EP1537254A1 - Procede et dispositif pour le traitement au plasma de pieces - Google Patents

Procede et dispositif pour le traitement au plasma de pieces

Info

Publication number
EP1537254A1
EP1537254A1 EP03735466A EP03735466A EP1537254A1 EP 1537254 A1 EP1537254 A1 EP 1537254A1 EP 03735466 A EP03735466 A EP 03735466A EP 03735466 A EP03735466 A EP 03735466A EP 1537254 A1 EP1537254 A1 EP 1537254A1
Authority
EP
European Patent Office
Prior art keywords
plasma
chamber
workpiece
station
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03735466A
Other languages
German (de)
English (en)
Inventor
Stephan Behle
Andreas LÜTTRINGHAUS-HENKEL
Gregor Arnold
Matthias Bicker
Jürgen Klein
Marten Walther
Hartmut Bauch
Michael Litzenberg
Frank Lewin
Hartwig Müller
Klaus Vogel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10224547.9A external-priority patent/DE10224547B4/de
Priority claimed from DE2002125609 external-priority patent/DE10225609A1/de
Priority claimed from DE10234374A external-priority patent/DE10234374A1/de
Application filed by Schott AG filed Critical Schott AG
Publication of EP1537254A1 publication Critical patent/EP1537254A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
    • B08B9/426—Grippers for bottles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42069—Means explicitly adapted for transporting blown article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D23/00—Details of bottles or jars not otherwise provided for
    • B65D23/02—Linings or internal coatings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
    • C08J9/0004—Use of compounding ingredients, the chemical constitution of which is unknown, broadly defined, or irrelevant
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00—Shaping characteristics in general
    • B29C2791/001—Shaping in several steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42073—Grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42073—Grippers
    • B29C49/42075—Grippers with pivoting clamps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
    • B29C49/42095—Rotating wheels or stars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
    • B29C49/42105—Transporting apparatus, e.g. slides, wheels or conveyors for discontinuous or batch transport
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42113—Means for manipulating the objects' position or orientation
    • B29C49/42115—Inversion, e.g. turning preform upside down
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/42384—Safety, e.g. operator safety
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/64—Heating or cooling preforms, parisons or blown articles
    • B29C49/68—Ovens specially adapted for heating preforms or parisons
    • B29C49/6835—Ovens specially adapted for heating preforms or parisons using reflectors
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2300/00—Characterised by the use of unspecified polymers
    • C08J2300/14—Water soluble or water swellable polymers, e.g. aqueous gels

Definitions

  • the invention relates to a method for the plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable plasma chamber of a treatment station and in which at least a part of the workpiece supports the handling of the workpieces
  • Treatment station is moved relative to at least one other part.
  • the invention further relates to a device for plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber is delimited by a chamber floor, a chamber cover and a lateral chamber wall is.
  • the invention also relates to a method for plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable plasma chamber of a treatment station and in which the workpiece is positioned within the treatment station by a holding element.
  • Such methods and devices are, for example used to provide plastics with surface coatings.
  • such methods and devices are already known for coating the inner or outer surfaces of containers which are intended for packaging liquids.
  • Devices for plasma sterilization are also known.
  • PCT-WO 95/22413 describes a plasma chamber for internally coating PET bottles.
  • the bottles to be coated are lifted into a plasma chamber by a movable base and connected to an adapter in the area of a bottle mouth.
  • the bottle interior can be evacuated through the adapter.
  • Bottles introduced to supply process gas.
  • the plasma is ignited using a microwave.
  • EP-OS 10 10 773 a feed device is explained in order to evacuate a bottle interior and to supply it with process gas.
  • PCT-WO 01/31680 describes a plasma chamber into which the bottles are introduced from a movable lid which was previously connected to a mouth area of the bottles.
  • PCT-WO 00/58631 also already shows the arrangement of plasma stations on a rotating wheel and, for such an arrangement, describes a group assignment of vacuum pumps and plasma stations in order to provide a favorable evacuation of the chambers and the interior of the bottles support.
  • the coating of several containers in a common plasma station or a common cavity is mentioned.
  • container layers made of silicon oxides with the general chemical formula SiO x are used to improve the barrier properties of the thermoplastic material.
  • Such barrier layers prevent penetration of oxygen into the packaged liquids and escape of carbon dioxide in the case of liquids containing CO 2 .
  • the barrier layers produced in this way can also be used to improve the barrier properties of the thermoplastic material.
  • Portions of carbon, hydrogen and nitrogen may be included.
  • the object of the present invention is therefore a
  • a sleeve-shaped chamber wall is positioned relative to a chamber bottom and relative to a chamber cover.
  • Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that simple movement kinematics of the workpieces to be treated are supported.
  • Chamber wall is sleeve-shaped and is arranged to be movable both relative to the chamber bottom and relative to the chamber cover.
  • the arrangement of the sleeve-shaped chamber wall which can be positioned relative to the chamber bottom and the chamber lid, makes it possible to transport the workpieces to be treated at an essentially constant height level. This saves the time for a height positioning of the workpieces to be carried out in accordance with the prior art and the design effort required for this.
  • the chamber bottom, as well as the chamber cover remain arranged at the same height level, so that with structurally simple means in the area of the chamber cover, a microwave generator for igniting the plasma and in
  • the procedural sequence in the handling of the workpieces is carried out in such a way that the displaceable sleeve is first displaced in such a way that an insertion of the coating workpiece into the chamber.
  • the sleeve-shaped chamber wall After inserting the workpiece, the sleeve-shaped chamber wall is moved into the working position and after sufficient evacuation and supply of the process gas, the plasma coating or another plasma treatment can be carried out after a microwave ignition. After completion of the treatment, the sleeve-shaped chamber wall is moved again and the treated workpiece can be removed and a new workpiece to be treated can be inserted.
  • a favorable introduction of gravity is supported in that the positioning is carried out in a vertical direction.
  • a supply of equipment and an energy supply with a simple structural design is supported in that the chamber bottom and the chamber cover are left in a static position relative to a station frame of the plasma station.
  • Plasma station takes place through the chamber floor.
  • a simple implementation in terms of device technology is also supported in that process gas is supplied through the chamber floor.
  • a quick and uniform distribution of the process gas in an interior of the workpiece can be achieved in that the process gas is fed through an lance into an interior of the workpiece.
  • the chamber wall be sealed relative to the chamber floor.
  • a low-wear implementation of a large number of opening and closing processes of the plasma chamber is supported in that the seal is carried out by a seal connected to the chamber wall.
  • the seal can also be arranged in the area of the chamber bottom.
  • the chamber wall be sealed relative to the chamber cover.
  • a further improved sealing quality can be achieved in that the sealing is carried out between an inner flange of the chamber wall and a flange of the chamber cover.
  • microwaves generated by a microwave generator be introduced into the cavity in the area of the chamber cover.
  • microwave generator is connected from a coupling channel to the Interior of the cavity is connected.
  • a typical application is that a workpiece is treated from a thermoplastic.
  • an interior of the workpiece is treated.
  • An extensive field of application is opened up by treating a container as a workpiece.
  • a high production rate with great reliability and high product quality can be achieved by transferring the plasma station from a rotating plasma wheel from an input position to an output position.
  • An increase in production capacity with only a slightly increased expenditure on equipment can be achieved by providing several cavities from one plasma station.
  • a typical application is defined in that a plasma coating is carried out as the plasma treatment.
  • the plasma treatment is carried out using a low pressure plasma.
  • plasma polymerization is carried out.
  • a good surface adhesion is supported in that 'may be deposited by the plasma at least partially organic substances.
  • Workpieces for packaging food can be achieved in that at least some inorganic substances are deposited by the plasma.
  • an adhesion promoter is additionally deposited to improve the adhesion of the substance on a surface of the workpiece.
  • High productivity can be supported by treating at least two workpieces simultaneously in a common cavity.
  • Another area of application is that plasma sterilization is carried out as the plasma treatment.
  • a surface activation of the workpiece is carried out as a plasma treatment.
  • the object of the present invention to construct a device of the type mentioned in the introduction such that a simple kinematics of movement of the workpieces to be treated is also achieved according to the invention in that a sleeve-like sealing element is arranged in the region of the chamber bottom, which is arranged movably relative to the chamber bottom.
  • the positionable arrangement of the sleeve-shaped sealing element relative to the chamber bottom and the holding element makes it possible to transport the workpieces to be treated at an essentially constant height level. This saves the time for a height positioning of the workpieces to be carried out in accordance with the prior art and the design effort required for this.
  • the procedural sequence for handling the workpieces is such that ' for the insertion of the workpieces into the plasma chamber, the sealing element was at least sunk into the chamber floor to such an extent that the workpieces can be transferred to the holding element. After the workpieces have been positioned by the holding element within the plasma chamber, the sealing element is raised at a predeterminable point in time and thereby the interior of the workpiece is sealed relative to the interior of the plasma chamber.
  • sealing can take place both at the beginning of the evacuation process and after a part evacuation has already been carried out.
  • Sealing only after partial evacuation has the advantage that an ' interior of the workpiece and the further interior of the plasma chamber can initially be evacuated together and that in a second evacuation step after sealing the interior of the workpiece, the negative pressure in the region of the interior of the workpiece differs to the Vacuum in the further interior of the plasma chamber can be specified.
  • Favorable gravity introduction is also supported according to this embodiment of the invention in that the positioning is carried out in a vertical direction.
  • a plasma treatment of workpieces with a circular mouth section is supported in that a sealing element with an annular cross-sectional area is positioned.
  • a high positioning accuracy is supported in that the workpiece is laterally supported by a mounting flange of the sealing element.
  • An active positioning of the sealing element in only one direction can be achieved in that the
  • Sealing element is pressed by a compression spring in a direction facing away from the plasma chamber.
  • Stroke range of the sealing element is limited by at least two stops.
  • a particularly simple positioning of the sealing element can be carried out by mechanically positioning the sealing element.
  • the sealing element is positioned pneumatically.
  • a structural simplification of the plasma station can be achieved in that the sealing element performs a valve function for the controllable connection and separation of the interior of the workpiece and the further interior of the plasma chamber.
  • the mounting flange be provided with an internal chamfer.
  • An effective seal is supported in that the sealing element has an annular seal arranged facing the plasma chamber.
  • the sealing element be coupled to a lance slide.
  • a very compact embodiment can be achieved in that the sealing element is coupled to a lance for supplying process gas.
  • the lance for positioning the sealing element is provided with a push plate.
  • a positioning of the sealing element that is independent of a positioning of the lance can be achieved if the pneumatic positioning device has an overpressure control. To avoid a separate supply of excess pressure, it is also possible for the pneumatic positioning device to have a vacuum control.
