EP1909977B1 - Procede et outil pour nettoyer des cavites - Google Patents
Procede et outil pour nettoyer des cavites Download PDFInfo
- Publication number
- EP1909977B1 EP1909977B1 EP06754085.6A EP06754085A EP1909977B1 EP 1909977 B1 EP1909977 B1 EP 1909977B1 EP 06754085 A EP06754085 A EP 06754085A EP 1909977 B1 EP1909977 B1 EP 1909977B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- cavity
- carbon dioxide
- cleaning
- fluid
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
- B23Q11/005—Devices for removing chips by blowing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
- B23Q11/0075—Devices for removing chips for removing chips or coolant from the workpiece after machining
Definitions
- the present invention relates to a method for cleaning cavities in workpieces and a cleaning device therefor.
- Such methods and devices are needed in particular for cleaning cavities such as holes, blind holes and the like of particulate and / or film-like impurities. They are used in particular in the field of mechanical engineering of the automotive industry.
- compressed air lances can be used to blow compressed air into the bore.
- chips and oils are then discharged from the bore.
- This cleaning method can not be used to remove fine oil layers or particles with a diameter ⁇ 1 micron with good success.
- the bore can be rinsed with a liquid under high pressure.
- Suitable media include in particular aqueous or hydrocarbon-based media. If the cavities are flushed out, drying is required.
- secondary waste such as sludge with detergent residues or polluted wastewater, which must be disposed of or worked up. Also, this procedure requires special measures for compliance with the maximum permitted concentrations at the workplace (MAK values).
- the cleaning effect can be extended by immersing the component in a cleaning bath and the cleaning effect is supported by the use of ultrasound.
- the cleaning effect of ultrasound in bores decreases considerably, since the ultrasound energy, depending on the component material, only reaches the bore interior to a limited extent. In such a bath solution dissolved dirt in the well are not sufficiently removed. As with liquid rinsing, drying will continue to be required.
- Another prior art process also uses CO 2 snow. With the help of a two-fluid nozzle, liquid CO 2 is released and the resulting ice crystals are accelerated to almost the speed of sound via another gas, such as nitrogen or air.
- another gas such as nitrogen or air.
- the DE 102 18 519 C1 describes a method of cleaning articles in a pressure vessel by means of a compressed gas which is compressed and decompressed one or more times in succession. As a result, particulate and other contaminants can be removed from wells, blind holes or open cavities in articles.
- the US 2003/0175626 A1 describes a method and apparatus for removing contaminants on a substrate.
- the substrate is sprayed with a supercritical fluid, such as supercritical CO 2 .
- the impurities are then dissolved in the supercritical fluid and removed from the supercritical fluid after the purification process by cooling the supercritical fluid in its liquid state.
- the US 2004/0112406 A1 describes a method and apparatus for removing solid and liquid residues from electronic components, such as semiconductor wafers, using also liquid or supercritical carbon dioxide.
- the DE 103 18 238 A1 describes a device for cleaning the inner surfaces of threaded holes, wherein a Blaswolf is introduced with a longitudinal section in the thread and then a cleaning medium is introduced under pressure into the Blashus. The cleaning medium then emerges with swirl from the longitudinal opening and removes adhering impurities or particles in the thread.
- the procedure for cleaning cavities in workpieces is a multi-step procedure.
- supercritical carbon dioxide is introduced into the cavity and the cavity is purged with this supercritical carbon dioxide.
- This step in particular, a degreasing of the cavity.
- Crucial here is that between the element for introducing the supercritical carbon dioxide in the cavity (the cleaning device) and the workpiece around the opening of the cavity must be a very good seal, since CO 2 only at a pressure> 73.8 bar (critical Pressure) at the same time a temperature> 31 ° C (critical temperature), is supercritical.
- the supercritical CO 2 in the cavity is now released. This can be done for example by opening a valve or opening the seal.
