EP1658530A1 - Procede et dispositif de production d'un hologramme - Google Patents

Procede et dispositif de production d'un hologramme

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Publication number
EP1658530A1
EP1658530A1 EP04762482A EP04762482A EP1658530A1 EP 1658530 A1 EP1658530 A1 EP 1658530A1 EP 04762482 A EP04762482 A EP 04762482A EP 04762482 A EP04762482 A EP 04762482A EP 1658530 A1 EP1658530 A1 EP 1658530A1
Authority
EP
European Patent Office
Prior art keywords
photon
photons
beams
packets
primary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04762482A
Other languages
German (de)
English (en)
Inventor
Wolfgang Dultz
Helmar A. Becker
Kay Michael Schmid
Heidrun Schmitzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsche Telekom AG
Original Assignee
Deutsche Telekom AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche Telekom AG filed Critical Deutsche Telekom AG
Publication of EP1658530A1 publication Critical patent/EP1658530A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/06—Processes or apparatus for producing holograms using incoherent light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/20—Coherence of the light source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/33—Pulsed light beam

Definitions

  • the invention relates to a method and an arrangement for producing a hologram.
  • Holograms are diffractive structures, i.e. special diffraction gratings, which are arranged flatly or spatially and reconstruct an object when illuminated as a spatial image.
  • coherent light - in particular laser light - is usually broken down into two partial beams by a beam splitter, the first of which is directed as an illuminating beam and illuminates the object, and the second, referred to as a reference beam or reference light, with which, due to the illumination the illumination beam coming from the object, also called object light, is brought to interference in an interference field.
  • a two-beam interferometer is used to produce the hologram, with the light coming from the object e.g. the amplitude and phase structure of the object is impressed by the reflection or scattering on the object surface.
  • the field of the superposition of the two partial beams, the interference field, is recorded by a photo plate or other two-dimensionally resolving detector, whereby the hologram is obtained.
  • detectors are e.g. Video cameras are suitable, the hologram supplied by them e.g. can be shown on an LCD display.
  • the hologram To view the hologram, it is illuminated with light, which does not necessarily have to be coherent. Since the holograms contain the complete spatial information of the object surface, they can be used for three-dimensional documentation of the object. In contrast to Ordinary photographs have a large depth of field in holographically displayed images; they show the spatial structure of the object and allow, for example, a very quick comparison with a given pattern using Fourier optical methods. Therefore, holograms can be used very advantageously for automatic object detection as well as for monitoring and quality control in mass production.
  • holography A special application of holography is speckle interferometry; This can be used to check the shape of highly stressed technical components such as Use car tires or turbine blades. Examples can be found in the article "Holography” by L. Huff in the book by M.Bass: “Handbook of Optics", Vol II, page 23.1 ff, New York 1995.
  • the achievable spatial resolution in holography is dependent on the wavelength of the light used.
  • the resolution decreases in proportion to the wavelength of the light. Halving the wavelength therefore doubles the resolution.
  • holography Another application of holography is to produce holographically masks for photolithography for the production of semiconductor components.
  • Techniques with light of 240 nm wavelength are used in modern photolithography today; the use of light with a wavelength of 200 nm is already being striven for.
  • complex technologies are being developed which should make it possible to further reduce the wavelength of the light used.
  • the lower limit is light with a wavelength of 150nm, since the substrates of the lithography masks are no longer transparent at even shorter wavelengths.
  • photon packets each of which consists of a plurality of photons correlated with one another quantum mechanically, which together form a multi-photon jib state.
  • the photon packets can in particular be photon pairs, the two members of which together form a two-photon jib state.
  • One method is based on non-linear optics.
  • a quantum optical effect is used, which is based on optical parametric fluorescence. This process can be carried out in such a way that so-called “multi-photon jib states” are formed.
  • photons from a laser hereinafter referred to as primary photons
  • primary photons are irradiated into a crystal suitable for nonlinear optics beta-barium borate, potassium deuterium phosphate, or lithium niobate, and the primary photon is likely to be converted into a pair of two "entangled" photons as they pass through the crystal through optical parametric fluorescence Since the total energy corresponds to the energy of the primary photon, the wavelength of each secondary photon is therefore longer than that of the primary photon.
  • an emitted photon of shorter wavelength is not generated from two irradiated photons, but rather two emitted photons of larger wavelengths are generated from one irradiated photon.
  • the secondary photon with the higher energy is referred to as “signal photon", the one with the lower energy as “follower” or "idler”.
  • signal photon the secondary photon with the higher energy
  • follower the one with the lower energy
  • the photon packets can be introduced into optical waveguides in a conventional manner.
  • a two-photon laser is e.g. in the publication "Polarization Instabilities in a Two-Photon Laser” by O. Pfister et al., Physical Review Letters, Vol. 86, No. 20, pp. 4512-4515, May 2001.
  • the invention is based on the object of providing an arrangement and a method which allow the production of holograms with increased resolution.
  • This object is achieved according to the invention by a method for producing a hologram of an object, in which photon packets are used for illuminating the object and as reference light, each of which consists of a plurality of photons which are quantum mechanically correlated with one another and which together form a multi-photon jib state, some of the photon packets are used to illuminate the object and some of the photon packets are used as reference light, - photon packets coming from the object are brought into interference with the reference light in an interference field, and the brightness distribution in the interference field or part of the same is registered by means of a detector.
  • the object is further achieved by an arrangement for producing a hologram of an object, with a light source which is able to emit photon packets, each of which consists of a plurality of photons correlated with one another quantum mechanically, which together form one Form a multi-photon jib state, with some of the photon packets emitted by the light source being able to illuminate the object and some of these photon packets being able to act as reference light, - photon packets coming from the object being able to interfere with the reference light in an interference field, and that Brightness distribution in the interference field or part thereof can be registered by means of a detector.
  • the photon packets coming from the object are those that were used to illuminate the object, for example reflected, scattered, diffracted or refracted from it, and therefore emanate from the object as object light. That is, the object light emanates from the object due to the illumination of the object through photon packets.
