFFAOYSA-N [Mo].[Ru].[Pt] Chemical compound [Mo].[Ru].[Pt] HJQJQFPYPGRXTQ-UHFFFAOYSA-N 0.000 description 1
- 239000007833 carbon precursor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000717 platinum sputter deposition Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
- H01M4/8825—Methods for deposition of the catalytic active composition
- H01M4/8867—Vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/8605—Porous electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
- H01M4/8803—Supports for the deposition of the catalytic active composition
- H01M4/8807—Gas diffusion layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
- H01M4/8803—Supports for the deposition of the catalytic active composition
- H01M4/881—Electrolytic membranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/96—Carbon-based electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/023—Porous and characterised by the material
- H01M8/0234—Carbonaceous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/1004—Fuel cells with solid electrolytes characterised by membrane-electrode assemblies [MEA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/92—Metals of platinum group
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Definitions
- the present invention relates to a method of manufacturing a thin-film fuel cell.
- Fuel cells are used in many applications, and are especially considered as a possible alternative to the use of fossil fuels. In fact, these cells make it possible to directly convert a source of chemical energy, for example hydrogen or ethanol, into electrical energy.
- a source of chemical energy for example hydrogen or ethanol
- a thin-film fuel cell is composed of an ionic conducting membrane (or electrolyte) on which an anode and a cathode are deposited on both sides.
- the operating principle of such a cell is as follows: fuel is injected at the anode of the cell. This anode will then be the seat of a chemical reaction creating positive ions, including protons, and electrons. The protons are, via the membrane, transferred to the cathode. Electrons, for their part, are transferred via a circuit, their movement thus creating electrical energy. In addition, the cathode is injected with an oxidant that will react with the protons.
- the fuel cell electrodes generally consist of carbon which has been catalyzed, for example with platinum.
- the most common technique for producing a catalyzed electrode is to use an ink or a carbon fabric, which is deposited on a support, and which is then covered with a catalyst ink, for example a platinum ink. .
- the disadvantage of these techniques is that the layers are relatively thick, since the known techniques of deposition of ink do not make it possible to produce layers with a thickness of less than about ten micrometers.
- a fuel cell is made in several distinct stages, since on the one hand, the electrodes are created, and then the assembly is made with an available membrane, for example a Nafion membrane.
- an available membrane for example a Nafion membrane.
- Nafion membranes have the disadvantage of being relatively thick, since they have a thickness greater than 20 microns, and moreover the fuel cells thus created can not operate at temperatures above 90 ° C., in particular because of the low density of the membranes. Indeed, in a low density membrane, the water is not sufficiently confined and is quickly vaporized because of the temperature. Now, water is a essential element for the operation of a fuel cell.
- Nafion membranes can not be used at high temperature because of the instability of this material from 9O 0 C.
- the invention aims to remedy at least one of the disadvantages mentioned above, in particular by providing a manufacturing method such that the battery can be manufactured entirely in a single device or in two similar and connected equipment.
- the invention relates to a method for manufacturing a thin-film fuel cell. This process comprises the following steps:
- a first porous carbon electrode is deposited by plasma spraying in a vacuum chamber on a gas-diffusing substrate, this electrode also comprising a catalyst, the catalyst being used to accelerate at least one of the chemical reactions taking place in the Fuel cell,
- this membrane made of an ionically conductive material is deposited on this first electrode, this membrane preferably having a thickness of less than 20 microns, and
- a second porous carbon electrode is deposited by plasma spraying in a vacuum chamber on the membrane, this second electrode also comprising a catalyst.
- the materials can be of various kinds, for example the membrane can be made of a proton conductive material.
- the plasma used is a low pressure argon plasma, the pressure varying between 1 and 500 milli Torr
- mT excited by radio frequency at a frequency for example equal to 13.56 Megahertz (MHz), and generated by an inductive plasma generator.
- Plasma spraying makes it possible to produce thin layers in which the catalyst has diffused in a carbon layer with a thickness that may be greater than 1 micrometer.
- the membrane in one embodiment, its deposition is carried out, in one embodiment, by a plasma-enhanced chemical vapor deposition method, called PECVD (Plasma Enhanced Chemical Vapor Deposition).
- PECVD Plasma-enhanced chemical vapor deposition method
- the surface on which it is desired to deposit is heated, namely the first electrode deposited
- a plasma is created from gas, said precursor gas, which will react in the gas phase and on the surface to create the deposit.
