EP1949465A1 - Actionneur piezo-electrique et procede pour le fabriquer - Google Patents

Actionneur piezo-electrique et procede pour le fabriquer

Info

Publication number
EP1949465A1
EP1949465A1 EP06807430A EP06807430A EP1949465A1 EP 1949465 A1 EP1949465 A1 EP 1949465A1 EP 06807430 A EP06807430 A EP 06807430A EP 06807430 A EP06807430 A EP 06807430A EP 1949465 A1 EP1949465 A1 EP 1949465A1
Authority
EP
European Patent Office
Prior art keywords
stack
recess
layers
region
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06807430A
Other languages
German (de)
English (en)
Inventor
Martin Schröder
Manfred Weigl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Automotive GmbH
Original Assignee
Continental Automotive GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Continental Automotive GmbH filed Critical Continental Automotive GmbH
Publication of EP1949465A1 publication Critical patent/EP1949465A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49163—Manufacturing circuit on or in base with sintering of base

Definitions

  • the present invention relates to a piezoelectric actuator, preferably in monolithic multilayer construction, and a method for producing the same.
  • Piezo actuators usually consist of a plurality of piezo elements arranged in a stack. Each of these elements in turn consists of a piezoelectric ceramic layer that is both ⁇ sides with metallic electrodes. If a voltage is applied to these electrodes, then the piezo ⁇ ceramic layer reacts with a grid consumption, which leads along a major axis to a usable length expansion. Since this in turn is less than 2 parts per thousand of the layer thickness along the main axis, a correspondingly higher layer thickness of active piezoceramic must be provided to achieve a desired absolute length expansion. However, with increasing layer thickness of the piezoelectric ceramic layer of a single piezoelectric element and the surfaces to attrac ⁇ increases the piezoelectric element required voltage.
  • the thicknesses of piezo-individual elements are usually between 20 and 200 ⁇ m.
  • a piezoelectric actuator in a multi-layer design must therefore have a corresponding number of individual elements or layers for a desired linear expansion.
  • piezoelectric actuators in multilayer construction therefore generally consist of a large number of individual layers.
  • piezoelectric ceramic layers are alternately arranged with electrode material to form a stack and laminated ge ⁇ jointly to form a monolithic composite and sintered.
  • Such a method is known, for example, from European Patent EP 0 894 340 B1.
  • piezoceramic green films are printed with an electrode material be ⁇ . The printing is done according to a pattern which includes printed areas and unprinted free areas.
  • the electrode layers are stacked alternately such that over each unprinted area in a first electrode layer an area printed with electrode material is arranged in the next adjacent second electrode layer. Due to the alternating arrangement, every second electrode layer is congruent with respect to its electrode pattern. In the intervening likewise to each other congruent electrode layers, the unprinted free remaining area are diagonally offset.
  • the Applicant further measures are known in order to reduce mechanical stresses in the piezoelectric actuator, which, however, not but prevent cracking in general, single ⁇ Lich a formation of cracks in the longitudinal direction of the piezoelectric actuator, thereby maintaining the function of the piezoelectric actuator far ⁇ continuously remains , Nevertheless, these measures continue to pose the risk of uncontrolled crack propagation due to residual transverse cracks, which may reduce or even destroy the performance of the piezoelectric actuator.
  • the present invention is thus based on the object of specifying a piezoactuator and a production method for the same, wherein poling cracks are reduced or minimized despite inactive regions in the electrode layers.
  • ⁇ is the fact that the piezoelectric actuator of several fauxhegbarer to a stack of piezo-electric material layers is produced, said electrode layers are applied, each egg ner recess to the plurality of piezoelectric material layers such that in the stacking egg ⁇ ne alternating sequence of piezoelectric material layers and electrode layers results, wherein electrode layers are provided with a recess in a first recess region and electrode layers with a recess in a second, different from the first recess region recess region in the stack alternately. Furthermore, a relief material is respectively provided in the first and second recesses, which after sintering of the stack has electrically insulating properties that do not stick together to the individual material layers.
  • the present invention over the known approaches has the advantage that the proposed free-lying areas or recesses of the electrode layers are not completely filled with Kera ⁇ mikmaterial in a sintering of the stack, but due to the non-adherent properties of the relief material Mecha ⁇ nische separation point or create a relief recess between two successive ceramic layers in the region of the recesses.
