EP1731950A1 - Flachbildanzeige - Google Patents

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Publication number
EP1731950A1
EP1731950A1 EP06015397A EP06015397A EP1731950A1 EP 1731950 A1 EP1731950 A1 EP 1731950A1 EP 06015397 A EP06015397 A EP 06015397A EP 06015397 A EP06015397 A EP 06015397A EP 1731950 A1 EP1731950 A1 EP 1731950A1
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EP
European Patent Office
Prior art keywords
metal film
light
refractive index
liquid crystal
film unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06015397A
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English (en)
French (fr)
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EP1731950B1 (de
Inventor
Tae Jin Kim
Tineke Thio
Thomas Wren Ebbesen
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NEC Corp
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NEC Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/13338—Input devices, e.g. touch panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336—Illuminating devices
    • G02F1/133614—Illuminating devices using photoluminescence, e.g. phosphors illuminated by UV or blue light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G02F1/134318—Electrodes characterised by their geometrical arrangement having a patterned common electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making

Definitions

  • the present invention relates to the field of optics, and in particular to the control of the intensity and wavelength of light transmitted through a thin metal film perforated with holes.
  • a single hole in such a metal film transmits light with an efficiency which depends on the diameter of the hole. If the hole diameter is smaller than the wavelength of light passing through the hole, the transmission is proportional to (d / ⁇ ) 4 . See H. A. Bethe, "Theory of Diffraction by Small Holes", Physical Review, Second Series, Vol. 66, Nos. 7 and 8, pp. 163-182 (1944) . For this reason, the optical throughput of near-field optical devices is extremely low.
  • the periodic array of holes also has properties similar to those of a diffraction grating ( see Ebbesen et al., supra ), including the presence of Wood's anomaly ( see R. W. Wood, "On a Remarkable Case of Uneven Distribution of Light in a Diffraction Grating Spectrum", Philosophical Magazine, Vol. 4, pp. 396-402 (1902) , and R. W. Wood, "Anomalous Diffraction Gratings", Physical Review, Vol. 48, pp. 928-936 (1935) ) which causes deep, sharp minima in the zero-order transmission when a higher-order diffracted beam becomes tangent to the metal film.
  • the present invention utilizes the properties of a metal film perforated with an array of subwavelength-diameter holes to provide novel apparatus which are capable of controlling the intensity and wavelength of transmitted light.
  • the invention includes novel thin display units (which can be used in flat panel displays), spatial light modulators, and tunable filters.
  • an optical transmission modulation apparatus for modulating light transmitted through the apparatus.
  • the apparatus comprises a metal film having a periodic array of subwavelength-diameter holes provided therein, and a supporting layer. At least a portion of the supporting layer has a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit. Selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of the light transmitted through the perforated metal film unit without substantially changing the direction of the light.
  • a flat panel display having a plurality of display cells comprises a light source, a metal film having a periodic array of subwavelength-diameter holes provided therein, and a supporting layer. At least a portion of the supporting layer has a refractive index which is selectively variable for each display cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit. Selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of light emitted by the light source which is transmitted through the perforated metal film unit for each display cell.
  • a spatial light modulator having a plurality of cells and modulating the intensity of incident light as the light is transmitted through each cell of the modulator.
  • the spatial light modulator comprises a metal film having a periodic array of subwavelength-diameter holes provided therein, and a supporting layer. At least a portion of the supporting layer has a refractive index which is selectively variable for each cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit. Selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit for each cell without substantially changing the direction of the light.
  • a tunable optical filter for modulating the intensity of incident light as the light is transmitted through the tunable optical filter.
  • the tunable optical filter comprises a metal film having a periodic array of subwavelength-diameter holes provided therein, and a supporting layer. At least a portion of the supporting layer has a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit. Selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit without substantially changing the direction of the light.
  • the tunable filter may also be provided with a plurality of cells, wherein the wavelengths of lights transmitted through each cell may be selectively controlled or tuned.
  • an object of the invention is to provide optical transmission modulation apparatus which control the intensity of transmitted light.
  • Another object of the invention is to provide optical transmission modulation apparatus which control the color of transmitted light.
  • a further object of the invention is to provide optical transmission modulation apparatus which exhibit enhanced transmission efficiency.
  • a still further object of the invention is to provide optical transmission modulation apparatus which are very thin and are potentially mechanically flexible.