  • a simple control of the plasma chamber for specifying different negative pressures within the workpiece and within the plasma chamber outside the workpiece is proposed that the sealing element is designed for controllable connection and separation of an interior of the plasma chamber with a vacuum source.
  • handling of the workpieces to be treated is further supported at high speed and with great reliability, in that the workpiece is acted upon by at least two clamping elements of the holding element that can be positioned relative to one another such that the workpiece is received by a clamping space between the clamping elements.
  • a simple movement kinematics of the workpieces to be treated is made possible according to this embodiment in that the holding element has at least two clamping elements which can be positioned relative to one another and which are arranged relative to one another with a distance providing a clamping space for receiving the workpiece.
  • the procedural sequence for handling the workpieces is such that an opening of the plasma chamber is first made for inserting the workpieces into the plasma chamber at least to the extent that the workpieces can be transferred to the holding element.
  • it is contemplated to carry out the transfer such that the workpieces are transferred from a transfer element to the holding element, so that no independent movement drive is required for the holding element.
  • the sealing element is raised at a predeterminable point in time and thereby the interior of the workpiece is sealed relative to the interior of the plasma chamber.
  • a seal only after a partial evacuation has the advantage that an interior of the workpiece and the further interior of the plasma chamber can initially be evacuated together and that in a second evacuation step after sealing the interior of the workpiece, the negative pressure in the area of the interior of the workpiece is different Vacuum in the further interior of the plasma chamber can be specified.
  • the workpiece is transferred from the holding element to a further transfer element.
  • the transfer process is preferably carried out in such a way that the transfer element approaches the holding element, takes over the workpiece and then transports the workpiece away.
  • a favorable introduction of gravity is supported in that the positioning of the clamping elements is carried out in a horizontal direction.
  • a simple implementation of transfer operations is supported in that the workpiece is positioned by pliers-like holding arms.
  • a simple opening and closing of the holding element is supported in that the workpiece is positioned by pivotably mounted holding arms.
  • Inserting the workpiece into the holding element is supported in that the holding arms are pressed apart when the workpiece is inserted into the clamping space.
  • the holding arms be pressed apart when the workpiece is pulled out of the clamping space. In particular, it is thought to cause the spreading apart by direct contact between the workpiece and the holding arms.
  • locking elements for fixing the holding arms be positioned together with the chamber wall.
  • a very secure fixation of the workpiece can be achieved in that a stop element for fixing the at about the same height level as the holding arms Workpiece is arranged.
  • the workpiece is fixed in a mouth area by the holding arms.
  • a resilient provision of the spring forces can take place in that the spring tensions are provided by leg springs.
  • the spring forces can also be generated by compression springs.
  • the holding arms be provided with locking webs in the area of their extension facing away from the fixing projections.
  • a simple mechanical implementation can be achieved in that the locking webs of locking elements can be fixed.
  • the locking elements be made of a hardened material.
  • a further improvement in the positioning reliability of the workpiece can be brought about in that the holding element is provided with a stop element for the workpiece.
  • stop element and the fixing projections are at a height level for loading a bottle-shaped one Workpiece are arranged between the support ring and the shoulder area.
  • a connection of the chamber to at least one equipment supply is controlled by a valve block with at least two valves arranged near a chamber floor.
  • a valve block with at least two valves for controlling a connection of the plasma chamber to at least one operating medium supply is arranged in an area of the chamber floor facing away from the plasma chamber.
  • valve block with the valves in the region of the chamber base provides a very compact structural unit which supports a spatially sealed arrangement of several plasma chambers next to one another and which facilitates both assembly and subsequent service work.
  • respective valves are provided by the respective valves to the plasma chamber very short connecting channels that lead to a shortening of the process downtimes, as well as the connecting channels have to be evacuated, for example, at a vacuum supply, resulting in a corresponding 'time.
  • a vacuum is controlled via at least one of the valves.
  • a quick evacuation process with a compact design is supported by the fact that at least two valves be used to connect at least two different vacuum levels.
  • a gradual pressure reduction is supported in that a first vacuum stage is supplied via a primary vacuum valve.
  • Treatment station at least temporarily connected to the vacuum supply.
  • the interior of the workpiece and the further interior of the plasma chamber are connected at least temporarily at the same time to a vacuum supply with a lower pressure than the first vacuum supply.
  • the interior of the workpiece be connected to at least one of the vacuum supplies for a longer period of time.
  • At least a portion of the plasma chamber is temporarily connected to an ambient pressure via the valve block. A deformation of the workpieces due to too large
  • Pressure differences can be avoided in that at least a partial area of the interior of the workpiece is temporarily connected to an ambient pressure via the valve block.
  • a simple process gas supply is supported in that plasma gas of at least one predefinable composition is connected to an operating medium supply via at least one process gas valve.
  • valve block is arranged vertically below the chamber floor.
  • a low height is supported by the fact that
  • Valve block is arranged essentially next to the chamber base.
  • valve block To ensure a simple structural design and simple assembly, it is possible for the valve block to form a common component with the chamber base.
  • a controllable process gas supply is supported in that at least one of the process gas valves is connected to a coupling element pointing downwards in the vertical direction.
  • the coupling element is designed as a connection to a lance carriage carrying the lance.
  • a simple external geometry of the components is supported by the fact that a deflection channel for the plasma gas is arranged in the area of the lance slide, which deflects the plasma gas from the coupling element in the direction of the lance.
  • valves that can be easily adapted to different application requirements provided that at least one of the valves is designed as an electromagnetically controlled valve.
  • a flow of the operating medium is branched into two partial flows at least once.
  • At least two plasma chambers are connected to at least one branch for dividing a flow of an operating medium into at least two partial flows.
  • the simultaneous supply of several chambers and the branching of at least one flow of equipment provide a very compact unit that supports a spatially dense arrangement of several plasma chambers next to one another and that facilitates both assembly and subsequent service work.
  • connection channels are provided by the branching, which lead to a shortening of the process idle times, since, for example, the connection channels also have to be evacuated in the case of a vacuum supply, which leads to a corresponding expenditure of time.
  • branching is carried out in a vertical direction.
  • branching is carried out in a horizontal direction.
  • At least one equipment from at least one branch is introduced directly into at least two chambers.
  • At least one item of equipment be introduced from at least one branch into the interior of at least two workpieces.
  • the interior of the workpiece is supported by introducing at least one item of equipment from at least one branch into at least two lances.
  • Processing process is supported in that a ventilation feed is distributed from the branch.
  • a further design simplification is supported in that a microwave feed is distributed from the branching.
  • the effort required to ignite the plasma can be reduced by connecting at least one branch to at least one microwave generator.
  • An effective evacuation of the plasma chambers is supported by the fact that at least one branch is connected to a primary vacuum valve for connecting a first negative pressure.
  • the primary vacuum valve at least temporarily connect both an interior of the workpiece and a further interior of the plasma chamber to a common vacuum supply.
  • At least one branch is connected to a secondary vacuum valve in order to switch on a vacuum that is lower than the first vacuum.
  • the secondary vacuum valve at least temporarily connect only an interior of the workpiece to the vacuum source.
  • a deformation of a finished workpiece is also avoided in that at least one branch is connected to a workpiece ventilation valve for connecting an interior of the workpiece to an ambient pressure.
  • At least one branch be connected to a chamber ventilation valve for connecting an interior of the plasma chamber to an ambient pressure.
  • a process gas supply is supported in that at least one branch is connected to a primary process gas valve.
  • At least one branch be connected to a secondary process gas valve.
  • At least one branch is connected to a process vacuum valve.
  • a partition of an interior of the workpiece from another interior of the plasma chamber is supported in that at least one branch is connected to a chamber vacuum valve.
  • a compact embodiment can be provided in that at least one branch is arranged in the area of a chamber base of the plasma station.
  • At least one branch is arranged in the vertical direction below the chamber floor.
  • a very compact construction can be provided in that at least one branch forms a common component with the chamber base.
  • valve block It also contributes to a compact construction that at least two of the valves are arranged in the area of a common valve block.
  • a very space-saving construction can be achieved in that at least one of the branches is arranged in the area of the valve block.
  • valve block with the at least two valves and the at least one branch is arranged in the vertical direction below the chamber base.
  • valve block forms a common component with at least one branch.
  • a control that can be adapted to different application requirements is provided in that at least one of the valves is designed as an electromagnetically controlled valve.
  • At least one item of equipment is at least partially acted upon by a conveyor device which is moved together with the treatment station on a closed and rotating transport path.
  • the plasma chamber and at least one conveying device for an operating medium are arranged on a rotating carrier device.
  • a rapid achievement of the physical conditions required for the plasma treatment is supported in that a vacuum is generated by the conveyor.
  • Rapid evacuation is also supported by the fact that at least two conveying devices generate at least two different negative pressures
  • a good compromise between a low weight to be transported and a low-delay supply of operating equipment is provided by providing preconditioned operating equipment for at least one conveyor device v-o at least one external preliminary stage.
  • a connection of stationary and moving components can be made in that the operating medium is guided into the area of the conveyor device via a rotary coupling.
  • At least two plasma stations are connected to at least one common conveyor device via a distributor.
  • a supply of equipment with short connecting lines can be achieved in that at least one equipment is distributed by at least one distributor at a level of a chamber base of the plasma station.
  • the equipment is supplied from the distributor in the direction of the plasma stations via straight connecting lines running radially outward from the distributor.
  • a compact distribution of different operating resources is supported in that at least two operating resources are routed to the plasma stations on different distribution levels.
  • Conveyors are arranged in the area of the support device such that an essentially balanced weight distribution is provided.
  • a combination of favorable weight distribution and good accessibility can be provided by alternately positioning conveying devices and distribution cabinets for electrical connections along a circumference of the carrying device.
  • a mechanically very stable arrangement which at the same time supports an exactly reproducible implementation of all process steps, can be achieved in that the conveying device is positioned together with the plasma station on a rotating plasma wheel as a carrying device.
  • a mechanically highly resilient embodiment is provided in that the conveying devices are transported by a wheel ring-like plasma wheel.
  • a compact and heavy-duty construction can be achieved in that the plasma wheel is provided with a support ring which has an essentially C-shaped vertical profile.
  • a particularly low center of gravity is achieved in that the conveyor is arranged on a base leg of the support ring.
  • a modular basic construction with good accessibility of the individual functional components is provided in that the plasma stations are arranged on an end leg of the support ring.
  • a method for plasma treatment of workpieces in which the workpieces are inserted into an at least partially evacuable plasma chamber of a treatment station and in which the workpieces are positioned within the treatment station by holding elements.