  • the separating points are formed as voids between adjacent ceramic layers.
  • the present invention has the advantage that in the areas of the recesses due to the electrically insulating properties of the relieving material electrically isolated areas arise, the racmetallmaschine the piezoelectric actuator for an electrical on ⁇ control every other electrode layer to simple and inexpensive Guarantee the way.
  • no new technology must be introduced, ie it can be the usual and previously known manufacturing equipment and manufacturing processes with minor modifications, ie only the application of the relief material in the recesses used.
  • harmful cracks in the ceramic layers can be prevented or minimized.
  • a noble metal-containing metallization paste having a low diffusion capability of the electrically conductive particles is printed on each of the piezoelectric material layers as electrode layers during sintering of the stack.
  • a silver-palladium-containing paste verwen ⁇ det wherein the palladium content a retention of the silver in the paste and the silver content ensure good electrical Leitfä ⁇ ability of the paste.
  • a noble metal-containing paste is printed with a very high diffusivity of the electrically conductive particles during sintering of the stack as a relief material on ⁇ into the recesses.
  • a silver-containing paste is comparable turns, wherein the silver during sintering in the ⁇ be adjacent electrode regions diffuses.
  • each second electrode layer in the stack is provided with a recess in a first corner region and each electrode layer provided therebetween has a recess in a second corner region opposite the first corner region. det.
  • the piezoelectric actuator is formed with at least two longitudinally extending bores, wherein the first recess region in the region of a bore and the second recess region in the region of the other bore in the stack are provided in alternating sequence.
  • the single ⁇ NEN electrode layers can be coupled via the bores with an elec- contacting step such that, in turn, per well, only every second electrode layer is contacted elekt ⁇ driven.
  • the two holes are typically, but not necessarily a similarly relatively large ⁇ SEN diameter in the mm range, since because of too large Stei- stiffness not simply a massive wire can be soldered, but rather a lot of fine wires wire comprising (eg a bottle brush ) can be used.
  • Figure 1 is an exploded view of several attached to a Sta ⁇ pel sixteenhegbarer ceramic layers with electrode layers listed a preferred embodiment of the present invention according to;
  • Figure 2 shows the exploded view of Figure 1 with the initial discharge savings deposited material in accordance with a preferred embodiment of the constricting vorlie ⁇ invention
  • 3 shows a perspective view of a piezoelectric actuator in assembled monolithic multilayer construction according to a preferred embodiment of the present invention.
  • the piezoelectric actuator according to the invention and its construction method are generally independent of the materials used.
  • a piezoelectric material layers may beispielswei ⁇ se any PZT (lead zirconate titanate) ceramics.
  • PZT lead zirconate titanate
  • genann ⁇ te green sheets are drawn or molded from this material having a thickness of microns, for example 20 to 200 after drying.
  • Electrode layers for example printed with a suitable silver-palladium paste.
  • the paste contains preference ⁇ , the particles of a silver / palladium alloy in a binder with a total printable consistency.
  • This screen printing paste has, for example, in addition to organic excipients fine-grained silver powder and palladium powder.
  • the silver content in the paste ensures the good electrical conductivity of the electrode layer after sintering, whereas the palladium content ensures that, despite the high diffusibility of the silver at the temperatures occurring during sintering, it remains in the printed electrode layer.
  • FIG 1 illustrates an exploded view of four piezo-electric ceramic layers 2 ⁇ that lektroden slaughter with an E in each case 3, for example from the above-described ⁇ NEN silver-palladium paste is printed on one side.
  • E in each case 3
  • FIG. 1 illustrates only four ceramic layers. Although only four ceramic layers are illustrated by way of example in Figures 1 and 2, it is open ⁇ clear for a skilled person that any number of piezoelectric ceramic layers can be bonded in a stack with each other in an analogous manner.
  • the ceramic layers 2 are printed according to a pattern in such a way that a printed electrode region 3 and an unprinted, free recess region 4 or 4 ⁇ are provided on each ceramic layer.
  • a printed electrode region 3 and an unprinted, free recess region 4 or 4 ⁇ are provided on each ceramic layer.
  • one side palladium paste silver-3 printed as much of the associated ceramic layers 2 for the electrode layers ⁇ that after sintering a 2-3 micron thick contiguous Elect ⁇ clear layer 3 is obtained.