  • a brightness distribution is formed, namely an interference pattern, which is recorded as a hologram by means of the detector.
  • photon packets behave spectroscopically and in terms of their transmission properties as they correspond to their respective wavelengths. Interferometrically, however, such a photon packet behaves as it corresponds to a photon, the energy of which is equal to the energy sum of all individual photons of the photon packet. If holograms are produced with the aid of such photon packets, a resolution is therefore achieved which is substantially higher than that which would be obtained using conventional light of the same wavelength as the packet photons.
  • the invention can therefore be used very advantageously, for example, in photolithography for the production of semiconductor components.
  • photon packets which consist of two photons each with a wavelength of 200nm exist
  • a resolution is achieved which corresponds to a wavelength of 100 nm, without the transparency of the substrates of the lithography masks decreasing compared to the use of conventional light of 200 nm wavelength.
  • any objects e.g. holographically with light of a wavelength ⁇ as if - if the photon packets e.g. Photon pairs are - light of half the wavelength, i.e. that of wavelength ⁇ / 2, i.e. at double resolution.
  • This can be done using quantum mechanically correlated photon pairs, which behave like single photons of half the wavelength ⁇ / 2.
  • the resolution can be further increased accordingly.
  • the increase in resolution generally reaches a factor of N, where N is the number of correlated photons per packet of photons.
  • Photon packets which originate from the same light source are preferably used to illuminate the object and as reference light.
  • a light source which is capable of emitting a coherent beam from such photon packets is preferably used to generate the photon packets.
  • the light source is therefore able to emit a coherent beam from such photon packets.
  • a light source can be used to generate the photon packets, which is capable of emitting a plurality of mutually coherent beams from such photon packets.
  • the light source is therefore able to emit a plurality of mutually coherent beams from such photon packets.
  • each photon packet for example a pair of photons, is generated in one of a plurality of channels, it being impossible to predict in which one.
  • At least one of the beams of photon packets is preferably used to illuminate the object and at least one other of the beams of photon packets is used as reference light or to form the same.
  • at least one of the beams of photon packets is able to illuminate the object and at least one other of the beams of photon packets is able to function as a reference light or to form the same;
  • the reference light can be formed by expanding the beam or beams of photon packets that function as reference light or are able to form the reference light.
  • the light source used is preferably one which generates photon pairs as photon packets, the two members of which are each quantum mechanically correlated with one another and are together in a two-photon jib state; in this case, photon pairs are used as photon packets.
  • the light source is therefore preferably one that generates photon pairs as photon packets, the two members of which are each quantum mechanically correlated with one another and are together in a two-photon jib state.
  • a light source can be used as the light source in which the photon packets are generated by irradiating primary photons of the average wavelength ⁇ from a primary light source, in particular a laser, into an optically non-linear crystal, which are thus obtained and is oriented that the photon packets arise in the optically nonlinear crystal from irradiated primary photons by optical parametric fluorescence.
  • the light source therefore has a primary light source, in particular a laser, and an optically nonlinear crystal, the primary light source irradiating primary photons of the medium wavelength ⁇ into the crystal and the latter being designed and oriented in such a way that it Packets of photons generated from incident primary photons by optical parametric fluorescence.
  • the energy distribution between the signal and idler photons of the photon pair is not always the same, but is statistically distributed and given by a probability distribution.
  • the secondary photons can have the same energy, which means that both have half the wavelength of the primary photon.
  • those photons whose wavelength deviates by more than a certain amount from half the wavelength of the primary photon can be filtered out, so that only those pairs of photons whose two members have approximately the same wavelength can pass.
  • the light source used is one which has the following components: a) a primary light source, in particular a laser, which emits a beam of primary photons of medium wavelength ⁇ , b) an optically nonlinear crystal, which is designed, arranged and oriented in such a way that at least some of the primary photons fall into the crystal and, in the same way through optical parametric fluorescence, a pair of secondary photons emerging from the crystal, namely one signal and one belonging to and with it This quantum mechanically correlated idler photon produces, c) an interferometer with two arms, between which there is an optical path length difference which is both smaller than the coherence length of the signal photon and smaller than that Coherence length of the idler photon, at least some of the pairs of secondary photons falling into the interferometer in such a way that the signal photon passes through the first arm and the associated idler photon passes through the second arm, d) a beam coupler with a first and
  • the light source has the following components: a) a primary light source, in particular a laser, which emits a beam of primary photons of the medium wavelength ⁇ , b) an optically non-linear crystal, which is so obtained and arranged is that at least a part of the primary photons falls into the crystal and generates a pair of secondary photons emerging from the crystal, namely a signal photon and an idler photon associated with it and quantum mechanically correlated with it, using optical parametric fluorescence , c) an interferometer with two arms, between which there is an optical path length difference which is both less than the coherence length of the signal photon and less than the coherence length of the idler photon, at least some of the pairs of secondary photons falling into the interferometer in such a way that in each case the signal photon passes through the first arm and the associated idler photon passes through the second arm, d) a beam coupler with a first and a second coupler
  • These rays can e.g. In the case of a very small object, they can be used directly to illuminate the same or as a reference light, or they can be expanded to illuminate the object or to form the reference light.
  • Both arms of the interferometer unite in the beam coupler can in particular be carried out in such a way that the two photons of a pair of photons emerge from the crystal in different directions, so that it is possible with only a small outlay on equipment for the first photon of each pair in the first arm and couple the second photon into the second arm of the interferometer.
  • the primary light source can in particular be a laser, which in this case is also referred to as a "pump laser" and can be a continuous light laser or a pulse laser.
  • the photons of a photon pair generated in this way are correlated and interleaved in several ways.
  • the corresponding light paths, i.e. the associated interferometer arms are often called signal and idler arms.
  • the coherence length of the first or second photon can typically be 10 ... 500 ⁇ m when using such photon pair sources, the wavelength of the first or second photon can e.g. each be 1.3 ⁇ m.
  • a beam splitter can be used in particular as a beam coupler, e.g. a beam splitter plate.
  • the beam coupler can also e.g. a polarizing beam splitter or a fusion coupler.