  • a corresponding device for the plasma treatment of workpieces accordingly comprises at least one evacuable plasma chamber for receiving the workpieces, in which the plasma chamber in the area of a Treatment station is arranged, and in which the plasma chamber is delimited by a chamber base, a chamber cover and a lateral chamber wall and has at least one holding element for positioning the workpieces.
  • At least two holding elements are positioned relative to one another in the area of the treatment station by a common carrier.
  • At least two holding elements are held by a common carrier in the area of the plasma station.
  • the common carrier for the holding elements supports an exactly reproducible positioning of the containers within the plasma station as well as the implementation of input and output processes with little expenditure of time and high reliability.
  • At least two holding elements be moved together with the carrier in the direction of a movement which is carried out at least temporarily by the carrier during the execution of a treatment process.
  • Simultaneous treatment of a larger number of workpieces with a compact construction of the treatment device is supported in that at least two holding elements are moved transversely to the direction of a movement which is at least temporarily carried out by the carrier during the execution of a treatment process relative to one another together with the carrier.
  • the carrier, loaded with at least one workpiece is inserted into the treatment station.
  • the carrier, loaded with at least one workpiece is removed from the treatment station.
  • a continuous execution of transfer processes is supported in that the carrier carries out a rotational movement at least temporarily relative to the treatment station.
  • Carrier is loaded with workpieces to be treated by a circumferential transfer element.
  • At least one unloading station be used to remove finished workpieces from the area of the carrier.
  • the workpieces to be treated are fed in that at least one loading station is used to feed workpieces to be machined into the area of the carrier.
  • Very short transfer times can be achieved in that the loading station is designed to feed workpieces to be machined to a carrier separate from the plasma wheel.
  • Transfer processes can be achieved by arranging at least one carrier in the area of each plasma station.
  • a simple implementation of the transfer operations is supported in that at least two holding elements are arranged along a circumference of the carrier.
  • a kinematically simple execution of the transfer operations is supported by the fact that the input path is centered runs a center of the plasma wheel.
  • Locally changeable transfer points can be realized in that the input path is arranged in the area of a transfer element.
  • Simple kinematic boundary conditions when carrying out the transfer operations are provided in that a speed of movement of the transfer element is adapted to a speed of movement of the carrier carried by the plasma wheel.
  • an output section be provided for removing workpieces to be treated from the supports.
  • the output path runs centrally to a center of the plasma wheel.
  • the output path is arranged in the area of a transfer element.
  • a convenient material flow during unloading can be achieved in that the transfer element is driven in a rotating manner.
  • Optimal utilization of the process angle is achieved by arranging the loading station on the one hand and the unloading station on the other hand at two cycle positions with a stationary plasma wheel.
  • a simple constructive implementation is achieved in that the Loading station is designed as a loading wheel.
  • the unloading station is designed as an unloading wheel.
  • wheels have a peripheral speed corresponding to a transport speed of the carrier in the area of its current transfer area.
  • Another mode of operation is defined by the fact that at least two rotations of the plasma wheel are provided for the period between an input of the workpieces into the plasma station and an output of the workpieces.
  • a material flow at a substantially constant height can be achieved in that the plasma station is guided so that it can be positioned at least partially in the direction of the carrier.
  • Another embodiment variant is that the carrier is guided so that it can be positioned vertically into the plasma chamber from above.
  • the carrier is guided so that it can be positioned in the vertical direction from below into the plasma chamber.
  • a device for treating workpieces which has at least one chamber for receiving at least one workpiece and in which the chamber is arranged in the region of a treatment station, and in which the treatment station is arranged so that it can be positioned by a transport element along a circumferential transport path.
  • preforms which have been suitably tempered beforehand.
  • Such preforms typically consist of a thermoplastic material, for example of PET (polyethylene terephthalate).
  • the preforms are converted into containers by the action of blowing pressure, which are used, for example, as bottles for packaging liquids.
  • blowing stations are arranged on a rotating blowing wheel. The blowing wheel rotates continuously and the blowing stations arranged on the blowing wheel take up the preforms to be deformed and dispense the finished containers. Blown impellers which are also moved in cycles are also known.
  • the object of the present invention is therefore to specify a method of the type mentioned in the introduction in such a way that parameter optimization for a production method is supported.
  • treatment station along the transport path at least one supply position relative to the transport direction is supplied with at least one operating means by at least one stationary supply device.
  • Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that optimization of the process parameters is supported.
  • At least one supply device is arranged along the transport path, the at least one
  • Coupling element and at least one supply connection for operating the treatment station when the transport element is stationary and that the treatment station is provided with at least one counter-coupling for connection to the coupling of the supply device.
  • any treatment station that is provided with suitable mating couplings, is to be positioned adjacent to the supply facility and operated as a laboratory station for process optimization.
  • a standard production station for laboratory operation Through the use of a standard production station for laboratory operation and through the operation of these treatment stations under boundary conditions corresponding to at least very common production conditions, the process optimizations obtained can be transferred to actual series production with little effort.
  • a typical application is that laboratory operation is performed for a plasma station.
  • Another variant is that an overpressure is supplied as the operating medium.
  • process gas be supplied as the operating medium.
  • mechanical drive energy is supplied as the operating means.
  • a movement of the mechanical components can be predetermined, for example, by supplying the mechanical drive energy pneumatically.
  • the mechanical drive energy is supplied electro-mechanically.
  • a control unit Production operation or for activating at least one function module to carry out a laboratory operation, a control unit is used.
  • control unit is connected to at least one measuring device for monitoring a laboratory operation of the treatment station.
  • control unit activate at least one operating means connection in the laboratory operation, which is also connected to the treatment station when carrying out a production operation, and modify it in relation to a production operation is controlled.
  • a technical measurement of parameters in the area of the treatment station is supported in that the measuring device has at least one sensor.
  • a method for handling workpieces in which the workpieces are transported by a rotating coupling wheel and in which at least two workpieces are positioned at least temporarily by a common holding element, the positioning being both a rotational movement relative to a Rotation axis of the coupling wheel as. also includes a rotational movement relative to an axis of rotation extending transversely to the axis of rotation of the coupling wheel.
  • a corresponding device for handling workpieces which is designed as a rotating coupling wheel, has at least one holding element for at least temporarily jointly positioning at least two workpieces, the holding element being rotatably mounted relative to the coupling wheel.
  • blow molded containers used to perform a transfer of blown containers from one work station to another work station with high transfer speed.
  • a coupling wheel is arranged between a rotating blowing wheel and an output section.
  • Such use is described in PCT-WO00 / 48818.
  • preforms made of a thermoplastic material for example preforms made of PET (polyethylene terephthalate)
  • PET polyethylene terephthalate
  • a blowing machine has a heating device and a blowing device, in the area of which the pre-tempered preform is expanded into a container by biaxial orientation. The expansion takes place with the aid of compressed air which is introduced into the preform to be expanded.
  • the procedural sequence for such an expansion of the preform is explained in DE-OS 43 40 291.
  • the basic structure of a blow molding station for container formation is described in DE-OS 42 12 583. Options for tempering the preforms are explained in DE-OS 23 52 926.
  • the preforms and the blown containers can be transported within the blow molding device with the aid of different handling devices.
  • the use of transport mandrels on which the preforms are attached has proven particularly useful.
  • the preforms can also be handled with other support devices.
  • the use of gripping pliers for handling preforms and the use of expanding mandrels that can be inserted into a mouth area of the preform for holding purposes are also available designs.
  • processing stations When using the known methods and devices in connection with the processing or processing of a large number of workpieces per unit of time, processing stations are used which enable simultaneous processing or processing of several workpieces.
  • the feeding and discharge of the workpieces often leads to complex transfer stations with complicated kinematics of the components used.
  • Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that the transfer of a large number of workpieces per unit of time is supported with a simple construction of a transfer device.
  • the holding element has at least two fixing elements for the workpieces, which are provided with a control that controls the fixing elements at different times relative to each other.
  • a typical handling of container-like workpieces is supported in that the holding element is pivoted about an essentially horizontal axis of rotation.
  • the holding element is cyclically pivoted back and forth by 180 °.
  • a structurally simple implementation is supported in that the pivoting movement of the holding element is controlled by a jacket curve positioned on the outside on a base of the coupling wheel.
  • the tong arms of the fixing elements be resiliently clamped relative to one another.
  • An active application of adjustment forces only in the area of intended transfers can be achieved by resiliently clamping the pliers arms in a clamping position provided for fixing the workpiece.
  • a typical application is that the coupling wheel is used to carry out transfer operations in an environment of at least one plasma station.
  • the plasma station is positioned by a rotating plasma wheel.
  • the coupling wheel is used to carry out transfer operations in an environment of at least one blow molding station.
  • the plasma station be positioned by a rotating blowing wheel.
  • a typical field of application is defined in that bottle-like workpieces are positioned by the coupling wheel.
  • a further increase in productivity can be achieved in that the coupling wheel for carrying out
  • Transfer processes are used in an environment of a treatment station for the workpieces, at least two workpieces being treated simultaneously in the treatment station.
  • An optimal kinematic adaptation is achieved in that the holding element is provided with a number of fixing elements which corresponds to the number of workpieces to be treated simultaneously in the area of the treatment station.
  • Fig. 1 is a schematic diagram of a plurality of Piasfflehuntn, which are arranged on a rotating plasma wheel and in which the plasma wheel is coupled to input and output wheels.
  • Fig. 2 shows an arrangement similar to Fig. 1, in which the plasma station is equipped with two plasma chambers are,
  • FIG. 3 is a perspective view of a plasma wheel with a plurality of plasma chambers
  • FIG. 4 is a perspective view of a plasma station with a cavity
  • FIG. 5 shows a front view of the device according to FIG. 4 with the plasma chamber closed
  • FIG. 7 shows a representation corresponding to FIG. 5 with the plasma chamber open
  • FIGS. 9 is an enlarged view of the plasma chamber with the bottle to be coated according to FIGS. 6 and
  • Fig. 10 is a further enlarged view of a connection element for holding the workpiece in the plasma chamber.
  • FIG. 11 shows a schematic illustration of a positioning of a bottle-shaped workpiece within the plasma chamber using a forceps-like holding element
  • FIG. 12 shows a representation similar to FIG. 10 with the sleeve-like sealing element lowered compared to FIG. 10.
  • 13 is a plan view of the holding element according to FIG. 11 without showing the workpiece,
  • FIG. 14 is a perspective view of the holding element according to FIG. 13 and
  • FIG. 16 shows a closed plasma chamber in which a valve block with a plurality of valves is arranged below the chamber bottom
  • FIG. 17 shows the arrangement according to FIG. 16 after opening the plasma chamber
  • FIG. 18 shows a representation of a valve block modified with respect to FIG. 16,
  • Fig. 19 is a vertical section along section line XV-XV in Fig. 18 without showing pliers-like holding elements for the workpieces and
  • Fig. 20 is a horizontal section along section line XVI-XVI in Fig. 14 also without a pliers-like holding element shown.