- the deposition of the membrane is carried out by plasma spraying in a vacuum chamber.
- the membrane comprises a carbon skeleton material with sulfonic terminations, and optionally fluorine.
- the precursor gases used for the chemical deposition are, for example, a carbon precursor gas such as styrene or 1-3 butadiene, and a sulphonic precursor gas, such as triflic acid.
- Such a membrane has the advantage of being relatively dense, and thus allow operation of the fuel cell at temperatures up to 150 0 C without there being degradation of the membrane.
- the method of production by PECVD makes it possible to produce a membrane comprising a large number of sulphonic groups. This facilitates the transfer of protons from one electrode to another, since during their passage through the membrane, the protons are routed passing from one sulfonic group to another.
- the carbon-skeleton material membranes with sulfonic terminations and fluorine have a lower methanol permeability than conventional membranes, thus reducing the methanol crossover phenomenon, that is to say the passage of methanol through the membrane to the cathode, resulting in oxidation of methanol. This allows, in the case of methanol cells, to obtain a better yield.
- the plasma sputtering used, for example, for depositing the first and second electrodes makes it possible to produce carbon layers with different morphologies, that is to say layers in which the size and the shape carbon grains differ.
- the carbon grains may be spherical or "bean" shaped. Due to these different morphologies, more or less porous carbon layers can be produced in such a way that, in a realization, the porosity of the deposited carbon is between 20% and 50%.
- the method defined above can be used for producing electrodes for any type of fuel cell, such as PEMFC type hydrogen fuel cells.
- the various components, especially the catalyst, can be of various kinds.
- the sprayed catalyst is included in the group consisting of:
- platinoid alloys such as platinum-ruthenium, platinum-molybdenum, platinum-tin,
- non-platinoid metals such as iron, nickel, cobalt, and
- the process as defined above makes it possible to produce a fuel cell in the order that one wishes, since the first step of depositing an electrode is suitable both for depositing an anode and for a cathode .
- the first deposited electrode constitutes the anode of the fuel cell, and in another embodiment, the first deposited electrode constitutes the cathode.
- This manufacturing method also has the advantage of allowing the integral realization of a battery with a single equipment or two similar equipment, possibly connected. So, in one realization, the three stages of deposit, namely the deposition of the two electrodes and the deposition of the membrane, are made in a single vacuum chamber. This configuration has many advantages since it makes it possible to produce fuel cells with a manufacturing time and a relatively low cost.
- the electrodes are deposited by plasma spraying, and the plasma-assisted chemical vapor deposition membrane, it may sometimes be necessary to take certain material precautions in order not to degrade the quality of the fuel cells produced.
- One solution to avoid these problems of interference between the different materials consists, in one embodiment, of performing the electrode deposition steps in a first vacuum chamber, and the step of depositing the membrane in a second vacuum chamber. which is connected to the first by a vacuum lock.
- the gas diffusion substrate serving as a support for the stack is preferably arranged on a moving substrate holder, making it possible to move the stack being produced from one enclosure to the other.
- the step of depositing the first and / or second porous carbon electrode comprises the steps of depositing alternatively and / or simultaneously porous carbon and a catalyst on the support, the thickness of each layer of porous carbon being selected such that the catalyst deposited on this carbon layer is diffused through substantially all of this layer, thereby creating a catalyzed carbon layer, and the total thickness of catalyzed carbon in the electrode being less than 2 micrometers, and preferably at most equal to 1 micrometer.
- the method may be such that there is no simultaneous deposition step.
- the carbon layers consist of a non-compact stack of carbon balls connected together, so as to allow the free flow of electrons.
- the chemical reaction taking place at the anode is an ion generating reaction.
- these ions must be routed to the anode, which is usually achieved through the membrane (electrolyte) which is made of an ion-conductive material.
- the step of depositing the first and / or second carbon electrode further comprises the step of depositing, after at least one catalyst deposit, an ionic conductor such as "Nafion" .
- an ionic conductor such as "Nafion”
- the deposition of the ionic conductor is carried out by plasma spraying. This spraying is preferably carried out in the same vacuum chamber as the carbon and catalyst sprays.
- the active amount of catalyst varies as a function of the delivered current density, and therefore also as a function of the operating power of the cell. This variation is due in particular to the competition between phenomena supply of reagents and ionic resistance of an electrode. Depending on the desired mode of operation, it will be useful to have more or less amounts of catalyst depending on the distance to the membrane.