  • a still further object of the invention is to provide a flat panel display which has high transmission efficiency; is potentially thin and flexible, does not require costly, bulky and complex polarizers and analyzers.
  • a still further object of the invention is to provide a spatial light modulator and an optical tuner which have high transmission efficiency and are potentially thin and flexible
  • the widths of the Wood's anomaly minima can be very small, and in general have been found to be limited by the resolution of the spectrometer. Wood mentioned the fact that in high quality diffraction gratings, the two sodium lines can be separated by this effect, corresponding to a wavelength resolution of 0.6 nm. Certain embodiments of the invention utilize this phenomenon by modulating the transmitted intensity with a high contrast ratio by varying the angle of incidence of light to the metal film ⁇ over a very small amount, as will be discussed below.
  • FIG. 3 shows the transmission spectra (at normal incidence) of two perforated metal film units.
  • the two units are identical except that in one, the supporting layer is a quartz dielectric layer (dashed line), whereas in the other the supporting layer is a sapphire dielectric layer (solid line).
  • FIG. 3 illustrates very clearly the statement in Equation (4) that the wavelengths at which the minima occur depend linearly on the refractive index of the medium which is substantially adjacent to the metal film.
  • the small differences between the two structures are due to small differences in the periodicities of the two hole arrays in the metal film.
  • the width of the surface plasmon resonances is relatively small.
  • Certain embodiments of the invention utilize this phenomenon to control the transmitted wavelength by changing the index of refraction of the adjacent medium.
  • the transmitted amplitude can be modulated by changing the refractive index, such that a transmission peak is swept past the relevant wavelength, and certain embodiments of the invention utilize this phenomenon as well.
  • the latter function can in principle be achieved with a high contrast ratio (i.e. the ratio between maximal and minimal transmission), because the extinction (i.e. the ratio of maximum to minimum transmission) around the occurrence of Wood's anomaly can be nearly complete.
  • FIG. 4 is a schematic diagram of an optical transmission modulation apparatus which controls optical transmission through a perforated metal film unit by selectively varying the refractive index of a material substantially adjacent to the metal film (i.e. a portion of the supporting layer).
  • a liquid crystal (LC) solution layer is sandwiched between a metal film perforated with an array of subwavelength-diameter holes and a transparent conducting layer.
  • the metal film perforated with subwavelength-diameter holes is used as one electrode for the liquid crystal, while the transparent conducting layer is used as the other electrode.
  • the transparent conducting layer may be comprised of any transparent, conductive material, and is preferably comprised of indium tin oxide (ITO).
  • the LC solution layer is preferably encapsulated between two very thin LC aligning layers as shown in FIG. 4 which align the liquid crystals according to an electric field as is well-known in the art of liquid crystal displays.
  • spacers on the order of micrometers such as insulating microspheres for example, are preferably provided in the LC solution layer to maintain a slight spacing between the metal film and transparent conducting layer so as to avoid electrical shorting between the metal film and the transparent conducting layer.
  • the LC solution layer, the LC aligning layers and the transparent conducting layer comprise a supporting layer which, in combination with the metal film, collectively comprise a perforated metal film unit as described above.
  • the LC solution layer comprises the selectively variable refractive index portion of the support layer and is substantially adjacent to the metal film.
  • the transparent conducting layer can be patterned, if desired, using standard photolithography as is well-known in the art so as to enable independent control of the refractive index of selected portions of the apparatus.
  • the optical transmission modulation apparatus shown in FIG. 4 provides electrical control of optical transmission through the array of holes in the perforated metal film.
  • the intensity of light transmitted through the perforated metal film unit is controlled by varying the refractive index of the LC solution layer, which is in turn controlled by varying the electric voltage to the LC electrodes.
  • the inventors have performed experiments involving such optical transmission modulation apparatus, using samples of metal films perforated with an array of subwavelength-diameter holes, which metal films were similar to those described in previous work. See T. W. Ebbesen et al., supra; H. F. Ghaemi et al., supra.
  • thickness t 100nm
  • a twisted-nematic type liquid crystal (Merck E63, EM Industries, Inc.) was sandwiched between the perforated metal film and a prepared transparent conductive layer comprising ITO (produced by E.H.C. Co. Ltd., Japan) in the manner shown in FIG. 4.