- carbon dioxide snow forms in the cavity from the supercritical CO 2 , which is driven out of the cavity due to the gas expansion.
- the carbon dioxide snow also removes particles on the inner surface of the cavity, which are blown out together with the CO 2 snow.
- the method according to the invention is a special form of purging with supercritical CO 2 in combination with a subsequent generation of CO 2 snow from the introduced liquid or supercritical CO 2 .
- Cavities with a diameter ⁇ 1 mm can also be degreased as well as cleaned of particles by this method. It is possible to clean cavities with almost arbitrarily high aspect ratios, without subsequently reworking, such as drying, is required. Because the CO 2 contained in the cavity finally sublimes completely. Since neither an aqueous nor an organic solvent was introduced into the cavity, then no corrosion takes place in the cavity.
- the solvent and blasting agent CO 2 itself is non-toxic, non-flammable, but very easily available at low cost. Protective measures, such as emission protection or explosion protection are therefore not required. No waste is generated, so no disposal of the solvent is required.
- the blowing out of the carbon dioxide snow is carried out with further carbon dioxide or with another gas, for example nitrogen or compressed air. If further carbon dioxide, in particular liquid carbon dioxide, is introduced into the cavity, further CO 2 snow can be produced at the same time.
- the workpiece can also be heated, for example by an oven, a hot plate, a hot air blower or an infrared radiator.
- a cleaning device is used for the inventive method, which has an outlet for CO 2 , which in turn can be sealed very well on the workpiece.
- the cleaning device has a lance which has at least one such outlet element for the cleaning medium CO 2 at its end.
- the outlet elements can also be arranged laterally on the circumference of the lance, in order to completely clean, for example, when pulling out the lance in the cavity arranged thread.
- the media supply device is specially designed by Namely, it not only has a supply of supercritical CO 2 to the cleaning device and into the cavity. Rather, while the supercritical CO 2 is prepared as in the prior art by compressing and heating taken from a container CO 2 . This area can be bypassed according to the invention via a bypass line, so that the cleaning device can alternatively be supplied with liquid or gaseous CO 2 instead of supercritical CO 2 . This allows blowing out of the CO 2 snow produced from supercritical CO 2 from the cavity following rinsing with the supercritical CO 2 .
- FIG. 1 shows in the sub-images A, B and C, three steps of cleaning a cavity 2a (bore) in a workpiece 1.
- Figure 1A are shown in the cavity 2a impurities 3 particulate type.
- the cavity has an opening 4 on the surface of the workpiece 1.
- a cleaning device 5 is now placed and sealed by means of a peripheral seal 13 on the workpiece 1.
- the cleaning device 5 has a lance 6, which has an opening 12 at its lance end. Via an opening 7, supercritical CO 2 can now be conducted via the line 9 to the opening 12 and introduced from there into the cavity 2 a .
- the cleaning device 5 has a bore 11 which is connected via a valve 10 with an outlet 8.
- the valve 10 is closed, so that the cavity 2a is flooded with supercritical CO 2 fluid.
- the rinsing process is shown with supercritical CO 2 , since the valve 10 is opened, so that under still sufficiently high pressure, the cavity 2 a is rinsed with supercritical CO 2 .
- the supercritical CO 2 passes through the line 9 into the cavity 2a and removes fats and oils there. Particulate deposits can not sufficiently remove the supercritical CO 2 from the cavity due to its low viscosity.
- the supercritical CO 2 flows through the bore 11 and the valve 10 to the outlet 8. There it can be collected again, for example.
- the cleaning device 5 is withdrawn from the bore 2a.
- the supercritical CO 2 is released , so that CO 2 snow is produced which, when flowing out of the cavity 2 a as CO 2 jet 15, entrains the particulate impurities 3 and discharges it out of the cavity 2 a .