- the ratio between the number of catalyst atoms and the number of carbon atoms present in the successive layers of catalyzed carbon varies according to a determined profile.
- a profile corresponding to the production of a fuel cell delivering a relatively high current for example a current greater than 800 mA / cm 2 , that is to say a battery operating at high power. , a power being considered high from 500 mW / cm 2 .
- a catalyst quantity such that the ratio of the number of catalyst atoms to the number of carbon atoms present in the catalyzed carbon layer thus created is greater than 20%, to a thickness of less than 100 nm, resulting in a total amount of platinum less than or equal to 0.1 mg / cm 2 .
- a quantity of catalyst such that the ratio between the number of catalyst atoms and the number of carbon atoms present in the catalyzed carbon layer thus created is less than 20%.
- the quantities of catalyst deposited are such that the ratio of the number of catalyst atoms to the number of carbon atoms present in the catalyzed carbon layer closest to the membrane of the fuel cell is more than 10 times higher than the ratio of the number of catalyst atoms to the number of carbon atoms present in the layer of carbon. catalyzed carbon furthest from this membrane.
- the process is such that porous carbon layers having all the same thickness are deposited.
- the invention also relates to a thin-film fuel cell produced according to the manufacturing method defined above.
- FIG. 1 shows two vacuum chambers for producing a fuel cell according to a process according to the invention
- FIG. 2 shows the principle of plasma spraying used in a process according to the invention
- FIG. 3 shows the structure of a carbon layer on which a catalyst and an ionic conductor have been sprayed
- FIGS. 4a and 4b show two catalyst distribution profiles in an electrode for, respectively, fuel cell operating at high and low power
- FIG. 5 is a timing chart showing alternating sprays of carbon and platinum in a process according to the invention.
- Figure 1 shows a sectional view of two vacuum housings 10 and 11, connected by a lock 12, also under vacuum. These two enclosures allow the deposition of the different elements of a fuel cell on a gas diffuser substrate.
- the substrate is installed on a substrate holder 14 for rotating this substrate around the normal to its main face, so as to deposit the different substances uniformly.
- the substrate holder is also movable so that the substrate can be moved from a position 13a to a position 13b, to allow the realization of the various manufacturing steps.
- Targets In the chamber 10 are three targets, of which only two are shown in Figure 1 (17 and 18), respectively porous carbon targets, catalyst, such as platinum, and ionic conductor, such as Nafion. These targets are biased respectively by variable voltages V17 and V18.
- a first target is positioned opposite the support, and the other two are positioned on either side of this first target, so that the normals to their main faces each form an angle less than 45 ° with the normal to the support.
- a first step which consists in depositing a first electrode on the gas diffusion substrate, the substrate is in position 13a, and the carbon, platinum and Nafion are successively pulverized using a low-pressure plasma sputtering in which ions Argon 15 are excited by a radiofrequency antenna 16.
- FIG. 2 The principle of such a sputtering is illustrated in FIG. 2.
- Argon ions 30, originating from an argon plasma are sent onto a target 32 of material to be sprayed on a support 34.
- the plasma state is obtained by a high power electric discharge through the argon gas.
- the target is polarized by a variable voltage V32. Because of the impact of these ions on the target, the atoms of the target are released through a series of collisions. These atoms are then projected (36) on the support 34.
- the argon ions are permanently bombarded on the three targets.
- the three targets are then fed successively so as to deposit on the substrate a porous carbon layer, then the catalyst, and finally the ionic conductor.
- These three successive sprays make it possible to build on the support a catalyzed carbon layer also containing ionic conductor atoms.
- a catalyzed carbon layer also containing ionic conductor atoms.
- FIG. 3 Such a layer is shown in FIG. 3.
- porous carbon balls generally between 30 and 100 nm in diameter, are deposited on a support 42.
- platinum 44 of diameter generally less than 3 nm, are diffused in the carbon layer and are thus distributed on the carbon balls 40 previously deposited.
- ionic conductor (46) such as Nafion
- each porous carbon layer is chosen so that it allows diffusion of the subsequently deposited catalyst substantially throughout the thickness of this carbon layer.
- the thickness of each carbon layer is preferably substantially less than 1 micrometer.
- the various carbon layers preferably have the same thickness. However, it is possible to make carbon layers of different thicknesses.
