EP1781410B1 - Procede pour deplacer de petites quantites de liquide dans des microcanaux au moyen d'ondes acoustiques - Google Patents
Procede pour deplacer de petites quantites de liquide dans des microcanaux au moyen d'ondes acoustiques Download PDFInfo
- Publication number
- EP1781410B1 EP1781410B1 EP20050802009 EP05802009A EP1781410B1 EP 1781410 B1 EP1781410 B1 EP 1781410B1 EP 20050802009 EP20050802009 EP 20050802009 EP 05802009 A EP05802009 A EP 05802009A EP 1781410 B1 EP1781410 B1 EP 1781410B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- channel system
- channel
- sound
- microchannel
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
- B01F31/85—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations with a vibrating element inside the receptacle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/08—Regulating or influencing the flow resistance
- B01L2400/084—Passive control of flow resistance
- B01L2400/088—Passive control of flow resistance by specific surface properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0391—Affecting flow by the addition of material or energy
Definitions
- the invention relates to a method for moving small amounts of liquid in microchannels and a microchannel system for carrying out the method.
- Miniaturized fluidic systems often consist of closed channels that can be made of plastics, semiconductor materials, or glass. Such closed channels are z. In MG Pollack and RB Fair, Applied Physics Letters, 2000, 77, 1725-1728 described.
- Manufacturing processes are z. As wet-chemical etching or hot embossing of plastics to produce the channels in the substrates. Subsequently, the substrates structured in this way are closed with a lid. Typical channel dimensions are diameters in the range between 50 ⁇ m and a few mm and a length of the entire system of a few cm. For lab-on-the-chip applications in these channels z. B. biochemical reactions are performed. In general, dosers, mixers, reaction chambers and branches would have to be realized in such a system. To move the liquid pump-like systems are necessary.
- Electrokinetic pumps require z. However, for example, voltages of several 100 volts, so are not suitable for portable devices. In the so-called lab-CDs, the liquids can only be moved in one direction, namely to the outside. Miniaturized peristaltic pumps are very expensive and therefore expensive.
- a hydrophilic channel can be filled with a solution, but with a filled channel, no further movement or flow is possible, which would be mediated by the capillary force.
- the object of the present invention is to provide a method and a system with which small quantities of liquid in microchannel systems can be moved in an easily controllable and programmable manner.
- the procedure should be easy to carry out and the necessary Materials small, robust and lightweight, so that the process can also be realized with portable chip laboratories.
- an amount of liquid is introduced into a channel system which comprises at least one region which corresponds topologically to a ring, so that a closed path of the liquid is possible.
- acoustic waves are radiated into the liquid, which have at least one asymmetric component in the plane of the channel system, which defines the direction of movement of the liquid. Due to the momentum transfer of the sound waves to the liquid, a flow is generated in the liquid ("acoustic streaming"). Due to the movement of the liquid in a closed path, only a small amount of power is required, since no great hydrostatic pressure has to be built up on the closed path in order to generate a movement.
- the asymmetric component imparts a direction of movement to the fluid, allowing it to move along the closed path.
- the channel system may have different geometries as long as a topologically annular region is included which serves for the directional movement of the liquid on a closed path.
- a topologically annular region is included which serves for the directional movement of the liquid on a closed path.
- Especially simple is the use of a simple ring without branches.
- the channel system is open at the top, z. B. as a groove in a substrate. Due to the movement mediation due "Acoustic Streaming" does not require an upper degree. The flow-induced movement can also take place in an open channel.
- a channel system Insensitive to external influences is a channel system that is enclosed on all sides.
- the filling of such a channel system is carried out either before a lid is applied to the channel-shaped channel system or through a corresponding filling opening to the z. B. a pipette can be applied.
- a vent opening is provided at another point of the channel system, so that the air displaced by the introduced liquid can escape. Since the motion in the channel system is mediated by the sound-induced flow, a tight seal is not necessary, as is the case with other prior art methods that use hydrostatic pressure to move.
- the channel system is simply provided in a substrate.
