EP1804271B1 - Source compacte à faisceau de rayons X de très grande brillance - Google Patents

Source compacte à faisceau de rayons X de très grande brillance Download PDF

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Publication number
EP1804271B1
EP1804271B1 EP06127095A EP06127095A EP1804271B1 EP 1804271 B1 EP1804271 B1 EP 1804271B1 EP 06127095 A EP06127095 A EP 06127095A EP 06127095 A EP06127095 A EP 06127095A EP 1804271 B1 EP1804271 B1 EP 1804271B1
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EP
European Patent Office
Prior art keywords
rotating anode
rotor
anode
control electronics
ray
Prior art date
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Not-in-force
Application number
EP06127095A
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German (de)
English (en)
French (fr)
Other versions
EP1804271A3 (fr
EP1804271A2 (fr
Inventor
Roland Bernard
Benoît BARTHOD
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Alcatel Lucent SAS
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Alcatel Lucent SAS
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Publication of EP1804271A2 publication Critical patent/EP1804271A2/fr
Publication of EP1804271A3 publication Critical patent/EP1804271A3/fr
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
    • H01J35/1017—Bearings for rotating anodes
    • H01J35/103—Magnetic bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details

Definitions

  • the present invention relates to rotating anode devices for generating an X-ray beam.
  • a radiological device comprising an X-ray tube with rotating anode.
  • the X-ray tube comprises a vacuum chamber, limited by a sealed wall, and in which is disposed a cathode adapted to generate a flow of electrons.
  • a cathode adapted to generate a flow of electrons.
  • In the vacuum chamber is also a rotating anode, driven in rotation about an axis of rotation by a rotor with magnetic bearings.
  • the rotating anode receives on its periphery the flow of electrons from the cathode, and thus emits X-rays which are directed to an output.
  • the magnetic bearings are driven to move the rotor along its axis of rotation, and thereby move the rotating anode in response to an output X-ray beam position sensor to maintain the fixed position. the output X-ray beam. This eliminates the harmful influence of parasitic movements of the rotating anode may result in particular thermal expansion or deformation of some elements of the device.
  • the currently known rotary anode X-ray emitting devices are relatively bulky because, in addition to the rotating anode and its rotary drive device in a vacuum chamber, they require an external vacuum pump for generation and maintenance. vacuum in the vacuum chamber.
  • the known means for rotating the rotating anodes generate vibrations which limit the possibilities of use in certain applications such as electron microscopy, the control of crystallization of polymers, the measurement of small structures or multilayers in the semiconductor manufacturing.
  • the present invention aims first of all at reducing the size and the cost of rotating anode X-ray generating devices.
  • Another object of the invention is to reduce the vibrations resulting from the rotation of the rotating anode.
  • Another object of the invention is to increase the brightness of the X-ray source, while simultaneously reducing the consequences of the unavoidable wear of the rotating anode subjected to a strong electron beam.
  • Another object of the invention is to increase the service life of the rotating anode in such a high-gloss X-ray source.
  • the invention takes advantage of the observation that vacuum pumps of molecular, turbomolecular or hybrid type have now become devices driven at a very high speed, with rotation speeds that can exceed 40,000 rpm, without sensible vibrations.
  • the idea according to the invention is then to use the vacuum pump itself both to generate the vacuum in the vacuum chamber of the X-ray generator, and to produce the rotation of the rotating anode.
  • the invention provides a device for the emission of X-rays, as suggested in claim 1.
  • the device is much more compact and minimizes its total footprint. Its cost is reduced simultaneously, since only one device in rotation ensures both the generation and the maintenance of the vacuum and the rotating drive of the rotating anode.
  • the high rotation speed of the vacuum pump gives the rotating anode a high rotational speed, allowing the rotating anode to withstand greater electron beam energy and emit a beam of X-rays with greater brilliance.
  • a high-energy electron beam is projected onto the rotating anode. But this produces a rapid heating of the rotating anode. It is then useful to thermally insulate the vacuum pump vis-à-vis the rotating anode, to prevent its own heating and degradation. Given the speed of rotation of the pump, it is impossible to use a cooling mode by circulating water in a hollow shaft because sealing problems at the connection between the rotating part and the fixed part appear .
  • the heat supplied to the anode by the X-ray beam must therefore be evacuated preferably solely by radiation.
  • a preferred solution consists in modifying the cooling element between the anode and the pump, so that it acts both as a thermal barrier and as an X-ray barrier.