  • FIG. 21 shows a vertical section through a plasma station with two plasma chambers which are connected to a common operating means feed via a channel-like branching
  • Fig. 22 is a vertical section along section line XIII-XIII in Fig. 21 and 23 shows a schematic illustration for a connection of a chamber base provided with branching connection channels to a plurality of valves.
  • FIG. 24 is a perspective view of a carrying device which has operating fluid pumps arranged on a rotating plasma wheel and also plasma stations, each with two plasma chambers, arranged on the plasma wheel,
  • FIG. 25 shows a further illustration of a plasma wheel similar to FIG. 24 without the illustrated distribution boxes and in a partially transparent illustration
  • FIG. 26 shows the plasma wheel according to FIG. 25 in a partially assembled state
  • 29 shows a schematic illustration of another plasma wheel, in which conveying devices for operating resources are arranged in an upper region in the vertical direction,
  • FIG. 30 shows a partial illustration of a further construction of a plasma wheel, which is mounted in a hanging manner and in which conveying devices for operating materials are positioned in the vertical direction above the plasma stations.
  • 31 is a perspective view of a support ring of a plasma wheel, on which a plurality of carriers for positioning several holding elements for bottle-shaped workpieces are arranged,
  • FIG. 32 shows a schematic representation of a plasma wheel, in which fully equipped carriers for the workpieces are inserted into the plasma wheel and after the treatment process has been carried out together with the treated ones
  • FIG. 33 shows an embodiment modified from FIG. 32, in which supports are arranged on the plasma wheel so as to be capable of rotation, which interact with loading and unloading sections which are arranged outside the plasma wheel, FIG.
  • 35 is a block diagram illustrating a control structure for selectively activating a production operation or a laboratory operation of the device.
  • 36 is a perspective view of a blow molding station for producing containers from preforms
  • FIG. 40 is a perspective view of a coupling wheel in which four holding elements, each with two fixing elements, are used, and
  • 41 is a plan view in the viewing direction XI in FIG. 10.
  • FIG. 1 shows a plasma module (1), which is provided with a rotating plasma wheel (2).
  • a plurality of plasma stations (3) are arranged along a circumference of the plasma wheel (2).
  • Plasma stations (3) are provided with cavities (4) or plasma chambers (17) for receiving workpieces (5) to be treated.
  • FIG. 1 To explain the basic construction principle, only one workpiece (5) per plasma station (3) is shown in FIG. 1.
  • the feeds and discharges of the workpieces also only schematically show the handling of individual workpieces (5). In fact, at least two or more workpieces (5) can also be assigned to each plasma station (3).
  • the workpieces (5) to be treated are fed to the plasma module (1) in the area of an input (6) and forwarded via a separating wheel (7) to a transfer wheel (8) which is equipped with positionable support arms (9).
  • the support arms (9) are arranged pivotably relative to a base (10) of the transfer wheel (8), so that a change in the distance of the workpieces (5) can be carried out relative to one another.
  • the Workpieces (5) from the transfer wheel (8) to an input wheel (11) with a greater distance between the workpieces (5) relative to one another in relation to the separating wheel (7).
  • the input wheel (11) transfers the workpieces (5) to be treated to the plasma wheel (2).
  • the treated workpieces (5) are removed from the area of the plasma wheel (2) by an output wheel (12) and transferred to the area of an output section (13).
  • the plasma stations (3) are each equipped with two cavities (4) or plasma chambers (17).
  • two workpieces (5) can be treated simultaneously.
  • Fig. 3 shows a perspective view of a plasma module (1) with a partially constructed plasma wheel (2).
  • the plasma stations (3) are arranged on a support ring (14) which is designed as part of a rotary connection and is mounted in the area of a machine base (15).
  • the plasma stations (3) each have a station frame (16) which holds plasma chambers (17).
  • the plasma chambers (17) have cylindrical chamber walls (18) and microwave generators (19).
  • a rotary distributor (20) is arranged in a center of the plasma wheel (2), via which the plasma stations (3) are supplied with operating resources and energy. Ring lines in particular can be used for the distribution of operating resources (21) can be used.
  • the workpieces (5) to be treated are shown below the cylindrical chamber walls (18). Lower parts of the plasma chambers (17) are not shown for the sake of simplicity.
  • Fig. 4 shows a plasma station (3) in perspective. It can be seen that the station frame (16) is provided with guide rods (23) on which a carriage (24) for holding the cylindrical chamber wall (18) is guided. Fig. 4 shows the carriage (24) with the chamber wall (18) in a raised state, so that the workpiece (5) is released.
  • the microwave generator (19) is arranged in the upper region of the plasma station (3).
  • Microwave generator (19) is connected via a deflection (25) and an adapter (26) to a coupling channel (27) which opens into the plasma chamber (17).
  • the microwave generator (19) can be coupled both directly in the area of the chamber cover (31) and via a spacer element to the chamber cover (31) with a predeterminable distance to the chamber cover (31) and thus in a larger surrounding area of the chamber cover (31) ,
  • the adapter (26) has the function of a transition element and the coupling channel (27) is designed as a coaxial conductor.
  • In the area of an opening of the coupling channel (27) into the chamber cover (31) is a
  • the deflection (25) is designed as a waveguide.
  • the workpiece (5) is positioned by a holding element (28) which is located in the area of a chamber base (29) is arranged. According to a development of the invention, the workpiece (5) is positioned in the area of a sealing element (280) which is arranged in the area of a chamber base (29).
  • the holding element (28) can also advantageously be designed as a sealing element (280) or comprise such a sealing element (280).
  • the chamber base (29) is designed as part of a chamber base (30). To facilitate adjustment, it is possible to fix the chamber base (30) in the area of the guide rods (23). Another variant is to attach the chamber base (30) directly to the station frame (16). With such an arrangement, it is also possible, for example, to design the guide rods (23) in two parts in the vertical direction.
  • FIG. 5 shows a front view of the plasma station (3) according to FIG. 3 in a closed state of the plasma chamber (17).
  • the carriage (24) with the cylindrical chamber wall (18) is lowered compared to the positioning in FIG. 4, so that the chamber wall (18) has moved against the chamber bottom (29).
  • the plasma coating can be carried out in this positioning state.
  • Fig. 6 shows the in a vertical sectional view
  • the coupling channel (27) opens into a chamber cover (31) which has a laterally projecting flange (32).
  • a seal (33) is arranged, which is struck by an inner flange (34) of the chamber wall (18).
  • a further seal (35) is arranged in a lower region of the chamber wall (18) in order to seal here too relative to the chamber bottom (29) guarantee .
  • the chamber wall (18) encloses the cavity (4), so that both an interior of the cavity (4) and an interior of the
  • a hollow lance (36) is arranged in the area of the chamber base (30) and can be moved into the interior of the workpiece (5).
  • the lance (36) is positioned by a lance carriage (37) which can be positioned along the guide rods (23).
  • a process gas channel (38) runs inside the lance slide (37) and, in the raised position shown in FIG. 6, is coupled to a gas connection (39) of the chamber base (30). This arrangement avoids hose-like connecting elements on the lance slide (37).
  • FIGS. 7 and 8 show the arrangement according to FIGS. 5 and 6 in a raised state of the chamber wall (18). In this position of the chamber wall (18), it is possible to remove the treated workpiece (5) from the area of the plasma station (3) and to insert a new workpiece (5) to be treated. As an alternative to the positioning of the chamber wall (18), it is possible to remove the treated workpiece (5) from the area of the plasma station (3) and to insert a new workpiece (5) to be treated. As an alternative to the positioning of the chamber wall (18).
  • Chamber wall (18) in an open state of the plasma chamber (17) reached by displacement upwards it is also possible to carry out the opening process by displacing a structurally modified sleeve-shaped chamber wall in the vertical direction downwards.
  • the coupling channel (27) has a cylindrical design and is arranged essentially coaxially with the chamber wall (18).
  • FIG. 9 shows the vertical section according to FIG. 6 in an enlarged partial illustration in the vicinity of the chamber wall (18).
  • the overlap of the inner flange (34) of the chamber wall (18) via the flange (32) of the chamber cover (31) and the holding of the workpiece (5) by the holding element (28) can be seen.
  • the lance (36) is guided through a recess (40) in the holding element (28).
  • the fixation of the workpiece (5) by the holding element (28), or • the positioning of the workpiece (5) in the region of the sealing element (280) can be seen in the enlarged illustration in FIG. 10.
  • the holding element (28) is inserted into a guide sleeve (41) which is provided with a spring bummer (42).
  • a compression spring (43) is inserted into the spring chamber (42) and clamps an outer flange (44) of the holding element (28) designed as a sealing element (280) relative to the guide sleeve (41).
  • a thrust plate (45) mounted on the lance (36) is guided against the outer flange (44) and presses the holding element (28) into its upper end position.
  • an interior of the workpiece (5) is insulated from the interior of the cavity (4).
  • the compression spring (43) displaces the holding element (28) relative to the guide sleeve (41) in such a way that a connection between the interior of the workpiece (5) and the interior of the cavity (4) is created.
  • Fig. 11 shows the positioning of the workpiece (5) within the plasma chamber (17) with the aid of a holding element (46).
  • the holding element (46) is like pliers trained and has two pivotally mounted holding arms (47, 48).
  • the holding arms (47, 48) can be pivoted relative to axes of rotation (49, 50).
  • the holding arms (47, 48) of springs (51, 52) are pressed into a respective holding position.
  • the holding element (46) is arranged above the chamber base (30), so that after lifting the chamber wall (18) there is lateral accessibility of the holding element (46).
  • the workpiece (5) can thereby be transferred from a positioning element to the holding element (46) without a lifting movement of the workpiece (5) in the direction of a longitudinal axis (53) of the cavity.
  • FIG. 12 shows the arrangement according to FIG. 10 after the chamber wall (18) has been raised and after the sealing element (28) has been lowered. Just as in FIG. 10, the holding element (46) according to FIG. 11 is also not shown in FIG. 11.
  • the sealing element (280) is lowered in such a way that the workpiece (5) can move laterally. This enables lateral insertion before the plasma treatment and removal from the side after the plasma treatment has ended.
  • the outer flange (44) of the sealing element (28) is guided against an inner web of the chamber base (30).
  • the inner flange (54) together with an inner flange (55) of the guide sleeve (41) defines the range of motion of the sealing element (28).