- Advantageous is the use of a material that is penetrated by acoustic waves, for example, glass, non-elastic plastic or semiconductor materials. In this way it is ensured even when externally arranged sound generator, that the movement is mediated by the generated with the sound waves "acoustic streaming" and not by a sound wave induced movement of the substrate material itself.
- the sound waves are generated according to the invention unit at least one interdigital transducer, as they are known from the high-frequency filter technology.
- interdigital transducers mounted on piezoelectric materials can be used to excite acoustic waves by applying a frequency of 1 to a few hundred MHz. in particular surface acoustic waves, are used in the piezoelectric material.
- the sound waves generated in this way can be coupled into the system, as well as in DE 103 25 313 B3 in the case of film-shaped capillary gaps is described.
- the interdigital transducer is brought into direct contact with the liquid, is thus part of the microchannel system.
- the sound wave which is generated with the interdigital transducer, transferred directly into the liquid.
- a further advantageous embodiment provides that the channel-like channel system is covered with a film, preferably made of plastic, against which the interdigital transducer is pressed directly in order to allow direct transmission of the sound waves into the liquid.
- the piezoelectric material usually a chip, can also be used directly as a termination of the channel system and thus represent a part of the channel system.
- interdigital transducers can be provided at different points of the channel system.
- a microchannel system according to the invention for moving small quantities of liquid has at least one channel, which constitutes a closed path. At least one interdigital transducer is arranged such that a sound wave can be coupled in directionally into the channel.
- the inventive method is particularly advantageous to use when individual areas of the microchannel system are biologically, chemically, physically or otherwise functionalized.
- the liquid can be passed by means of the method according to the invention in a microchannel system according to the invention, so that the entire liquid is safely in contact with the functionalization.
- the liquid can be guided past correspondingly arranged measuring points.
- FIG. 1a shows a longitudinal section through a microchannel system. Visible is the microchannel 3, the z. B. has a diameter in the range of 50 microns to a few mm. He is z. B. formed by wet chemical etching in a substrate 1, the z. B. made of glass, semiconductor materials or of a non-elastic plastic. In the channel, the liquid moves, which is exemplified by the crosses 5. The direction of movement is designated 19.
- FIG. 1b shows a cross section in the direction A of FIG. 1a ,
- the annular channel 3 has a filling opening 7, which is visible in this cross-sectional view.
- a piezoelectric substrate 13 is arranged in the region of a corner, on which there is an interdigital transducer 11, which can be driven in a manner known per se and therefore not shown here with an alternating electric field.
- a coupling medium for example water
- Interdigital transducers known per se from surface acoustic wave filter technology, include comb-shaped metallic electrodes whose double finger spacing defines the wavelength of the surface acoustic wave and which are obtained by optical photolithography techniques, e.g. B. can be made in the range of 10 microns finger spacing.
- Such interdigital transducers are provided on piezoelectric crystals to excite thereon surface acoustic waves in a conventional manner. Applying an alternating electric field of a few to a few 100 MHz in a conventional manner to the interdigitated finger electrodes of the interdigital transducer 11 causes the generation of surface acoustic waves, similar to DE 103 25 313 B3 described for the training of Sound waves 15, 17 lead.
- the application of the alternating field can via corresponding electrical connections or z. B. by wireless irradiation.
- FIG. 1a corresponds approximately to the line of sight B, the in FIG. 1b is specified.
- FIG. 1a The position of the interdigital transducer 11 and the emission directions of the sound waves 15, 17 are also in FIG. 1a although indicated in the longitudinal section of the FIG. 1a would not be visible in itself.
- FIGS. 1a and 1b The arrangement shown can be used as follows. Through the filling opening 7 liquid is introduced into the system. In this case, the capillary force can be utilized, which sucks the liquid through the channel 3 therethrough. Alternatively, the liquid through the filling opening 7 z. B. be introduced with a syringe or pipette. The displaced by the liquid from the channel 3 air exits through the vent opening 9. The channel is finally completely filled with liquid. After filling, the filling opening 7 and the vent opening 9 can be closed, which is not necessary.