  • the beam coupler is preferably set up in such a way that no coupler output is preferred over the other coupler output.
  • the optically nonlinear crystal used can be one which consists of beta-barium borate, potassium deuterium phosphate or lithium niobate. From a quantum mechanical point of view, no photon pair whose members are quantum mechanically correlated with one another and together are in a two-photon jib state, as would be classically expected, only leaves the beam coupler through the first or only the second coupler output. Rather, the pairs of photons in both coupler outputs are entangled, ie both members of each such pair of photons leave the beam coupler together both through the first and at the same time through the second coupler output. This is a consequence of the wave character of the particles involved. However, the pair of photons can of course only be detected in one of the two coupler outputs. If it is detected in the first coupler output, it is no longer detectable in the second coupler output, and vice versa.
  • the first beam of photon pairs is preferably used to illuminate the object and the second beam of photon pairs is used as reference light or to form the same, or vice versa.
  • the first beam of photon pairs is therefore able to illuminate the object, and the second beam of photon pairs is able to act as reference light or to form the same, or vice versa.
  • the beam splitter which in the prior art usually splits the coherent light required for producing a hologram into the illuminating beam and the reference beam or the reference light, can be dispensed with, since the light source according to this embodiment of the invention already has two emits coherent partial beams, one of which is used to illuminate the object and the other as a reference beam or, for example can be used by expansion to form the same.
  • An adjustable delay path is preferably optically interposed in at least one of the interferometer arms, so that a certain optical path length difference D is selected between the interferometer arms can be.
  • the probability W that the signal and idler photons in the beam coupler interfere in such a way that they do not leave the beam coupler separately from one another through different coupler outputs, but together through the same coupler output, depends to a large extent on the optical path length difference D, that is, the efficiency of the generation of the photon pairs can be optimized by a suitable choice of the path length difference.
  • the amount of the optical path length difference D existing between the first and the second arm of the interferometer is preferably chosen to be less than 5 ⁇ , where ⁇ is the mean wavelength of the primary photons.
  • the arrangement according to the invention is therefore set up such that the amount of the optical path length difference D existing between the first and the second arm of the interferometer is less than 5 ⁇ , where ⁇ is the mean wavelength of the primary photons.
  • the efficiency of the generation of the photon pairs is optimized by choosing the optical path length difference D existing between the first and the second arm of the interferometer such that the ratio of the number of cases in which the signal photon and the associated idler photon both leave the beam coupler through the same coupler output, the number of cases in which the signal photon and the idler phototone associated with it leave the beam coupler separately from one another through different coupler outputs have reached a maximum over time.
  • the optical path length difference D existing between the first and the second arm of the interferometer is therefore chosen such that the ratio of the number of cases in which the signal photon and the idler photon associated therewith both transmit the beam coupler through the same coupler output the maximum number of cases in which the signal photon and the idler phototone associated with it leave the beam coupler separately from one another through different coupler outputs has a maximum over time.
  • a beam or beams of pairs of photons can also be generated in other ways.
  • the light source used is one in which the photon pairs are generated by quadrupole transitions or cascade transitions taking place in the light source.
  • the light source used is one in which the photon pairs are generated by means of a two-photon laser.
  • the light source used is one in which the photon pairs are generated by a Coulomb blockade effect taking place in the light source.
  • the beam of photon packets can be split into a plurality of sub-beams which are coherent with one another, or the beam of photon packets can be split into a plurality of coherent beams with one another Photon packet partial beams are taken, wherein at least one of the photon packet partial beams is used to illuminate the object and at least one other of the photon packet partial beams is used as reference light or to form the same.
  • a larger number of photon packet partial beams can advantageously be used for illuminating the object than for forming the reference light, for example to compensate for reflection losses of the illuminating beam on the object and to achieve that in the area of the interference field the light coming from the object, in the literature also referred to as the object beam, with an intensity that is as similar as possible to that of the reference light.
  • a light source can also be used which generates a plurality of beams of photon packets, in that primary photons of average wavelength ⁇ are irradiated into a plurality of optically nonlinear crystals from a primary light source, in particular laser, the crystals in each case are designed, arranged and oriented in such a way that one of the beams of photon packets is created in each of the crystals from irradiated primary photons by optical parametric fluorescence.
  • a primary light source in particular laser
  • the crystals in each case are designed, arranged and oriented in such a way that one of the beams of photon packets is created in each of the crystals from irradiated primary photons by optical parametric fluorescence.
  • the light source therefore has a primary light source, in particular a laser, and a plurality of optically nonlinear crystals, the primary light source irradiating primary photons of the average wavelength ⁇ in each of the crystals and thus procuring and orienting the crystals are that in each of the crystals from irradiated primary photons one of the beams of photon packets is created by optical parametric fluorescence.
  • Each photon packet, e.g. Pair of photons is thus generated in one of a plurality of channels, it being impossible to predict which one.
  • the number of partial photon pack beams or of packets of photons used to illuminate the object is greater than the number of Partial beam packets of photons or beams of packets of photons which are used as reference light, for example in order to achieve that in the area of the interference field the light coming from the object is as similar as possible in intensity to the reference light.
  • the optically nonlinear crystal can therefore consist or the optically nonlinear crystals consist of beta barium borate, potassium deuterium phosphate or lithium niobate.
  • optically nonlinear crystal or as optically nonlinear crystals, e.g. those are used which are designed as optical waveguides.
  • the optically nonlinear crystal is or the optically nonlinear crystals are therefore designed as optical waveguides.
  • the primary light source used here can be one which emits a beam of primary photons of the medium wavelength ⁇ , the beam of primary photons being split into a plurality of sub-beams of primary phototons which are coherent with one another, or the beam of primary -Photons a plurality of mutually coherent partial beams of primary photons is taken, and each of the partial beams of primary photons generated in this way is irradiated into one of the optically nonlinear crystals. In this case, the beam from primary photons is split into partial beams.
  • a plurality of photon pack partial beams or a plurality of partial beams from primary photons can be obtained in various ways.
