EP1867219A2 - Systeme de surveillance de processus de pulverisation thermique - Google Patents

Systeme de surveillance de processus de pulverisation thermique

Info

Publication number
EP1867219A2
EP1867219A2 EP06722707A EP06722707A EP1867219A2 EP 1867219 A2 EP1867219 A2 EP 1867219A2 EP 06722707 A EP06722707 A EP 06722707A EP 06722707 A EP06722707 A EP 06722707A EP 1867219 A2 EP1867219 A2 EP 1867219A2
Authority
EP
European Patent Office
Prior art keywords
arrangement
optical fibers
plasma
light
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06722707A
Other languages
German (de)
English (en)
Other versions
EP1867219B1 (fr
Inventor
Manuel Hertter
Jörg Höschele
Stefan Schneiderbanger
Jürgen STEINWANDEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTU Aero Engines AG
Original Assignee
MTU Aero Engines GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Aero Engines GmbH filed Critical MTU Aero Engines GmbH
Publication of EP1867219A2 publication Critical patent/EP1867219A2/fr
Application granted granted Critical
Publication of EP1867219B1 publication Critical patent/EP1867219B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means

Definitions

  • the invention relates to an arrangement for monitoring thermal spraying processes according to the preamble of patent claim 1.
  • EP 0 542 542 B1 discloses an arrangement for timely (on-line) detection of powder spray particles in a plasma jet.
  • the light radiation emitted by the plasma jet is focused onto one end of a light guide.
  • the light radiation is divided by means of a dichroic lens into two light beams, which are each fed to a photodetector.
  • the photodetectors the temporal intensity distribution is determined for each light beam.
  • a filter which is connected upstream of the photodetectors, suitable wavelength ranges from the light radiation can be filtered and their temporal intensity profile can be determined.
  • EP 0 542 542 B1 also describes the possibility of using an optical fiber bundle and supplying the received radiation to a CCD camera.
  • PFI diagnostics is an imaging process and was developed for industrial use.
  • an optical CCD camera picks up the luminous region of the spray jet between the source of the spray jet and the coating surface, the separation of hot regions and colder zones being realized by transmission-matched gray filters.
  • the method is used for monitoring both the particle beam and the plasma or high-speed flame spray jet.
  • the brightness characteristics of the rays recorded and simulated by simple ellipse geometries Their characteristics are sensitive to changes in process parameters In this way, the PFI process allows the monitoring and quality control of the entire injection process up to the layer formation
  • a disadvantage of an arrangement which works according to the PFI method is that the PFI method can only be used in a controlled manner before and after the end of an injection process.
  • the PFI method does not allow a high-resolution process control because the entire PFI arrangement is system-dependent is not movable and designed so that the entire area between the source and the coating surface is monitored. It is not possible to monitor individual subsections of the spray jet
  • the object of the invention is to provide an arrangement with which a comprehensive high-resolution online process control of partial areas of the spray jet up to the entire coating space from the plasma source to simultaneous monitoring of the layer formation is possible
  • means are provided for dividing the light guided in the first optical fibers into the further optical fibers, wherein the one optical fibers are connected to the input aperture of a partial Ie flux arrangement and the other optical fibers are connected to the input aperture of a spectrometer and wherein
  • the evaluation is carried out in each case according to the method known to a person skilled in the art
  • the supply of the light beams to the particle flux image arrangement and to the spectrometers is advantageously synchronized in time.
  • additional spectral information at selected PFI ellipse points and thus comprehensive process control becomes possible
  • the inventive arrangement allows a comprehensive online process control of the thermal spraying process, combining the advantages of PFI technology with optical spectroscopy.
  • the arrangement is in particular fully capable online and due to its design also suitable to perform a process control
  • Another advantage is that it is possible, for example, simultaneously to determine the velocities of several different particles contained in the Piasmastrahl also several different gas and material flows can be determined in the plasma jet at the same time This is particularly advantageous if not as a spray material Powder material, but z B a powder mixture is used
  • the array may in this case be in particular an Lmienarray or a square or rectangular array, eg B with a 4x4 or 5x5 matrix
  • each optical fiber in the array is sequentially interrogated and thus the light radiation sequentially fed to the spectrometer.
  • the advantage here is a considerable space and cost saving of the components required for the process.
  • FIG. 1 shows a first embodiment of the arrangement according to the invention
  • FIG. 2 shows a second embodiment of the arrangement according to the invention
  • the optical fibers 2a are arranged in an exemplary one-dimensional array 6. Of course, a two-dimensional array is also possible.
  • the light emitted by the plasma 1 is transmitted to the optical fibers 2a
  • the optical fibers 2a are each connected to a light switch W
  • the light coming from the optical fibers 2a is divided equally into the optical fibers 2b and 2c
  • the optical fibers 2b are each connected to a spectrometer 3.
  • the optical fibers 2c are connected to the CCD camera connected to a PFI arrangement
  • the optical fiber 2c thus form the section of the Spnzstrahls on the input aperture (not shown) of the CCD camera
  • the spectrometer 3 the light of the plasma 1 is decomposed into its spectral components
  • FIG. 2 a second embodiment of the arrangement according to the invention is shown.
  • the structure in FIG. 2 essentially corresponds to the structure described in FIG. 1.
  • the individual optical fibers 2 are fed to a distributor circuit 4.
  • This distributor circuit 4 now passes the information of the individual optical fibers 2 sequentially to the spectrometer 3.
  • the distributor circuit 4 can of course be controlled by a control circuit, not shown