  • a cooling element on the opposite side of the anode can also contribute to the absorption of the X-rays emitted by the anode, and thus constitute an X-ray barrier with respect to the outside of the enclosure.
  • the element comprises a body of copper or stainless steel of sufficient thickness to absorb the flow of X-rays emitted.
  • This body can take the form of a ring, a disc or a plate, and thus allows a passage between the anode and the turbomolecular pump, in particular at the rotor, to allow the pump to ensure the pumping of the enclosure at the level of the anode.
  • This passage is preferably at the periphery of the disc or the ring.
  • the amount of X-rays emitted at 25 cm from the target is of the order of 2.1.10 10 ⁇ Sv / h.
  • an attenuation level of 3.10 -11 is necessary.
  • this attenuation is obtained when the X-rays pass through an aluminum thickness of 164 mm.
  • the cooling element or elements may advantageously comprise an internal cooling circuit traversed by a heat transfer fluid which discharges the heat energy to the outside.
  • the heat-energy extraction of the rotating anode can be further promoted by providing that the opposite surfaces of the at least one cooling element and the rotating anode are coated with a layer of high-emissivity material, such as black nickel. or black chrome, or a ceramic.
  • a layer of high-emissivity material such as black nickel. or black chrome, or a ceramic.
  • An additional means to promote the extraction of heat energy from the rotating anode is to provide an anode made of materials and structure able to withstand higher temperatures, combined with high-efficiency thermal insulation means vis-à-vis of the vacuum pump.
  • the rotating anode has on the surface an increased temperature which promotes the radiation and therefore the heat transfer to the cooling element or elements.
  • the opposing surfaces of the cooling element (s) and the rotating anode can be concentrically serrated, increasing the radiating surface.
  • Thermal insulation means may further be interposed between the rotor shaft and the rotating anode itself carried by the shaft.
  • Such thermal insulation means may comprise, for example, a ceramic layer made on the corresponding surface of the shaft. The ceramic is less heat-conducting than the metals constituting the shaft and the rotating anode, thereby providing a barrier which restricts the propagation of heat energy to the vacuum pump. This isolation means is simple and effective, and, thanks to the hardness of the ceramic, does not degrade the stability of the rotating anode.
  • the thermal insulation means may comprise an insulating ring or little conductor of heat, preferably for example a stainless steel ring.
  • a stainless steel ring is a poorer thermal insulator than ceramics, it has better mechanical properties.
  • Another solution would be to interpose between the anode and the rotor, a stainless steel ring supporting the highest mechanical stresses, associated with two ceramic rings enclosing the anode and ensuring its maintenance.
  • the presence of a suitable gas in the interior atmosphere of the vacuum pump between the opposite surfaces of the cooling elements and the rotating anode can further promote, by convection, the extraction of heat energy from the anode.
  • Means will be provided to limit the propagation of the gas to the area through which the flow of electrons between the cathode and the rotating anode.
  • the vacuum pump will be of molecular pump, turbomolecular or hybrid type, allowing a high speed of rotation and the realization of a high vacuum.
  • the brightness of the X-ray source can thus be increased.
  • the rotating anode may be an insert at the end of a coaxial shaft of the rotor.
  • the rotating anode can thus be an interchangeable part, easily replaced after wear.
  • the rotating anode may have the general shape of a disc, its peripheral surface constituting at least one target that receives the electron flow from the cathode.
  • Such a structure is simple and compact.
  • the impact of the electron beam on the peripheral surface of the rotating anode causes its progressive wear. This may result in a dimensional variation of the rotating anode, and therefore a deflection and / or focusing defect of the X-ray beam at the output of the device.
  • the rotor may be biased by magnetic bearings controlled by a bearing control electronics, the assembly determining the axial position and the radial position of the rotor in the stator.
  • the bearing control electronics can be adapted to voluntarily modify at least the axial position of the rotor along its axis of rotation.
  • control electronics can be adapted to modify the axial position of the rotor as a function of the wear of the rotating anode, to move a worn zone of the rotating anode away from the impact zone. of the electron beam.
  • control electronics can move the rotor back and forth along its axis of rotation during operation, thus displacing the impact zone of the electron beam on a larger peripheral surface of the rotating anode, and thus distributing the wear over a larger area.
