EP1804271A3 - Source compacte à faisceau de rayons X de très grande brillance - Google Patents

Source compacte à faisceau de rayons X de très grande brillance Download PDF

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Publication number
EP1804271A3
EP1804271A3 EP06127095A EP06127095A EP1804271A3 EP 1804271 A3 EP1804271 A3 EP 1804271A3 EP 06127095 A EP06127095 A EP 06127095A EP 06127095 A EP06127095 A EP 06127095A EP 1804271 A3 EP1804271 A3 EP 1804271A3
Authority
EP
European Patent Office
Prior art keywords
anode
brightness
ray beam
vacuum pump
compact source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06127095A
Other languages
German (de)
English (en)
Other versions
EP1804271B1 (fr
EP1804271A2 (fr
Inventor
Roland Bernard
Benoît BARTHOD
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP1804271A2 publication Critical patent/EP1804271A2/fr
Publication of EP1804271A3 publication Critical patent/EP1804271A3/fr
Application granted granted Critical
Publication of EP1804271B1 publication Critical patent/EP1804271B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
    • H01J35/1017—Bearings for rotating anodes
    • H01J35/103—Magnetic bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Un dispositif d'émission de rayons X selon l'invention comprend une pompe à vide (1) dont l'enveloppe périphérique étanche (1f) contient une cathode (3) d'émission de flux d'électrons (4), une anode tournante (2), montée en bout d'arbre (1e) de la pompe à vide (1), et un dispositif de collection (5) collectant un faisceau émis de rayons X (6). On réduit ainsi considérablement l'encombrement de la source de rayons X, et, grâce à la rotation très rapide et stable de l'anode tournante (2) solidaire du rotor (1a) de la pompe à vide (1)> on réalise une source à très grande brillance. On peut en outre déplacer axialement l'anode tournante (2) pour compenser l'usure qu'elle subit par l'impact du faisceau incident d'électrons (4) provenant de la cathode (3).
Selon l'invention, le dispositif comprend en outre au moins un élément refroidisseur fixé au stator de pompe à vide ou à l'enveloppe périphérique étanche en regard de l'une des faces radiales principales de l'anode tournante pour absorber l'énergie thermique de rayonnement émise par l'anode tournante en fonctionnement.
EP06127095A 2006-01-03 2006-12-22 Source compacte à faisceau de rayons X de très grande brillance Not-in-force EP1804271B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0650007A FR2895831B1 (fr) 2006-01-03 2006-01-03 Source compacte a faisceau de rayons x de tres grande brillance

Publications (3)

Publication Number Publication Date
EP1804271A2 EP1804271A2 (fr) 2007-07-04
EP1804271A3 true EP1804271A3 (fr) 2007-10-17
EP1804271B1 EP1804271B1 (fr) 2010-03-17

Family

ID=36822366

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06127095A Not-in-force EP1804271B1 (fr) 2006-01-03 2006-12-22 Source compacte à faisceau de rayons X de très grande brillance

Country Status (10)

Country Link
US (1) US7515687B2 (fr)
EP (1) EP1804271B1 (fr)
JP (1) JP2007184277A (fr)
KR (1) KR20070073605A (fr)
CN (1) CN101026077B (fr)
AT (1) ATE461523T1 (fr)
DE (1) DE602006012924D1 (fr)
FR (1) FR2895831B1 (fr)
IL (1) IL180440A (fr)
TW (1) TW200802488A (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2882886B1 (fr) * 2005-03-02 2007-11-23 Commissariat Energie Atomique Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source
DE102008062671B4 (de) * 2008-12-17 2011-05-12 Siemens Aktiengesellschaft Röntgeneinrichtung
JP5675987B2 (ja) 2010-08-27 2015-02-25 ジーイー センシング アンド インスペクション テクノロジーズ ゲ−エムベーハー 高分解能ｘ線装置用の微小焦点ｘ線管
DE102011083729A1 (de) * 2011-09-29 2013-04-04 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Bestimmung des Verschleißes einer Röntgenanode
JP6166145B2 (ja) 2013-10-16 2017-07-19 浜松ホトニクス株式会社 Ｘ線発生装置
TWI552187B (zh) * 2014-11-20 2016-10-01 能資國際股份有限公司 冷陰極ｘ射線產生器的封裝結構及其抽真空的方法
JP6558908B2 (ja) * 2015-02-09 2019-08-14 株式会社大阪真空機器製作所 Ｘ線発生装置用ターゲットマウントおよびこれを備えたｘ線発生装置
CN107546089B (zh) * 2016-08-04 2024-05-28 上海钧安医疗科技有限公司 一种大功率x射线球管
JP6966863B2 (ja) * 2017-04-17 2021-11-17 ブルカージャパン株式会社 Ｘ線発生装置
CN109343105B (zh) * 2018-09-11 2021-07-13 东莞中子科学中心 一种用于白光中子源带电粒子探测谱仪的控制系统
CN113205986B (zh) * 2021-05-10 2021-11-19 浙江万森电子科技有限公司 一种高效散热的x射线管