- the channel system Since the channel system is already filled before irradiation of the sound wave, only a very low pressure is necessary. In this respect, the electrical powers of less than 1 watt of the interdigital transducer 11 are sufficient to cause a movement of the liquid.
- the arrangement of the interdigital transducer 11 in a corner of the channel system 3 ensures that only one sound component 15 acts in the direction of the channel 3, while the other sound wave generated by the interdigital transducer is emitted to the outside.
- a unidirectional transducer design can be used that radiates in one direction only. Such a unidirectional transducer can be used anywhere in channel 3.
- geometries can be realized in which the counter-jet 17 is not emitted to the outside, but is selectively absorbed or reflected.
- the channel system may have different geometries, as long as only one closed track is possible.
- Another embodiment shows z. B. FIG. 2 with a branch 4.
- the interdigital transducer 11 is as for FIG. 1 described used to generate a movement in the direction 19.
- Another interdigital transducer 12 can cause a movement along the branch 4 in the direction 20.
- the channel system is open at the top.
- FIG. 3 shows another embodiment of a micro channel system according to the invention in cross section.
- the channel system 3 is closed by a plastic film 21, on which the piezoelectric material 13 is pressed with the interdigital transducer 11 applied thereto, so that the air gap between the transducer and the film is smaller than the sound wavelength (1 to several 100 microns) to reflections on Air gap to avoid.
- the sound wave penetrates the plastic film and the energy transfer to the liquid takes place by acoustic streaming and not by the sound-induced movement of the film itself.
- the piezoelectric material for generating the acoustic waves is used directly as a cover for the channel system.
- FIG. 4 shows a schematic representation of an inventive microchannel system with a functionalized area 23.
- This functionalized area can, for. B. have a physical, chemical, biological or other functionalization, which is provided for a reaction with the liquid in the channel system 3, 4.
- a flow is generated either with the aid of the interdigital transducer 11 or the interdigital transducer 14 as described in the channel 3.
- Create another alternating electric field to the interdigital transducer 12 causes a movement in the direction 20 through the branch 4.
- the liquid is thus guided past the functionalized region 23.
- the z. B. can be electrical or optical. 27 also indicates only schematically the electrical connection of this measuring device. If the liquid moves in the channel 3 z. B. by exciting a flow with the interdigital transducer 11 or with the interdigital transducer 14, the liquid is guided past this measuring point 25. The continuous flow ensures that all liquid flows past the measuring point.
- the generation of sound waves in the liquid by means of surface acoustic waves, which are generated by an interdigital transducer on a piezoelectric material, is particularly advantageous for the method according to the invention, since the sound wave thus generated already has a large component in the direction of the channel.
- the method according to the invention or the micro channel system according to the invention have the further advantage that they can be used not only for moving the liquid along the channel, but also for mixing the liquid.
- the sound wave generating devices are operated with such low power that the energy is not sufficient for the flow of the entire system.
- two transducers which have an opposite direction of radiation, such. B. the transducers 11 and 14 of FIG. 2 to be operated at the same time, so that a flow of the liquid is not possible and only one mixing takes place.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Dispersion Chemistry (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Reciprocating Pumps (AREA)
Claims (22)
- Procédé pour déplacer de petites quantités de liquide dans des microcanaux, dans lequel :- une quantité de liquide est introduite dans un système de canaux (3, 4), qui comprend au moins une zone qui correspond topologiquement à un anneau de sorte qu'une voie fermée du liquide soit possible, et- on envoie dans le liquide des ondes acoustiques (15), qui ont, dans le plan du système de canaux (3, 4), au moins une composante asymétrique qui définit le sens de déplacement du liquide,caractérisé en ce que,
pour produire les ondes acoustiques, on utilise au moins un transducteur interdigital (11) sur un matériau piézoélectrique (13). - Procédé selon la revendication 1, dans lequel le système de canaux comprend un anneau (3).
- Procédé selon l'une quelconque des revendications 1 ou 2, dans lequel on utilise un système de canaux qui est ouvert vers le haut.