  • the peripheral surface of the rotating anode may consist of several adjacent annular bands, each consisting of distinct materials, to be each adapted to the production of X-rays at a distinct determined energy.
  • the bearing control electronics then makes it possible to axially move the rotor to place under the incident electron beam a chosen annular band corresponding to the intended application.
  • the bearing control electronics can be further adapted to voluntarily modify the radial position of the rotor in order to make up for the wear of the rotating anode and thus to maintain, through a collection device, the focusing of the X-ray beam on a precise convergence zone at the output.
  • Another function that can be fulfilled by modifying the radial position of the rotor is to move the focal point to change over time the X-ray impact zone on the collection device and thus increase the life of the device of collection.
  • the invention provides its use as an X-ray source in a crystallization control system, or as an X-ray source in an X-ray microscope in the water window, or as an X-ray source for measuring small structures or multilayers in semiconductor fabrication.
  • the device illustrated on the figure 1 comprises a vacuum pump 1, of molecular, turbomolecular or hybrid type, a rotating anode 2, a cathode 3 generating an electron beam 4, and a collection device 5 which collects and conditions the X-ray beam 6 produced by the device.
  • the vacuum pump 1 consists, in a manner known per se, of a rotor 1 a rotatable about an axis II in a stator 1b, driven in rotation by a motor 1c, and held in position by bearings or bearings 10a, 10b, 10c, 10d and 10e schematically illustrated.
  • the bearings or bearings 10a-10e may be structures usually used in vacuum pumps, for example ball or needle bearings, plain bearings, gas bearings, or magnetic bearings. These allow fast rotations at more than 40,000 revolutions per minute, without vibration, with a controlled stability of the order of one micron.
  • the rotor 1a is connected to the motor 1c by a motor shaft 1d.
  • the rotating anode 2 is secured to the rotor 1a of the pump 1, disposed coaxially with the rotor 1a.
  • the rotating anode 2 is an insert at the end of a coaxial shaft 1a of the rotor 1a.
  • the sealed peripheral envelope 1f of the pump also surrounds the rotating anode 2, and itself constitutes at least a part of the sealed wall of a vacuum chamber 7 in which the electron beam 4 and the beam propagate.
  • the vacuum chamber 7 contains for this purpose the rotating anode 2, as well as the cathode 3, and the collection device 5.
  • the electron beam 4 produced by the cathode 3 propagates in a vacuum, since the cathode 3, and strikes the peripheral surface 2a of the rotating anode 2, producing the X-ray beam 6 which propagates towards the collection device 5.
  • the collection device 5 may be contained in a vacuum enclosure 7 monobloc. Alternatively, the collection device 5 may be contained in a portion attached to the vacuum enclosure 7.
  • the peripheral surface 2a of the rotating anode 2 is cylindrical, coaxial with the axis II.
  • the cathode 3 is oriented so that the incident beam of electrons 4 is inclined relative to the axis II, which produces an emitted x-ray beam 6 also inclined.
  • the rotating anode peripheral surface 2a which receives the electron beam 4 may be a peripheral portion of a radial face 2b or 2c of the rotating anode 2.
  • the shaft 1 e In its end portion carrying the rotating anode 2, the shaft 1 e is covered with a thermally insulating layer 1h, so that the rotating anode 2 is in contact with the layer 1h providing thermal insulation.
  • This layer 1h may in particular comprise a stainless steel ring.
  • a first cooling element 8 and a second cooling element 9 are provided, both of which are fixed to the stator 1b or pump body, or to the sealed peripheral envelope 1f of the pump, facing one of the main radial faces 2b or 2c of the rotating anode 2, which is in the form of a disk.
  • the cooling elements 8 and 9 are close to the main radial faces 2b and 2c of the rotating anode 2, and receive the thermal radiation energy emitted by the rotating anode 2 in operation.
  • the cooling elements 8 and 9 comprise an internal cooling circuit, respectively 8a and 9a, traversed by a heat transfer fluid which discharges to the outside the heat energy received from the rotating anode 2.
  • the cooling element 8 is coated with a layer 8b of high-emissivity material, for example black nickel or black chrome, but also some ceramics. It is the same for the cooling element 9 which is coated with such a layer 9b.
  • a layer 8b of high-emissivity material for example black nickel or black chrome, but also some ceramics. It is the same for the cooling element 9 which is coated with such a layer 9b.
  • the main radial faces 2b and 2c of the rotating anode 2 may each be coated with a layer of high emissivity material. This increases the heat energy transfer by radiation from the rotating anode 2 to the cooling elements 8 and 9, favoring the cooling of the rotating anode 2.
  • the cooling element 8 comprises a 10.5 mm thick annular copper body which serves as an X-ray barrier and prevents them from reaching the outside of the enclosure.
  • the copper ring could be replaced by a 16.5 mm thick stainless steel ring.