- FIG. 2 shows an example of the use of a total of four cleaning devices 5a, 5b, 5c and 5d with respective lances 6a, 6b, 6c and 6d on the openings 4a, 4b, 4c and 4d of the communicating cavities 2a, 2b, 2c, 2d at the Surface of the workpiece 1.
- the same and similar elements as in FIG. 1 same or similar reference numerals used.
- the method according to the invention is therefore also a simultaneous cleaning of several, optionally interconnected cavities, such as a channel system of a valve block, possible.
- the cleaning of the cavities can be done simultaneously or coordinated with each other.
- the use of each adapted cleaning tools that can be controlled simultaneously or sequentially for each hole is possible.
- one of the cleaning devices 5a, 5b, 5c or 5d or several of these cleaning devices can also be replaced by blind plugs without any problem.
- the only relevant factor is that the cavity system can be kept under pressure, which allows it to be flushed with supercritical CO 2 .
- the CO 2 loaded after cleaning with fats or particles can then be easily cleaned by filtration or precipitation and fed back into the circulation of the cleaning system.
- the particulate impurities present in the cleaning medium are separated from the liquid and / or from the gaseous state by means of filters.
- An alternative to the filtration is, for example, the precipitation.
- the cleaning medium is depressurized until it is in gaseous form. This also results in a separation of the particulate or dissolved substances from the converted into the gaseous state cleaning medium.
- FIG. 3 shows a media supply system for a cleaning device 5.
- the cleaning device 5 is in FIG. 3 also shown with a lance 6 and an annular seal 13.
- the media supply system FIG. 3 can also be considered as part of the cleaning device itself.
- a reservoir 20 for CO 2 gas container
- a filter 21 for cleaning the CO 2 for cleaning the CO 2
- a cooling unit 22 for cooling the CO 2 for cooling the CO 2
- a high-pressure pump 23 to increase the pressure of the CO 2 to a supercritical pressure via a line 26
- a heating device 24 heating section
- a shut-off or flow control valve 25 a for raising the temperature of the CO 2 to a supercritical temperature
- a shut-off or flow control valve 25 a the cleaning device 5 and another shut-off or flow control valve 25 b arranged. It is thus possible to introduce supercritical CO 2 into the lance 6 via this line.
- a bypass line is now arranged around the high-pressure pump 23, the heating section 24 and the valve 25a.
- This bypass line 27 in turn has a shut-off or flow control valve 25c.
- valve 25a and the valve 25b are opened at the same time, supercritical CO 2 flows through the lance and through the cavity (not shown here) back to the valve 25b (corresponding to the valve 10 in FIG. 1) for flushing the cavity.
- the media supply device has a bypass line 27, which bypasses the high-pressure pump 23 and the heating section 24 as well as the valve 25a. It is provided with a valve 25c for shut-off or for volume flow control.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Claims (13)
- Procédé pour le nettoyage de cavités (2a) dans des pièces (1), moyennant quoi, dans une première étape, à l'aide d'un dispositif de nettoyage (5), par l'intermédiaire d'une lance (6) du dispositif de nettoyage (5), inséré dans une cavité (2a), du dioxyde de carbone supercritique est introduit dans la cavité et la cavité est rincée avec le dioxyde de carbone supercritique et, après le rinçage de la cavité, dans une étape supplémentaire, le dioxyde de carbone supercritique se trouvant dans la cavité étant détendu de façon à ce que du dioxyde de carbone gazeux et de la neige de dioxyde de carbone se forment dans la cavité et la neige de dioxyde de carbone permettant de détacher des particules sur la surface interne de la cavité, qui sont ensuite expulsées hors de la cavité en même temps que la neige de dioxyde de carbone du fait de la dilatation du gaz, une étanchéification circulaire entre le dispositif de nettoyage (5) et l'ouverture (4) de la cavité (2a) étant assurée au moins pendant la première étape.
- Procédé selon la revendication précédente, caractérisé en ce que, pour le soufflage de la neige de dioxyde de carbone, un fluide supplémentaire est introduit dans la cavité.