  • the beam from photon packets or the beam from primary photons is obtained at least one obstacle introduced into the same or an aperture introduced into the same with a plurality of holes or at least one beam splitter introduced into the same into a plurality of Photon packet partial beams or a plurality of partial beams of primary photons split.
  • the beam of photon packets or the beam of primary photons is split into a plurality of at least partially phase-shifted partial beam beams or partial beams of primary photons by a phase plate introduced therein.
  • a phase plate which splits the beam of photon packets into two photon pack partial beams, between which there is a phase difference of (2n + 1) * ⁇ / Z, where n is an integer and Z is the number of photons per photon packet.
  • a zone plate with a first and a second zone group is used as the phase plate, which is designed such that a photon packet partial beam emanates from each zone of the first zone group, so that a first group of photon packet partial beams emanates from the zone plate.
  • each photon packet sub-beam of this first group has passed through one of the zones of the first zone group and a photon packet sub-beam emanates from each zone of the second zone group, so that a second group of photon packet sub-beams emanates from the zone plate is defined in that each photon packet sub-beam of this second group has passed through a zone of the second zone group, and the
  • Photon packet partial beams of the first group have a phase difference of (2m + 1) * ⁇ / Z compared to those of the second group, where m is a whole
  • Number and Z is the number of secondary photons per packet of photons.
  • phase difference Due to the phase difference, interference occurs immediately behind the phase plate in the border area between the photon packet partial beams, by means of which the light intensity decreases in the border area, the total intensity of the partial beams advantageously not decreasing since no photons are removed from the partial beams. If the phase difference is chosen so that the photon packet partial beams are out of phase, the intensity is in Limit range equal to zero.
  • an optical waveguide which is introduced into the beam of photon packets in each case, is used to remove a plurality of partial photon packet beams from the beam of photon packets or to remove a plurality of partial beams of primary phototons from the beam of primary photons, that part of the beam of photon packets or part of the beam of primary photons is coupled into each optical waveguide.
  • the primary light source one can also be used which emits a plurality of beams of primary photons each having the mean wavelength ⁇ , each of which is irradiated into one of the optically nonlinear crystals in such a way that in each of the crystals from one of the irradiated beams of primary photons is created by optical parametric fluorescence of one of the beams of photon packets.
  • the primary light source is therefore able to emit a plurality of rays from primary photons each having the mean wavelength ⁇ and to irradiate them into one of the optically nonlinear crystals in such a way that in each of the crystals from one of the incident rays from primary Photons are created by optical parametric fluorescence of one of the beams from photon packets.
  • Primary light sources that can be used are those which emit two or more coherent beams of primary photons from the outset, so that the splitting into or the removal of partial beams is not necessary.
  • such a laser is therefore used as the primary light source, in which a transverse mode or a spiral mode is formed, which result in the laser having at least two separate brightness zones, each of which emits one of the rays from primary photons.
  • a is used as the primary light source Kaleidoscope laser is used, in which a plurality of separate brightness zones are formed, each of which emits one of the rays from primary photons.
  • At least two of the beams from photon packets are used to illuminate the object and, before reaching the same, are expanded into illuminating beams such that each illuminating beam completely detects the object.
  • At least two of the beams from photon packets are used to illuminate the object and, before reaching the same, are expanded into illuminating beams in such a way that each illuminating beam only detects part of the object and all illuminating beams collectively detect the entire object.
  • the expansion can e.g. by a corresponding number of lenses or an area of lenses, which are preferably, but not necessarily, designed as diverging lenses, or by diffraction gratings.
  • the light source used to generate the photon packets is one which is set up in such a way that the object light and the reference light have the same amplitude in the interference field, i.e. have the same intensity.
  • At least two of the beams of photon packets are used to form the reference light by expanding them into reference beams in each case reaching the detector in such a way that the reference beams all overlap in a region which occupies at least 90% of the interference field.
  • At least two of the beams of photon packets are used to form the reference light, in that, before reaching the detector, they are each expanded into reference beams such that each of the reference beams is in an area which occupies at most 10% of the interference field, overlaps with one or more of the other reference beams.
  • a two-dimensional, spatially resolving detector is preferably used, which in particular, e.g. a video camera with or without a lens can be used.
  • the detector can also e.g. be a photo plate.
  • a two-dimensional array of a plurality of light-sensitive sensor elements which can in particular be CCD elements.
  • the detector used is one which comprises a light-sensitive sensor element which is able to scan the interference field.
  • the sensor element can e.g. be a CCD element or be composed of a rigidly arranged plurality of such. Such a detector is never spatially resolved; a spatial resolution is only achieved through the scanning process.
  • the detector used is one which comprises two light-sensitive sensor elements which, depending on one another or independently of each other, are able to scan the interference field; In this case too, a two-dimensional image is only created by the scanning process.
  • the detector used is one which comprises the following components: (a) a detector beam splitter which is arranged such that photons and photons of the reference beam coming from the object can strike the detector beam splitter, and is able to pass part of these photons and deflect another part of these photons, (b) a first photosensitive sensor element which is arranged such that only photons transmitted by the detector beam splitter into it (c) as well as a second light-sensitive sensor element, which is arranged in such a way that only photons deflected by the detector beam splitter can fall into it, and the interference field is able to scan.
  • This detector also has no intrinsic spatial resolution; Spatial resolution is also only achieved through the scanning process.
  • a detector In order to suppress background noise which would deteriorate the contrast of the hologram, a detector is preferably used which only responds when one of the photon packets is incident on the detector and does not respond when a single photon is incident on it alone.
  • the detector used is one which is capable of responding to individual photons incident in the detector.
  • the detector used is one which only responds if two photons, the energy of which is greater than a certain lower threshold value, enter the detector within a predeterminable window time period.
  • photons e.g. from background heat radiation or e.g. come from the room lighting, can be safely suppressed.
  • a detector e.g. such a can be used, which also only responds when the energy of the two photons is in each case less than a certain first upper threshold value.
  • the photon packets are generated by means of optical parametric fluorescence, e.g. Primary photons that undesirably get onto the detector are suppressed because the energy of each packet photon generated by optical parametric fluorescence is smaller than that of the primary photons.