  • the cooling element 9 comprises a 10.5 mm thick plate or copper disk body which serves as an X-ray barrier and prevents them from reaching the outside of the enclosure.
  • the copper disc could be replaced by a 16.5 mm thick stainless steel disc.
  • the wall of the vacuum chamber is usually made of stainless steel to ensure the protection of the external environment in case of failure of the pump.
  • the cooling element 9 is attached to this wall, the wall itself contributes to the barrier function with respect to the X-rays.
  • the thickness of the material allowing a total protection of the exterior vis-à-vis X-rays are then calculated taking into account the combination of the cooling element 9 and the wall, in order to achieve the required level of attenuation.
  • means are further provided for moving the rotor 1a along its axis of rotation I-I. It is understood that such axial displacement of the rotor 1a causes the same axial displacement of the rotating anode 2, and makes a modification of the impact zone 4a of the electron beam 4 on the peripheral surface 2a of the rotating anode 2.
  • the rotor 1a can be biased by magnetic bearings 10a to 10e, schematically shown, controlled by a bearing control electronics 10f, the assembly determining the axial position and the radial position of the rotor 1a in the stator 1b.
  • Magnetic bearings as usually used in vacuum pumps comprise a plurality of independent magnetic poles, distributed on the frame and on the shaft of the vacuum pump, and whose magnetic field is generated by coils fed by the electronic control of bearings according to signals from position sensors equally distributed between the frame and the shaft of the vacuum pump.
  • the position of the rotor can be controlled along five axis axes, comprising the longitudinal axis and four radial axes contained in the planes of two different straight sections. But it is also possible to control the rotor, by means of electromagnets associated with a control electronics, only along certain axial or radial axes called “active”, while other axes called “Passive”, controlled by permanent magnets, will require no piloting.
  • the bearing control electronics is programmed to keep as constant as possible the axial and radial positions of the rotor 1a in the stator 1b.
  • the radial elements 10a to 10d of the magnetic bearings which normally provide the radial positioning of the rotor 1a, maintain this radial position constant.
  • the axial elements 10e of the magnetic bearings which ensure the axial positioning of the rotor, are arranged so that the bearing control electronics 10f can voluntarily modify the axial position of the rotor 1a along its axis of rotation I-I. It will be understood that the axial position setpoint received by the bearing control electronics 10f is modified for this purpose, said command setpoint being generated by a control circuit 10g.
  • the bearing control electronics 10f can also control the radial elements 10a to 10d of the magnetic bearings, to deliberately modify the radial position of the rotor 1a in the stator 1b. This modifies for this the radial position setpoint, generated by the control circuit 10g.
  • control circuit 10g can generate the positions of axial and / or radial position as a function of information received from sensors arranged on the other organs of the device of the invention.
  • a wear sensor 10h making it possible to detect the wear of the peripheral surface 2a of the rotary anode 2, and the signal received from this wear sensor 10h is used by the control circuit 10g for moving the worn rotating anode zone away from the impact zone 4a of the electron beam 4, by axial displacement of the rotating anode 2.
  • control circuit 10g and the bearing control electronics 10f can move the rotor 1a back and forth along its axis of rotation I-I during operation.
  • the impact zone 4a of the electron beam 4 is thus displaced on a peripheral surface of the rotating anode 2, thus distributing the wear over a larger area, and simultaneously reducing the local wear. of each peripheral surface portion 2a of the rotating anode 2.
  • means may be provided for modifying the position and / or the orientation of the cathode 3, thus modifying the zone impact 4a of the electron beam 4 on the peripheral zone 2a of the rotating anode 2.
  • the rotating anode 2 may be entirely made of the same material. Alternatively, it may consist of a base material which is locally coated with the material necessary for the formation of X-rays along its peripheral surface 2a.
  • the base material must have mechanical and thermal characteristics compatible with the operating conditions of the anode, such as aluminum, copper, stainless steel, titanium or silicon carbide, without this list being limiting.
  • the peripheral surface 2a of the rotating anode 2 may preferably be made of a material such as copper, molybdenum, tungsten, beryllium oxide, anodized aluminum, oxide ceramic or any other oxide, without this list is restrictive.
  • the material will be chosen according to the energy required for the application for which the X-ray source is intended. Copper allows the formation of X-rays at 8 keV. Molybdenum allows the formation of X-rays at 17 keV.
