EP1837721A1 - Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür - Google Patents

Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür Download PDF

Info

Publication number
EP1837721A1
EP1837721A1 EP06111727A EP06111727A EP1837721A1 EP 1837721 A1 EP1837721 A1 EP 1837721A1 EP 06111727 A EP06111727 A EP 06111727A EP 06111727 A EP06111727 A EP 06111727A EP 1837721 A1 EP1837721 A1 EP 1837721A1
Authority
EP
European Patent Office
Prior art keywords
micro
insulating material
mechanical part
silicon
part according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06111727A
Other languages
English (en)
French (fr)
Inventor
Thierry Conus
Marc Lipunner
Philippe Marmy
Benjamin Krähenbühl
Michael Reber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to EP06111727A priority Critical patent/EP1837721A1/de
Priority to EP07104385.5A priority patent/EP1837722B1/de
Priority to TW096109746A priority patent/TWI438588B/zh
Priority to KR1020070027483A priority patent/KR20070096834A/ko
Priority to CN2007100893622A priority patent/CN101042570B/zh
Priority to JP2007076624A priority patent/JP5378654B2/ja
Priority to US11/691,063 priority patent/US7824097B2/en
Publication of EP1837721A1 publication Critical patent/EP1837721A1/de
Priority to HK08103103.0A priority patent/HK1113948A1/xx
Priority to JP2013118770A priority patent/JP5599917B2/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
    • G04D3/0087—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of the escapement mechanism, e.g. lever escapement, escape wheel

Definitions

  • the present invention relates to a micro-mechanical part made of an insulating material, and more particularly to a fixed or mobile part of a watch movement whose proximity to other parts does not disturb the operation of a moving part, directly, or indirectly by the attraction of particles.
  • Insulating materials such as silicon and its compounds, quartz, diamond, glass, ceramics or others are increasingly used to make micro-mechanical parts, whether fixed parts , such as plates or bridges, or moving parts for example part of the drive train, or the control system such as the balance spring, balance or exhaust.
  • the present invention therefore aims to provide a solution to the problem mentioned above by providing a fixed or mobile micro-mechanical part made of an insulating material whose surface treatment avoids the risk of bonding.
  • the invention relates to a micro-mechanical part made of an insulating material, such as silicon, and its compounds, diamond, glass, ceramic or other, all or part of its surface is coated with a thin metal deposit preferably less than 50 nm.
  • a thin metal deposit preferably less than 50 nm.
  • This deposit may be performed on a piece of insulating material monoblock or composite, that is to say, at least the outer surface is of insulating material.
  • the stainless and amagnetic metals such as gold, platinum, rhodium and palladium are preferably chosen. These metals can be deposited by known methods making it possible to control the thickness by adjusting the operating conditions, for example by sputtering, PVD, doping, ion implantation or by an electrolytic process.
  • said micro-mechanical part is a part of the kinematic chain of a watch movement, such as a hairspring, an anchor, an escape wheel or a toothed wheel, or any which other fixed part may for example be the bearing of the axis of a mobile.
  • a hairspring which is the most sensitive part of a watch movement.
  • the invention also relates to a timepiece incorporating such a micro-mechanical part.
  • the invention will be more particularly illustrated by a sprung-balance adjusting device represented in FIG. 1, in which the spiral 1 is produced, for example, in silicon, by adapting the micro-machining processes used in the manufacture of integrated circuits or accelerometers from a silicon wafer or other amorphous or crystalline insulating material.
  • wet chemical etching, plasma dry machining or reactive ion etching (RIE) can be carried out using masks appropriate to the desired contour for the hairspring.
  • the same silicon wafer makes it possible to manufacture a batch of spirals whose characteristics are determined by the thickness of the wafer and the shape of the masks, said characteristics being calculated for operation of the spiral in a plane.
  • FIG. 2 whose cross-sectional representation is limited to the hairspring 1 and to the cock 9, the behavior of the turns 11 is shown in the left-hand part after a certain operating time when the hairspring 1 n has undergone no treatment.
  • the turns 11 deviate from their normal position shown in dotted lines by being attracted by the cock 9 and can even stick to it, which obviously disturbs the normal walking, that is to say to say a march having only movements of extension / contraction in a plane.
  • the metal used is preferably a stainless and amagnetic metal such as gold, platinum, rhodium, palladium.
  • This deposition can be carried out by means of various known methods, such as sputtering, PVD deposition, ion implantation or electroplating.
  • a gold deposit of 15 nm has been carried out by "sputtering", that is to say by performing a cathodic sputtering under vacuum, with a gold target, by applying a voltage of 60 mA for 15 seconds.
  • a silicon spiral has just been described, but other non-conductive amorphous or crystalline materials may also be used, as indicated above, and be treated with a surface metallization avoiding the risk of attraction or sticking.
  • a composite material to produce, for example, a hairspring having a silicon core and a thick coating of silicon dioxide on which the very low metal deposition will be performed.
  • a “composite material” may also include a metal core embedded in an insulating material.
  • the invention is not limited to a hairspring and can be applied to other moving parts such as an anchor, an escape wheel or a toothed wheel, as well as to fixed parts.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
EP06111727A 2006-03-24 2006-03-24 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür Withdrawn EP1837721A1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
EP06111727A EP1837721A1 (de) 2006-03-24 2006-03-24 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
EP07104385.5A EP1837722B1 (de) 2006-03-24 2007-03-19 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
TW096109746A TWI438588B (zh) 2006-03-24 2007-03-21 由絕緣材料製成的微機械零件及其製造方法
KR1020070027483A KR20070096834A (ko) 2006-03-24 2007-03-21 절연성 물질로 만들어지는 미세-기계 부분 및 상기 부분을제조하기 위한 방법
CN2007100893622A CN101042570B (zh) 2006-03-24 2007-03-23 由绝缘材料制成的微型机械部件及其制造方法
JP2007076624A JP5378654B2 (ja) 2006-03-24 2007-03-23 絶縁材でできた微小機械部品及びそれを製造する方法
US11/691,063 US7824097B2 (en) 2006-03-24 2007-03-26 Micro-mechanical part made of insulating material and method of manufacturing the same
HK08103103.0A HK1113948A1 (en) 2006-03-24 2008-03-18 Micro-mechanical part made of insulating material and method of manufacturing the same
JP2013118770A JP5599917B2 (ja) 2006-03-24 2013-06-05 時計仕掛けの機構に組み入れられる微小機械部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06111727A EP1837721A1 (de) 2006-03-24 2006-03-24 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür

Publications (1)

Publication Number Publication Date
EP1837721A1 true EP1837721A1 (de) 2007-09-26

Family

ID=37625990

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06111727A Withdrawn EP1837721A1 (de) 2006-03-24 2006-03-24 Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür

Country Status (2)

Country Link
EP (1) EP1837721A1 (de)
CN (1) CN101042570B (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2589568A1 (de) * 2011-11-03 2013-05-08 Sigatec SA Verbessertes mikromechanisches Bauteil das eine elektrische Entladung ermöglicht
WO2014023584A1 (fr) * 2012-08-07 2014-02-13 Eta Sa Manufacture Horlogere Suisse Système oscillant pour mouvement d'horlogerie
EP2804054A1 (de) * 2013-05-17 2014-11-19 ETA SA Manufacture Horlogère Suisse Antihaftvorrichtung einer Spiralfeder auf einer Brücke
US10274897B2 (en) 2015-06-15 2019-04-30 Citizen Watch Co., Ltd. Speed governor for timepiece
EP3667433A1 (de) 2018-12-12 2020-06-17 Nivarox-FAR S.A. Spiralfeder und ihr herstellungsverfahren

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602007013123D1 (de) * 2007-11-28 2011-04-21 Manuf Et Fabrique De Montres Et De Chronometres Ulysse Nardin Le Locle S A Mechanischer oszillator mit einem optimierten thermoelastischen koeffizienten
EP2104008A1 (de) * 2008-03-20 2009-09-23 Nivarox-FAR S.A. Monoblock-Regulierungsorgan und sein Herstellungsverfahren
EP2264553B1 (de) * 2009-06-19 2016-10-26 Nivarox-FAR S.A. Thermokompensierte Feder und ihr Herstellungsverfahren
EP2706416B1 (de) * 2012-09-07 2015-11-18 The Swatch Group Research and Development Ltd Flexibler Anker mit konstanter Kraft
EP2781968A1 (de) * 2013-03-19 2014-09-24 Nivarox-FAR S.A. Resonator, der weniger empfindlich gegenüber klimatischen Schwankungen ist
CH713151B1 (fr) * 2016-11-23 2020-09-30 Swatch Group Res & Dev Ltd Lame flexible pour l'horlogerie, et procédé de fabrication.
EP3502289B1 (de) * 2017-12-21 2022-11-09 Nivarox-FAR S.A. Herstellungsverfahren einer spiralfeder für uhrwerk
EP3742237A1 (de) 2019-05-23 2020-11-25 Nivarox-FAR S.A. Komponente, insbesondere für uhrwerk mit einer oberflächentopologie, und ihr herstellungsverfahren