  • the sealing element (28) with its outer flange (44) is pressed against the inner flange (54) by the compression spring (43).
  • the sealing element (28) also has an annular seal (57) in the region of its extension facing the workpiece (5). In the case of a bottle-like workpiece (5), this ring seal (57) is guided against an orifice surface (58) of a threaded area (59). For the outer border of the threaded area (59) in a raised state of the sealing element (28), the sealing element (28) ' also has a ring-like
  • the sealing element (280) can in particular be designed such that, in the positioning shown in FIG. 12, after lowering the chamber wall (18), a common evacuation of an interior of the workpiece (5) and the interior of the plasma chamber (17) takes place. After the sealing element (28) has been lifted, the interior of the plasma chamber (17) is sealed off from the vacuum supply by the sealing element (28), but the interior of the workpiece (5) remains connected to the vacuum supply. As a result, different evacuation of the interior of the workpiece (5) and the interior of the plasma chamber (17) can be carried out without an additional control valve.
  • FIG. 13 shows a top view of the holding element (46) according to FIG. 11 after removal of the workpiece (5). It can be seen in particular that between the holding arms (47, 48) a clamping space (154) for receiving the workpiece (5) is arranged.
  • the holding arms (47, 48) protrude into the clamping space (154) with fixing projections (155, 156).
  • the holding arms (47, 48) have locking webs (157, 158) which face away from the fixing projections (155, 156) and which are arranged in one by locking elements (159, 160), which can preferably be positioned together with the chamber wall (18) Locking position can be fixed.
  • the holding element (46) has a stop element (161).
  • the stop element (161) limits maximum insertion of the workpiece (5) into the clamping space (154).
  • the workpiece (5) is pressed against the stop element (161) by the fixing projections (155, 156).
  • the stop element (161) and the fixing projections (155, 156) are thereby arranged at approximately the same height level.
  • FIG. 13 additionally shows the sealing element (280) and the lance (36) at a lower height level than the holding element (46) due to the selected viewing direction with respect to the plane of the drawing.
  • FIG. 14 shows the holding element (46) according to FIG. 12 in a perspective illustration and without depicting the locking elements (59, 60). It can be seen in particular that the holding element (46) has a base plate (62) from which the holding arms (47, 48) and the further components are carried.
  • the base plate (62) can be mounted in the area of the station frame (16) using spacer elements (63, 64) and connecting elements (65, 66). In particular, it is intended to be mounted on the chamber base (30).
  • Fig. 14 also shows that the fixing projections (55, 56) are each provided with insertion bevels (67) and outlet bevels (68).
  • the workpiece (5) When the workpieces (5) are inserted into the clamping space (154), the workpiece (5) first comes into contact with the insertion bevels (67) and presses the holding arms (47, 48) apart against the forces of the springs (51, 52). After the workpiece (5) has been completely inserted into the clamping space (154), the holding arms (47, 48) automatically return to the locking position due to the forces of the springs (511 52) and press the workpiece (5) against the stop element (61) , The workpiece (5) is thereby fixed within the plasma chamber (17).
  • the workpiece (5) is gripped by a transfer element and pulled against the outlet bevels (68).
  • the outlet bevel (68) is preferably curved and is designed with a curvature course corresponding to an outer contour of the workpiece (5) in the contact area.
  • the holding arms (47, 48) are thereby brought apart again and release the workpiece (5).
  • the transfer element with controlled tong arms.
  • the controlled pliers arms enable active gripping of the workpieces (5) and support the application of
  • FIG. 15 shows the arrangement according to FIG. 14 after inserting a bottle-like workpiece (5) which is acted upon by the holding arms (47, 48) between a support ring (69) and a shoulder region (70). Holding such a bottle-like workpiece (5) in the neck region shown leads to a very stable fixation of the workpiece (5).
  • the locking elements (159, 160) are also shown in FIG. 15. The locking elements
  • the locking elements (159, 160) block a movement of the holding arms (47, 48), so that an uncontrolled opening of the holding element
  • valve block (254) arranged below the chamber base (30).
  • the valve block (254) essentially consists of a block housing which holds a plurality of valves (255). In particular, it is contemplated to use electromagnetically controlled valves (255).
  • valve block (254) is arranged directly below the chamber base (30). In principle, it is also conceivable to realize the chamber base (30) and the valve block (254) as a single component.
  • the valves (255) are only shown schematically in FIG. 16.
  • the valve block (254) according to the present embodiment has a primary vacuum valve (256) for supplying a first vacuum level and a secondary vacuum valve
  • a process vacuum valve (258) is also arranged to maintain the vacuum synchronously with the supply of the process gas.
  • the process vacuum valve (258) avoids an overflow of extracted process gas in the supply circuits for the primary vacuum and the secondary vacuum.
  • a chamber vacuum valve (259) which carries out a corresponding shut-off function, is used to support an optional or joint supply of negative pressure to the interior of the workpiece (5) and / or to the further interior of the plasma chamber (17).
  • a workpiece venting valve (260) and a chamber venting valve (261) are used to support a definable and mutually independent venting of both the interior of the workpiece (5) and the further interior of the plasma chamber (17).
  • a primary process gas valve (262) and a secondary process gas entile (263) are used to support the supply of different process gas compositions.
  • Additional equipment (264, 265) can be used to connect or derive additional equipment.
  • a plurality of valves are arranged one below the other in groups. Such an arrangement supports a connection of the valves to the corresponding ones
  • FIG. 17 shows the arrangement according to FIG. 16 after opening the plasma chamber (17) by lifting the chamber wall (18). In this operating state of the plasma station (3), all valves (255) are closed and the lance (36) is retracted into the chamber base (30) and the valve block (254), so that the workpiece (5) can be positioned laterally.
  • FIG. 18 shows an embodiment of the valve block (254) which is modified compared to FIGS. 16 and 17.
  • the embodiment shown here is particularly advantageous for supplying two plasma chambers (17) with a symmetrical design of the respective feed channels.
  • the process gas valves (262, 263) are not shown in the illustrations from FIGS. 14 to 16.
  • the chamber vacuum valve (259), the workpiece ventilation valve (260) and the chamber ventilation valve (261) are arranged on an essentially identical vertical plane in a region of the valve block (254) facing the plasma chamber (17).
  • the primary vacuum valve (256), the secondary vacuum valve (257) and the process vacuum valve (258) are arranged below this level and in the vertical direction.
  • actuating elements (269) are used in each case for controlling the valves (255).
  • the control elements (269) can be designed, for example, as electromagnetic coils which, depending on their respective electrical control, arrange the valves (255) in a closed position, an open position or, if appropriate, also in intermediate positions.
  • a chamber connection channel (270) runs within the valve block (254) for a direct connection of at least one of the valves (255) to the interior of the Plasma chamber (17) and a workpiece connection channel (71) for connecting at least one of the valves (255) to an interior of the workpiece (5) to be treated.
  • Fig. 20 shows a connection of the valves (255).
  • Flexible connecting lines (267) are plugged onto connecting pieces (266) and fixed with hose clips (268).
  • the use of connecting pipes is also possible.
  • the respective selection of the suitable connecting lines (267) is made taking into account the structural boundary conditions.
  • FIG. 21 shows a plasma station (3) with two plasma chambers (17) for the simultaneous plasma treatment of two workpieces (5).
  • Each of the plasma chambers (17) is connected via a coupling channel (27) as well as an adapter (26) and a deflection (25) to a microwave generator (19).
  • a coupling channel (27) as well as an adapter (26) and a deflection (25) to a microwave generator (19).
  • microwave generator (19) To use microwave generator (19) and to split the generated microwave radiation via a branch, not shown, to ensure a uniform ignition of the plasma in each of the plasma chambers (17).
  • Coupling channels (354) open into the plasma chambers (17), each of which is connected to a branch (355) for dividing a quantity of an operating medium supplied into two subsets. If more than two plasma chambers (17) are used, the branch (355) is either provided with a corresponding number of outputs, or a plurality of partial branches are cascaded in a row.
  • the arrangement of the branch (355) shown in FIG. 12 in the immediate vicinity of the plasma chamber (17) leads to very short coupling channels (27). If a vacuum is supplied, this has the advantage that only a relatively small volume of the coupling channels (27) has to be evacuated.
  • FIG. 22 shows a vertical section through the arrangement according to FIG. 21 with the lance slide (37) additionally drawn in.
  • the plasma chamber (17) is closed and the lance slide (37) is guided against the chamber base (30), so that a flow of process gas into the interior of the workpiece (5) can be controlled.
  • chamber channels (356) for connecting interior spaces of the plasma chambers (17) to the respective supply means and to the
  • Positioning channel (357) is arranged, within which a coupling tube (358) is guided so as to be longitudinally displaceable and sealed, which provides a connection to the plasma gas channel (38) within the lance slide (37). Regardless of a respective positioning of the lance carriage (37) to Ka mersockel (30), the lance (36) is thereby connected to a process gas supply, so that penetration of ambient air into the process gas supply is avoided.
  • FIG. 23 shows the arrangement according to FIG. 21 in a highly schematic representation and with an additional representation of valves (359) for controlling an operating medium supply.
  • valves 359 for controlling an operating medium supply.
  • three branches 355) are used due to the circuit arrangement of the coupling channels (354). Quartz glass windows (368) can also be seen for sealing the interior of the plasma chambers (17) relative to the interior of the coupling channels (27) with simultaneous passage for the microwave radiation.
  • a primary vacuum valve (360) for supplying a first vacuum level and a secondary vacuum valve (361) for supplying a lower pressure than the first vacuum level are used.
  • a process vacuum valve (362) is also arranged to maintain the vacuum in synchronism with the supply of the process gas. The process vacuum valve (362) avoids an overflow of extracted process gas into the supply circuits for the primary vacuum and the secondary vacuum.
  • Chamber vacuum valve (363) is used, which performs a corresponding shut-off function.
  • it is contemplated to supply the respective supply vacuum directly to the interior of the workpiece (5) via the valves (360, 361, 362) and to control the further interior of the plasma chamber (17) in a controlled manner via the chamber vacuum valve (363).
  • Process gas compositions include a primary process gas valve (366) and a secondary process gas valve (367).
  • branches (355) it is possible to use the branches (355) to connect several plasma chambers (17) to common valves (359) to join.
  • branches (359) it is possible to connect several cavities within a plasma chamber to common valves (359) via the branches.
  • the valves (359) are preferably actuated via a programmable electronic control.
  • the primary vacuum valve (360) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are evacuated at the same time. A pressure level in the range of 20 bar to 50 bar is reached.
  • the secondary vacuum valve (361) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are initially connected simultaneously to a vacuum source with a lower pressure level.