  • the metal rotating anode 2 It may be advantageous to produce the metal rotating anode 2, the metal being able to contribute to better distributing and evacuating the thermal energy produced by the impact of the electron beam 4, in comparison with the oxides which poorly lead the heat to high temperature. In other words, the metal contributes to evacuate the heat throughout the rotating anode 2, avoiding that the thermal energy remains localized on the impact zone 4a of the electron beam 4.
  • Cooling elements 8 and 9 may advantageously be made of a good heat-conducting metal, for example copper.
  • the peripheral surface 2a of the rotating anode 2 may consist of several adjacent annular strips of different materials each adapted to the production of X-rays according to a distinct determined energy.
  • a first annular copper strip a second annular molybdenum strip.
  • the bearing control electronics 10f then makes it possible to axially move the rotor to place a selected annular band under the incident electron beam 4.
  • X-rays can be produced at 8 keV
  • X-rays can be produced. 17 keV.
  • Other properties of X-rays can be obtained for example with strips of other materials such as stainless steel, inconel.
  • the rotating anode 2 can be symmetrically machined, so that it can be turned over completely once worn.
  • the facing surfaces 8b and 9b of the cooling elements 8 and 9 and the main radial surfaces 2b and 2c of the rotating anode 2 are concentrically serrated, forming a succession of concentric annular ribs with a triangular profile, in order to increase the radiation cooling exchange surface.
  • the wear sensor 10h placed as illustrated on the figure 1 detects the displacement of the convergence zone 11.
  • the bearing control electronics 10f can be adapted to voluntarily modify the radial position of the rotor 1a, to the right on the figure 1 , in order to make up for the wear of the rotating anode 2 and thus maintain the focusing of the X-ray beam on the convergence zone 11 which is precise at the output.
  • an electrical connection device allowing the polarization of the rotating anode 2 and the evacuation of the electric current resulting from the impact of the electron beam 4.
  • This device can be a conductive structure by sliding contact.
  • the electrical conduction can be ensured by providing, between at least a portion of the rotating anode 2 and a conductive fixed portion, an electric discharge zone in a conductive gas.
  • the rotating anode 2 is disk-shaped, the ends of which are slightly inclined to direct the X-ray beam towards the collection device 5.
  • turbomolecular pumps The operation of turbomolecular pumps is based on a peripheral velocity of the blades of the order of the thermal velocity of the molecules, several hundred meters per second.
  • the use of vacuum pump technology to rotate the rotating anode 2 allows a very high speed rotation of the peripheral surface 2a of the rotating anode 2, with very precise servo-control and an almost total absence of vibrations.
  • the very fast rotation of the rotating anode 2 makes it possible to increase the power of the incident electron beam 4, thus producing a very high-gloss X-ray source.
  • the cathode 3 is brought closer to the peripheral surface 2a of the rotating anode 2, and the collection device 5 is positioned closer to the peripheral surface 2a of the rotating anode 2.
  • the compactness of the X-ray source is further increased, the convergence capacitance of the emitted x-ray beam is improved, thereby improving the flux on a sample placed in the convergence zone 11, and the losses are reduced.
  • a compact, vibration-free X-ray source is thus produced, which delivers a monochromatic beam of high gloss focused on a convergence zone 11 of very small size.
  • the device can be used as an X-ray source in a crystallization control system.
  • the small size of the X-ray source according to the invention makes it possible to envisage its use as a means of systematic control of the crystallization of proteins.
  • Such control currently done with expensive and cumbersome rotating anode sources, can be performed more easily with an X-ray source according to the invention, which produces a beam of high intensity with well-defined properties (spectral purity, divergence and stability).
  • X-ray detection thus makes it possible to monitor the crystallization in a more precise and automated manner.
  • the device according to the invention can be used as an X-ray source in an X-ray microscope in the water window.
  • the microscopy in the water window is a very promising technique, but today limited because it requires a source of radiation synchrotron, very expensive, which allows to emit an X-ray of power and monochromaticity satisfactory. The cost of these sources of radiation prevents their development.
  • a source of X-rays according to the invention can achieve an X-ray power sufficient for microscopic application in the window of water.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP06127095A 2006-01-03 2006-12-22 Source compacte à faisceau de rayons X de très grande brillance Not-in-force EP1804271B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0650007A FR2895831B1 (fr) 2006-01-03 2006-01-03 Source compacte a faisceau de rayons x de tres grande brillance