  • the printed with electrode material piezoceramic layers 2 are optionally dried and then stacked in ge ⁇ suitable manner one above the other, wherein a ⁇ al ternierende arrangement of piezoelectric ceramic layers 2 and electronics clear layers 3 is obtained.
  • each recess 4 and 4 ⁇ in a first electrode layer Arranged at the electrode layers 3 is also alternately stacked so that on each recess 4 and 4 ⁇ in a first electrode layer, the clear areas of the unprinted elec- 4 or 4 ⁇ corresponding to a printed with electrode material surface in the next adjacent Elect ⁇ clear layer is, as can be seen in Figure 1.
  • the recesses 4 and 4 ⁇ are provided alternately in diagonally opposite corner regions.
  • the recesses 4 and 4 ⁇ at any other point in alternating render sequence on the ceramic layers can be provided.
  • every second layer is congruent with respect to its electrode pattern with pre ⁇ provided recesses 4.
  • the recesses 4 ⁇ with respect to the recesses 4 are arranged offset.
  • each layer consists of an electrode portion 3 printed with a silver-palladium paste and a recess portion 5 printed with a silver paste 5.
  • sintering is carried out for example, under light pressure in an oxidizing atmosphere for a predetermined time and at a predetermined sintering temperature which may be, for example, to more than 1000 0 C.
  • Currency ⁇ rend sintering reaches the silver in the silver-palladium paste by diffusion due to the presence of the palladium a uniform concentration distribution in the palladium.
  • the silver remains in the Elektrodenbe- areas 3, which have a palladium content.
  • the silver diffuses into the Silberpas ⁇ te ⁇ 5 in the recesses 4 and 4 due to its high diffusivity almost completely out of the recess ⁇ areas 4 and 4 ⁇ and into the adjacent silver-palladium electrode regions 3 into it. Due to the diffusion of silver from the recessed portions 4 and 4 ⁇ into the adjacent electrode layers 3 are relief recesses 6 and 6 ⁇ in the areas of the recesses 4 and formed ⁇ 4, as is schematically indicated in Figure 3 by the dashed lines.
  • the recesses 4 and 4 ⁇ comprising recess portions have due to the diffusion of the electrically conductive silver particles on an electrically insulating or electrically non-conductive property, which is required for a connecting ⁇ de external contact only every second layer. This allows the time-tested Kontak- ttechnikstechnologie of the piezoelectric actuator to be retained unchanged upright ⁇ .
  • FIG. 3 illustrates a perspective view of a finished piezoactuator 1, which is contacted with an outer metallization 8 in strip form for electrical contacting at opposite corners. Due to the Cell layer to single layer alternating electrode structure reaches such an external contact 8 only each second electrode layer, while the attached to the termelie ⁇ ing edge outer contact 8 contacts the respective dazwi lying electrode layers. Thus, an electrically parallel interconnection of the piezoelectric material layers lying between the electrode layers is possible, which enables optimum operation of the piezoelectric actuator 1.
  • the present invention provides a piezoactuator and a method for producing the same, wherein due to the separation points or relief recesses achieved during the sintering in the areas of the recesses 4 and 4, ⁇ electrically non-conductive regions as well as mechanically relieved areas for preventing mechanical stresses become.
  • the method according to the invention ensures that no new technology has to be introduced and no new production facilities are required.
  • no new chemical compounds or elements are added to the chemical system of the piezoactuator, which could lead to unknown effects.
  • silver compared to palladium inexpensive so that additional material costs are unommet ⁇ Lich.
  • the additional screen printing process for printing the silver paste is compared to additional manufacturing ⁇ steps in previous measures to avoid cracks easy and inexpensive to accomplish.
  • the silver-palladium paste instead of the silver-palladium paste, another precious metal-containing metallizing paste with a low diffusivity of the electrically conductive particles are used in a sintering of the stack.
  • the other relief material with a very high Dif ⁇ fusion capability of the electroconductive particles during sintering of the stack can be used.
  • any relief material is suitable which ensures an electrically non-conductive region in the recess regions and adhesion between adjacent layers for
  • the recessed portions can be used instead of diagonally opposite corner regions within the layer surface can be provided, for example such that hole ⁇ holes in the longitudinal direction of the piezoelectric actuator in each case through each recess pattern extend.
  • a contact from the outside of the piezoelectric actuator to the inside can be advantageously laid.
  • geeig ⁇ items contacting means in the at least two bores are made in such a way that only every second turn E- lektroden slaughter electrically contacts and the intermediate layers due to the intended Aussparungsbe- not rich are contacted.
  • adjacent layers do not adhere to each other in these recessed areas because of the relief recesses.