  • a detector can be used as the detector, which also only responds if the energy sum of the two photons is also within a predetermined bandwidth. In this way, background radiation can also be effectively suppressed.
  • one is used as the detector, which also only responds if the two photons additionally fall into two different ones of the sensor elements. This prevents the detector from responding even if a single photon falls on the detector.
  • a detector is used as the detector, which also only responds when the two photons also fall into one and the same sensor element. In this way, those photon pairs can be selected whose members have a low spatial dispersion, i.e. form a "narrow" pair of photons.
  • an imaging element in particular a converging lens, is used, which maps the object or a part thereof to the interference field
  • a pinhole is used which limits the angle of incidence at which photon packets coming from the object can strike the detector.
  • the intensity of the light used to illuminate the object and the reference light is chosen so low that the impact of two photon packets on the detector is small within the window period, e.g. less than 1% or e.g. less than 0.1%.
  • the hologram can be viewed with such photon packets, each of which consists of a plurality of photons correlated with one another quantum mechanically, which together form a multi-photon jib state, are illuminated.
  • Fig. 1 shows an embodiment of an arrangement according to the invention for producing a hologram of an object, with a light source which generates two beams of photon packets, one of which is used to illuminate the object and the other to form the reference light, and with a detector on which the light coming from the object and the reference light strike at different angles,
  • FIG. 2 shows another exemplary embodiment of an arrangement according to the invention, with a light source which generates three beams of pairs of photons, of which two beams are used for illuminating the object and one beam for forming the reference light,
  • FIG. 3 shows a further exemplary embodiment of an arrangement according to the invention, with the light source and the detector from FIG. 1, the light coming from the object and the reference light hitting the detector coaxially,
  • FIGS. 1 to 3 shows a detector which can be used in the arrangements from FIGS. 1 to 3,
  • FIG. 5 shows another detector which can be used in the arrangements from FIGS. 1 to 3, and
  • FIG. 1 shows an exemplary embodiment of an arrangement according to the invention for producing a hologram of an object 4, with a light source LQ1, which generates two beams S3, S4 of photon packets, one of which, namely the beam S4, for illuminating the object 4, and the other, namely the beam S3, is used to form the reference light, and with a detector on which the light coming from the object and the reference light impinge at different angles.
  • the light OL1 coming from the object 4 and the reference light R interfere in an interference field, the brightness distribution of which is registered by a detector 5, on which the light OL1 coming from the object 4 and the reference light R strike at different angles in the example of the arrangement in FIG. 1 becomes.
  • photon packets are used to produce a hologram of the object 4 for illuminating the object 4 and to form the reference light R, each of which consists of a plurality of photons which are quantum mechanically correlated with one another and which together form a multi-photon jib state.
  • photon pairs are used as photon packets, each of which consists of two photons correlated with one another quantum mechanically, which together form a two-photon jib state.
  • the arrangement of FIG. 1 therefore has a light source LQ1 which is able to emit two beams S3, S4 from such photon pairs, one of which is used according to the invention to form the illuminating beam B and the other to form the reference light R.
  • the light source LQ1 has the following components: a) a primary light source 1, b) an optically nonlinear crystal 2, c) an interferometer with two arms and d) a beam coupler 3 with a first coupler input 3E1, a second coupler input 3E2, a first Coupler output 3A1 and a second coupler output 3A2.
  • the primary light source 1 in the arrangement of FIG. 1 is a laser 1, which emits a beam P of primary photons of the mean wavelength ⁇ .
  • the optically nonlinear crystal 2 is designed, arranged and oriented in such a way that at least some of the primary photons fall into the crystal 2 and in the same through optical parametric fluorescence a pair of secondary photons emerging from the crystal 2, namely one Signal and an idler photon belonging to it and correlated with this quantum mechanically, also called follower photon.
  • This process is carried out in the light source LQ1 in such a way that the signal photons in a beam S1 and the idler photons in a beam S2 emerge from the crystal 2, the two beams S1 and S2 having different directions; this can be achieved by orienting the crystal 2 accordingly.
  • Beam S1 is coupled into the first arm and beam S2 into the second arm of the interferometer.
  • the optically nonlinear crystal 2 can e.g. consist of beta barium borate, potassium deuterium phosphate or lithium niobate.
  • the total energy of the pair of photons corresponds to the energy of the primary photon.
  • the wavelength of each secondary photon is therefore larger than that of the primary photon.
  • the interferometer in the arrangement of FIG. 1 is formed by two deflecting mirrors Sp1, Sp2 and an optical delay device, not shown in FIG. 1.
  • the deflecting mirror Sp1 is located in the first arm of the interferometer and deflects the beam S1 in such a way that the signal photons enter the beam coupler 1 through the first input 3E1.
  • the deflection mirror Sp2 is located in the second arm of the interferometer and deflects the beam S2 in such a way that the idler photons enter the beam coupler 1 through the second input 3E2. Both arms of the interferometer thus unite in the beam coupler 3.
  • the arms of the interferometer can be formed by light guides.
  • the delay device can be formed, for example, by one of the deflecting mirrors Sp1, Sp2 being adjustable in the direction perpendicular to its surface.
  • the delay device can also be formed, for example, by an adjustable mirror system which is optically interposed in one of the interferometer arms.
  • the delay device can also For example, be formed by an electrically controllable birefringent delay element which is optically interposed in one of the interferometer arms.
  • the signal photons can interfere with the idler photons associated with them. After this interference, each signal photon and each idler photon can leave the beam coupler 3 both through the first coupler output 3A1 and through the second coupler output 3A2.
  • the signal photon and the idler photon belonging to it can either leave the beam coupler 3 separately from one another through different coupler outputs 3A1, 3A2, or they can both the beam coupler 3 together as a photon pair, the members of which are quantum mechanically correlated with one another and are together in a two-photon -Fock state, in a so-called Hong-Ohu-almond interference through each of the two coupler outputs 3A1, 3A2, so that the light source through the first coupler output 3A1 a first beam S3 and through the second coupler output 3A2 a second beam S4 is able to emit from such photon pairs.