- Procédé selon la revendication précédente, caractérisé en ce que le fluide supplémentaire utilisé pour le soufflage de la neige de dioxyde de carbone est un gaz, du dioxyde de carbone gazeux, liquide ou supercritique, de l'azote moléculaire ou de l'air comprimé.
- Procédé selon l'une des deux revendications précédentes, caractérisé en ce que, en tant que fluide supplémentaire, du dioxyde de carbone gazeux, liquide ou supercritique est introduit de façon à ce que de la neige de dioxyde de carbone supplémentaire se forme dans la cavité.
- Procédé selon l'une des revendications précédentes, caractérisé en ce que la pièce à nettoyer est chauffée.
- Procédé selon la revendication précédente, caractérisé en ce que la pièce à nettoyer est chauffée avec un four, une plaque chauffante, une soufflante à air chaud ou un émetteur de rayonnement infrarouge.
- Procédé selon l'une des revendications précédentes, caractérisé en ce que les différentes étapes du procédé sont effectuées une fois, deux fois ou plus dans l'ordre indiqué.
- Dispositif avec
un dispositif pour l'alimentation en fluide d'un dispositif de nettoyage (5) avec du dioxyde de carbone fluide en tant que fluide de nettoyage,
le dispositif d'alimentation en fluide d'un dispositif de nettoyage (5) avec du dioxyde de carbone fluide en tant que fluide de nettoyage, comprend un réservoir (20) pour du dioxyde de carbone, une sortie de fluide pouvant être reliée à un dispositif de nettoyage, qui est relié au réservoir par l'intermédiaire d'une conduite de fluide (26), une unité de refroidissement (22) disposée dans la conduite de fluide après le réservoir, une pompe à haute pression (23) disposée dans la conduite de fluide pour la génération d'une pression de service élevée, un dispositif de chauffage (24) disposé dans la conduite de fluide après l'unité de refroidissement ainsi qu'une première soupape contrôlable (25a) disposée dans la conduite de fluide et une conduite de dérivation de fluide (27) autour de la pompe ou du dispositif de chauffage ou autour de la pompe et du dispositif de chauffage, qui comprend une deuxième soupape contrôlable (25c) et avec un dispositif de nettoyage (5) pour le nettoyage d'une cavité dans des pièces avec une admission et une évacuation pour un fluide de nettoyage, l'admission étant reliée avec le dispositif d'alimentation de fluide et le dispositif de nettoyage comprenant une lance (6), avec au moins un élément d'évacuation conçu de manière à introduire du CO2 supercritique, liquide ou gazeux dans la cavité à nettoyer et à le transformer en neige de CO2 en tant que jet de CO2 et en ce que le dispositif de nettoyage comprend en outre un joint d'étanchéité (13) entourant la lance (6). - Dispositif selon la revendication précédente, caractérisé en ce que la conduite de dérivation est reliée, au niveau d'une des ses extrémités, à un premier point de liaison avant la pompe (23) ou le dispositif de chauffage (24), avec la conduite de fluide (26) et, avec leur autre extrémité, à un deuxième point de liaison derrière la pompe ou le dispositif de chauffage, avec la conduite de fluide.
- Dispositif selon la revendication précédente, caractérisé en ce que la première soupape (5a), est disposée dans la conduite de fluide (26) entre le premier et le deuxième point de liaison.
- Dispositif de nettoyage selon l'une des revendications 8 à 10, caractérisé par un joint d'étanchéité (13) pour l'étanchéification entre l'évacuation et la pièce à nettoyer.
- Dispositif de nettoyage selon l'une des revendications 8 à 11, caractérisé en ce que l'évacuation comprend au moins un élément d'évacuation pour le fluide de nettoyage.