- bias voltages Vl7 and V18 ( Figure 1) being variable, it is possible to control the number of atoms projected at each spray. This makes it possible to construct electrodes having catalyst distribution profiles in the thickness which is adapted to the desired use of the fuel cell.
- FIG. 4a shows an electrode profile particularly adapted to high power operation, that is to say for powers greater than 500 mW / cm 2 .
- the ratio of the number of platinum atoms to the number of carbon atoms is 50%, and the amount of platinum is 10 grams per cubic centimeter. This quantity remains constant over a thickness of about 0.33 micrometers, until it reaches the cutoff point 52. From there, the quantity of platinum decreases very rapidly, reaching a value that is almost zero for a thickness of electrode equal to 1 micrometer (54).
- FIG. 4b shows an electrode profile particularly adapted to low power operation, that is to say for powers of less than 500 mW / cm 2 .
- the ratio of the number of platinum atoms to the number of carbon atoms is 20%, and the amount of platinum is 6 grams per cubic centimeter. This quantity gradually decreases to reach (58) a value of 0.6 grams per cubic centimeter, for a thickness less than 1 micrometer, then it remains constant until a thickness of 2 micrometers maximum.
- One way to achieve these profiles is to spray the same amount of carbon with each spray, and to vary the amount of platinum sprayed.
- Such a sequencing is illustrated by the timing diagram of FIG. On this chronogram, the x-axis represents time, and the y-axis represents the number of atomized atoms.
- the number of platinum atoms varies.
- the number of platinum atoms sprayed is equal for each occurrence.
- this number decreases sharply during occurrences 62d and 62e.
- This chronogram shows only the first sprays of the deposit. Subsequently, for example, carbon sprays remain the same, and platinum sprays continue to decline.
- the total number of occurrences is generally between 2 and 20, and the time required to deposit the electrode is less than 10 minutes. In one example, all the occurrences have the same duration, equal to 30 seconds, and 10 phases of carbon deposits and 10 phases of catalyst deposition are carried out.
- An electrode deposited following such a chronogram has a profile similar to that of Figure 4a. Indeed, the first 3 platinum sprays (62a to 62c) correspond to the portion of the profile situated between the points 50 and 52 (FIG. 4a), while the sprays 62d and following correspond to the portion located between the points 52 and 54 ( Figure 4a).
- one (or more) platinum sputtering may be followed by an ionic conductive spray.
- the airlock 12 is opened so as to allow the displacement of the carrier substrate of this first electrode to the position 13b.
- the chamber 11 is then the seat of the deposition of a membrane by plasma-assisted chemical vapor deposition.
- a membrane comprising a carbon-fluorinated backbone and sulfonic terminations.
- precursor gases (19) are introduced into the chamber: styrene, which is a carbonaceous precursor gas, and triflic acid, containing the sulphonic precursor and a fluorinated group. These gases are then excited via a source 21 fed by a low-frequency generator 20 until it is in a plasma phase. In this phase, the precursor gases react in the gas volume to form the ultimate precursors that adsorb on the surface and react with each other to form the membrane.
- the substrate now carrying a first electrode and the membrane, is moved back to its first position 13a.
- the next step is then to deposit the second electrode, using a method of the same type as that used for the deposition of the first electrode.
- the two electrodes may be totally different from one another, or symmetrical with respect to the membrane.
