EP1798417A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP1798417A3
EP1798417A3 EP06023139A EP06023139A EP1798417A3 EP 1798417 A3 EP1798417 A3 EP 1798417A3 EP 06023139 A EP06023139 A EP 06023139A EP 06023139 A EP06023139 A EP 06023139A EP 1798417 A3 EP1798417 A3 EP 1798417A3
Authority
EP
European Patent Office
Prior art keywords
components
vacuum pump
attached active
housing
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06023139A
Other languages
English (en)
French (fr)
Other versions
EP1798417B1 (de
EP1798417A2 (de
Inventor
Bernhard Tatzber
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1798417A2 publication Critical patent/EP1798417A2/de
Publication of EP1798417A3 publication Critical patent/EP1798417A3/de
Application granted granted Critical
Publication of EP1798417B1 publication Critical patent/EP1798417B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem schnelldrehenden Rotor (2), mit auf diesem angebrachten pumpaktiven Bauteilen (4), mit einem Stator (9) und auf diesem angebrachten pumpaktiven Bauteilen (5) und mit einem ersten (10) und einem zweiten (11) Gehäusebauteil. Um die Montage und Demontage zu vereinfachen und Herstellkosten zu senken wird vorgeschlagen, das erste und das zweite Gehäusebauteil an ihrer Verbindungsstelle (13) mit sich derart überlappende Strukturen (14,16) zu versehen, dass eine Verriegelung der Bauteile gegen eine Bewegung in lediglich axialer Richtung gegeben ist.
EP06023139A 2005-12-14 2006-11-07 Vakuumpumpe Active EP1798417B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005059636A DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1798417A2 EP1798417A2 (de) 2007-06-20
EP1798417A3 true EP1798417A3 (de) 2010-05-19
EP1798417B1 EP1798417B1 (de) 2011-09-07

Family

ID=37814035

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06023139A Active EP1798417B1 (de) 2005-12-14 2006-11-07 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP1798417B1 (de)
AT (1) ATE523693T1 (de)
DE (1) DE102005059636A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800009500A1 (it) * 2018-10-16 2020-04-16 Eurosets Srl Pompa centrifuga a trascinamento magnetico
GB2607605B (en) * 2021-06-08 2023-07-05 Leybold Gmbh Apparatus and vacuum system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (de) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Turbomolekularpumpe und Flansch
EP1517045A2 (de) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Verbindungselement

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4122487C2 (de) * 1991-07-06 1997-09-18 Grundfos Int Förderaggregat aus einer Strömungsarbeitsmaschine und aus einem Antriebsmotor
DE9214308U1 (de) * 1992-10-23 1993-01-07 Siegenia-Frank Kg, 5900 Siegen, De
DE19909371A1 (de) * 1999-03-03 2000-09-07 Wilo Gmbh Kreiselpumpe mit Serviceschnittstelle
DE29906811U1 (de) * 1999-04-20 2000-08-31 Brinkmann Pumpen K H Brinkmann Mehrstufige Kreiselpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (de) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Turbomolekularpumpe und Flansch
EP1517045A2 (de) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Verbindungselement

Also Published As

Publication number Publication date
ATE523693T1 (de) 2011-09-15
DE102005059636A1 (de) 2007-06-21
EP1798417B1 (de) 2011-09-07
EP1798417A2 (de) 2007-06-20

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