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Système de mesure de propriétés caractéristiques d'un jet de plasma dans un processus de pulvérisation thermique, qui comporte des moyens permettant d'introduire des matières de pulvérisation dans le plasma, un groupe en une dimension ou en deux dimensions de premières fibres optiques (2a) destinées à recevoir le rayonnement lumineux émis par le plasma (1) et d'autres fibres optiques (2b, 2c) pour la répartition du rayonnement lumineux émis par le plasma (1). Selon la présente invention, ledit système comporte des moyens (W) destinés à répartir la lumière guidée dans les premières fibres optiques (2a) dans les autres fibres optiques (2b, 2c), une fibre optique (2c) étant connectée au diaphragme d'ouverture d'un système de flux de particules (7) et l'autre fibre optique (2b) étant connectée au diaphragme d'ouverture d'un spectromètre (3). Ledit système de mesure comporte en outre des moyens (5, 7) permettant la détermination de l'état dans l'instant du processus de pulvérisation.
EP06722707A 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique Not-in-force EP1867219B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005016189A DE102005016189A1 (de) 2005-04-08 2005-04-08 Anordnung zur Überwachung thermischer Spritzprozesse
PCT/DE2006/000555 WO2006105762A2 (fr) 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique

Publications (2)

Publication Number Publication Date
EP1867219A2 true EP1867219A2 (fr) 2007-12-19
EP1867219B1 EP1867219B1 (fr) 2008-10-01

Family

ID=36608578

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06722707A Not-in-force EP1867219B1 (fr) 2005-04-08 2006-03-30 Systeme de surveillance de processus de pulverisation thermique

Country Status (4)

Country Link
US (1) US7688441B2 (fr)
EP (1) EP1867219B1 (fr)
DE (2) DE102005016189A1 (fr)
WO (1) WO2006105762A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053774A1 (de) * 2006-11-15 2008-05-21 Mtu Aero Engines Gmbh Vorrichtung zum thermischen Spritzen, Verfahren zum Überwachen eines Prozesses des thermischen Spritzen und Verfahren zum Beschichten und/oder Ausbessern von Turbinen- oder Triebwerksteilen
KR100860473B1 (ko) * 2007-04-18 2008-09-26 에스엔유 프리시젼 주식회사 플라즈마 모니터링장치
KR102636879B1 (ko) * 2018-09-07 2024-02-15 삼성전자주식회사 플라즈마 센싱 장치, 이를 포함하는 플라즈마 모니토링 시스템 및 플라즈마 공정 제어 방법
FR3107636B1 (fr) * 2020-02-25 2022-02-18 Univ Bordeaux Dispositif de génération de plasma à base de fibres optiques composites

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2055267C (fr) 1991-11-12 1999-01-12 Christian Moreau Appareil servant a controler la temperature et la vitesse des particules projetees par plasma et methode connexe
US5986277A (en) * 1997-10-29 1999-11-16 National Research Council Of Canada Method and apparatus for on-line monitoring the temperature and velocity of thermally sprayed particles
US6034781A (en) * 1998-05-26 2000-03-07 Wisconsin Alumni Research Foundation Electro-optical plasma probe
US6744041B2 (en) * 2000-06-09 2004-06-01 Edward W Sheehan Apparatus and method for focusing ions and charged particles at atmospheric pressure
DE10140299B4 (de) 2001-08-16 2004-10-28 Mtu Aero Engines Gmbh Verfahren zur Überwachung und online-Diagnose eines thermischen Spritzprozesses
CA2472271A1 (fr) * 2002-01-03 2003-07-17 Gary M. Hieftje Acquisition simultanee d'informations chimiques
JP2005317341A (ja) 2004-04-28 2005-11-10 Konica Minolta Holdings Inc プラズマ測定方法及びプラズマ処理装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006105762A3 *

Also Published As

Publication number Publication date
WO2006105762A3 (fr) 2007-04-19
US20090051915A1 (en) 2009-02-26
DE502006001690D1 (de) 2008-11-13
EP1867219B1 (fr) 2008-10-01
WO2006105762A2 (fr) 2006-10-12
DE102005016189A1 (de) 2006-10-12
US7688441B2 (en) 2010-03-30

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