Publications (3)

Publication Number Publication Date
EP1804271A2 EP1804271A2 (fr) 2007-07-04
EP1804271A3 EP1804271A3 (fr) 2007-10-17
EP1804271B1 true EP1804271B1 (fr) 2010-03-17

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EP06127095A Not-in-force EP1804271B1 (fr) 2006-01-03 2006-12-22 Source compacte à faisceau de rayons X de très grande brillance

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Country Link
US (1) US7515687B2 (ja)
EP (1) EP1804271B1 (ja)
JP (1) JP2007184277A (ja)
KR (1) KR20070073605A (ja)
CN (1) CN101026077B (ja)
AT (1) ATE461523T1 (ja)
DE (1) DE602006012924D1 (ja)
FR (1) FR2895831B1 (ja)
IL (1) IL180440A (ja)
TW (1) TW200802488A (ja)

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FR2882886B1 (fr) * 2005-03-02 2007-11-23 Commissariat Energie Atomique Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source
DE102008062671B4 (de) * 2008-12-17 2011-05-12 Siemens Aktiengesellschaft Röntgeneinrichtung
US9153408B2 (en) 2010-08-27 2015-10-06 Ge Sensing & Inspection Technologies Gmbh Microfocus X-ray tube for a high-resolution X-ray apparatus
DE102011083729A1 (de) * 2011-09-29 2013-04-04 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Bestimmung des Verschleißes einer Röntgenanode
JP6166145B2 (ja) 2013-10-16 2017-07-19 浜松ホトニクス株式会社 Ｘ線発生装置
TWI552187B (zh) * 2014-11-20 2016-10-01 能資國際股份有限公司 冷陰極ｘ射線產生器的封裝結構及其抽真空的方法
JP6558908B2 (ja) * 2015-02-09 2019-08-14 株式会社大阪真空機器製作所 Ｘ線発生装置用ターゲットマウントおよびこれを備えたｘ線発生装置
CN107546089B (zh) * 2016-08-04 2024-05-28 上海钧安医疗科技有限公司 一种大功率x射线球管
JP6966863B2 (ja) * 2017-04-17 2021-11-17 ブルカージャパン株式会社 Ｘ線発生装置
CN109343105B (zh) * 2018-09-11 2021-07-13 东莞中子科学中心 一种用于白光中子源带电粒子探测谱仪的控制系统
CN113205986B (zh) * 2021-05-10 2021-11-19 浙江万森电子科技有限公司 一种高效散热的x射线管

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CN101026077B (zh) 2010-11-10
EP1804271A3 (fr) 2007-10-17
ATE461523T1 (de) 2010-04-15
JP2007184277A (ja) 2007-07-19
CN101026077A (zh) 2007-08-29
IL180440A (en) 2011-12-29
DE602006012924D1 (de) 2010-04-29
US7515687B2 (en) 2009-04-07
KR20070073605A (ko) 2007-07-10
EP1804271A2 (fr) 2007-07-04
US20070153978A1 (en) 2007-07-05
TW200802488A (en) 2008-01-01
FR2895831A1 (fr) 2007-07-06
IL180440A0 (en) 2007-06-03
FR2895831B1 (fr) 2009-06-12

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