  • the ITO layer comprised one electrode for the liquid crystal, and the perforated metal film was used as the other electrode, separated from the ITO layer by 5-10 ⁇ m glass microsphere spacers to prevent shorting.
  • the sole function of the liquid crystal was to provide a refractive index portion that is controllable (that is, selectively variable) through the application of an electric field.
  • Other materials in which such a variation of the refractive index n can be achieved may also be used in the optical transmission modulation apparatus of the present invention, and may in fact be preferable over liquid crystals since the latter have a relatively long switching time due to the reorientation of molecules. For applications which require switching times less than about 1 ms, faster switching media (such as a semiconductor layer or a polymer electro-optic film, for example) are preferred.
  • Ferro-electric liquid crystals can also be used to provide enhanced switching speed.
  • FIG. 6 shows the transmission spectra of the experimental perforated metal film unit - described above, for various values of the AC voltage applied to the liquid crystal electrodes.
  • the transmission spectra are quite broad because the diameter of the holes in the perforated metal film was relatively large. For this reason, the spectral shift is not immediately apparent in the data of FIG. 6.
  • FIG. 7 shows the time-dependent transmission signal (shown in arbitrary units) of a 1.55 ⁇ m laser and the modulated liquid crystal at 1 kHz, measured using the experimental arrangement shown in FIG. 5.
  • the transmission modulation of this particular sample is approximately 25%, and is in phase with the driving voltage.
  • the relatively small modulation amplitude is a consequence of the large hole diameter, which tends to broaden the minima associated with Wood's anomaly.
  • Color control can also be achieved using an apparatus including a perforated metal film unit which enables the angle of incidence of incoming light to be changed (such as by rotating the perforated metal film unit with respect to the incoming light beam).
  • An experimental unit of this type is shown in FIG. 8.
  • the metal film was used as part of a cell containing a liquid crystal in order to match the refractive index of the glass substrate.
  • Red light R (wavelength 635 nm) and green light G (wavelength 532 nm) were directed into a beam splitter so that both lights are incident colinearly on the perforated metal film unit, which is rotated around a vertical axis to vary the angle of incidence ⁇ of the incoming light to achieve color switching between red and green light, which color switching can be observed on the Screen.
  • the intensities of the two laser beams are of the correct proportions (which proportions are well-known in the art), at an intermediate angle the transmitted beam is perceived to be yellow due to additive color mixing.
  • FIG. 9 shows the transmitted intensity (on a gray scale) as a function of photon energy and angle of incidence.
  • the dispersion is similar to that shown in the article by H. F. Ghaemi et al., supra, but it will be noted that in FIG. 9 the metal-air resonances are absent, both media (that is, the liquid crystal supporting layer and the quartz auxiliary layer) having an index close to 1.5.
  • a cut through the data of FIG. 9 along these two lines gives the angle dependence of the transmitted intensity at the two wavelengths, which is plotted in FIG. 10.
  • LCDs Liquid crystal displays
  • polarizers represent an appreciable portion of the cost of materials and device assembly and add to the complexity of such displays.
  • present LCDs require color filters to realize full color, resulting in a very low overall transmission of less than about 7%. Therefore, a very bright illuminating source is needed which consumes a substantial amount of electric power.
  • the flat panel displays of the present invention which are based on the controllability of the optical transmission through perforated metal films, need no polarizer, analyzer, or even color filters.
  • the experimental results described above show very promising performances and advantages over prior art LCDs.
  • full color control with about 15-50% maximum transmission can be achieved with a properly designed geometry of the hole arrays in the perforated metal film. See T. W. Ebbesen et al., supra.
  • a design tradeoff is inherent: high transmission can be achieved at the expense of lower wavelength resolution, or high wavelength resolution can be achieved at the expense of lower transmission.
  • flat panel display includes not only displays which are flat in the sense of being planar, but, due to the mechanical flexibility which is possible with the apparatus of the present invention, the flat panel displays described and claimed herein include any flexible "thin film” type of display.
  • the flat panel displays of the present invention may utilize perforated metal film units as described above to control intensity and/or color of transmitted light.
  • the flat panel displays of the present invention may, for example, include the optical transmission modulation apparatus shown in FIG. 4 and described above. A fuller understanding of the flat panel displays encompassed by the present invention will be better understood with reference to FIGS. 11-13.