  • a beam of such photon pairs thus emerges through each of the two coupler outputs 3A1, 3A2.
  • the beam coupler is preferably set up in such a way that the same number of photon pairs emerge through each of the coupler outputs 3A1, 3A2 over time, so that none of the coupler outputs 3A1, 3A2 is preferred.
  • a beam splitter can be used as the beam coupler 3, e.g. a beam splitter plate.
  • the probability W that the signal and idler photons leave the beam coupler 3 together through the same coupler output 3A1 or 3A2 depends in a complicated manner on the optical path length difference D.
  • the yield of such photon pairs can therefore be maximized by appropriate selection of the path length difference.
  • part of the photon pairs generated in this way namely the beam S4 in the example of the arrangement in FIG. 1, is used to illuminate the object 4.
  • the photon pair beam S4 is expanded by means of a diverging lens L2 to an illumination beam B which detects the object 4. Due to the illumination by the illumination beam B, 4 pairs of photons emanate from the object and reach the detector 5 as object light OL1. If the object 4 is sufficiently small or only a sufficiently small part of the object 4 is to be captured by the hologram, the photon pair beam S4 need not be expanded; rather, the beam S4 can serve directly as an illuminating beam in this case.
  • a portion of the photon pairs generated in this way namely the photon pair beam S3 in the example of the arrangement in FIG. 1, is used to form the reference light R.
  • the photon pair beam S3 is directed in the direction of the detector 5 by means of further deflecting mirrors Sp3, Sp4 and expanded to the reference light R by means of a diverging lens L1.
  • the reference light R is formed from the beam S3 by widening it
  • the brightness distribution in the interference field or in a part thereof is registered by means of the detector 5 as a hologram of the object 4.
  • the reference light R is attenuated by an attenuator before it hits the detector 5 such that the mean intensities of the reference light R and the object light OL1 in the interference field are essentially the same size.
  • a light source is used which is set up in such a way that the object light and the reference light have the same amplitude, ie the same intensity, in the interference field.
  • the beam coupler 3 replaces the beam splitter, which, in the prior art, usually breaks down the coherent light required to produce a hologram into the illuminating beam and the reference beam, since the light source LQ1 uses the beam coupler 3 to emit two coherent partial beams from the outset, one of which is used Illumination of the object and the other can be used as reference light or to form the same.
  • FIG. 2 shows another exemplary embodiment of an arrangement according to the invention, with a light source LQ2, which generates two illuminating beams B1, B2 for illuminating the object 4 and a reference beam R1 as reference light.
  • the light OL2 coming from the object 4 and the reference beam R1 interfere in an interference field, the brightness distribution of which is registered by the detector 5.
  • the arrangement of FIG. 2 has a light source LQ1, which is able to emit three beams S5, S6, S7 from such photon pairs, each of which consists of two photons correlated with each other quantum mechanically, which together form a two-photon jib state.
  • Two of the beams of photon packets, namely S5 and S6, are used to illuminate the object and the third of the beams of photon packets, namely beam S7, is used to form the reference light R1.
  • the light source LQ1 has the following components: the primary light source 1 from FIG. 1 and three optically nonlinear crystals 2A, 2B, 2C.
  • the optically nonlinear crystals 2A, 2B, 2C are each arranged, arranged and oriented such that a part of the primary photons is incident in each of them and in each of the crystals 2A, 2B, 2C from irradiated primary photons one of the photon pair beams S5, S6, S7 of photon pairs is produced by optical parametric fluorescence.
  • Each of the photon packets generated in this way consists of two secondary photons, namely a signal photon and an idler photon associated with it and quantum mechanically correlated with it.
  • This process is carried out in the light source LQ2 in such a way that signal and idler photons essentially emerge from crystals 2A, 2B, 2C essentially parallel to one another, ie each of the photon pair beams S5, S6, S7 contains both signal and idler photons.
  • This can be achieved by appropriate orientation of the crystals 2A, 2B, 2C.
  • the optically nonlinear crystals 2A, 2B, 2C can consist, for example, of beta barium borate, of potassium deuterium phosphate or of lithium niobate.
  • Each pair of photons is thus generated in one of three channels, it being impossible to predict which one.
  • the crystals 2A, 2B, 2C are preferably spaced apart from one another so that the photon pair beams S5, S6, S7 run spatially separated from one another; this mutual spacing of crystals 2A, 2B, 2C is not shown in FIG. 2. If the diameter of the primary photon beam P is too small to capture all crystals 2A, 2B, 2C, the primary photon beam P can be expanded accordingly before reaching crystals 2A, 2B, 2C; such an expansion is not shown in FIG. 2. Crystals 2A, 2B, 2C can e.g. be designed as an optically non-linear waveguide.
  • a part of the photon pairs generated in this way namely the photon pair beams S5 and S6 in the example of the arrangement in FIG. 2, is used to illuminate the object 4.
  • the photon pair beams S5 and S6 are expanded by means of a diverging lens array LA to form an illuminating beam B1 or B2, which in each case cover the entire object 4 in the example of FIG. 2.
  • the photon pair beam S7 is directed in the direction of the detector 5 by means of a deflecting mirror Sp5 and expanded to the reference beam R1 by means of a diverging lens L3.
  • the arrangement of FIG. 2 is modified in such a way that more than three photon packet partial beams are generated, one or some of which are used to form the reference beam and the rest are used to illuminate the object.
  • FIG. 3 shows a further exemplary embodiment of an arrangement according to the invention, with the light source LQ1 and the detector 5 from FIG. 1, the light OL3 coming from the object 4 and the reference beam R3 hitting the detector 5 coaxially.
  • the operation of the light source LQ1 has already been explained with reference to FIG. 1.
  • the light source LQ1 emits two pairs of photons that are not parallel to one another. Rays S3. S4 from.
  • the photon pair beam S3 is expanded by a lens L4 to an illuminating beam B3, which covers the entire object 4.
  • object light OL3 in the form of photon pairs coming from object 4 emanates from object 4 and reach the interference field after passing through a converging lens 6 and a pinhole 7 and after penetrating a beam splitter plate 8.
