CN103406304B - 一种超声波辅助超临界二氧化碳清洗精密零部件的方法 - Google Patents
一种超声波辅助超临界二氧化碳清洗精密零部件的方法 Download PDFInfo
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- CN103406304B CN103406304B CN201310355287.5A CN201310355287A CN103406304B CN 103406304 B CN103406304 B CN 103406304B CN 201310355287 A CN201310355287 A CN 201310355287A CN 103406304 B CN103406304 B CN 103406304B
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- cleaning
- carbon dioxide
- supercritical carbon
- precision parts
- ultrasonic
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 254
- 238000004140 cleaning Methods 0.000 title claims abstract description 135
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 127
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 127
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 19
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000005057 refrigeration Methods 0.000 claims description 16
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 7
- 238000000746 purification Methods 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract description 3
- 230000006837 decompression Effects 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 230000003670 easy-to-clean Effects 0.000 abstract 1
- 238000004064 recycling Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
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Priority Applications (1)
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CN201310355287.5A CN103406304B (zh) | 2012-09-29 | 2013-08-15 | 一种超声波辅助超临界二氧化碳清洗精密零部件的方法 |
Applications Claiming Priority (4)
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CN201210370921.8 | 2012-09-29 | ||
CN2012103709218 | 2012-09-29 | ||
CN201210370921 | 2012-09-29 | ||
CN201310355287.5A CN103406304B (zh) | 2012-09-29 | 2013-08-15 | 一种超声波辅助超临界二氧化碳清洗精密零部件的方法 |
Publications (2)
Publication Number | Publication Date |
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CN103406304A CN103406304A (zh) | 2013-11-27 |
CN103406304B true CN103406304B (zh) | 2015-05-20 |
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CN201310355287.5A Active CN103406304B (zh) | 2012-09-29 | 2013-08-15 | 一种超声波辅助超临界二氧化碳清洗精密零部件的方法 |
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CN (1) | CN103406304B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103977985A (zh) * | 2014-05-05 | 2014-08-13 | 大连理工大学 | 一种再制造零部件复合清洗方法 |
CN105312945B (zh) * | 2014-07-31 | 2018-03-23 | 深圳市世工科技有限公司 | 自清洗刀库和机床 |
CN104585847B (zh) * | 2015-01-26 | 2016-09-28 | 新疆农业大学 | 一种葡萄干无水清洗方法 |
CN107971299B (zh) * | 2017-12-22 | 2023-04-11 | 厦门理工学院 | 一种超临界二氧化碳清洗设备及其清洗方法 |
CN109482571A (zh) * | 2018-10-18 | 2019-03-19 | 合肥常青机械股份有限公司 | 一种汽车零件清洗控制方法 |
CN114018085A (zh) * | 2021-11-02 | 2022-02-08 | 珠海格力绿色再生资源有限公司 | 一种采用超临界技术清洗空调冲压油的装置及方法 |
CN115069685A (zh) * | 2022-07-22 | 2022-09-20 | 中国船舶重工集团公司第七0七研究所 | 陀螺仪用半球谐振子干式清洗系统及干式清洗方法 |
CN115401030B (zh) * | 2022-09-03 | 2023-06-30 | 福建久策气体股份有限公司 | 一种利用高纯超临界二氧化碳清洗led晶圆的清洗系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5013366A (en) * | 1988-12-07 | 1991-05-07 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
CN1799710A (zh) * | 2004-12-31 | 2006-07-12 | 财团法人工业技术研究院 | 基板清洗系统与方法 |
CN1990126A (zh) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | 超临界二氧化碳清洗系统与方法 |
TW200840656A (en) * | 2007-04-10 | 2008-10-16 | Taiwan Supercritical Technology Co Ltd | Precision part cleaning method featuring recyclability and reusability |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6558475B1 (en) * | 2000-04-10 | 2003-05-06 | International Business Machines Corporation | Process for cleaning a workpiece using supercritical carbon dioxide |
DE102005034634B3 (de) * | 2005-07-25 | 2007-03-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Werkzeug zur Reinigung von Kavitäten |
KR101003206B1 (ko) * | 2008-05-26 | 2010-12-21 | 부경대학교 산학협력단 | 초임계이산화탄소 내에서 고이온주입된 포토레지스트제거에 유용한 초음파 세정 시스템 |
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- 2013-08-15 CN CN201310355287.5A patent/CN103406304B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5013366A (en) * | 1988-12-07 | 1991-05-07 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
CN1799710A (zh) * | 2004-12-31 | 2006-07-12 | 财团法人工业技术研究院 | 基板清洗系统与方法 |
CN1990126A (zh) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | 超临界二氧化碳清洗系统与方法 |
TW200840656A (en) * | 2007-04-10 | 2008-10-16 | Taiwan Supercritical Technology Co Ltd | Precision part cleaning method featuring recyclability and reusability |
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