WO2006105762A3 - Anordnung zur überwachung thermischer spritzprozesse - Google Patents

Anordnung zur überwachung thermischer spritzprozesse Download PDF

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Publication number
WO2006105762A3
WO2006105762A3 PCT/DE2006/000555 DE2006000555W WO2006105762A3 WO 2006105762 A3 WO2006105762 A3 WO 2006105762A3 DE 2006000555 W DE2006000555 W DE 2006000555W WO 2006105762 A3 WO2006105762 A3 WO 2006105762A3
Authority
WO
WIPO (PCT)
Prior art keywords
arrangement
plasma
optical waveguides
thermal spray
spray processes
Prior art date
Application number
PCT/DE2006/000555
Other languages
English (en)
French (fr)
Other versions
WO2006105762A2 (de
Inventor
Manuel Hertter
Joerg Hoeschele
Stefan Schneiderbanger
Juergen Steinwandel
Original Assignee
Mtu Aero Engines Gmbh
Manuel Hertter
Joerg Hoeschele
Stefan Schneiderbanger
Juergen Steinwandel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mtu Aero Engines Gmbh, Manuel Hertter, Joerg Hoeschele, Stefan Schneiderbanger, Juergen Steinwandel filed Critical Mtu Aero Engines Gmbh
Priority to US11/887,797 priority Critical patent/US7688441B2/en
Priority to DE502006001690T priority patent/DE502006001690D1/de
Priority to EP06722707A priority patent/EP1867219B1/de
Publication of WO2006105762A2 publication Critical patent/WO2006105762A2/de
Publication of WO2006105762A3 publication Critical patent/WO2006105762A3/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Die Erfindung betrifft eine Anordnung zur Messung charakteristischer Eigenschaften eines Plasmastrahls in einem thermischen Spritzprozess, umfassend Mittel zur Zuführung von Spritzmaterialien in das Plasma, einem ein- oder zweidimensionales Array aus ersten Lichtleitfasern (2a) zur Aufnahme der vom Plasma (1 ) ausgesandte Lichtstrahlung und weiteren Lichtleitfasern (2b, 2c) zur Verteilung der vom Plasma (1 ) ausgesandte Lichtstrahlung. Gemäß der Erfindung sind Mittel (W) vorhanden zur Aufteilung des in den ersten Lichtleitfasern (2a) geführten Lichts in die weiteren Lichtleitfasern (2b, 2c), wobei die eine Lichtleitfasern (2c) mit der Eingangsblende einer Particle-Flux-Anordnung (7) und die anderen Lichtleitfasern (2b) mit der Eingangsblende eines Spektrometers (3) verbunden sind und wobei Mittel (5, 7) zur Ermittlung des momentanen Zustandes des Spritzprozesses vorhanden sind.
PCT/DE2006/000555 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse WO2006105762A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US11/887,797 US7688441B2 (en) 2005-04-08 2006-03-30 Arrangement for monitoring thermal spray processes
DE502006001690T DE502006001690D1 (de) 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse
EP06722707A EP1867219B1 (de) 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005016189A DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse
DE102005016189.8 2005-04-08

Publications (2)

Publication Number Publication Date
WO2006105762A2 WO2006105762A2 (de) 2006-10-12
WO2006105762A3 true WO2006105762A3 (de) 2007-04-19

Family

ID=36608578

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2006/000555 WO2006105762A2 (de) 2005-04-08 2006-03-30 Anordnung zur überwachung thermischer spritzprozesse

Country Status (4)

Country Link
US (1) US7688441B2 (de)
EP (1) EP1867219B1 (de)
DE (2) DE102005016189A1 (de)
WO (1) WO2006105762A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053774A1 (de) * 2006-11-15 2008-05-21 Mtu Aero Engines Gmbh Vorrichtung zum thermischen Spritzen, Verfahren zum Überwachen eines Prozesses des thermischen Spritzen und Verfahren zum Beschichten und/oder Ausbessern von Turbinen- oder Triebwerksteilen
KR100860473B1 (ko) * 2007-04-18 2008-09-26 에스엔유 프리시젼 주식회사 플라즈마 모니터링장치
KR102636879B1 (ko) * 2018-09-07 2024-02-15 삼성전자주식회사 플라즈마 센싱 장치, 이를 포함하는 플라즈마 모니토링 시스템 및 플라즈마 공정 제어 방법
FR3107636B1 (fr) * 2020-02-25 2022-02-18 Univ Bordeaux Dispositif de génération de plasma à base de fibres optiques composites

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986277A (en) * 1997-10-29 1999-11-16 National Research Council Of Canada Method and apparatus for on-line monitoring the temperature and velocity of thermally sprayed particles
US6034781A (en) * 1998-05-26 2000-03-07 Wisconsin Alumni Research Foundation Electro-optical plasma probe
EP1284588A2 (de) * 2001-08-16 2003-02-19 MTU Aero Engines GmbH Verfahren zur Überwachung von Plasma- oder Flammspritzverfahren
JP2005317341A (ja) * 2004-04-28 2005-11-10 Konica Minolta Holdings Inc プラズマ測定方法及びプラズマ処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2055267C (en) 1991-11-12 1999-01-12 Christian Moreau Method and apparatus for monitoring the temperature and velocity of plasma sprayed particles
US6744041B2 (en) * 2000-06-09 2004-06-01 Edward W Sheehan Apparatus and method for focusing ions and charged particles at atmospheric pressure
WO2003058204A2 (en) * 2002-01-03 2003-07-17 Advanced Research And Technology Institute, Inc. Simultaneous acquisation of chemical information

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986277A (en) * 1997-10-29 1999-11-16 National Research Council Of Canada Method and apparatus for on-line monitoring the temperature and velocity of thermally sprayed particles
US6034781A (en) * 1998-05-26 2000-03-07 Wisconsin Alumni Research Foundation Electro-optical plasma probe
EP1284588A2 (de) * 2001-08-16 2003-02-19 MTU Aero Engines GmbH Verfahren zur Überwachung von Plasma- oder Flammspritzverfahren
JP2005317341A (ja) * 2004-04-28 2005-11-10 Konica Minolta Holdings Inc プラズマ測定方法及びプラズマ処理装置

Also Published As

Publication number Publication date
EP1867219A2 (de) 2007-12-19
US7688441B2 (en) 2010-03-30
DE502006001690D1 (de) 2008-11-13
WO2006105762A2 (de) 2006-10-12
DE102005016189A1 (de) 2006-10-12
EP1867219B1 (de) 2008-10-01
US20090051915A1 (en) 2009-02-26

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