- Dispositif de nettoyage selon la revendication précédente, caractérisé en ce que la lance (6) comprend des éléments d'évacuation au niveau de son extrémité dans la direction axiale ou latéralement sur sa surface s'étendant le long de son axe ou au niveau de son extrémité dans la direction axiale et latéralement sur sa surface s'étendant le long de son axe.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005034634A DE102005034634B3 (de) | 2005-07-25 | 2005-07-25 | Verfahren und Werkzeug zur Reinigung von Kavitäten |
PCT/EP2006/005290 WO2007012364A1 (fr) | 2005-07-25 | 2006-06-02 | Procede et outil pour nettoyer des cavites |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1909977A1 EP1909977A1 (fr) | 2008-04-16 |
EP1909977B1 true EP1909977B1 (fr) | 2016-04-13 |
Family
ID=36933431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06754085.6A Not-in-force EP1909977B1 (fr) | 2005-07-25 | 2006-06-02 | Procede et outil pour nettoyer des cavites |
Country Status (4)
Country | Link |
---|---|
US (1) | US8262803B2 (fr) |
EP (1) | EP1909977B1 (fr) |
DE (1) | DE102005034634B3 (fr) |
WO (1) | WO2007012364A1 (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008021049B3 (de) * | 2008-04-26 | 2009-12-10 | Ex-Cell-O Gmbh | Verfahren zum Kühlen und Schmieren eines Werkzeugs und zum Reinigen der bearbeiteten Fläche |
DE102008057942A1 (de) * | 2008-11-19 | 2010-05-20 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zum Entfernen von Fremdkörpern aus einem offenen Hohlraum eines Maschinenteils sowie Einrichtung zur Durchführung des Verfahrens |
DE102009030514B4 (de) * | 2009-06-04 | 2015-09-10 | Scanwill Fluid Power Aps | Ausblaswerkzeug |
DE102010005421B4 (de) * | 2010-01-22 | 2015-01-08 | Lufthansa Technik Ag | Vorrichtung und Verfahren zur Reinigung einer Stirndichtung eines Strahltriebwerks |
EP2554279A3 (fr) | 2011-08-04 | 2013-05-22 | t.neubert GmbH | Modular cleaning and/or rinsing system for interiors of workpieces and method for cleaning and/or rinsing |
CN103406304B (zh) * | 2012-09-29 | 2015-05-20 | 山东常林机械集团股份有限公司 | 一种超声波辅助超临界二氧化碳清洗精密零部件的方法 |
US20160167978A1 (en) | 2013-08-08 | 2016-06-16 | Ocean Team Group A/S | A permanent magnetic material |
JP6112422B2 (ja) * | 2014-03-12 | 2017-04-12 | 住友電装株式会社 | コネクタのための異物除去方法及びその装置 |
US9925639B2 (en) * | 2014-07-18 | 2018-03-27 | Applied Materials, Inc. | Cleaning of chamber components with solid carbon dioxide particles |
EP3323551A1 (fr) * | 2016-11-18 | 2018-05-23 | Inventio AG | Dispositif de nettoyage de trous |
FR3061949A1 (fr) * | 2017-01-17 | 2018-07-20 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Procede et un dispositif de sechage de bouteilles de fluide sous pression |
JP6696948B2 (ja) * | 2017-10-03 | 2020-05-20 | 株式会社スギノマシン | 清掃装置 |
CA3117369A1 (fr) * | 2018-11-15 | 2020-05-22 | Ocean Team Group A/S | Procede de decolmatage pulse a contre-courant de tuyaux obstrues, par exemple dans un systeme de tuyaux hydrauliques |
WO2023219827A2 (fr) * | 2022-05-10 | 2023-11-16 | Henrici Gerald | Appareil et procédé d'inspection d'orifice et de nettoyage de dioxyde de carbone associé |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4423188A1 (de) * | 1994-07-01 | 1996-01-04 | Linde Ag | Reinigung von Behältern wie Druckgasbehälter |