  • the converging lens 6 serves to image the object 4 on the detector 5.
  • the perforated plate 7 serves to adjust the opening angle at which the part of the object light OL3 passing through the beam splitter plate 8 falls on the detector 5 to the opening angle at which the beam splitter plate reflected part of the reference light R3 is incident on the detector.
  • the photon pair beam S4 is directed onto a beam splitter plate 8 by a deflecting mirror Sp6.
  • a diverging lens L5 between the deflecting mirror Sp6 and the beam splitter plate, which widens the photon packet beam S4 to the reference light R3, i.e. the beam S4 is used to form the reference light R3.
  • the beam splitter plate 8 reflects a part of the reference light R3 into the interference field, where this part interferes with the part of the object light OL3 transmitted by the beam splitter plate 8.
  • the position of the object 4, the deflecting mirror Sp6 and the beam splitter plate 8 are selected so that the part of the object light OL3 let through by the beam splitter plate 8 and the part of the reference light R3 reflected by the beam splitter plate coaxially fall into the interference field and onto the detector 5, which means an approximation of the angles of incidence of the photon pairs coming from the object 4 and the reference light R3 onto the detector 5 and is advantageous, for example affects the resolution of the hologram.
  • the brightness distribution in the interference field or in a part thereof is registered as a hologram of the object 4 by means of the detector 5.
  • the detector 5 can alternatively be arranged such that the part of the object light OL3 reflected by the beam splitter plate 8 and that by the Part of the reference light R3 transmitted through the beam splitter plate 8 coaxially incident on the detector 5; in this case the detector 5 in FIG. 3 is to be arranged below the beam splitter plate 8 (not shown).
  • the detector 5 of Figures 1 to 3 can e.g. be a photo plate.
  • the detector 5 can also e.g. be a CCD detector; in this case, the detector 5 includes an evaluation circuit, which is not shown in FIGS. 1 to 3.
  • FIG. 4 shows a schematic cross-sectional illustration of a detector 5A, which can be used in the arrangements from FIG. 1 to FIG. 3 instead of the detector 5 shown there.
  • the detector 5A comprises a multiplicity of light-sensitive sensor elements E5A, which are each designed as individual CCD elements E5A and are arranged as a two-dimensional matrix on a holder F5A. They thus form a two-dimensional CCD matrix, so that the detector 5A has two-dimensional spatial resolution.
  • the CCD individual elements E5A are connected to an evaluation circuit 10A via a cable set KA.
  • the detector 5A is preferably set up in such a way that it only responds if two photons, the energy sum of which lies within a predetermined bandwidth, fall into the detector 5A within a predeterminable window time period, so that the detector 5A essentially only responds if one the pairs of photons are incident on the detector 5A and do not respond when a single photon is incident on them alone.
  • the detector 5 shows a schematic cross-sectional illustration of a detector 5B, which can likewise be used in the arrangements from FIGS. 1 to 3 instead of the detector 5 shown there.
  • the detector 5B comprises two light-sensitive sensor elements E5A, each of which is an individual CCD element E5B trained, each arranged in a version F5B and dependent on each other or independently capable of scanning the interference field.
  • the two individual CCD elements E5B are connected to an evaluation circuit 10B via a cable set KB.
  • the detector 5B is preferably set up in such a way that it only responds if a photon falls into each of the two individual CCD elements E5B within a predefinable window time period and the energy sum of these two photons lies within a predetermined bandwidth, so that also the detector 5B essentially only responds when one of the pairs of photons falls into the detector 5B, and does not respond when a single photon falls into it alone.
  • the detector 5B advantageously does not respond when a single photon falls into the detector 5B, the energy of which lies within the predetermined bandwidth. However, the detector 5B does not respond to those photon pairs whose members are so close to one another that both photons of the photon pair fall into the same single CCD element. Thus, the detector 5B only responds to "wide" pairs of photons.
  • FIG. 6 shows a schematic cross-sectional illustration of a detector 5C, which can likewise be used in the arrangements from FIG. 1 to FIG. 3 instead of the detector 5 shown there and which only responds to "narrow" photon pairs.
  • the detector 5C comprises a detector beam splitter 11 which is arranged so that photons and photons of the reference beam coming from the object 4 can each strike the detector beam splitter 11 and is able to pass part of these photons and another part of these photons distract.
  • the detector 5C further comprises two light-sensitive sensor elements E5C1, E5C2, namely a first single CCD element E5C1 and a second single CCD single element E5C2, which are arranged in a common version F5C and the interference field together, i.e. in a constant mutual arrangement, are able to scan.
  • the first single CCD element E5C1 is arranged so that only the Detector beam splitter 11 transmitted photons can fall into the same.
  • the second individual CCD element E5C2 is arranged in such a way that only photons deflected by the detector beam splitter 11 can fall into the same.
  • the two individual CCD elements E5C1, E5C2 are thus optically coupled to one another via the beam splitter 11 and connected to an evaluation circuit 10C via a cable set KC.
  • the detector 5C is also preferably set up in such a way that it only responds if a photon falls into each of the two individual CCD elements E5C1, E5C2 and the energy sum of these two photons is within a predetermined bandwidth within a predefinable window time period. so that the detector 5C also responds essentially only when one of the pairs of photons falls into the detector 5C and does not respond when a single photon falls into it alone. In particular, the detector 5C therefore advantageously does not respond when a single photon falls into the detector 5C, the energy of which lies within the predetermined bandwidth.
  • a disadvantage of the detector 5C is that it does not respond if the two members of the photon pair on the detector beam splitter 11 are not separated, but either both are deflected there or both are let through. As a result, the efficiency of the detector 5C is reduced by an average of 50%.
  • the detector 5C advantageously responds only to those photon pairs which have the property that the projection of their mutual distance onto the detector 5C is smaller than a certain maximum value, which is determined by the geometry of the detector 5C; otherwise at least one of the members of the pair would not hit any of the single CCD elements E5C1, E5C2.
  • the detector 5C only responds to "narrow" photon pairs. In this way, those photon pairs can be selected whose members have a low spatial dispersion, without the incidence of a single photon being able to simulate the incidence of a photon pair.