- Procédé selon l'une quelconque des revendications 1 ou 2, dans lequel on utilise un système de canaux (3, 4) qui est fermé de tous côtés, à l'exception d'une ouverture de remplissage (7) et d'une ouverture d'aération (9).
- Procédé selon l'une quelconque des revendications 1 à 4, dans lequel le système de canaux employé (3, 4) est formé dans un substrat (1) en verre, en matériau synthétique non élastique ou en matériau semi-conducteur.
- Procédé selon l'une quelconque des revendications 1 à 5, dans lequel le transducteur interdigital est en contact direct avec le liquide.
- Procédé selon l'une quelconque des revendications 1 à 5, dans lequel le système de canaux (3, 4) est recouvert d'une feuille, de préférence d'une feuille synthétique, contre laquelle est pressé le transducteur interdigital (11).
- Procédé selon l'une quelconque des revendications 1 à 5, dans lequel le système de canaux est fermé en un point par le matériau piézoélectrique, sur lequel est appliqué le transducteur interdigital.
- Procédé selon l'une quelconque des revendications 1 à 8, dans lequel la fréquence des ondes acoustiques est choisie dans la plage entre un MHz et quelques 100 MHz.
- Procédé selon l'une quelconque des revendications 1 à 9, dans lequel on utilise plusieurs dispositifs générateurs de son (11, 12, 14) pour susciter différents mouvements.
- Système de microcanaux pour effectuer un procédé selon l'une quelconque des revendications 1 à 10 en vue de déplacer de petites quantités de liquide, avec- au moins un canal (3) qui représente une voie fermée, et- au moins un dispositif générateur de son (11, 14), qui est aménagé et/ou conçu de sorte qu'une onde acoustique (15) puisse être émise de manière dirigée dans le canal (3), le au moins un dispositif générateur de son comprenant un transducteur interdigital (11, 14).
- Système de microcanaux selon la revendication 11, dans lequel le système de canaux (3, 4) est fermé de tous côtés, à l'exception d'une ouverture de remplissage (7) et d'une ouverture d'aération (9).
- Système de microcanaux selon l'une quelconque des revendications 11 ou 12, dans lequel le système de canaux se présente sous la forme d'une rigole dans un substrat (1), qui est fermée par un couvercle (21).
- Système de microcanaux selon la revendication 13, dans lequel le couvercle (21) est constitué d'une feuille, de préférence d'une feuille synthétique, et le dispositif générateur de son (11) est appliqué directement sur le couvercle (21).
- Système de microcanaux selon la revendication 11, dans lequel le système de canaux est ouvert vers le haut.
- Système de microcanaux selon l'une quelconque des revendications 11 à 15, dans lequel le au moins un dispositif générateur de son est aménagé en dehors du système de canaux (3, 4).
- Système de microcanaux selon l'une quelconque des revendications 11 à 16, avec plusieurs dispositifs générateurs de son (11, 12, 14) qui sont aménagés de sorte qu'ils puissent envoyer des ondes acoustiques dans différentes directions dans le système de canaux (3, 4).
- Système de microcanaux selon l'une quelconque des revendications 11 à 17, dans lequel le système de canaux employé (3, 4) est formé dans un substrat (1) en verre, en matériau synthétique non élastique ou en matériau semi-conducteur.
- Système de microcanaux selon l'une quelconque des revendications 11 à 18, dans lequel il est prévu, à l'intérieur du système de canaux (3, 4), au moins une zone (23) à fonction biologique, chimique ou physique.
- Système de microcanaux selon l'une quelconque des revendications 11 à 19, dans lequel il est prévu, dans au moins une zone du système de canaux (3, 4), un dispositif de mesure (25) pour mesurer un paramètre physique, biologique ou chimique.
- Procédé selon l'une quelconque des revendications 1 à 10, dans lequel le liquide (5) passe devant au moins une zone (23) à fonction biologique, chimique ou physique à l'intérieur du système de canaux (3, 4).