  • FIG. 11 shows the details of a flat panel display based on surface-plasmon enhanced transmission through a perforated metal film.
  • This flat panel display is similar to the previously described optical transmission modulation apparatus described above.
  • a liquid crystal (LC) solution layer is sandwiched between a metal film perforated with an array of subwavelength-diameter holes and a transparent conducting layer.
  • the metal film perforated with subwavelength holes is used as one electrode for the liquid crystal solution, while the transparent conducting layer is used as the other electrode.
  • the metal film may be comprised of any metal, and certain degenerately doped semiconductors may also be used.
  • the transparent conducting layer preferably comprises indium tin oxide (ITO), for example.
  • the LC solution layer is preferably encapsulated between two very thin LC aligning layers as shown in FIG. 11 to force the alignment of the liquid crystals so as to alter the liquid crystal refractive index.
  • spacers on the order of micrometers, such as microspheres for example, are preferably provided in the LC solution layer to maintain a slight spacing between the metal film and transparent conducting layer to avoid electrical shorting between the metal film and the transparent conducting layer.
  • the transparent conducting layer may be patterned as desired to provide independent control over a plurality of discrete, independently controllable regions of the display, referred to as "display cells.” To enable independent electrical control of the display cells, the transparent conducting layer is provided with wiring from a control unit to each display cell using standard photolithography and like processes, as is well-known in the art.
  • the LC solution layer, the LC aligning layers and the transparent conducting layer comprise a supporting layer which, in combination with the metal film, collectively comprise a perforated metal film unit as described above.
  • the LC solution layer comprises the selectively variable refractive index portion of the support layer and is substantially adjacent to the metal film.
  • the control circuit enables independent, selective control of the voltage across the electrodes (the perforated metal film and the patterned transparent conductive layer) of each cell, which varies the alignment of the liquid crystals to provide selective control of the refractive index in each display cell, thereby modulating the transmission of light through each cell as described above.
  • FIGS. 12A and 12B further illustrate the flat panel display of the present invention.
  • FIG. 12A is a cross-sectional diagram of one three-color (red, green and blue, or "RGB") pixel of a flat panel display of the present invention.
  • White light from a light source 100 illuminates the perforated metal film 102 which is part of a cell containing a liquid crystal solution 104.
  • Alignment layers 103 are provided to align the liquid crystal solution 104 in a well-defined direction.
  • a transparent conductive layer 117 serves as the other electrode in the liquid crystal cell, and is patterned (such as shown in FIG. 11) such that each color of each pixel can be controlled independently, preferably utilizing conventional LCD drivers known as either simple or active matrix drives.
  • the perforated metal film 102, liquid crystal solution 104, alignment layers 103 and transparent conductive layer 117 form a perforated metal film unit, in which the liquid crystal solution is substantially adjacent to the metal film.
  • Substrates 101 and 118, onto which the perforated metal film 102 and transparent conductive electrode 117, respectively, are deposited, are auxiliary layers which serve to hold the cell together mechanically.
  • the viewer's side of the supporting layer 118 may be provided with a scattering medium (such as surface roughening, or frosting, in the case of glass) in order to maximize the viewing angle of the display if desired.
  • FIG. 12B is a plan view of the hole arrays in the perforated metal film for a single three-color (RGB) display pixel, such as that shown in FIG. 12A.
  • the subwavelength holes 112 are fabricated in a square array, each with a period (P R , P G , P B ) designed to match the desired wavelength of the transmitted light in accordance with Equation (3).
  • the cells of the flat panel display of the present invention allow electrical control of optical transmission through the array of holes in the perforated metal film as discussed above. That is, the intensity of light transmitted through the perforated metal film unit is controlled by selectively varying the refractive index of the liquid crystal, which is in turn controlled by varying the electric voltage to the LC electrodes.
  • the color of light transmitted through the holes is controlled by creating the holes in the perforated metal film with holes of suitable size and periodicity according to Equation (3) above.
  • a long-pass filter can be used with an appropriate wavelength cutoff. At wavelengths longer than the cutoff, such filters have a transmission of about 90%.
  • a particular hole periodicity may be selected to create a display cell for each of the generally used red, green and blue display colors, and a wide apparent spectrum of colors may be obtained from each RGB pixel by controlling the intensity of light transmitted through the RGB display cells which are adjacent to one another in the pixel as is well-known in the art.