  • the maximum value mentioned is further reduced in the example of FIG. 6 by a perforated diaphragm 9 optically connected upstream of the detector 5C.
  • a light source for producing holograms is used, for example, which generates quantum mechanically correlated photon pairs, as described, for example, in the book by J. Brendel "Quantum phenomena in the world of light", Chapter 4.1, Frankfurt (Main) 1994.
  • Other photon pair sources for example atomic cascade sources, can also be used according to the invention if they generate correlated photon pairs.
  • photon packets each containing more than two correlated photons, the resolution can be further improved, but the previously known sources for photon packets, each with more than two correlated photons, are very weak, so that the generation of a hologram using such sources takes a long time ,
  • the members of the photon pairs can be conditioned on a beam splitter to form an interference-capable pair and then fed into a conventional holography setup.
  • Light which e.g. originates from a laser, also known as a pump laser, falls on a nonlinear optical crystal; some of the photons irradiated in this way, also called pump photons, decay in the crystal into a signal and an idler photon, each with an average of half the energy and twice the wavelength.
  • the energy conservation rate applies, i.e. the sum of the signal and idler photons is equal to the energy of the irradiated pump photon. This process is called "parametric fluorescence".
  • the two resulting photons, signal and idler photons fall on the two inputs of a 50:50 beam splitter and leave it as a couple in one of the two outputs.
  • the path difference between the signal and idlerohoton must be selected so that the paths of the photons for the cases a) both photons are reflected at the beam splitter or b) both photons are transmitted through the beam splitter and are indistinguishable (see also CK Hong et al .: " Measurement of Subpicosecond Time Intervals between Two Photons by Interference ", Phys. Rev. Letters 59" 2044 (1987).
  • the two outputs of the beam splitter through which the photon pair can leave the beam splitter it not being determined which of the two Outputs are the inputs of the interferometer that generates the hologram. That is, one output generates the illuminating beam for the object and the other the reference beam or reference light.
  • the two beams are converted into spherical waves, one illuminating the object and then, scattered by the object, superimposed on the reference spherical wave.
  • the overlapping area is the interference field which, taken photographically or by means of another detector, gives the hologram.
  • a large number of possible holography arrangements are described in the above-mentioned article "Hologrpahy” by L. Huff in the book by M.Bass: “Handbook of Optics", Voll II, page 23.1 ff, New York 1995; others can be found in the book by T. Kreis "Holographie Interferometry", Berlin 1996.
  • a photographic plate electronic registration devices can be used as a detector.
  • the hologram must be shown on a suitable display for viewing, e.g. on a liquid crystal display, the detectors used must detect single photons or pairs of photons.
  • Sensitive video cameras, also in conjunction with light amplifiers, can record the hologram directly.
  • the coincidence detection is also advantageous, in which the registration is only carried out if two pixels respond at the same time. Cameras that only register photon pairs at a pixel are also suitable (see e.g. Fig. 4).
  • Detector pairs can scan the interference field independently of one another and thus record the hologram (see e.g. Fig. 5). If they are switched in coincidence, only photon pairs are registered. Detector pairs are also possible, which are coupled together with the aid of a beam splitter and coincide in the interference field. Such detectors are described in the aforementioned book by J. Brendel.
  • the registration of the holograms with video cameras is often difficult due to the camera resolution being too low.
  • the structures of the hologram However, they become coarser and can therefore be better recorded if the reference beam and object beam (or reference light and object light) run coaxially (cf. FIG. 3).
  • the invention is commercially applicable, for example in the field of repro technology, holographic monitoring of the shape of series components, photolithography for the production of semiconductor components and the holographic storage of information.
  • I primary light source 2.2A, 2B, 2C optically nonlinear crystals
  • E5C1 E5C2 sensor elements from 5C

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Abstract

L'invention concerne un procédé de production d'un hologramme d'un objet (4), selon lequel on utilise des paquets de photons pour éclairer l'objet et comme lumière de référence, chaque paquet de photons étant constitué d'une pluralité de photons qui sont en corrélation selon la mécanique quantique et qui forment ensemble un état Fock à multiphotons. Une partie (8) des paquets de photons permet l'éclairage de l'objet et une partie (R) des paquets de photons est utilisée comme lumière de référence. Les paquets de photons (OL1) provenant de l'objet et la lumière de référence sont amenés dans un champ d'interférence aux fins d'interférence et la répartition de la luminosité dans le champ d'interférence ou une partie de ce dernier est enregistrée à l'aide d'un détecteur (5). Pour produire les paquets de photons, on utilise de préférence une source lumineuse qui émette une pluralité de rayons de tels paquets de photons, ces rayons étant cohérents entre eux. On utilise au moins un rayon pour l'éclairage de l'objet et au moins un autre rayon comme lumière de référence ou pour sa formation. De plus, on préfère une source lumineuse qui génère des paires de photons en tant que paquets de photons.
EP04762482A 2003-08-22 2004-07-22 Procede et dispositif de production d'un hologramme Withdrawn EP1658530A1 (fr)

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Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BELINSKII A V ET AL: "TWO-PHOTON OPTICS: DIFFRACTION, HOLOGRAPHY, AND TRANSFORMATION OF TWO-DIMENSIONAL SIGNALS", JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, PLEIADES PUBLISHING / AIP, MELVILLE, NY, US, vol. 78, no. 3, 1 March 1994 (1994-03-01), pages 259 - 262, XP009041618, ISSN: 1063-7761 *
BOTO A N ET AL: "QUANTUM INTERFEROMETRIC OPTICAL LITHOGRAPHY: EXPLOITING ENTANGLEMENT TO BEAT THE DIFFRACTION LIMIT", PHYSICAL REVIEW LETTERS, AMERICAN PHYSICAL SOCIETY, NEW YORK, US, vol. 85, no. 13, 25 September 2000 (2000-09-25), pages 2733 - 2736, XP001029914, ISSN: 0031-9007, DOI: 10.1103/PHYSREVLETT.85.2733 *
See also references of WO2005022274A1 *

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