  • the chamber vacuum valve (363) closes and only the interior of the workpiece (5) is evacuated further. A pressure level of about 0.1 mbar is reached.
  • the primary process gas valve (366) opens and a process gas of a first composition is supplied.
  • the gas connections (39), for example shown in FIG. 6, in the region of the chamber base (30) are designed in such a way that within a bore-like recess, a tubular coupling element is guided displaceably in a longitudinal direction. Sealing can be done using a dynamic ring seal.
  • the tubular connecting element is carried by the lance slide (37) and establishes a connection to the plasma gas channel (38) within the lance slide (37).
  • Connection element within the bore-like recess ensures a connection to the process gas distribution for each positioning of the lance slide (37).
  • the microwave generator (19) ignites the plasma in the interior of the workpiece (5).
  • the primary process gas valve (366) and the secondary process gas valve close at a predeterminable point in time
  • Process gas of a second composition At least temporarily, parallel to the opening of the process gas valves (366, 367), the process vacuum valve (362) also opens to a sufficiently low negative pressure in the interior of the workpiece
  • the workpiece vent valve (364) After completion of the plasma coating, the workpiece vent valve (364) first opens and connects the interior of the workpiece (5) to an ambient pressure. with a predefinable time delay after opening the workpiece vent valve (364) also opens the chamber vent valve (365) to the interior of the
  • Plasma treatment method within the workpiece (5) it is possible to remove the workpiece (5) from the
  • the discharge of the compressed air can either take place in an environment of the plasma station (3), but in particular it is also contemplated to activate one of the negative pressure connections at the same time as the pressure is applied and thereby to carry out a defined suction of the contaminants.
  • FIG. 24 shows a plasma module (1) modified from the representation in FIG. 3.
  • the plasma wheel (2) is designed here for a circumferential transport of plasma stations (3), which are each provided with two plasma chambers (17).
  • each of the plasma stations (3) has two microwave generators (19), two deflections (25) and two adapters (26) which use microwaves to ignite the plasma via coupling channels (27).
  • the support ring (14) of the plasma wheel (2) has a vertical cross-section with a c-shaped profile with a base leg (441), a spacer leg (442) and an end leg (443).
  • the spacer leg (442) runs essentially in a vertical direction, the base leg and the end leg (443) are arranged essentially horizontally.
  • the base leg (441) and the end leg (443) extend from the spacer leg (442) in a radially outward direction.
  • the plasma stations (3) are arranged in the vertical direction above the end leg (443).
  • conveyor devices (444) for an operating medium are arranged on the base leg (441).
  • the equipment is fed to the plasma stations (3).
  • the conveying device (444) is implemented as a vacuum pump.
  • conveyors (444) are also possible.
  • Distribution cabinets (445) for an electrical supply to the plasma stations (3) are arranged on the base leg (441).
  • the conveying devices (444) and the distribution cabinets (445) are arranged within the receiving space provided by the c-shaped profile of the support ring (14).
  • Fig. 24 shows the plasma station (3) without a mounted chamber base (30).
  • lances (36) for supplying process gas can be recognized, which are carried and positioned by lance slides (37).
  • the lance slides can be positioned along the guide rods (23).
  • FIG. 25 shows a slightly modified plasma module (1) compared to the representation in FIG. 24 in a different representation and with a partially changed illustration of the individual parts.
  • the microwave generators (19) are positioned differently from the illustration in FIG. 24.
  • the chamber bases (30) are shown in FIG. 25, in the area of which, in particular, control valves for supplying the plasma stations (3) with operating equipment can be arranged.
  • the distribution cabinets (445) are not shown in Fig. 25, so that a view into the center of the plasma wheel (2) is possible. It can be seen that a rotary coupling (446) is arranged approximately at a height level of the conveyor devices (444).
  • the rotary coupling (446) serves to connect the conveying devices (444) to external conveying devices (447).
  • the rotary coupling (446) is implemented as a three-way vacuum rotary introduction.
  • the rotary coupling (446) can be connected to the external conveying devices (447) in a simple manner via connecting pipes (448), some of which run below the machine base (15).
  • the machine base (15) has stand elements (449) which provide an assembly space below the machine base (15) in that the machine base (15) is arranged at a vertical distance from a dividing surface.
  • the rotary coupling (446) is connected via lines (450) to the respectively assigned conveying devices (444).
  • the spacer leg (442) is shown partially transparently in the illustration in FIG. 25, so that the course of the lines (450) can be seen.
  • FIG. 26 shows the arrangement according to FIG. 25 in a partially assembled state.
  • a distributor (451) is arranged at a height level similar to the height level of the plasma chambers (17).
  • the distributor (451) is implemented as a three-way distributor.
  • the distributor (451) has three distribution segments arranged one above the other in the vertical direction. The distribution segments are each connected to the plasma chambers (17) via connecting lines (452).
  • two operating means are fed to the distributor (451) in each case via a conveying device (444).
  • the conveyor devices (444) are connected to the distributor (451) via coupling lines (453).
  • Another operating medium is fed to the distributor (451) via a riser (454) directly from the rotary coupling (446).
  • FIG. 27 shows the arrangement according to FIG. 26 with only one illustrated plasma station (3) for further clarification.
  • the arrangement of the three segments of the distributor (451) one above the other in the vertical direction and the course of the connecting lines (448) between the distributor (451) and the chamber base (30) can be seen here.
  • the connecting lines (452) are led directly to valves arranged in the area of the chamber base (30).
  • FIG. 27 also illustrates that in the exemplary embodiment shown, the distributor (451) is carried by the lines (452, 453). This ensures good accessibility. But it is also possible to use additional support elements.
  • FIG. 28 shows the arrangement according to FIG. 27 in a different perspective view and with assigned six external conveying devices (447).
  • two external conveying devices (447) are assigned to each vacuum level.
  • the conveying devices (447) provide a negative pressure in the range from approximately 30 mbar to 50 mbar for the first negative pressure stage. This negative pressure is fed to the plasma stations (3) in the illustrated embodiment without additional conveying devices (444) on the plasma wheel (2) directly via the rotary coupling (446).
  • the negative pressures for the other external conveyor devices (447) are specified as a function of the respective process requirements. In particular, a pressure range of approximately 1 mbar to 10 mbar is envisaged.
  • Roots pumps can be used as conveying devices (444, 447).
  • Roots pumps are used as conveying devices (444) arranged on the plasma wheel (2) and rotary vane pumps as external conveying devices (447).
  • a special pre-stage module can be used for this purpose, for example.
  • the required external conveyor devices (447) can be arranged in the pre-stage module and the pre-stage module can be equipped with standardized connections for connection to the plasma module (1). This greatly simplifies both assembly and later commissioning.
  • the two external conveying devices (447) for the first vacuum stage are connected in parallel relative to one another.
  • the other external conveying devices (447) for the second vacuum stage, which operates at a lower pressure level relative to the first vacuum stage, and the third vacuum stage for maintaining the vacuum while the treatment is being carried out, are connected in series. This takes into account that it is primarily important to pump out a relatively large volume when generating the relatively higher negative pressure, but in the case of the two further negative pressure levels working at lower pressure levels relative to the first negative pressure level, the desired low pressure is primarily to be achieved, which is due to the series connection is supported.
  • Fig. 29 shows an embodiment in which the conveyors (444) are at a higher level than that
  • Plasma stations (3) are arranged. Although this leads to a higher center of gravity of the plasma wheel (2), it 'is but provided very good accessibility of the conveyors (444) both during assembly and during later servicing.
  • coupling to the external conveyor devices (447) preferably takes place via connecting pipes (448) which are initially laid above the plasma module (1) and are connected to the external conveyor devices (447) via vertical lines (455).
  • the plasma stations (3) can be arranged relatively low, so that the workpieces (5) to be coated can also be input and output at a relatively low height level.
  • FIG. 30 shows a further embodiment of the plasma module (1).
  • the plasma wheel (2) is suspended here in a support frame (456).
  • a rotary bearing (457) of the plasma wheel (2) is not located below the plasma wheel (2) in the vertical direction, but above the plasma wheel (2) in the vertical direction.
  • the structure of the plasma station (3) can basically be retained compared to the other embodiments.
  • 30 shows the plasma station (3) only in a partial representation without chamber base (30) and without the lance slide (37) with assigned components.
  • Conveyors (444) maintain a relatively low arrangement of the plasma chambers (17).
  • three conveyor devices (444) are positioned on the plasma wheel (2). Relative to a rotary bearing (457) held by the support frame (456)
  • Plasma stations (3) are arranged below the rotary bearing (457) and the conveying devices (444) above the rotary bearing (457). This high arrangement of the rotary bearing (457) enables a high level of structural stability to be provided despite the high arrangement of the conveyor devices (444).
  • a typical treatment process is explained below using the example of a coating process and carried out in such a way that the workpiece (5) is first transported to the plasma wheel (2) using the input wheel (11) and that in a pushed-up state of the sleeve-like chamber wall (18) the workpiece (5) is inserted into the plasma station (3).
  • the workpiece (5) is first inserted into the clamping space (154) by a transfer element. After the workpiece (5) has been fixed by the holding arms (47, 48), the controlled holding pliers of the transfer element open and release the workpiece (5).
  • the chamber wall (18) is lowered into its sealed position and, at the same time, both the cavity (4) and an interior of the workpiece (5) are evacuated at the same time.
  • the lance (36) is moved into the interior of the workpiece (5) and the interior of the workpiece (5) is partitioned off from the interior of the cavity (28) by moving the holding element (28). 4) performed. It is also possible to move the lance (36) into the workpiece (5) synchronously with the beginning of the evacuation of the interior of the cavity. The pressure inside the workpiece (5) is then further reduced. In addition, the positioning movement of the lance (36) is at least partially already carried out parallel to the positioning of the chamber wall (18). After reaching a sufficiently low vacuum, process gas is introduced into the interior of the workpiece (5) and the plasma is ignited with the aid of the microwave generator (19).
  • the plasma is intended to use the plasma to deposit both an adhesion promoter on an inner surface of the workpiece (5) and the actual barrier layer made of silicon oxides.
  • the adhesion promoter can be applied, for example, in a two-stage process as the first stage before the barrier layer is applied in the second stage, but it is also conceivable in a continuous process to add at least part of the barrier layer at the same time as the application of at least part of the adhesion promoter produce.
  • Method of producing at least one part of the barrier layer facing the workpiece (5) as a gradient layer at the same time as applying at least a part of the adhesion promoter can be generated in a simple manner during the duration of an already ignited plasma by changing the composition of the process gas. Such a change in the composition of the process gas can be achieved abruptly by changing valve controls or continuously by changing the mixing ratio of components of the process gas.
