EP1837722A2 - Mikromechanisches Bauteil aus Isoliermaterial und Verfahren zu dessen Herstellung - Google Patents

Mikromechanisches Bauteil aus Isoliermaterial und Verfahren zu dessen Herstellung Download PDF

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Publication number
EP1837722A2
EP1837722A2 EP07104385A EP07104385A EP1837722A2 EP 1837722 A2 EP1837722 A2 EP 1837722A2 EP 07104385 A EP07104385 A EP 07104385A EP 07104385 A EP07104385 A EP 07104385A EP 1837722 A2 EP1837722 A2 EP 1837722A2
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EP
European Patent Office
Prior art keywords
micro
mechanical part
part according
silicon
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07104385A
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English (en)
French (fr)
Other versions
EP1837722B1 (de
EP1837722A3 (de
Inventor
Thierry Conus
Marc Lippuner
Philippe Marmy
Benjamin Krähenbühl
Michael Reber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
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ETA SA Manufacture Horlogere Suisse
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Filing date
Publication date
Priority claimed from EP06111727A external-priority patent/EP1837721A1/de
Priority claimed from CH00595/06A external-priority patent/CH707669B1/fr
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to EP07104385.5A priority Critical patent/EP1837722B1/de
Publication of EP1837722A2 publication Critical patent/EP1837722A2/de
Publication of EP1837722A3 publication Critical patent/EP1837722A3/de
Application granted granted Critical
Publication of EP1837722B1 publication Critical patent/EP1837722B1/de
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B15/00—Escapements
    • G04B15/14—Component parts or constructional details, e.g. construction of the lever or the escape wheel
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring

Definitions

  • the present invention relates to a micro-mechanical part made of an insulating material, and more particularly to a fixed or mobile part of a watch movement whose proximity to other parts does not disturb the operation of a moving part, directly, or indirectly by the attraction of particles.
  • Insulating materials such as silicon and its compounds, quartz, diamond, glass, ceramics or others are increasingly used to make micro-mechanical parts, whether fixed parts , such as plates or bridges, or moving parts for example part of the drive train, or the control system such as the balance spring, balance or exhaust.
  • the present invention therefore aims to provide a solution to the problem mentioned above by providing a fixed or mobile micro-mechanical part made of an insulating material whose surface treatment avoids the risk of bonding.
  • the invention relates to a micro-mechanical part made of an insulating material, such as silicon, and its compounds, diamond, glass, ceramic or other, all or part of its surface is coated with a thin deposit of an electrically conductive material such as a layer of a metallic material or a conductive non-metallic material.
  • the conductive deposit preferably has a thickness of less than 50 nm. This very thin deposit invisible to the naked eye, but detectable by the current means of analysis eliminates the risk of attraction and collage by a neighboring room, this attraction may be due to friction or tension that can create electrostatic charges in the room.
  • This deposit may be performed on a piece of insulating material monoblock or composite, that is to say, at least the outer surface is of insulating material.
  • the stainless and amagnetic metals such as gold, platinum, rhodium and palladium are preferably chosen.
  • non-metallic conductive materials one will preferably choose one of the group comprising graphite, carbon, doped silicon, and conductive polymers. These metals can be deposited by known methods making it possible to control the thickness by adjusting the operating conditions, for example by sputtering, PVD, doping, ion implantation or by an electrolytic process. The same techniques can be used to deposit conductive non-metallic materials.
  • said micro-mechanical part is a part of the kinematic chain of a watch movement, such as a hairspring, an anchor, an escape wheel or a toothed wheel, or any which other fixed part may for example be the bearing of the axis of a mobile.
  • a hairspring which is the most sensitive part of a watch movement.
  • the invention also relates to a timepiece incorporating such a micro-mechanical part.
  • the invention will be more particularly illustrated by a sprung-balance adjusting device represented in FIG. 1, in which the spiral 1 is produced, for example, in silicon, by adapting the micro-machining processes used in the invention.
  • manufacture of integrated circuits or accelerometers from a silicon wafer or other amorphous or crystalline insulating material.
  • wet chemical etching, plasma dry machining or reactive ion etching (RIE) can be carried out using masks appropriate to the desired contour for the hairspring.
  • the same silicon wafer makes it possible to manufacture a batch of spirals whose characteristics are determined by the thickness of the wafer and the shape of the masks, said characteristics being calculated for operation of the spiral in a plane.
  • FIG. 2 whose cross-sectional representation is limited to the hairspring 1 and to the cock 9, the behavior of the turns 11 is shown in the left-hand part after a certain operating time when the hairspring 1 n has undergone no treatment.
  • the turns 11 deviate from their normal position shown in dotted lines by being attracted by the cock 9 and can even stick to it, which obviously disturbs the normal walking, that is to say to say a march having only movements of extension / contraction in a plane.
  • the material used is preferably a stainless and non-magnetic metal such as gold, platinum, rhodium, palladium, when it is a metallic conductive material.
  • This deposition can be carried out by means of various known methods, such as sputtering, PVD deposition, ion implantation or electroplating.
  • a gold deposit of 15 nm has been carried out by "sputtering", that is to say by performing a cathodic sputtering under vacuum, with a gold target, by applying a current of 60 mA for 15 seconds.
  • a non-metallic conductive material When a non-metallic conductive material is deposited, it will preferably be chosen from the group comprising graphite, carbon, doped silicon, and conducting polymers and deposition techniques and thicknesses as mentioned above will be used.
  • a silicon spiral has just been described, but other non-conductive amorphous or crystalline materials may also be used, as indicated above, and be treated with a surface metallization avoiding the risk of attraction or sticking.
  • a composite material to produce for example a hairspring having a silicon core and a thick coating of silicon dioxide on which the deposition of conductive material of small thickness will be performed.
  • a “composite material” may also include a metal core embedded in an insulating material.
  • the invention is not limited to a hairspring and can be applied to other moving parts such as an anchor, an escape wheel or a toothed wheel, as well as to other fixed parts. or moving a watch movement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
EP07104385.5A 2006-03-24 2007-03-19 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür Active EP1837722B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07104385.5A EP1837722B1 (de) 2006-03-24 2007-03-19 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP06111727A EP1837721A1 (de) 2006-03-24 2006-03-24 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
CH00595/06A CH707669B1 (fr) 2006-04-10 2006-04-10 Pièce de micro-mécanique en matériau électriquement isolant ou en silicium ou un de ses composés et son procédé de fabrication.
EP07104385.5A EP1837722B1 (de) 2006-03-24 2007-03-19 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür

Publications (3)

Publication Number Publication Date
EP1837722A2 true EP1837722A2 (de) 2007-09-26
EP1837722A3 EP1837722A3 (de) 2008-06-04
EP1837722B1 EP1837722B1 (de) 2016-02-24