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2018503A (en) * 1978-03-31 1979-10-17 Siemens Ag Vacuum tube arrangements
GB2131224A (en) * 1982-11-25 1984-06-13 Atomic Energy Authority Uk Intense microfocus X-ray source
US4688239A (en) * 1984-09-24 1987-08-18 The B. F. Goodrich Company Heat dissipation means for X-ray generating tubes

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH231981A (de) * 1940-12-02 1944-04-30 C H F Mueller Aktiengesellscha Röntgenröhre mit Drehanode.
US3610984A (en) * 1967-12-28 1971-10-05 Tokyo Shibaura Electric Co Rotating-anode x-ray tube with multiple focal areas
GB1328185A (en) * 1972-02-02 1973-08-30 Larionov I N Method of joining electrically conducting bodies
JPS5246790A (en) * 1975-10-13 1977-04-13 Toshiba Corp Anode of x-ray tube
GB1579341A (en) * 1976-04-28 1980-11-19 Emi Ltd X-ray generating tubes
DE2711847C2 (de) * 1977-03-18 1979-03-22 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Röntgenröhre
US4417355A (en) * 1981-01-08 1983-11-22 Leningradskoe Npo "Burevestnik" X-Ray fluorescence spectrometer
DE3151229A1 (de) * 1981-12-23 1983-06-30 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur optimierung der emission einer roentgenroehre
JPS59151735A (ja) * 1983-02-18 1984-08-30 Toshiba Corp 複数焦点ｘ線管
JPS6012654A (ja) * 1983-06-30 1985-01-23 Shimadzu Corp Ｘ線管の回転陽極装置
FR2566987B1 (fr) * 1984-06-29 1986-10-10 Thomson Cgr Dispositif radiologique a asservissement en position de foyer
US4943989A (en) * 1988-08-02 1990-07-24 General Electric Company X-ray tube with liquid cooled heat receptor
JP2815876B2 (ja) * 1988-09-30 1998-10-27 株式会社東芝 回転陽極ｘ線管
US4975621A (en) * 1989-06-26 1990-12-04 Union Carbide Corporation Coated article with improved thermal emissivity
US5107526A (en) * 1990-10-31 1992-04-21 The United State Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water window imaging x-ray microscope
JPH0562622A (ja) * 1991-09-05 1993-03-12 Hitachi Medical Corp 回転陽極ｘ線管
JPH05174751A (ja) * 1991-12-20 1993-07-13 Hitachi Medical Corp 回転陽極ｘ線管用ターゲット
US5511105A (en) * 1993-07-12 1996-04-23 Siemens Aktiengesellschaft X-ray tube with multiple differently sized focal spots and method for operating same
US6327340B1 (en) * 1999-10-29 2001-12-04 Varian Medical Systems, Inc. Cooled x-ray tube and method of operation
JP2002352757A (ja) * 2001-05-24 2002-12-06 Toshiba Corp 回転陽極型ｘ線管装置
US6560315B1 (en) * 2002-05-10 2003-05-06 Ge Medical Systems Global Technology Company, Llc Thin rotating plate target for X-ray tube
DE10240628B4 (de) * 2002-09-03 2012-06-21 Siemens Ag Röntgenröhre mit Ringanode und Röntgen-System mit einer solchen Röntgenröhre

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2018503A (en) * 1978-03-31 1979-10-17 Siemens Ag Vacuum tube arrangements
GB2131224A (en) * 1982-11-25 1984-06-13 Atomic Energy Authority Uk Intense microfocus X-ray source
US4688239A (en) * 1984-09-24 1987-08-18 The B. F. Goodrich Company Heat dissipation means for X-ray generating tubes

Also Published As

Publication number Publication date
KR20070073605A (ko) 2007-07-10
ATE461523T1 (de) 2010-04-15
EP1804271B1 (fr) 2010-03-17
FR2895831A1 (fr) 2007-07-06
IL180440A0 (en) 2007-06-03
CN101026077A (zh) 2007-08-29
JP2007184277A (ja) 2007-07-19
US7515687B2 (en) 2009-04-07
CN101026077B (zh) 2010-11-10
IL180440A (en) 2011-12-29
DE602006012924D1 (de) 2010-04-29
FR2895831B1 (fr) 2009-06-12
EP1804271A2 (fr) 2007-07-04
TW200802488A (en) 2008-01-01
US20070153978A1 (en) 2007-07-05

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