  • the transmission modulation has been experimentally observed in pixels as small as 60 ⁇ m x 30 ⁇ m, corresponding to a much higher resolution than that required for a high-definition display (typically about 250 ⁇ m).
  • the method used for driving the display cells can be similar to either the simple matrix drive or the active matrix drive used in present LCD systems.
  • the flat panel display of the present invention can be used with currently available illumination systems for commercial LCD displays, such as collimated line illumination or very thin electroluminescent (EL) panels, for example.
  • the overall thickness of this kind of flat panel display may be well below 1 inch including all the electronic control circuit boards and packaging.
  • the display could be made thinner than 500 ⁇ m if a thin-sheet EL panel is used (250 ⁇ m, currently commercially available).
  • a large display screen may be provided which is also flexible.
  • the hole arrays can be manufactured for large-size displays using embossing holography technology. See J.J. Cowan, "Aztec surface-relief volume diffractive structure," Journal of the Optical Society of America, Vol. 7, No. 8, pp. 1529-1544 (Aug. 1990 ).
  • HDTV high-definition television
  • flat panel display of the present invention An important benefit of the flat panel display of the present invention is that the overall transmission can be significantly higher than that of prior art flat panel display systems.
  • flat panel display of the present invention exhibit at least 15% transmission for full color resolution.
  • less power is required by the flat panel display of the present invention, which can therefore extend the battery life in a portable unit incorporating such a display (such as a laptop PC), for example.
  • the flat panel display of the present invention does not require a polarizer / analyzer system as used in prior art LCD systems, the manufacturing process can be made much simpler.
  • liquid crystal exhibiting any change in refractive index in the presence of varied voltage is encompassed by the invention.
  • flat panel display of the present invention encompasses the use of any material or device exhibiting a selectively variable refractive index when disposed substantially adjacent to a metal film perforated with subwavelength-diameter holes, and is not merely confined to the use of liquid crystals.
  • the invention also encompasses a flat panel display in which color control is achieved by controlling the intensity of ultraviolet (UV) light which is made to excite a fluorescent dye, similar to the principle of a cathode ray tube (CRT), as shown in FIGS. 13A and 13B.
  • FIG. 13A is a cross-sectional diagram of one three-color (RGB) display pixel using a light source with a single color in the ultra-violet range. UV light from the light source impinges on the perforated metal film 102, which again forms one electrode of a liquid crystal cell, with a transparent conductive layer 117 again serving as the other electrode.
  • the layers 101, 102, 103 and 104 are identical to those shown in FIG. 12A.
  • the transmitted light emerging from the transparent conductive layer 117 excites fluorescent dyes (119R, 119G, 119B) which emit light at a predetermined wavelengths appropriate to generate the RGB colors, similar to the operation of conventional cathode ray tube (CRT) displays.
  • fluorescent dyes 119R, 119G, 119B
  • Auxiliary layers 118a and 118b are used to encapsulate the fluorescent dyes therebetween.
  • FIG. 13B is a plan view of the hole arrays in the perforated metal film for the single, three-color display pixel using UV illumination shown in FIG. 13A.
  • the holes are fabricated on a square array as in the display pixel shown in FIG. 12B, but the period of all three arrays is the same (Puv), and matches the incident UV wavelength according to Equation (3).
  • the invention encompasses related but distinct devices known as spatial light modulators utilizing the perforated metal film units described hereinabove.
  • a spatial light modulator may be constructed as shown in FIG. 11 and as described above in relation to that figure. While the spatial light modulator of the present invention is similar to the flat panel display cells described above, the LC layers in the spatial light modulator may be used to induce a refractive index change, or the LC layers may be replaced by a semiconductor layer or a polymer electro-optic film, for example, in order to achieve fast electro-optic modulation.
  • the spatial light modulator of the present invention provides a similar effect, but operates in transmission mode by using metal films perforated with hole arrays.
  • By appropriately selecting the geometry (hole diameter and hole array periodicity) and material for the perforated metal film sharp transmission peaks can be obtained, and the transmission spectrum can therefore be made very narrow.
  • the required refractive index change is small, requiring in turn a smaller angle of rotation of the liquid crystal molecules.
  • the spatial light modulator using perforated metal films of the present invention offers high speed, high resolution and a high contrast ratio.