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EP (1) EP1837722B1 (de)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009068091A1 (fr) * 2007-11-28 2009-06-04 Manufacture Et Fabrique De Montres Et Chronomètres Ulysse Nardin Le Locle S.A. Oscillateur mécanique présentant un coefficient thermoélastique optimisé
EP2104007A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblockspirale aus Material auf Siliziumbasis und ihr Herstellungsverfahren
EP2104006A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblock-Doppelspirale und ihr Herstellungsverfahren
EP2104008A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblock-Regulierungsorgan und sein Herstellungsverfahren
EP2105807A1 (de) 2008-03-28 2009-09-30 Nivarox-FAR S.A. Monoblockspirale zur Erhöhung der kurve und ihr Herstellungsverfahren
EP2184653A1 (de) * 2008-11-06 2010-05-12 Montres Breguet S.A. Spiralfeder mit Endkurvenerhöhung aus mikro-bearbeitbarem Material
EP2201428A1 (de) * 2007-10-18 2010-06-30 DAMASKO, Konrad Verfahren zum herstellen von funktionselementen für uhrwerke sowie nach diesem verfahren hergestelltes funktionselement
US8322914B2 (en) 2010-05-18 2012-12-04 Montres Breguet Sa Silicon overcoil balance spring
US8550699B2 (en) 2008-03-20 2013-10-08 Nivarox-Far S.A. Composite balance and method of manufacturing the same
WO2014075859A1 (fr) * 2012-11-16 2014-05-22 Nivarox-Far S.A. Résonateur moins sensible aux variations climatiques
EP2781968A1 (de) * 2013-03-19 2014-09-24 Nivarox-FAR S.A. Resonator, der weniger empfindlich gegenüber klimatischen Schwankungen ist
EP2394202B1 (de) * 2009-02-06 2016-09-07 DAMASKO GmbH Mechanisches schwingsystem für uhren sowie funktionselement für uhren
EP3056948B1 (de) 2015-02-17 2019-02-20 Master Dynamic Limited Siliciumspiralfeder
US10274897B2 (en) 2015-06-15 2019-04-30 Citizen Watch Co., Ltd. Speed governor for timepiece
US10324419B2 (en) 2009-02-06 2019-06-18 Domasko GmbH Mechanical oscillating system for a clock and functional element for a clock
US20190271946A1 (en) * 2018-03-01 2019-09-05 Rolex Sa Process for producing a thermo-compensated oscillator
EP3742237A1 (de) * 2019-05-23 2020-11-25 Nivarox-FAR S.A. Komponente, insbesondere für uhrwerk mit einer oberflächentopologie, und ihr herstellungsverfahren
EP3859449A1 (de) * 2020-01-30 2021-08-04 ETA SA Manufacture Horlogère Suisse Leitende schnur für spirale

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (de) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Mikromechanischer Teil und Verfahren zur dessen Herstellung
WO1999036941A2 (en) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Trench isolation for micromechanical devices
US20020060954A1 (en) * 1999-04-21 2002-05-23 Konrad Schafroth Watch movement with a microgenerator and method for testing watch movements
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
WO2004020329A1 (en) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Microelectromechanical system comb actuator and manufacturing method thereof
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (de) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Spiraluhrwerkfeder und Verfahren zu deren Herstellung
EP1482282A1 (de) * 2002-03-04 2004-12-01 Citizen Watch Co., Ltd. Elektrische uhr

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (de) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Mikromechanischer Teil und Verfahren zur dessen Herstellung
WO1999036941A2 (en) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Trench isolation for micromechanical devices
US20020060954A1 (en) * 1999-04-21 2002-05-23 Konrad Schafroth Watch movement with a microgenerator and method for testing watch movements
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
EP1482282A1 (de) * 2002-03-04 2004-12-01 Citizen Watch Co., Ltd. Elektrische uhr
WO2004020329A1 (en) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Microelectromechanical system comb actuator and manufacturing method thereof
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (de) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Spiraluhrwerkfeder und Verfahren zu deren Herstellung

