EP1867219B1 - Systeme de surveillance de processus de pulverisation thermique - Google Patents

Systeme de surveillance de processus de pulverisation thermique Download PDF

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Publication number
EP1867219B1
EP1867219B1 EP06722707A EP06722707A EP1867219B1 EP 1867219 B1 EP1867219 B1 EP 1867219B1 EP 06722707 A EP06722707 A EP 06722707A EP 06722707 A EP06722707 A EP 06722707A EP 1867219 B1 EP1867219 B1 EP 1867219B1
Authority
EP
European Patent Office
Prior art keywords
arrangement
fibre
optical waveguides
plasma
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP06722707A
Other languages
German (de)
English (en)
Other versions
EP1867219A2 (fr
Inventor
Manuel Hertter
Jörg Höschele
Stefan Schneiderbanger
Jürgen STEINWANDEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTU Aero Engines AG
Original Assignee
MTU Aero Engines GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Aero Engines GmbH filed Critical MTU Aero Engines GmbH
Publication of EP1867219A2 publication Critical patent/EP1867219A2/fr
Application granted granted Critical
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means

Definitions

  • the invention relates to an arrangement for monitoring thermal spraying processes according to the preamble of patent claim 1.
  • EP 0 542 542 B1 It also describes the possibility of using an optical fiber bundle and supplying the received radiation to a CCD camera.
  • a monitoring of the relevant process variables for the injection process is in DE 101 40 299 A1 described.
  • the light radiation is examined spectrometrically and evaluated.
  • the plasma composition, the composition of the spray materials and the gas and material flow are determined.
  • PFI diagnostics is an imaging process and was developed for industrial use.
  • an optical CCD camera picks up the luminous region of the spray jet between the source of the spray jet and the coating surface, the separation of hot areas and colder zones being realized by transmission-matched gray filters.
  • the method is used to monitor both the particle beam and the plasma or high-speed flame spray jet. With minimal equipment effort, the brightness characteristics of the rays captured and simulated by simple ellipse geometries. Their characteristics are sensitive to changes in the process parameters. In this way, the PFI process allows the monitoring and quality control of the entire injection process up to the layer formation.
  • a disadvantage of an arrangement which works according to the PFI method is that the PFI method can only be used in a controlled manner before and after completion of an injection process.
  • the PFI process does not allow high-resolution process control because the entire PFI arrangement is inherently non-moveable and designed to monitor the entire area between the source and coating surface. Monitoring of individual sections of the spray jet is not possible.
  • the object of the invention is to provide an arrangement with which a comprehensive high-resolution online process control of partial areas of the spray jet up to the entire coating space from the plasma source to simultaneous monitoring of the layer formation is possible.
  • means are provided for dividing the guided in the first optical fiber light in the other optical fibers, wherein the one optical fiber to the input aperture of a particle flux image assembly and the other optical fibers are connected to the input aperture of a spectrometer and wherein means for Determining the current state of the injection process are present.
  • the evaluation is carried out in each case according to the method known to a person skilled in the art.
  • the supply of the light beams to the particle flux image arrangement and to the spectrometers is advantageously synchronized in time. This enables additional spectral information on selected PFI ellipse points and thus a comprehensive process control.
  • the arrangement according to the invention allows comprehensive online process control of the thermal spraying process, combining the advantages of PFI technology with optical spectroscopy.
  • the arrangement is in particular fully capable online and due to its design also suitable to perform a process control.
  • each optical fiber In contrast to the prior art can be determined with the inventive arrangement for each optical fiber both the time course of an entire spectrum and the luminance at a defined position.
  • a spectral resolution of individual pixels (formed by the individual optical fibers) along the plasma jet is achieved.
  • a spatially highly resolved evaluation of the luminance of the plasma jet is achieved by means of individual pixels (formed by the individual optical fibers).
  • Another advantage is that it is e.g. it is possible to simultaneously determine the velocities of several different particles contained in the plasma jet.
  • several different gas and material flows in the plasma jet can be determined simultaneously. This is of great advantage especially if the spray material is not just a powder material, but e.g. a powder mixture is used.
  • the array may be a line array or a square or rectangular array, e.g. with a 4x4 or 5x5 matrix.
  • each optical fiber in the array is queried sequentially and thus the light radiation is sequentially fed to the spectrometer.
  • the advantage here is a considerable space and cost savings of the components required for the process.
  • a switchover of the individual optical fibers to the spectrometer is possible without great loss of time.
  • Fig. 1 shows a first embodiment of the inventive arrangement.
  • the optical fibers 2a are arranged in an exemplary one-dimensional array 6.
  • the light emitted by the plasma 1 is applied to the optical fibers 2a shown.
  • the optical fibers 2a are each connected to a light switch W.
  • the light coming from the optical fibers 2a is divided into equal portions on the optical fibers 2b and 2c.
  • the optical fibers 2b are each connected to a spectrometer 3.
  • the optical fibers 2c are connected to the CCD camera of a PFI arrangement.
  • the optical fiber 2c thus form the section of the spray beam on the input aperture (not shown) of the CCD camera.
  • the light of the plasma 1 is decomposed into its spectral components.
  • the frequency spectrums generated in the individual spectrometers 3 are further processed in a processor 5, for example a computer.
  • Fig. 2 a second embodiment of the arrangement according to the invention is shown.
  • the structure corresponds to Fig. 2 essentially the in Fig. 1 described construction.
  • a distributor circuit 4 is supplied.
  • This distribution circuit 4 now passes the information of the individual optical fibers 2 sequentially to the spectrometer 3.
  • the distribution circuit 4 can of course be controlled by a control circuit, not shown.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Claims (3)