  • the transmission mode may have significant advantages over the reflection mode necessitated by the attenuated total reflection principle. For instance, since the effects described here are present in the zero-order transmitted light, modulation of the light requires no redirection of the beam path, as is the case for the reflection mode.
  • the actively controlled surface plasmon spatial light modulator of the present invention will provide advantages in many applications, including but not limited to the areas of image processing, optical interconnect networks, high speed laser light modulation for fiber optic communication, and 3-D holographic displays.
  • the present invention further includes a tunable optical filter based on this color selectability.
  • FIG. 14 is a schematic diagram depicting a tunable optical filter according to the present invention which can select one wavelength from a two-wavelength input by rotating the perforated metal film structure so as to cause the light to impinge the structure at a predetermined angle of incidence.
  • the tunable optical filter again utilizes a perforated metal film unit as described above.
  • the perforated metal film unit may include liquid crystal (LC) sandwiched - between a metal film perforated with subwavelength-diameter holes and a transparent conducting layer, which may be constructed as described above with respect to the flat panel display and spatial light modulator.
  • LC liquid crystal
  • Multiplexed input light is provided to the metal film / transparent conducting layer via a beam splitter, which is itself provided with light of a first wavelength (Wavelength 1) and light of a second wavelength (Wavelength 2) so that both the light of the first wavelength and the light of the second wavelength are provided as multiplexed input light which is incident colinearly on the perforated metal film unit.
  • the perforated metal film unit is rotated (by an adjuster, not shown) through a relatively small angle, thereby causing the incident multiplexed input light to impinge the perforated metal film unit at a predetermined angle of incidence.
  • the wavelength (and therefore the color) of light transmitted through the perforated metal film unit depends on the angle at which the perforated metal film unit is rotated, and selective optical tuning is therefore provided.
  • the adjuster may comprise any mechanism for rotating the perforated metal film unit, and the particulars of the adjuster itself are not critical to the invention.
  • the invention embraces tunable optical filters including perforated metal film units in which the supporting layer includes a portion comprising any material having a selectively variable refractive index, as discussed above regarding the optical transmission modulation apparatus using refractive index variation.
  • a large rotation angle may pose a mechanical limit for fast switching of a tunable optical filter on a macroscopic scale (e.g. where the largest linear dimension (width) is greater than or equal to about 1 mm).
  • higher switching speeds can be achieved by miniaturizing, for example by using micro-electro-machining device technology as is well-known in the art.
  • the tunable optical filter of the present invention may also be designed to tune the color of the transmitted light by applying an electric field either to the liquid crystal or to a piezoelectric element used to rotate the perforated metal film unit as described above. Moreover, both tuning methods, by angle control and index control, may be combined in a single device as shown in FIG. 14. Such a tunable optical filter is useful for many applications including wavelength division multiplexing (WDM) for optical communications and image processing.
  • WDM wavelength division multiplexing
  • the apparatus of the invention described above which utilize a perforated metal film unit provide advantageous use in electro-optic devices due to at least the ability of such apparatus to control the intensity or wavelength of the light transmitted through the subwavelength-diameter hole arrays in the metal film. Since such control can be achieved at high speed, high throughput, and high contrast ratio, and without the need to redirect the optical beam, the apparatus of the present invention are important advances over the prior art.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
EP06015397A 1998-10-08 1999-04-26 Flachbildanzeige Expired - Lifetime EP1731950B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/168,265 US6040936A (en) 1998-10-08 1998-10-08 Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes
EP99107421A EP0992833B1 (de) 1998-10-08 1999-04-26 Vorrichtung zum Regeln von der optischen Transmission mittels perforierten metallischen Filmen mit Lochdurchmesser im Subwellenlängenbereich

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EP99107421.2 Division 1999-04-26

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EP06015399A Expired - Lifetime EP1729166B1 (de) 1998-10-08 1999-04-26 Abstimmbares optisches Filter
EP06015397A Expired - Lifetime EP1731950B1 (de) 1998-10-08 1999-04-26 Flachbildanzeige
EP99107421A Expired - Lifetime EP0992833B1 (de) 1998-10-08 1999-04-26 Vorrichtung zum Regeln von der optischen Transmission mittels perforierten metallischen Filmen mit Lochdurchmesser im Subwellenlängenbereich

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