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2201428A1 (de) * 2007-10-18 2010-06-30 DAMASKO, Konrad Verfahren zum herstellen von funktionselementen für uhrwerke sowie nach diesem verfahren hergestelltes funktionselement
WO2009068091A1 (fr) * 2007-11-28 2009-06-04 Manufacture Et Fabrique De Montres Et Chronomètres Ulysse Nardin Le Locle S.A. Oscillateur mécanique présentant un coefficient thermoélastique optimisé
US8414185B2 (en) 2007-11-28 2013-04-09 Manufacture Et Fabrique De Montres Et Chronometres Ulysse Nardin Le Locle S.A. Mechanical oscillator having an optimized thermoelastic coefficient
US8550699B2 (en) 2008-03-20 2013-10-08 Nivarox-Far S.A. Composite balance and method of manufacturing the same
US8523426B2 (en) 2008-03-20 2013-09-03 Nivarox-Far S.A. One-piece regulating member and method of manufacturing the same
US9459589B2 (en) 2008-03-20 2016-10-04 Nivarox-Far S.A. One-piece double balance spring and method of manufacturing the same
EP2104006A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblock-Doppelspirale und ihr Herstellungsverfahren
EP2104008A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblock-Regulierungsorgan und sein Herstellungsverfahren
WO2009115463A1 (fr) 2008-03-20 2009-09-24 Nivarox-Far S.A. Organe régulateur monobloc et son procédé de fabrication
EP2104007A1 (de) 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblockspirale aus Material auf Siliziumbasis und ihr Herstellungsverfahren
US8622611B2 (en) 2008-03-28 2014-01-07 Montres Breguet S.A. One-piece hairspring and method of manufacturing the same
EP2105807A1 (de) 2008-03-28 2009-09-30 Nivarox-FAR S.A. Monoblockspirale zur Erhöhung der kurve und ihr Herstellungsverfahren
CN101550978B (zh) * 2008-03-28 2012-09-05 宝玑表有限公司 单片游丝及其制造方法
US8296953B2 (en) 2008-03-28 2012-10-30 Montres Breguet S.A. Method of manufacturing a one-piece hairspring
EP2184652A1 (de) * 2008-11-06 2010-05-12 Montres Breguet SA Spiralfeder mit Endkurvenerhöhung aus mikro-bearbeitbarem Material
US8215828B2 (en) 2008-11-06 2012-07-10 Montres Breguet S.A. Breguet overcoil balance spring made of micro-machinable material
US7950847B2 (en) 2008-11-06 2011-05-31 Montres Breguet S.A. Breguet overcoil balance spring made of micro-machinable material
EP2184653A1 (de) * 2008-11-06 2010-05-12 Montres Breguet S.A. Spiralfeder mit Endkurvenerhöhung aus mikro-bearbeitbarem Material
EP2394202B1 (de) * 2009-02-06 2016-09-07 DAMASKO GmbH Mechanisches schwingsystem für uhren sowie funktionselement für uhren
US10324419B2 (en) 2009-02-06 2019-06-18 Domasko GmbH Mechanical oscillating system for a clock and functional element for a clock
US8322914B2 (en) 2010-05-18 2012-12-04 Montres Breguet Sa Silicon overcoil balance spring
WO2014075859A1 (fr) * 2012-11-16 2014-05-22 Nivarox-Far S.A. Résonateur moins sensible aux variations climatiques
US10001749B2 (en) 2012-11-16 2018-06-19 Nivarox-Far S.A. Resonator with reduced sensitivity to climatic variations
WO2014146833A3 (fr) * 2013-03-19 2014-11-13 Nivarox-Far S.A. Résonateur moins sensible aux variations climatiques
US10001750B2 (en) 2013-03-19 2018-06-19 Nivarox-Far S.A. Resonator with reduced sensitivity to climatic variations
EP2781968A1 (de) * 2013-03-19 2014-09-24 Nivarox-FAR S.A. Resonator, der weniger empfindlich gegenüber klimatischen Schwankungen ist
EP3056948B1 (de) 2015-02-17 2019-02-20 Master Dynamic Limited Siliciumspiralfeder
US10274897B2 (en) 2015-06-15 2019-04-30 Citizen Watch Co., Ltd. Speed governor for timepiece
US20190271946A1 (en) * 2018-03-01 2019-09-05 Rolex Sa Process for producing a thermo-compensated oscillator
EP3742237A1 (de) * 2019-05-23 2020-11-25 Nivarox-FAR S.A. Komponente, insbesondere für uhrwerk mit einer oberflächentopologie, und ihr herstellungsverfahren
US11586145B2 (en) 2019-05-23 2023-02-21 Nivarox-Far S.A. Component especially for horology with surface topology and method for manufacturing the same
EP3859449A1 (de) * 2020-01-30 2021-08-04 ETA SA Manufacture Horlogère Suisse Leitende schnur für spirale

Also Published As

Publication number Publication date
EP1837722B1 (de) 2016-02-24
EP1837722A3 (de) 2008-06-04

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