EP1626178B1 - Spiralvakuumpumpe - Google Patents

Spiralvakuumpumpe Download PDF

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Publication number
EP1626178B1
EP1626178B1 EP20040018870 EP04018870A EP1626178B1 EP 1626178 B1 EP1626178 B1 EP 1626178B1 EP 20040018870 EP20040018870 EP 20040018870 EP 04018870 A EP04018870 A EP 04018870A EP 1626178 B1 EP1626178 B1 EP 1626178B1
Authority
EP
European Patent Office
Prior art keywords
driving shaft
scroll
compression chamber
fixed
orbiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP20040018870
Other languages
English (en)
French (fr)
Other versions
EP1626178A1 (de
Inventor
Ryusuke Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Priority to DE200460009437 priority Critical patent/DE602004009437T2/de
Priority to EP20040018870 priority patent/EP1626178B1/de
Publication of EP1626178A1 publication Critical patent/EP1626178A1/de
Application granted granted Critical
Publication of EP1626178B1 publication Critical patent/EP1626178B1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the present invention relates to a scroll vacuum pump and especially to a scroll vacuum pump in which a fixed wrap of a fixed scroll is engaged with an orbiting wrap of an orbiting scroll rotatably mounted to an eccentric portion of a driving shaft in a housing, the orbiting scroll being revolved at a certain eccentricity by the driving shaft so that a gas sucked through the outer circumference of the housing is compressed towards the center and discharged.
  • the scroll vacuum pump is known. In the scroll vacuum pump, operation time is too long, and the temperatures of the eccentric portion of the driving shaft and bearing and packing for supporting it are raised to cause the bearing and packing to be damaged, so that they become difficult to be used.
  • JP 63-105294A discloses that an inert gas such as N 2 is introduced from the outside as the above (1) and that Fig. 5 thereof illustrates the gas flowing path in the eccentric portion of the driving shaft as the above (3).
  • the driving shaft rotates, the low-temperature or room-temperature air or nitrogen is introduced through the ventilating hole of the driving shaft to cool the bearings, but when the driving shaft stops, a toxic gas or impurity-including gas in the compressing region runs back and is discharged to the outside via the ventilating hole to cause environmental pollution.
  • Fig. 1 is a vertical sectional side view of a scroll vacuum pump of the present invention in which an orbiting scroll is revolved to forward a gas sucked through the outer circumference to a compressing region formed between the orbiting scroll and a fixed scroll, the gas being discharged close to the center after compressed.
  • Numeral 1 denotes a housing which has a sealed disc-like compression chamber 2, and comprises a casing 3 and a cover 4 with a sucking bore 1a on its circumference.
  • the casing 3 and the cover 4 have fixed end plate 3a and 4a that surround the compression chamber 2.
  • the fixed end plates 3a and 4a have spiral fixed wraps 3b and 4b respectively to form fixed scrolls 3c and 4c.
  • an orbiting scroll 5 is revolved around an axis of the compression chamber 2.
  • the orbiting scroll 5 has orbiting wraps 5b,5b engaged with the fixed scrolls 3c,4c deviating by 180 degrees, and is rotatably mounted to an eccentric portion 8a of a driving shaft 8 with bearings 6,7 at the center of the housing 1.
  • the orbiting end plate 5a is connected to the fixed end plate 3a with a three known pin-crank-type self-rotation-preventing mechanisms (not shown in Fig. 1).
  • the orbiting plate 5a eccentrically revolves in the compression chamber 2 thereby changing the size of a sealed space between the fixed wraps 3b,4b and the orbiting wrap 5b engaged with each other.
  • a main shaft 11a of a pin-crank 11 is rotatably fitted in the fixed end plate 3a with a ball bearing 12, and a crank shaft 11b is fitted in a support bore 13 with a bearing 14 closer to the outer circumference of the orbiting plate 5a.
  • a through-bore 16 which communicates with the compression chamber 2 and is closed at the outer end by a plugue 15 close to the center of the casing 4.
  • a discharge bore 17 radially extends from the through bore 16 to the outer circumference of the casing 4.
  • a discharge joint 18 is fitted over the discharge bore 17.
  • the driving shaft 8 is driven by a motor (not shown) and cooling fans 19,20 are mounted to the driving shaft 8 closer to the outer ends of the casing 3 and the cover 4 respectively. Cooling fins 3d,4d are projected on the outer surfaces of the casing 3 and the cover 4 respectively.
  • a ventilating hole 21 which communicates with external air at one end extends along the center of the driving shaft 8 and communicates with a valve bore 22 in the middle of the thickened eccentric portion 8a of the driving shaft 8.
  • the valve bore 22 extends radially from the ventilating hole 21 to the outer circumferential surface of the eccentric portion 8a.
  • the orbiting end plate 5a has a discharge bore 24 which extends from the outer end of the ventilating hole 21 via a communicating path 24a radially and opens via smaller-diameter outlets 23 to a low-pressure area in the middle of the radius of the compression chamber 2 formed between the fixed wraps 3b,4b and the orbiting wrap 5b.
  • valve 25 In the valve bore 22, there is a check valve 25 which opens outward radially, but does not open inward.
  • the check valve 25 is shown in Fig. 3.
  • a smaller-diameter valve seat 22a is formed at the inner end radially of the valve bore 22, and a larger-diameter portion 22b is formed at the outer end.
  • a valve disc 26 has a tapered portion at the lower end and a cylindrical portion which has a plurality of vertical grooves 26a on the outer circumferential surface. The tapered portion of the valve disc 26 is fitted on the valve seat 22a when the valve bore 22 is closed by the check valve 25.
  • a support plate 27 which has a discharge opening 27a is provided on the larger-diameter portion 22b.
  • a valve shaft 28 extends vertically from the center of the valve disc 26 into the support plate 27, and the valve shaft 28 is surrounded by a compression spring 29 between the valve disc 26 and the support plate 27.
  • the sucking bore 1a is connected to a sealed container (not shown) to be depressurized or evacuated when the valve disc 26 is closed.
  • the sealed container contains a toxic gas such as HCl.
  • the driving shaft 8 is driven while the ventilating hole 21 of the driving shaft 3 communicates with external air.
  • the orbiting scroll 5 pivotally mounted thereto is revolved at a certain eccentricity while it is engaged with the fixed scrolls 3c,4c. Accordingly, the sealed container connected to the sucking bore 1a is gradually depressurized and evacuated, so that the toxic gas is sucked into the compression chamber 2 in the scroll vacuum pump.
  • valve disc 26 of the check valve 25 When the rotation speed of the driving shaft 8 exceeds a certain value, the valve disc 26 of the check valve 25 is subjected to centrifugal force produced thereby, and moved radially against the compression spring 29 to open.
  • the compression chamber 2 in the scroll vacuum pump is compressed, but has always lower pressure than atmospheric pressure.
  • the check valve 25 When operation stops, the check valve 25 is automatically closed thereby preventing the toxic gas in the compression chamber 2 from being discharged to the outside. So environment is not contaminated by the toxic gas.
  • the fixed and orbiting scrolls in the embodiments have two-sides, but the present invention may be also applied to a one-side scroll.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (2)

