DE502006001690D1 - Anordnung zur überwachung thermischer spritzprozesse - Google Patents

Anordnung zur überwachung thermischer spritzprozesse

Info

Publication number
DE502006001690D1
DE502006001690D1 DE502006001690T DE502006001690T DE502006001690D1 DE 502006001690 D1 DE502006001690 D1 DE 502006001690D1 DE 502006001690 T DE502006001690 T DE 502006001690T DE 502006001690 T DE502006001690 T DE 502006001690T DE 502006001690 D1 DE502006001690 D1 DE 502006001690D1
Authority
DE
Germany
Prior art keywords
arrangement
thermal spraying
spraying processes
monitoring thermal
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502006001690T
Other languages
English (en)
Inventor
Manuel Hertter
Joerg Hoeschele
Stefan Schneiderbanger
Juergen Steinwandel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTU Aero Engines AG
Original Assignee
MTU Aero Engines GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Aero Engines GmbH filed Critical MTU Aero Engines GmbH
Publication of DE502006001690D1 publication Critical patent/DE502006001690D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE502006001690T 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse Active DE502006001690D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005016189A DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse
PCT/DE2006/000555 WO2006105762A2 (de) 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse

Publications (1)

Publication Number Publication Date
DE502006001690D1 true DE502006001690D1 (de) 2008-11-13

Family

ID=36608578

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102005016189A Withdrawn DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse
DE502006001690T Active DE502006001690D1 (de) 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102005016189A Withdrawn DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse

Country Status (4)

Country Link
US (1) US7688441B2 (de)
EP (1) EP1867219B1 (de)
DE (2) DE102005016189A1 (de)
WO (1) WO2006105762A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053774A1 (de) * 2006-11-15 2008-05-21 Mtu Aero Engines Gmbh Vorrichtung zum thermischen Spritzen, Verfahren zum Überwachen eines Prozesses des thermischen Spritzen und Verfahren zum Beschichten und/oder Ausbessern von Turbinen- oder Triebwerksteilen
KR100860473B1 (ko) * 2007-04-18 2008-09-26 에스엔유 프리시젼 주식회사 플라즈마 모니터링장치
KR102636879B1 (ko) * 2018-09-07 2024-02-15 삼성전자주식회사 플라즈마 센싱 장치, 이를 포함하는 플라즈마 모니토링 시스템 및 플라즈마 공정 제어 방법
FR3107636B1 (fr) * 2020-02-25 2022-02-18 Univ Bordeaux Dispositif de génération de plasma à base de fibres optiques composites

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2055267C (en) 1991-11-12 1999-01-12 Christian Moreau Method and apparatus for monitoring the temperature and velocity of plasma sprayed particles
US5986277A (en) * 1997-10-29 1999-11-16 National Research Council Of Canada Method and apparatus for on-line monitoring the temperature and velocity of thermally sprayed particles
US6034781A (en) * 1998-05-26 2000-03-07 Wisconsin Alumni Research Foundation Electro-optical plasma probe
US6744041B2 (en) * 2000-06-09 2004-06-01 Edward W Sheehan Apparatus and method for focusing ions and charged particles at atmospheric pressure
DE10140299B4 (de) 2001-08-16 2004-10-28 Mtu Aero Engines Gmbh Verfahren zur Überwachung und online-Diagnose eines thermischen Spritzprozesses
CA2472271A1 (en) * 2002-01-03 2003-07-17 Gary M. Hieftje Simultaneous acquisation of chemical information
JP2005317341A (ja) 2004-04-28 2005-11-10 Konica Minolta Holdings Inc プラズマ測定方法及びプラズマ処理装置

Also Published As

Publication number Publication date
WO2006105762A3 (de) 2007-04-19
US20090051915A1 (en) 2009-02-26
EP1867219A2 (de) 2007-12-19
EP1867219B1 (de) 2008-10-01
WO2006105762A2 (de) 2006-10-12
DE102005016189A1 (de) 2006-10-12
US7688441B2 (en) 2010-03-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition