EP1574116B1 - Verfahren zur erzeugung eines tröpfchen-targets - Google Patents

Verfahren zur erzeugung eines tröpfchen-targets Download PDF

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Publication number
EP1574116B1
EP1574116B1 EP03813077A EP03813077A EP1574116B1 EP 1574116 B1 EP1574116 B1 EP 1574116B1 EP 03813077 A EP03813077 A EP 03813077A EP 03813077 A EP03813077 A EP 03813077A EP 1574116 B1 EP1574116 B1 EP 1574116B1
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EP
European Patent Office
Prior art keywords
several
nozzle
liquid
droplets
expansion channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03813077A
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German (de)
English (en)
French (fr)
Other versions
EP1574116A2 (de
Inventor
Sargis Ter-Avetisyan
Matthias SCHNÜRER
Peter-Viktor Nickles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungsverbund Berlin FVB eV
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Forschungsverbund Berlin FVB eV
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Publication of EP1574116A2 publication Critical patent/EP1574116A2/de
Application granted granted Critical
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Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Definitions

  • the invention relates to a method for producing a droplet target.
  • High density droplet mist with a density of up to 10 19 atom / cm 3 with a droplet diameter of about 1 ⁇ m was prepared with a droplet source described in Rev. Sci. lnstrum. 69, 3780 (1998) by LC Mountford, RA Smith and MRHR Hutchinson and from which the present invention is based.
  • a magnetic valve which forms the liquid pulse and thus the liquid volume, the starting point of the droplet source.
  • a vessel was filled with a liquid and kept under high pressure by means of ethanol. In synchronization the laser is used to open the valve for 2500 ⁇ s so that the droplets exit the nozzle.
  • Droplets with a smaller diameter of about 0.6 microns could be achieved by subsequent electrostatic splitting of the droplets, but which requires a technically complex arrangement.
  • the mist consisting of these droplets has a lower density, namely about 10 16 atms / cm 3 .
  • WO 01/30152 A1 describes a device for producing a dense mist of micrometric droplets, in particular for EUV lithography.
  • the apparatus comprises a container intended to receive a liquid from which a dense mist of micrometric and submicrometric droplets is to be generated.
  • the liquid is pressurized with compressed gas and is then expelled through a nozzle in a vacuum chamber.
  • a diameter of the droplets produced is in the order of 10 microns to 30 microns.
  • the high density should also be realized at a greater distance from the nozzle, i. the droplet target has better collimation compared to the prior art to increase the life of the nozzle.
  • the nozzle is designed as a supersonic nozzle
  • the valve is connected to the supersonic nozzle via an expansion channel, around which the expansion channel heating means are designed such that the temperature can be set to a size, wherein a supersaturated vapor is formed in the expansion channel, and between the electromagnetic valve and the means for heating an insulator is arranged.
  • the device enables the generation of high-density sub- ⁇ liquid targets necessary for the study of
  • the droplets in the solution according to the invention arise from supersaturated vapor, which condenses in a cloud of mist.
  • the target made with the device consists of droplets with an average diameter of about 150 nm and has an average atomic density of> 10 18 atoms / cm 3 .
  • Such a target allows the study of previously unexplored states that exist between clusters (from a few atoms up to 10 6 atoms / cluster with a local density close to that of a solid) and solids.
  • the spatial extent of the droplets has an influence on an increased space charge limitation of hot electrons, which in turn leads to an improved coupling of the laser energy into the ions of the droplets.
  • the droplet target made with the device can be generated continuously and has a time-unlimited operation.
  • Embodiments of the device relate to the design of their individual components.
  • the pulsed electromagnetic valve operates with a pulse duration of 2 ms;
  • the expansion channel has a length of a few mm to several 10 mm and a diameter of several 100 microns to the mm range,
  • the supersonic nozzle a conical opening angle 2 ⁇ from a few grd to several 10 grd, an inlet opening of some 100 microns in diameter and a has a few mm long conical shaped section.
  • the supersaturated water vapor is present here as it heats up, it expands as it passes through the ultrasonic nozzle, cools down and forms liquid droplets of the desired size and density Parameters are determined by the dimensions of the expansion channel, its temperature and the pressure prevailing in it.