  • a typical structure of a gradient layer is such that in a part of the gradient layer facing the workpiece (5) an at least predominant part of the adhesive agent and in a part of the gradient layer facing away from the workpiece (5) at least predominantly a part of the barrier material is contained. A transition of the respective components takes place continuously in at least part of the gradient layer in accordance with a predeterminable gradient course.
  • the interior of the plasma chamber (17) and the interior of the workpiece (5) are first evacuated together to a pressure level of approximately 20 mbar to 50 mbar.
  • the pressure in the interior of the workpiece (5) is then further reduced to approximately 0.1 mbar while the Treatment process, a negative pressure of about 0.3 mbar is maintained.
  • the lance (36) is removed from the interior of the workpiece (5) - and the plasma chamber (17) and the interior of the workpiece (5) are ventilated.
  • the chamber wall (18) is raised again in order to remove the coated workpiece (5) and to enter a new workpiece (5) to be coated.
  • the sealing element (280) is moved back into the chamber base (3) at least in some areas.
  • a transfer element with a controlled pliers is again positioned in the area of the holding element (46) and the controlled pliers of the transfer element access the workpiece (5).
  • the workpiece held in this way is then pulled out of the holding element (46), the holding arms (47, 48) being pressed apart against the forces of the springs (51, 52).
  • the sealing element (28) can be moved back into the chamber base (3) at least in some areas.
  • the holding element (46) in the case of bottle-like workpieces (5) grips the workpiece (5) preferably in the threaded region or at a short distance from the mouth opening.
  • the chamber wall (18), the holding and sealing element (28, 280) and / or the lance (36) can be positioned using different drive units. Fundamentally, the use of pneumatic drives and / or electric drives, especially in one
  • Embodiment as a linear motor, conceivable.
  • the curve control can for example be carried out in such a way that along a
  • Circumference of the plasma wheel (2) are arranged along which cam rollers are guided.
  • the cam rollers are coupled to the components to be positioned.
  • the valves (255) are preferably actuated via a programmable electronic control.
  • the primary vacuum valve (256) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are evacuated at the same time. A pressure level in the range of 20 mbar to 50 mbar is achieved.
  • the secondary vacuum valve (257) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are initially simultaneously connected to a vacuum source with a lower pressure level.
  • the chamber vacuum valve (259) closes and only the interior of the workpiece (5) is evacuated further. A pressure level of about 0.1 mbar is reached.
  • Process gas supply to the lance (36) is particularly thought of, for example, that shown in FIG. 6
  • Connection element is carried by the lance slide (37) and establishes a connection to the plasma gas channel (38) within the lance slide (37).
  • a corresponding displacement of the tubular connecting element within the bore-like recess ensures a connection to the process gas distribution for each positioning of the lance slide (37).
  • the microwave generator (19) ignites the plasma in the interior of the workpiece (5).
  • the primary process gas valve (262) closes and the secondary process gas valve (263) opens to supply a process gas of a second composition.
  • the process vacuum valve (258) also opens, at least temporarily in parallel with the opening of the process gas valves (262, 263), in order to maintain a sufficiently low negative pressure in the interior of the workpiece (5).
  • a pressure level of about 0.3 mbar proves to be expedient.
  • the workpiece vent valve (260) first opens and connects the interior of the workpiece (5) to an ambient pressure. With a definable time delay after opening of the workpiece ventilation valve (260) also opens the chamber ventilation valve (261) in order to raise the interior of the plasma chamber (17) completely to the ambient pressure. After at least approximately reaching the ambient pressure within the plasma chamber (17), the plasma chamber (17) can open and the coated workpiece (5) is removed and replaced by a new workpiece (5) to be coated.
  • Plasma treatment method within the workpiece (5) it is possible to introduce compressed air into the workpiece (5) before removing the workpiece (5) from the plasma chamber (17) and thereby to remove any impurities.
  • the discharge of the compressed air can either take place in an environment of the plasma station (3), but in particular it is also contemplated to activate one of the negative pressure connections at the same time as the pressure is applied and thereby to carry out a defined suction of the contaminants. Alternatively, it is also considered to carry out the cleaning process exclusively by applying an additional vacuum and to carry out the cleaning process using ambient air flowing in.
  • Fig. 31 shows a support ring (14) of a further embodiment of the plasma wheel (2).
  • a plurality of carriers (541) are arranged on the support ring (14), each of which positions holding elements (542) for the workpieces (5).
  • the carriers (541) are essentially circularly delimited and six holding elements (542) are arranged in the vicinity of a circumference of the carriers (541).
  • the holding elements (542) are designed for positioning bottle-shaped workpieces (5), the workpieces (5) each with
  • Mouth openings are arranged vertically downwards.
  • the carrier (541) with the holding elements (542) and the ⁇ workpieces (5) can be of different designs
  • Plasma stations (3) are used. For example, it is possible to equip the plasma station (3) with only one plasma chamber (17) and to insert all workpieces (5) together into this plasma chamber (17). It is also conceivable to divide a corresponding common plasma chamber (17) into individual cavities (4) or separate plasma chambers (17) in the area of the plasma station (3) for each of the workpieces (5) or for subgroups of the supports (541) positioned workpieces (5).
  • FIG. 32 shows a schematic illustration of a plasma wheel (2) with a plurality of carriers (541).
  • the carriers (541) are completely loaded with the workpieces (5) to be treated in the area of a loading station (543) and a carrier (541) equipped with the workpieces (5) is transferred to the plasma wheel (2).
  • the carrier (541) equipped with the workpieces (5) is removed from the plasma wheel (2) and into the area of an unloading station (544) transferred.
  • the carrier (541) can again be fitted with workpieces (5) in the area of the loading station (543) and attached to the
  • Plasma wheel (2) to be handed over.
  • at least one carrier (541) more than can be arranged simultaneously in the region of the plasma wheel (2).
  • a carrier fully equipped with workpieces (5) can be transferred back to the plasma wheel (2).
  • the carrier (541) carrying the workpieces (5 ) or without the workpieces (5) is positioned in an upward or downward direction.
  • Such a procedure is particularly advantageous if the carrier (541) is to be lifted into the plasma chamber (17) or lowered into the plasma chamber (17) together with the workpieces (5) to be machined.
  • FIG. 33 shows an embodiment modified from the representation in FIG. 32.
  • the beams (541) are here arranged stationary in the area of the plasma wheel (2) and rotatably supported relative to the plasma wheel (2) via rotary bearings (545).
  • rotary bearings (545) it is contemplated to support the carriers (541) in the area of the plasma wheel (2) in such a way that rotational movements can be carried out.
  • the loading station (543) is formed from a transfer element (546) and a loading wheel (547).
  • the workpieces (5) to be machined reach the area of the loading wheel (547) via an input path (548) and are transferred by this to the transfer element (546).
  • the transfer element (546) has a circumferential transfer element (549), which can be implemented, for example, like a chain.
  • the loading wheel (547) initially transfers the workpieces (5) to be machined to the transfer element (549) in the area of a transfer position (550).
  • the loading wheel (547) and the transfer element (549) are expediently moved in the same direction and at the same peripheral speed in the area of the transfer position (550) in order to be able to carry out the transfer process continuously.
  • a transfer path (551) is provided for transferring the workpieces (5) from the transfer element (549) to the carrier (541), which essentially has a curvature corresponding to the movement path of a part of the carrier (552) facing away from a center point (552) of the plasma wheel (2). 541) runs. This takes into account the fact that between the carrier (541) and the Transfer element (549) is not a fixed transfer position, but that the transfer position changes due to the rotation of the plasma wheel (2).
  • the carrier (541) After completion of the treatment process of the workpieces (5) and a corresponding rotational movement of the plasma wheel (2), the carrier (541) reaches the area of a transfer element (553) which, together with an unloading wheel (554), forms the unloading station (544). Similar to the transfer element (546), the transfer element (553) also has a transfer element (555) which, for example, can be chain-like and can be driven in rotation.
  • a transfer element (555) which, for example, can be chain-like and can be driven in rotation.
  • Workpieces (5) from the carrier (541) to the transfer element (555) and from the transfer element (555) to the unloading wheel (554) and from this to an output section (556) are carried out analogously to the input, only in the reverse order of the transfer processes to be carried out.
  • a transfer section (557) of the transfer element (555) also runs with a curvature corresponding to the transfer section (551) of the transfer element (549).
  • FIG. 34 shows a variant in which the plasma wheel (2) is operated in cycles. This enables direct loading of the carriers (541) using the loading wheel (547) and direct unloading of the carriers (541) using the unloading wheel (554), since there are fixed input and output positions.
  • the wheels shown have advantages both in terms of mechanical stability and in terms of the exact reproducibility of the movements carried out.
  • at least two carriers (541) per plasma station (3) For example, for a plasma station (3) for the treatment of six workpieces (5), it is conceivable to position three workpieces (5) each by means of a common carrier (541) and thus to use two carriers (541) per plasma station (3).
  • a constructive structure of the carrier (541) can depend on the given constructive
  • Boundary conditions take place.
  • the carrier (541) like a plate and to provide it with suitable recesses, for example for the lances (36) and the sealing elements (28). It is also conceivable to construct the carrier (541) in a ring-like manner or one
  • Canal branches can be arranged in the area of the chamber base (30), which make it possible to supply several plasma chambers (17) or cavities (4) with common control valves.
  • the arrangement of several workpieces (5) in the area of a common plasma station (3) explained in the exemplary embodiments makes it possible, on the one hand, to achieve an increased production output.
  • Another variant consists in treating different workpieces (5) simultaneously on a common machine.
  • Input and output facilities are provided. A user therefore does not need several machines to process different products or is relieved of complex machine conversions.
  • pumps that are used to generate the required negative pressures.
  • the individual plasma station (3) remains connected to an associated pump for longer and switching times are saved.
  • Successive plasma stations (3) can thereby be connected to different pumps in terms of circuitry.
  • 35 shows a schematic block diagram for
  • FIG. 35 shows a control unit (654) which is provided with an input device (655) and a display device (656). Using the input device (655), it is possible to activate different function modules (657). At least one of the function modules (657) is provided for carrying out a production operation; moreover, several different function modules (657) can be selected for carrying out different service programs. At least one of the function modules (657) is configured to carry out a laboratory operation.
  • the activation of the function module (657) for a laboratory operation of the machine typically takes place after the selected treatment station in the present one
  • the required external media supplies are connected manually or automatically. It is possible to externally supply all required media supply, but in particular it is also contemplated to use media supplies connected to the treatment station in production operation and only to use a control of the media supplies adapted for laboratory operation.
  • the supply of external operating equipment relates, for example, to the supply of negative pressure, positive pressure, electrical energy, mechanical drive energy or special control sequences for carrying out a laboratory operation.