  1. Spiral-Vakuumpumpe, umfassend:
    ein Gehäuse (1);
    eine Antriebswelle (8), die entlang einer Mitte des Gehäuses verläuft und einen exzentrischen Abschnitt (8a) hat;
    eine im Gehäuse befestigte, feststehende Spirale (3c; 4c), die eine feststehende Windung (3b; 4b) hat; und
    eine umlaufende Spirale (5), die drehbar um den exzentrischen Abschnitt (8a) der Antriebswelle (8) angebracht ist und eine umlaufende Windung (5b) hat, wobei die umlaufende Spirale durch die Antriebswelle exzentrisch in Drehung versetzt wird, so dass ein durch einen Außenumfang des Gehäuses angesaugtes Gas zur Mitte des Gehäuses hin in einer Kompressionskammer (2) zwischen den ineinander greifenden feststehenden und umlaufenden Spiralen komprimiert und ausgestoßen wird, wodurch Gas in die Kompressionskammer (2) gesaugt wird,
    wobei die Antriebswelle (8) ein Entlüftungsloch (21) hat, das mit der Außenumgebung in Verbindung steht und sich axial darin erstreckt, eine Ventilbohrung (22), die sich radial erstreckt und an einem Ende mit dem Entlüftungsloch (21) in Verbindung steht und am anderen Ende in die Kompressionskammer (2) mündet, wobei die Ventilbohrung (22) ein Rückschlagventil (25) hat, das bei Drehung der Antriebswelle (8) durch Zentrifugalkraft öffnet, wodurch Außenluft zum Kühlen in die Kompressionskammer (2) gelangt, während das Rückschlagventil (25) schließt, wenn die Antriebswelle (8) anhält, wodurch verhindert ist, dass das Gas aus der Kompressionskammer (2) nach außen hin entweicht.
  2. Spiral-Vakuumpumpe nach Anspruch 1, bei der die umlaufende Spirale eine von der Ventilbohrung (22) zu Auslässen (23) führende Ableitungsbohrung (24) hat, wobei die Auslässe in die Kompressionskammer (2) münden.
EP20040018870 2004-08-09 2004-08-09 Spiralvakuumpumpe Expired - Fee Related EP1626178B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE200460009437 DE602004009437T2 (de) 2004-08-09 2004-08-09 Spiralvakuumpumpe
EP20040018870 EP1626178B1 (de) 2004-08-09 2004-08-09 Spiralvakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20040018870 EP1626178B1 (de) 2004-08-09 2004-08-09 Spiralvakuumpumpe

Publications (2)

Publication Number Publication Date
EP1626178A1 EP1626178A1 (de) 2006-02-15
EP1626178B1 true EP1626178B1 (de) 2007-10-10

Family

ID=34926108

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20040018870 Expired - Fee Related EP1626178B1 (de) 2004-08-09 2004-08-09 Spiralvakuumpumpe

Country Status (2)

Country Link
EP (1) EP1626178B1 (de)
DE (1) DE602004009437T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4837416B2 (ja) * 2006-03-27 2011-12-14 アネスト岩田株式会社 スクロール流体機械

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758077B2 (ja) * 1986-10-20 1995-06-21 株式会社日立製作所 スクロ−ル形真空ポンプ
JP3423514B2 (ja) * 1995-11-30 2003-07-07 アネスト岩田株式会社 スクロール流体機械
JP2002180978A (ja) * 2000-12-12 2002-06-26 Toyota Industries Corp スクロール型圧縮機およびガス圧縮方法

Also Published As

Publication number Publication date
DE602004009437T2 (de) 2008-07-24
EP1626178A1 (de) 2006-02-15
DE602004009437D1 (de) 2007-11-22

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