  1. Dispositif de mesure des propriétés caractéristiques d'un faisceau de plasma dans un procédé de projection thermique comprenant des moyens pour fournir les matières de projection au plasma, un réseau mono ou bi dimensionnel composé de premières fibres optiques (2a) pour prendre le rayonnement lumineux émis par le plasma (1), d'autres fibres optiques (2b, 2c) pour distribuer le rayonnement lumineux émis par le plasma (1), des moyens (5) pour déterminer l'état instantané du procédé de projection et un spectromètre (3), certaines des fibres optiques (2b) étant reliées au diaphragme d'entrée du spectromètre (3),
    caractérisé en ce qu'
    un premier dispositif d'image de flux de particules (7) et des moyens (W) répartissent la lumière conduite par les premières fibres optiques (2a) vers les autres fibres optiques (2b, 2c),
    les autres fibres optiques (2c) sont reliées au diaphragme d'entrée du dispositif d'image de flux de particules (7) et
    le moyen (5) et le dispositif d'image de flux de particules (7) servent à déterminer l'état instantané du procédé de projection.
  2. Dispositif selon la revendication 1, dans lequel la fourniture des faisceaux lumineux vers le dispositif d'image de flux de particules (7) et vers les spectromètres (3) est synchronisée dans le temps.
  3. Dispositif selon l'une des revendications précédentes, selon lesquelles des moyens (4) sont prévus pour l'alimentation séquentielle des faisceaux lumineux des différentes fibres optiques (2b) vers le spectromètre (3).
EP06722707A 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique Expired - Fee Related EP1867219B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005016189A DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse
PCT/DE2006/000555 WO2006105762A2 (fr) 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique

Publications (2)

Publication Number Publication Date
EP1867219A2 EP1867219A2 (fr) 2007-12-19
EP1867219B1 true EP1867219B1 (fr) 2008-10-01

Family

ID=36608578

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06722707A Expired - Fee Related EP1867219B1 (fr) 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique

Country Status (4)

Country Link
US (1) US7688441B2 (fr)
EP (1) EP1867219B1 (fr)
DE (2) DE102005016189A1 (fr)
WO (1) WO2006105762A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053774A1 (de) * 2006-11-15 2008-05-21 Mtu Aero Engines Gmbh Vorrichtung zum thermischen Spritzen, Verfahren zum Überwachen eines Prozesses des thermischen Spritzen und Verfahren zum Beschichten und/oder Ausbessern von Turbinen- oder Triebwerksteilen
KR100860473B1 (ko) * 2007-04-18 2008-09-26 에스엔유 프리시젼 주식회사 플라즈마 모니터링장치
KR102636879B1 (ko) * 2018-09-07 2024-02-15 삼성전자주식회사 플라즈마 센싱 장치, 이를 포함하는 플라즈마 모니토링 시스템 및 플라즈마 공정 제어 방법
FR3107636B1 (fr) * 2020-02-25 2022-02-18 Univ Bordeaux Dispositif de génération de plasma à base de fibres optiques composites

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2055267C (fr) 1991-11-12 1999-01-12 Christian Moreau Appareil servant a controler la temperature et la vitesse des particules projetees par plasma et methode connexe
US5986277A (en) * 1997-10-29 1999-11-16 National Research Council Of Canada Method and apparatus for on-line monitoring the temperature and velocity of thermally sprayed particles
US6034781A (en) * 1998-05-26 2000-03-07 Wisconsin Alumni Research Foundation Electro-optical plasma probe
US6744041B2 (en) * 2000-06-09 2004-06-01 Edward W Sheehan Apparatus and method for focusing ions and charged particles at atmospheric pressure
DE10140299B4 (de) 2001-08-16 2004-10-28 Mtu Aero Engines Gmbh Verfahren zur Überwachung und online-Diagnose eines thermischen Spritzprozesses
AU2003207440A1 (en) * 2002-01-03 2003-07-24 Indiana University Research And Technology Corporation Simultaneous acquisation of chemical information
JP2005317341A (ja) 2004-04-28 2005-11-10 Konica Minolta Holdings Inc プラズマ測定方法及びプラズマ処理装置

Also Published As

Publication number Publication date
DE502006001690D1 (de) 2008-11-13
DE102005016189A1 (de) 2006-10-12
US20090051915A1 (en) 2009-02-26
WO2006105762A3 (fr) 2007-04-19
WO2006105762A2 (fr) 2006-10-12
US7688441B2 (en) 2010-03-30
EP1867219A2 (fr) 2007-12-19

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