  • the inventive method comprises the following method steps: filling a target liquid in a vessel in which by means of non-reactive gas, a high pressure is realized, short-term opening of this vessel by means of a pulsed electromagnetic valve, intermittent introduction of the target liquid in an expansion channel, heating the Expansion channel such that forms supersaturated liquid vapor, cooling this vapor when passing through a supersonic nozzle connected to the expansion channel and leakage of the droplets from the outlet opening of the nozzle in the vacuum.
  • a pulsed electromagnetic valve operating in the ms range with a pulse duration, in particular of 2 ms is used.
  • the target liquid is forced into the expansion channel and the corresponding vapor is forced into the supersonic nozzle.
  • an expansion channel with a length of a few mm to several 10 mm and a diameter of several 100 microns to the mm range and a supersonic nozzle with a conical opening angle 2 ⁇ from some grd to several 10 grd, an inlet opening of some 100 microns in Diameter and a few mm long conical shaped section used.
  • the nozzle diameter also determines the diameter of the liquid droplets which emerge from the nozzle opening into the vacuum.
  • the valve in the solution according to the invention directly regulates the feeding into an additionally arranged expansion channel, in which the target liquid is heated.
  • the now super-saturated gas is guided to the nozzle outlet opening and thereby cooled, which causes droplet formation in the nozzle.
  • the valve directly opens and closes the nozzle, which makes it possible to significantly reduce the influence on the formation and expansion of the droplets and their collimation.
  • the device for generating a droplet target has a pulsed electromagnetic valve 1 .
  • This valve 1 closes a vessel (not shown) in which the target liquid is held by means of gaseous nitrogen at a pressure of 35 bar.
  • the target liquid can be water, but in principle any other liquid.
  • the valve 1 opens and closes with a pulse duration of 2 ms and discharges water droplets in the opening phase into an expansion channel 2 with a diameter of 1 mm and a length of 15 mm.
  • this expansion channel 2 is by means of a heater 3, a temperature of 150 ° C. generated, the expansion channel 2 is separated from the valve 1 by means of an insulator 5 .
  • a supersonic nozzle 4 At the outlet of the supersonic nozzle 4 entseht a droplet target that is continuously generated and allows a time-unlimited operation.
  • Fig. 2 shows a curve with the switching pulse of the valve and the associated intensity of the resulting liquid mist as a function of time, at a distance of 1 mm from the outlet opening of the nozzle.
  • the pulse duration of the valve in this measurement in which the radiation generated by a cw He-Ne laser was directed to the droplet target, scattered there and the intensity of the scattered radiation was determined at a distance of 1 mm from the nozzle opening, was 2 ms , It can be seen that the majority of the spray pulse occurs about 1 ms after opening the valve.
  • FIG. 3 is a graph showing the propagation of the liquid mist (spray) as a function of the distance from the nozzle orifice to air and vacuum. Compared with the known results of the prior art can be found that in the inventive solution by about 30% better collimation can be achieved.
  • FIG. 4 shows a curve which shows both the dependence of the droplet density in the spray and the dependence of the average atomic density in the spray on the distance from the outlet opening of the nozzle.
  • the measured droplet density directly varies for droplets with a diameter of 0.15 ⁇ m of (1.6 ⁇ 0.5) .10 11 droplets / cm 3 (or a mean molecular density of 1.5-10 18 cm -3 ) the exit orifice of the nozzle to (7.5 ⁇ 0.7) x 10 9 droplets / cm 3 (or a mean molecular density of 8 x 10 16 cm -3 ) at a distance of 20 mm from the exit orifice.
  • This is up to three orders of magnitude higher in droplet size than currently described spray droplet sources, which is important for the conversion of incident laser energy.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Structure Of Belt Conveyors (AREA)
EP03813077A 2002-12-13 2003-12-11 Verfahren zur erzeugung eines tröpfchen-targets Expired - Lifetime EP1574116B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10260376 2002-12-13
DE10260376A DE10260376A1 (de) 2002-12-13 2002-12-13 Vorrichtung und Verfahren zur Erzeugung eines Tröpfchen-Targets
PCT/DE2003/004129 WO2004056158A2 (de) 2002-12-13 2003-12-11 Vorrichtung und verfahren zur erzeugung eines tröpfchen-targets