  • the heating device can be equipped, for example, with infrared radiators or microwave radiators. In the case of such an embodiment, in particular, it is also contemplated to manually position the preforms in the area of the heating device and to automatically transfer them from the heating device to the processing station set in the laboratory.
  • the safety devices can relate, for example, to the monitoring of the correct closing of access doors and the correct implementation of pneumatic connections.
  • a device for blow molding a container essentially consists of a blow molding station (743) which is provided with a blow mold (744) into which a preform (741) can be inserted.
  • the preform (741) can be an injection molded part made of polyethylene terephthalate.
  • the blow mold (744) In order to enable the preform (741) to be inserted into the blow mold (744) and to enable the finished container (742) to be removed, the blow mold (744) consists of mold halves (745, 746) and a base part (747) which is provided by a lifting device (748) can be positioned.
  • the preform (741) can be held in the area of the blowing station (743) by a transport mandrel (749) which, together with the preform (741), passes through a plurality of treatment stations within the device.
  • a connecting piston (750) is arranged below the transport mandrel (749), which supplies compressed air to the preform (741) and at the same time seals against the transport mandrel (749).
  • a connecting piston (750) is arranged below the transport mandrel (749), which supplies compressed air to the preform (741) and at the same time seals against the transport mandrel (749).
  • the preform (741) is stretched using a stretching rod (751) which is positioned by a cylinder (752).
  • a stretching rod (751) which is positioned by a cylinder (752).
  • the use of curve segments is particularly expedient when a plurality of Blow stations (743) are arranged on a rotating blowing wheel.
  • the use of cylinders (752) is expedient if there are blowing stations (743) arranged in a fixed position.
  • the stretching system is designed such that a tandem arrangement of two cylinders (752) is provided.
  • the stretching rod (751) is first moved into the area of a bottom (754) of the preform (741) before the actual stretching process begins, during the actual stretching process the primary cylinder (753) is extended together with a stretching rod the carriage (755) carrying the primary cylinder (755) is positioned by a secondary cylinder (756) or via a cam control.
  • the secondary cylinder (756) in a cam-controlled manner in such a way that a current stretching position is specified by a guide roller (757) which slides along a cam track during the execution of the stretching process.
  • the guide roller (757) is pressed against the guideway by the secondary cylinder (756).
  • the carriage (755) slides along two guide elements (758).
  • Fig. 38 shows the basic structure of a blow molding machine which is provided with a heating section (764) and a rotating blowing wheel (765).
  • Preform entry (766) the preforms (741) are transported by transfer wheels (767, 768, 769) into the area of the heating section (764). Radiant heaters (770) and blowers (771) are arranged along the heating section (764) in order to temper the preforms (741). After the preforms (741) have been adequately tempered, they are transferred to the blowing wheel (765), in the area of which the blowing stations (743) are arranged. The finished blown containers (742) are fed to a delivery section (72) by further transfer wheels.
  • thermoplastic material can be used as the thermoplastic material.
  • plastics for example PET, PEN or PP.
  • the preform (741) is expanded during the orientation process by compressed air supply.
  • the compressed air feed is fed into a pre-blowing phase, in the gas, for example 'compressed air with a low pressure level is divided into a subsequent main blowing phase, in which gas is supplied at a higher pressure level.
  • Compressed air with a pressure in the interval from 10 bar to 25 bar is typically used during the pre-blowing phase and compressed air with a pressure in the interval from 25 bar to 40 bar is fed in during the main blowing phase.
  • the heating section (764) is formed from a plurality of circumferential transport elements (73) which are strung together and guided along deflection wheels (74).
  • the chain-like arrangement is intended to span an essentially rectangular basic contour.
  • a single relatively large deflection wheel (74) is used in the area of the heating section (764) facing the transfer wheel (769) and an input wheel (75), and two comparatively smaller deflection wheels (76) are used in the area of adjacent deflections ,
  • any other guides are also conceivable.
  • the arrangement shown proves to be particularly expedient since three deflection wheels (74, 76) are positioned in the area of the corresponding extension of the heating section (764), and in each case the smaller deflection wheels (76) in the area of the transition to the linear courses of the heating section (764) and the larger deflection wheel (74) in the immediate transfer area to the transfer wheel (769) and the input wheel (75).
  • chain-like transport elements (73) it is also possible, for example, to use a rotating stimulating wheel. After the containers (742) have been blown, they are removed from the area of the blowing stations (743) by a removal wheel (77). transported via the transfer wheel (768) and an output wheel (78) to the output section (72).
  • the larger number of radiant heaters (770) allows a larger amount of preforms (741) to be tempered per unit of time.
  • the blowers (771) introduce cooling air into the area of cooling air ducts (79), which are opposite the assigned radiant heaters (770) and discharge the cooling air via outflow openings. By arranging the outflow directions, a flow direction for the cooling air is essentially transverse to one
  • the cooling air ducts (79) can provide reflectors for the heating radiation in the area of the surfaces opposite the radiant heaters (770). It is also possible to cool the radiant heaters (770) by means of the cooling air emitted.
  • Both the devices for plasma treatment of workpieces (5) shown above and the devices for blow molding containers (742) shown in FIGS. 36 to 39 can be equipped with one or more coupling wheels (81) according to FIGS. 40 and 41 be equipped.
  • the use of such coupling wheels (81) is particularly expedient when plasma stations (3) or blowing stations (743) with more than one cavity (4) each are used.
  • the coupling wheels (81) are typically used to rotate workpieces (5) in the vertical direction.
  • FIG. 40 shows the coupling wheel (81), which is rotatably mounted relative to a center line (82) for workpieces (5) or blown containers (742).
  • the rotatable mounting can be implemented in such a way that the coupling wheel (81) is guided in a base (84) via bearings and a shaft (83).
  • the holding elements (86) act on the workpieces (5) designed as containers (742) in the region of the mouth section (761) above a support ring.
  • the support arms (85) are movably guided relative to a base element (87) of the coupling wheel (81).
  • the support arms (85) are each pivotable about an axis of rotation (88).
  • the axis of rotation (88) runs in the region of a shaft (89) which is guided by bearings (90) in the base element (87) and extends essentially in the horizontal direction.
  • the support arms (85) are coupled to a cam roller (91) in order to specify pivoting movements around the axis of rotation (88).
  • the cam rollers (91) engage in a cam track (92) which is arranged on the outside of the base (84) as a jacket cam.
  • the cam rollers (91) each move an adjusting element (93) in a vertical direction.
  • the control element (93) is with a Coupling element (94) connected, which engages via a rack-like toothing (95) in a gear (96) which rests rigidly on the shaft (89). A stroke movement of the coupling element (94) is thereby transformed into a rotational movement of the shaft (83).
  • the holding element (86) is provided with two pliers-like fixing elements (97), each of which has a container (742) in the region of the
  • Each of the fixing elements (97) is equipped with tong arms (98, 99) which are arranged so as to be rotatable around pivot bearings (100, 101).
  • the gun arms (98, 99) are connected to each other by a coupling lever (102).
  • the gun arm (98) has one
  • the actuating lever (103) preferably causes a symmetrical movement of the two tong arms (98, 99) when working together with the coupling lever (102).
  • cam rollers (104), each associated with a holding element, (86), run through the cam segments (105, 106) one after the other in time. This leads to the fact that
  • Fixing elements (97) are actuated sequentially in time. For a transfer of workpieces (5) or containers (742) to the holding elements (86), a single transfer position can thus be realized, in the area of which the transfers are carried out one after the other, although the workpieces (5) are transported further by a common holding element (86).
  • the combination of the cam rollers (104) and the cam segments (105, 106) enables simple loading and unloading operations to be carried out despite the groupwise transport of the workpieces (5), as is possible with coupling wheels (81) with support arms (85), which each have only one holding element (86) for loading an individual workpiece (5).
  • FIG. 41 shows a top view again of the arrangement of the fixing elements (97) and the respective positioning of the fixing elements (97). It can be seen in particular that the tong arms (98, 99) of springs (107) are braced relative to one another. This leads to the fact that the fixing elements (97) assume the respective fixing position without external action. Only when the cam rollers (104) engage in one of the cam segments (105, 106) are the fixing elements (97) opened in a controlled manner in order to carry out a transfer process. The control of the fixing elements (97) even when the workpieces (5) are inserted has the advantage that sliding contact between the workpieces (5) and the fixing elements (97) is avoided. This counteracts the occurrence of abrasion on the workpieces (5).
  • Fig. 41 also illustrates that the cam rollers (104) are moved one after the other in a rest state on a circle arranged concentrically to the center line (82). This enables the successive staggered positioning using common curve segments (105, 106).

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EP03735466A 2002-05-24 2003-05-26 Procede et dispositif pour le traitement au plasma de pieces Withdrawn EP1537254A1 (fr)

Applications Claiming Priority (21)

Application Number Priority Date Filing Date Title
DE10223288 2002-05-24
DE10223288 2002-05-24
DE10224547 2002-05-31
DE10224547.9A DE10224547B4 (de) 2002-05-24 2002-05-31 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10224546 2002-05-31
DE10224546A DE10224546A1 (de) 2002-05-24 2002-05-31 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10224395 2002-06-01
DE10224395A DE10224395A1 (de) 2002-05-24 2002-06-01 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225609 2002-06-07
DE10225607A DE10225607A1 (de) 2002-05-24 2002-06-07 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225607 2002-06-07
DE2002125609 DE10225609A1 (de) 2002-06-07 2002-06-07 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225985 2002-06-11
DE10225985A DE10225985A1 (de) 2002-05-24 2002-06-11 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10227637 2002-06-20
DE10227637A DE10227637A1 (de) 2002-05-24 2002-06-20 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10229529 2002-07-01
DE10229529A DE10229529A1 (de) 2002-05-24 2002-07-01 Verfahren und Vorrichtung zur Behandlung von Werkstücken
DE10234374 2002-07-27
DE10234374A DE10234374A1 (de) 2002-07-27 2002-07-27 Verfahren und Vorrichtung zur Handhabung von Werkstücken
PCT/EP2003/005519 WO2003100122A2 (fr) 2002-05-24 2003-05-26 Procede et dispositif pour le traitement au plasma de pieces

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DE102004017241B4 (de) 2004-04-05 2012-09-27 Schott Ag Verbundmaterial und Verfahren zu seiner Herstellung
FR2907351B1 (fr) 2006-10-18 2009-02-06 Sidel Participations Machine de traitement de recipients par plasma,comprenant des circuits de depressurisation et de pressurisation decales
JP6352816B2 (ja) 2013-01-18 2018-07-04 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置および樹脂容器製造システム

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