EP1654914B8 - Extreme uv and soft x ray generator - Google Patents

Extreme uv and soft x ray generator Download PDF

Info

Publication number
EP1654914B8
EP1654914B8 EP04744676A EP04744676A EP1654914B8 EP 1654914 B8 EP1654914 B8 EP 1654914B8 EP 04744676 A EP04744676 A EP 04744676A EP 04744676 A EP04744676 A EP 04744676A EP 1654914 B8 EP1654914 B8 EP 1654914B8
Authority
EP
European Patent Office
Prior art keywords
soft
gas
extreme
ray generator
symmetry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04744676A
Other languages
German (de)
French (fr)
Other versions
EP1654914B1 (en
EP1654914A2 (en
Inventor
Klaus Philips Intellectual Property & BERGMANN
Willi c/o Philips Intellectual Property & NEFF
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, Koninklijke Philips Electronics NV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP1654914A2 publication Critical patent/EP1654914A2/en
Application granted granted Critical
Publication of EP1654914B1 publication Critical patent/EP1654914B1/en
Publication of EP1654914B8 publication Critical patent/EP1654914B8/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Reciprocating Pumps (AREA)

Abstract

A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening that defines an axis of symmetry and is provided for the discharge of radiation. A diaphragm exhibits at least one opening on the axis of symmetry and operates as a differential pump stage, between the two electrodes.
EP04744676A 2003-08-07 2004-07-29 Extreme uv and soft x ray generator Expired - Lifetime EP1654914B8 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10336273A DE10336273A1 (en) 2003-08-07 2003-08-07 Device for generating EUV and soft X-radiation
PCT/IB2004/051323 WO2005015602A2 (en) 2003-08-07 2004-07-29 Extreme uv and soft x ray generator

Publications (3)

Publication Number Publication Date
EP1654914A2 EP1654914A2 (en) 2006-05-10
EP1654914B1 EP1654914B1 (en) 2009-03-25
EP1654914B8 true EP1654914B8 (en) 2009-08-12

Family

ID=34129504

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04744676A Expired - Lifetime EP1654914B8 (en) 2003-08-07 2004-07-29 Extreme uv and soft x ray generator

Country Status (9)

Country Link
US (1) US7734014B2 (en)
EP (1) EP1654914B8 (en)
JP (1) JP4814093B2 (en)
KR (1) KR101058068B1 (en)
CN (1) CN100482030C (en)
AT (1) ATE427026T1 (en)
DE (2) DE10336273A1 (en)
TW (1) TW200515458A (en)
WO (1) WO2005015602A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007020742B8 (en) * 2007-04-28 2009-06-18 Xtreme Technologies Gmbh Arrangement for switching large electrical currents via a gas discharge
US20130098555A1 (en) * 2011-10-20 2013-04-25 Applied Materials, Inc. Electron beam plasma source with profiled conductive fins for uniform plasma generation
US9129777B2 (en) 2011-10-20 2015-09-08 Applied Materials, Inc. Electron beam plasma source with arrayed plasma sources for uniform plasma generation
US8951384B2 (en) 2011-10-20 2015-02-10 Applied Materials, Inc. Electron beam plasma source with segmented beam dump for uniform plasma generation
US9443700B2 (en) 2013-03-12 2016-09-13 Applied Materials, Inc. Electron beam plasma source with segmented suppression electrode for uniform plasma generation

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005931A (en) * 1960-03-29 1961-10-24 Raphael A Dandl Ion gun
NL298175A (en) * 1962-11-20
JPS5763755A (en) * 1980-10-03 1982-04-17 Fujitsu Ltd X-ray generating appratus
JPS61218056A (en) * 1985-03-25 1986-09-27 Nippon Telegr & Teleph Corp <Ntt> X-ray generator
JPH0687408B2 (en) * 1986-03-07 1994-11-02 株式会社日立製作所 Plasma X-ray generator
KR900003310B1 (en) * 1986-05-27 1990-05-14 리가가구 겡큐소 Ion producing apparatus
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US4894546A (en) * 1987-03-11 1990-01-16 Nihon Shinku Gijutsu Kabushiki Kaisha Hollow cathode ion sources
JPH01117253A (en) * 1987-10-30 1989-05-10 Hamamatsu Photonics Kk Plasma x-ray generation device
JP2572787B2 (en) * 1987-11-18 1997-01-16 株式会社日立製作所 X-ray generator
JPH01243349A (en) * 1988-03-25 1989-09-28 Hitachi Ltd Plasma extreme ultraviolet light generator
DE3927089C1 (en) * 1989-08-17 1991-04-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
JP2819420B2 (en) * 1989-11-20 1998-10-30 東京エレクトロン株式会社 Ion source
IT1246682B (en) * 1991-03-04 1994-11-24 Proel Tecnologie Spa CABLE CATHOD DEVICE NOT HEATED FOR THE DYNAMIC GENERATION OF PLASMA
US5397956A (en) * 1992-01-13 1995-03-14 Tokyo Electron Limited Electron beam excited plasma system
KR100271244B1 (en) * 1993-09-07 2000-11-01 히가시 데쓰로 Eletron beam excited plasma system
US5467362A (en) * 1994-08-03 1995-11-14 Murray; Gordon A. Pulsed gas discharge Xray laser
US6031241A (en) * 1997-03-11 2000-02-29 University Of Central Florida Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications
US6576917B1 (en) 1997-03-11 2003-06-10 University Of Central Florida Adjustable bore capillary discharge
US6815700B2 (en) * 1997-05-12 2004-11-09 Cymer, Inc. Plasma focus light source with improved pulse power system
DE19753696A1 (en) 1997-12-03 1999-06-17 Fraunhofer Ges Forschung Device and method for generating extreme ultraviolet radiation and soft X-rays from a gas discharge
DE19962160C2 (en) * 1999-06-29 2003-11-13 Fraunhofer Ges Forschung Devices for generating extreme ultraviolet and soft X-rays from a gas discharge
DE10051986A1 (en) * 2000-10-20 2002-05-16 Schwerionenforsch Gmbh Hollow cathode for use in a gas discharge process for ion stripping
DE10139677A1 (en) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Method and device for generating extremely ultraviolet radiation and soft X-rays
DE10134033A1 (en) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Method and device for generating extreme ultraviolet radiation / soft X-rays
DE10151080C1 (en) * 2001-10-10 2002-12-05 Xtreme Tech Gmbh Device for producing extreme ultraviolet radiation used in the semiconductor industry comprises a discharge chamber surrounded by electrode housings through which an operating gas flows under a predetermined pressure
US7342236B2 (en) * 2004-02-23 2008-03-11 Veeco Instruments, Inc. Fluid-cooled ion source

Also Published As

Publication number Publication date
WO2005015602A3 (en) 2005-06-02
JP2007501997A (en) 2007-02-01
WO2005015602A2 (en) 2005-02-17
JP4814093B2 (en) 2011-11-09
CN1833472A (en) 2006-09-13
DE502004009224D1 (en) 2009-05-07
KR20060054422A (en) 2006-05-22
DE10336273A1 (en) 2005-03-10
US20080143228A1 (en) 2008-06-19
TW200515458A (en) 2005-05-01
CN100482030C (en) 2009-04-22
EP1654914B1 (en) 2009-03-25
ATE427026T1 (en) 2009-04-15
US7734014B2 (en) 2010-06-08
EP1654914A2 (en) 2006-05-10
KR101058068B1 (en) 2011-08-22

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