US5482211A (en) * | 1994-04-21 | 1996-01-09 | Hughes Aircraft Company | Supercritical fluid cleaning apparatus without pressure vessel |
Family Cites Families (16)
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JPS59218300A (ja) | 1983-05-26 | 1984-12-08 | Hata Tekkosho:Kk | 回転式粉末成形機の回転盤洗浄方法 |
US5509431A (en) * | 1993-12-14 | 1996-04-23 | Snap-Tite, Inc. | Precision cleaning vessel |
ATE192684T1 (de) * | 1996-03-07 | 2000-05-15 | Messer Griesheim Gmbh | Maschine zum polieren und/oder schleifen |
ATE249328T1 (de) * | 1997-02-05 | 2003-09-15 | Linde Ag | Verfahren und vorrichtung zur kühlung extrudierter hohlprofile |
US5853128A (en) * | 1997-03-08 | 1998-12-29 | Bowen; Howard S. | Solid/gas carbon dioxide spray cleaning system |
WO2001087505A1 (fr) * | 2000-05-18 | 2001-11-22 | S. C. Fluids, Inc. | Procede de nettoyage a fluide supercritique de surfaces de precision |
DE10055127A1 (de) | 2000-11-07 | 2002-05-08 | Daimler Chrysler Ag | Verfahren und Vorrichtung zur Reinigung von Gegenständen mittels eines komprimierten Reinigungsfluides |
JP2002172368A (ja) * | 2000-12-05 | 2002-06-18 | Canon Inc | ドライアイス洗浄方法及びドライアイス洗浄装置 |
SE524570C2 (sv) * | 2000-12-18 | 2004-08-31 | Sinterkil Ab | Anordning för att bekämpa skadedjur, insekter eller ohyra medelst nedkylning |
US6953654B2 (en) | 2002-03-14 | 2005-10-11 | Tokyo Electron Limited | Process and apparatus for removing a contaminant from a substrate |
DE10218519C1 (de) | 2002-04-25 | 2003-06-26 | Daimler Chrysler Ag | Verfahren zur Reinigung von Gegenständen mittels eines komprimierten Reinigungsmediums |
US6875286B2 (en) * | 2002-12-16 | 2005-04-05 | International Business Machines Corporation | Solid CO2 cleaning |
DE10311552B4 (de) | 2003-03-17 | 2006-02-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Reinigung von Werkstücken von anhaftenden Verunreinigungen |
DE10318238B4 (de) | 2003-04-23 | 2007-02-01 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Reinigen von Innenflächen von Gewindebohrungen |
EP1503401A1 (fr) | 2003-08-01 | 2005-02-02 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Methode et appareillage pour le nettoyage d'un substrat grace à un fluide supercritique |
WO2006065725A1 (fr) * | 2004-12-13 | 2006-06-22 | Cool Clean Technologies, Inc. | Appareil à neige carbonique |
-
2005
- 2005-07-25 DE DE102005034634A patent/DE102005034634B3/de not_active Expired - Fee Related
-
2006
- 2006-06-02 WO PCT/EP2006/005290 patent/WO2007012364A1/fr active Application Filing
- 2006-06-02 EP EP06754085.6A patent/EP1909977B1/fr not_active Not-in-force
- 2006-06-02 US US11/995,643 patent/US8262803B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5482211A (en) * | 1994-04-21 | 1996-01-09 | Hughes Aircraft Company | Supercritical fluid cleaning apparatus without pressure vessel |
DE4423188A1 (de) * | 1994-07-01 | 1996-01-04 | Linde Ag | Reinigung von Behältern wie Druckgasbehälter |
Also Published As
Publication number | Publication date |
---|---|
WO2007012364A1 (fr) | 2007-02-01 |
EP1909977A1 (fr) | 2008-04-16 |
US8262803B2 (en) | 2012-09-11 |
DE102005034634B3 (de) | 2007-03-29 |
US20090107523A1 (en) | 2009-04-30 |
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