Abstract

La présente invention concerne un actionneur piézo-électrique et un procédé pour le fabriquer. Ce procédé consiste à disposer de plusieurs couches de matériau piézo-électrique (2) qui peuvent être assemblées pour former un empilement, à appliquer des couches d'électrode (3) présentant respectivement un évidement (4, 4') sur les couches de matériau piézo-électrique, de manière à obtenir dans l'empilement une séquence alternée de couches de matériau piézo-électrique et de couches d'électrode, les couches d'électrode présentant un évidement (4) dans une première région d'évidement et un évidement (4') dans une seconde région d'évidement, différente de la première région d'évidement, de façon alternée dans l'empilement, puis à placer dans le premier évidement et dans le second évidement un matériau de décharge (5) qui présente des caractéristiques assurant une isolation électrique et ne faisant pas adhérer les couches de matériau individuelles entre elles après frittage de l'empilement.
EP06807430A 2005-10-26 2006-10-20 Actionneur piezo-electrique et procede pour le fabriquer Withdrawn EP1949465A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005051289A DE102005051289B3 (de) 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben
PCT/EP2006/067612 WO2007048756A1 (fr) 2005-10-26 2006-10-20 Actionneur piezo-electrique et procede pour le fabriquer

Publications (1)

Publication Number Publication Date
EP1949465A1 true EP1949465A1 (fr) 2008-07-30

Family

ID=37763816

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06807430A Withdrawn EP1949465A1 (fr) 2005-10-26 2006-10-20 Actionneur piezo-electrique et procede pour le fabriquer

Country Status (5)

Country Link
US (2) US20080315717A1 (fr)
EP (1) EP1949465A1 (fr)
CN (1) CN101356661B (fr)
DE (1) DE102005051289B3 (fr)
WO (1) WO2007048756A1 (fr)

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Publication number Priority date Publication date Assignee Title
JP5031737B2 (ja) * 2006-04-24 2012-09-26 日本碍子株式会社 圧電／電歪膜型素子
JP5050164B2 (ja) * 2006-10-20 2012-10-17 京セラ株式会社 圧電アクチュエータユニット及びその製造方法
WO2008053569A1 (fr) * 2006-10-31 2008-05-08 Kyocera Corporation Élément piézoelectrique multicouches et appareil d'injection employant celui-ci
DE102007037500A1 (de) * 2007-05-11 2008-11-13 Epcos Ag Piezoelektrisches Vielschichtbauelement
JP5597583B2 (ja) * 2011-03-28 2014-10-01 太陽誘電株式会社 タッチパネル装置及び電子機器
KR20150061411A (ko) * 2013-11-27 2015-06-04 삼성전기주식회사 압전 액추에이터 모듈 및 이를 포함하는 mems 센서
CN117412660B (zh) * 2023-12-14 2024-04-16 乌镇实验室 一种共烧型多层压电致动器

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EP1930962A1 (fr) * 2005-08-29 2008-06-11 Kyocera Corporation Élément piézoélectrique stratifié et dispositif d'injection l'utilisant

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JPH04352481A (ja) * 1991-05-30 1992-12-07 Nec Corp 電歪効果素子の製造方法
EP1930962A1 (fr) * 2005-08-29 2008-06-11 Kyocera Corporation Élément piézoélectrique stratifié et dispositif d'injection l'utilisant

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See also references of WO2007048756A1 *

Also Published As

Publication number Publication date
US20110062830A1 (en) 2011-03-17
CN101356661B (zh) 2011-11-16
WO2007048756A1 (fr) 2007-05-03
US8132304B2 (en) 2012-03-13
DE102005051289B3 (de) 2007-05-16
US20080315717A1 (en) 2008-12-25
CN101356661A (zh) 2009-01-28

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