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (de) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Mikromechanischer Teil und Verfahren zur dessen Herstellung
WO1999036941A2 (en) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Trench isolation for micromechanical devices
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
WO2004020329A1 (en) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Microelectromechanical system comb actuator and manufacturing method thereof
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (de) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Spiraluhrwerkfeder und Verfahren zu deren Herstellung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0732635A1 (de) * 1995-03-17 1996-09-18 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Mikromechanischer Teil und Verfahren zur dessen Herstellung
WO1999036941A2 (en) * 1998-01-15 1999-07-22 Cornell Research Foundation, Inc. Trench isolation for micromechanical devices
US20020171150A1 (en) * 2000-11-09 2002-11-21 Joachim Rudhard Method for producing a micromechanical structure and a micromechanical structure
WO2004020329A1 (en) * 2002-08-30 2004-03-11 Samsung Electronics Co., Ltd. Microelectromechanical system comb actuator and manufacturing method thereof
WO2004029733A2 (fr) * 2002-09-25 2004-04-08 Fore Eagle Co Ltd Pieces mecaniques
EP1422436A1 (de) * 2002-11-25 2004-05-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA Spiraluhrwerkfeder und Verfahren zu deren Herstellung

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2589568A1 (de) * 2011-11-03 2013-05-08 Sigatec SA Verbessertes mikromechanisches Bauteil das eine elektrische Entladung ermöglicht
CH705724A1 (fr) * 2011-11-03 2013-05-15 Sigatec Sa Pièce de micromécanique, notamment pour l'horlogerie.
WO2014023584A1 (fr) * 2012-08-07 2014-02-13 Eta Sa Manufacture Horlogere Suisse Système oscillant pour mouvement d'horlogerie
EP2804054A1 (de) * 2013-05-17 2014-11-19 ETA SA Manufacture Horlogère Suisse Antihaftvorrichtung einer Spiralfeder auf einer Brücke
US9348313B2 (en) 2013-05-17 2016-05-24 ETA SA Manufacture Horlogére Suisse Anti-adhesion device for a balance spring on a bar
US10274897B2 (en) 2015-06-15 2019-04-30 Citizen Watch Co., Ltd. Speed governor for timepiece
EP3667433A1 (de) 2018-12-12 2020-06-17 Nivarox-FAR S.A. Spiralfeder und ihr herstellungsverfahren

Also Published As

Publication number Publication date
CN101042570A (zh) 2007-09-26
CN101042570B (zh) 2011-09-14

Similar Documents

Publication Publication Date Title
EP1837722B1 (de) Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
EP1837721A1 (de) Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
JP5599917B2 (ja) 時計仕掛けの機構に組み入れられる微小機械部品
EP1904901B1 (de) Verstärktes mikromechanisches teil
EP2456714B1 (de) Verfahren zur Herstellung eines mikromechanischen Teils aus verstärktem Silizium
EP2229470B1 (de) Verfahren zur gewinnung einer metallmikrostruktur und anhand dieses verfahrens gewonnene mikrostruktur
EP0119459B1 (de) Stück, das ein mit einem harten und korrosionsfesten Überzug versehenes Substrat enthält
EP2598952B1 (de) Kontaktlose kraftübertragung in einem uhrwerk
EP3092531B1 (de) Verfahren zur befestigung eines uhrenglases an einem uhrengehäuse
CH714952B1 (fr) Composant horloger, son procédé de fabrication et application de ce procédé.
EP2586880B1 (de) Method for thermal treatment of micromechanical clock parts
CH707669B1 (fr) Pièce de micro-mécanique en matériau électriquement isolant ou en silicium ou un de ses composés et son procédé de fabrication.
WO2008043964A2 (fr) Couche de cuivre comprenant des atomes d' azote inseres, procede d' implantation associe
EP2190020B1 (de) Verfahren zur Verdünnung eines Blocks, der auf ein Substrat aufgebracht ist
EP4327164A1 (de) Uhrkomponente und verfahren zur herstellung einer solchen uhrkomponente
EP4327165A1 (de) Verfahren zur herstellung eines uhrendrehbolzens und durch dieses verfahren erhaltener uhrendrehstift
EP1186683A1 (de) Verfahren zur Härtung von Oberflächen eines Substrats
CH718550A2 (fr) Axe de pivotement horloger et procédé de fabrication d'un tel axe de pivotement horloger.
EP3798739A1 (de) Uhrkomponente
CH705275B1 (fr) Procédé de revêtement de composants mécaniques et composants mécaniques ansi revêtus.
CH705667A2 (fr) Procédé de traitement thermique de pièces micromécaniques horlogères.

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

AKX Designation fees paid
REG Reference to a national code

Ref country code: DE

Ref legal event code: 8566

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20080327