- the deposition chronogram of the second electrode corresponds to the deposition chronogram of the first in which the successive deposits of catalyst are made in the reverse order, from the chronological point of view.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Inert Electrodes (AREA)
- Fuel Cell (AREA)
- Catalysts (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0553669A FR2894077A1 (fr) | 2005-11-30 | 2005-11-30 | Procede de fabrication de pile a combustible en couches minces |
PCT/FR2006/051241 WO2007063245A1 (fr) | 2005-11-30 | 2006-11-28 | Procédé de fabrication de pile à combustible en couches minces |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1958286A1 true EP1958286A1 (fr) | 2008-08-20 |
Family
ID=36954230
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06842052A Withdrawn EP1958286A1 (fr) | 2005-11-30 | 2006-11-28 | Procédé de fabrication de pile à combustible en couches minces |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100119725A1 (ja) |
EP (1) | EP1958286A1 (ja) |
JP (1) | JP2009517825A (ja) |
KR (1) | KR20090012304A (ja) |
CN (1) | CN101401244A (ja) |
FR (1) | FR2894077A1 (ja) |
WO (1) | WO2007063245A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2925767B1 (fr) * | 2007-12-20 | 2010-05-28 | Centre Nat Rech Scient | Procede de fabrication d'une pile a combustible en couches minces a oxyde solide dite sofc. |
FR2928227B1 (fr) * | 2008-02-29 | 2010-04-02 | Commissariat Energie Atomique | Procede de fabrication d'une membrane polymerique a conduction ionique pour pile a combustible. |
JP5995468B2 (ja) * | 2012-03-14 | 2016-09-21 | 東京エレクトロン株式会社 | 膜電極接合体の製造方法 |
EP2946430A1 (en) | 2013-01-18 | 2015-11-25 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Proton conductive membrane deposited by hot wire cvd technique |
FR3011549B1 (fr) * | 2013-10-03 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de preparation par polymerisation plasma d'un materiau specifique |
CN105749926A (zh) * | 2016-02-03 | 2016-07-13 | 厦门大学 | 一种非贵金属电解析氢催化剂的制备方法 |
CN107086316A (zh) * | 2017-05-10 | 2017-08-22 | 上海亮仓能源科技有限公司 | 一种车载燃料电池用叠层结构膜电极及其制备方法 |
CN108203814A (zh) * | 2018-03-14 | 2018-06-26 | 中国科学技术大学 | 双腔室无污染化学气相沉积二维材料异质结的装置 |
WO2020027728A1 (en) * | 2018-07-30 | 2020-02-06 | National University Of Singapore | Proton conductive two-dimensional amorphous carbon film for gas membrane and fuel cell applications |
CN115036519A (zh) * | 2022-07-04 | 2022-09-09 | 上海电气集团股份有限公司 | 氟掺杂多孔碳、微孔层、气体扩散层及制备方法、应用 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6153327A (en) * | 1995-03-03 | 2000-11-28 | Southwest Research Institute | Amorphous carbon comprising a catalyst |
US5750013A (en) * | 1996-08-07 | 1998-05-12 | Industrial Technology Research Institute | Electrode membrane assembly and method for manufacturing the same |
US5921461A (en) * | 1997-06-11 | 1999-07-13 | Raytheon Company | Vacuum package having vacuum-deposited local getter and its preparation |
US6828054B2 (en) * | 2000-02-11 | 2004-12-07 | The Texas A&M University System | Electronically conducting fuel cell component with directly bonded layers and method for making the same |
EP1254711A1 (de) * | 2001-05-05 | 2002-11-06 | OMG AG & Co. KG | Edelmetallhaltiger Trägerkatalysator und Verfahren zu seiner Herstellung |
KR100448168B1 (ko) * | 2001-12-27 | 2004-09-10 | 현대자동차주식회사 | 연료전지용 막-전극-가스켓 접합체의 제조방법 |
US20040175498A1 (en) * | 2003-03-06 | 2004-09-09 | Lotfi Hedhli | Method for preparing membrane electrode assemblies |
US7838165B2 (en) * | 2004-07-02 | 2010-11-23 | Kabushiki Kaisha Toshiba | Carbon fiber synthesizing catalyst and method of making thereof |
-
2005
- 2005-11-30 FR FR0553669A patent/FR2894077A1/fr not_active Withdrawn
-
2006
- 2006-11-28 CN CNA2006800498792A patent/CN101401244A/zh active Pending
- 2006-11-28 JP JP2008542808A patent/JP2009517825A/ja not_active Withdrawn
- 2006-11-28 WO PCT/FR2006/051241 patent/WO2007063245A1/fr active Application Filing
- 2006-11-28 US US12/085,875 patent/US20100119725A1/en not_active Abandoned
- 2006-11-28 KR KR1020087015861A patent/KR20090012304A/ko not_active Application Discontinuation
- 2006-11-28 EP EP06842052A patent/EP1958286A1/fr not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
See references of WO2007063245A1 * |
Also Published As
Publication number | Publication date |
---|---|
KR20090012304A (ko) | 2009-02-03 |
WO2007063245A1 (fr) | 2007-06-07 |
JP2009517825A (ja) | 2009-04-30 |
FR2894077A1 (fr) | 2007-06-01 |
US20100119725A1 (en) | 2010-05-13 |
CN101401244A (zh) | 2009-04-01 |
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