- Procédé selon l'une quelconque des revendications 1 à 10 ou 21, dans lequel le liquide (5) passe devant au moins un point de mesure (25) pour mesurer un paramètre physique, biologique ou chimique.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004051394A DE102004051394B4 (de) | 2004-10-21 | 2004-10-21 | Verfahren zur Bewegung von kleinen Flüssigkeitsmengen in Mikrokanälen und Mikrokanalsystem |
PCT/EP2005/011320 WO2006045547A1 (fr) | 2004-10-21 | 2005-10-20 | Procede pour deplacer de petites quantites de liquide dans des microcanaux au moyen d'ondes acoustiques |
Publications (2)
Publication Number | Publication Date |
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EP1781410A1 EP1781410A1 (fr) | 2007-05-09 |
EP1781410B1 true EP1781410B1 (fr) | 2010-10-06 |
Family
ID=35520810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP20050802009 Not-in-force EP1781410B1 (fr) | 2004-10-21 | 2005-10-20 | Procede pour deplacer de petites quantites de liquide dans des microcanaux au moyen d'ondes acoustiques |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080260582A1 (fr) |
EP (1) | EP1781410B1 (fr) |
JP (1) | JP2008517209A (fr) |
AT (1) | ATE483521T1 (fr) |
DE (2) | DE102004051394B4 (fr) |
WO (1) | WO2006045547A1 (fr) |
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DE10136008B4 (de) * | 2001-07-24 | 2005-03-31 | Advalytix Ag | Verfahren zur Analyse von Makromolekülen und Verfahren zur Herstellung einer Analysevorrichtung |
DE10142789C1 (de) * | 2001-08-31 | 2003-05-28 | Advalytix Ag | Bewegungselement für kleine Flüssigkeitsmengen |
US20040109793A1 (en) * | 2002-02-07 | 2004-06-10 | Mcneely Michael R | Three-dimensional microfluidics incorporating passive fluid control structures |
US20040066703A1 (en) * | 2002-10-03 | 2004-04-08 | Protasis Corporation | Fluid-handling apparatus and methods |
US6811385B2 (en) * | 2002-10-31 | 2004-11-02 | Hewlett-Packard Development Company, L.P. | Acoustic micro-pump |
DE502004004027D1 (de) * | 2003-02-27 | 2007-07-19 | Advalytix Ag | Verfahren und vorrichtung zur durchmischung kleiner flüssigkeitsmengen in mikrokavitäten |
DE10325313B3 (de) * | 2003-02-27 | 2004-07-29 | Advalytix Ag | Verfahren und Vorrichtung zur Erzeugung von Bewegung in einem dünnen Flüssigkeitsfilm |
US20070264161A1 (en) * | 2003-02-27 | 2007-11-15 | Advalytix Ag | Method and Device for Generating Movement in a Thin Liquid Film |
JP3988658B2 (ja) * | 2003-03-07 | 2007-10-10 | コニカミノルタホールディングス株式会社 | マイクロポンプの制御方法およびマイクロ流体システム |
-
2004
- 2004-10-21 DE DE102004051394A patent/DE102004051394B4/de not_active Expired - Fee Related
-
2005
- 2005-10-20 WO PCT/EP2005/011320 patent/WO2006045547A1/fr active Application Filing
- 2005-10-20 EP EP20050802009 patent/EP1781410B1/fr not_active Not-in-force
- 2005-10-20 US US11/665,877 patent/US20080260582A1/en not_active Abandoned
- 2005-10-20 AT AT05802009T patent/ATE483521T1/de not_active IP Right Cessation
- 2005-10-20 DE DE200550010349 patent/DE502005010349D1/de active Active
- 2005-10-20 JP JP2007537223A patent/JP2008517209A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE102004051394A1 (de) | 2006-04-27 |
ATE483521T1 (de) | 2010-10-15 |
EP1781410A1 (fr) | 2007-05-09 |
DE502005010349D1 (de) | 2010-11-18 |
US20080260582A1 (en) | 2008-10-23 |
WO2006045547A1 (fr) | 2006-05-04 |
JP2008517209A (ja) | 2008-05-22 |
DE102004051394B4 (de) | 2006-08-17 |
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