Publications (2)

Publication Number Publication Date
EP1574116A2 EP1574116A2 (de) 2005-09-14
EP1574116B1 true EP1574116B1 (de) 2007-05-30

Family

ID=32519270

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03813077A Expired - Lifetime EP1574116B1 (de) 2002-12-13 2003-12-11 Verfahren zur erzeugung eines tröpfchen-targets

Country Status (7)

Country Link
US (1) US7306015B2 (ja)
EP (1) EP1574116B1 (ja)
JP (1) JP4488214B2 (ja)
AT (1) ATE363819T1 (ja)
AU (1) AU2003300494A1 (ja)
DE (2) DE10260376A1 (ja)
WO (1) WO2004056158A2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405416B2 (en) * 2005-02-25 2008-07-29 Cymer, Inc. Method and apparatus for EUV plasma source target delivery
DE102004036441B4 (de) 2004-07-23 2007-07-12 Xtreme Technologies Gmbh Vorrichtung und Verfahren zum Dosieren von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung
KR101177707B1 (ko) * 2005-02-25 2012-08-29 사이머 인코포레이티드 Ｅｕｖ 광원의 타겟 물질 핸들링을 위한 방법 및 장치
DE102006017904B4 (de) * 2006-04-13 2008-07-03 Xtreme Technologies Gmbh Anordnung zur Erzeugung von extrem ultravioletter Strahlung aus einem energiestrahlerzeugten Plasma mit hoher Konversionseffizienz und minimaler Kontamination
DE102009018021B4 (de) 2009-04-18 2013-09-05 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Mikrodosiersystem mit einem gepulsten Laser
EP2951643B1 (en) 2013-01-30 2019-12-25 Kla-Tencor Corporation Euv light source using cryogenic droplet targets in mask inspection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE364469A (ja) 1928-10-13
US4962886A (en) * 1988-10-14 1990-10-16 The Board Of Trustees Of The University Of Maine High flow rate nozzle system with production of uniform size droplets
FR2799667B1 (fr) * 1999-10-18 2002-03-08 Commissariat Energie Atomique Procede et dispositif de generation d'un brouillard dense de gouttelettes micrometriques et submicrometriques, application a la generation de lumiere dans l'extreme ultraviolet notamment pour la lithographie
US6711233B2 (en) * 2000-07-28 2004-03-23 Jettec Ab Method and apparatus for generating X-ray or EUV radiation
US6324256B1 (en) * 2000-08-23 2001-11-27 Trw Inc. Liquid sprays as the target for a laser-plasma extreme ultraviolet light source
US6498832B2 (en) * 2001-03-13 2002-12-24 Euv Llc Electrode configuration for extreme-UV electrical discharge source
US6738452B2 (en) * 2002-05-28 2004-05-18 Northrop Grumman Corporation Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
US6792076B2 (en) * 2002-05-28 2004-09-14 Northrop Grumman Corporation Target steering system for EUV droplet generators

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP1574116A2 (de) 2005-09-14
US7306015B2 (en) 2007-12-11
AU2003300494A1 (en) 2004-07-09
DE50307397D1 (de) 2007-07-12
US20060054238A1 (en) 2006-03-16
WO2004056158A3 (de) 2004-09-16
DE10260376A1 (de) 2004-07-15
JP2006510176A (ja) 2006-03-23
WO2004056158A2 (de) 2004-07-01
ATE363819T1 (de) 2007-06-15
JP4488214B2 (ja) 2010-06-23

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