WO2003100117A1 - Procede et dispositif pour le traitement au plasma de pieces - Google Patents

Procede et dispositif pour le traitement au plasma de pieces Download PDF

Info

Publication number
WO2003100117A1
WO2003100117A1 PCT/DE2003/001503 DE0301503W WO03100117A1 WO 2003100117 A1 WO2003100117 A1 WO 2003100117A1 DE 0301503 W DE0301503 W DE 0301503W WO 03100117 A1 WO03100117 A1 WO 03100117A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
plasma
chamber
holding arms
station
Prior art date
Application number
PCT/DE2003/001503
Other languages
German (de)
English (en)
Inventor
Michael Litzenberg
Frank Lewin
Hartwig Müller
Klaus Vogel
Gregor Arnold
Stephan Behle
Andreas LÜTTRINGHAUS-HENKEL
Matthias Bicker
Jürgen Klein
Original Assignee
Sig Technology Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10224547.9A external-priority patent/DE10224547B4/de
Application filed by Sig Technology Ltd. filed Critical Sig Technology Ltd.
Priority to AU2003233771A priority Critical patent/AU2003233771A1/en
Publication of WO2003100117A1 publication Critical patent/WO2003100117A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
    • B08B9/426—Grippers for bottles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42069—Means explicitly adapted for transporting blown article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D23/00—Details of bottles or jars not otherwise provided for
    • B65D23/02—Linings or internal coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
    • C08J9/0004—Use of compounding ingredients, the chemical constitution of which is unknown, broadly defined, or irrelevant
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00—Shaping characteristics in general
    • B29C2791/001—Shaping in several steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42073—Grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42073—Grippers
    • B29C49/42075—Grippers with pivoting clamps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
    • B29C49/42095—Rotating wheels or stars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42093—Transporting apparatus, e.g. slides, wheels or conveyors
    • B29C49/42105—Transporting apparatus, e.g. slides, wheels or conveyors for discontinuous or batch transport
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/4205—Handling means, e.g. transfer, loading or discharging means
    • B29C49/42113—Means for manipulating the objects' position or orientation
    • B29C49/42115—Inversion, e.g. turning preform upside down
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/42384—Safety, e.g. operator safety
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
    • B29C49/42—Component parts, details or accessories; Auxiliary operations
    • B29C49/64—Heating or cooling preforms, parisons or blown articles
    • B29C49/68—Ovens specially adapted for heating preforms or parisons
    • B29C49/6835—Ovens specially adapted for heating preforms or parisons using reflectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0244—Bottles
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2300/00—Characterised by the use of unspecified polymers
    • C08J2300/14—Water soluble or water swellable polymers, e.g. aqueous gels

Definitions

  • the invention relates to a method for plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable plasma chamber of a treatment station and in which the workpiece is positioned within the treatment station by a holding element.
  • the invention further relates to a device for plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber from a chamber floor, a chamber cover and a lateral one Chamber wall is limited and has at least one holding element for positioning the workpiece.
  • a device for plasma treatment of workpieces which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber from a chamber floor, a chamber cover and a lateral one Chamber wall is limited and has at least one holding element for positioning the workpiece.
  • Such methods and devices are used, for example, to provide plastics with surface coatings.
  • such methods and devices are also already known for coating inner or outer surfaces of containers which are intended for packaging liquids.
  • Devices for plasma sterilization are also known.
  • PCT-O 95/22413 describes a plasma chamber for internally coating PET bottles.
  • the bottles to be coated are lifted into a plasma chamber by a movable base and connected to an adapter in the area of a bottle mouth.
  • the bottle interior can be evacuated through the adapter.
  • a hollow lance is inserted through the adapter into the interior of the bottles to supply process gas.
  • the plasma is ignited using a microwave.
  • EP-OS 10 10 773 a feed device is explained in order to evacuate a bottle interior and to supply it with process gas.
  • PCT-WO 01/31680 describes a plasma chamber into which the bottles are introduced from a movable lid which was previously connected to a mouth area of the bottles.
  • PCT-WO 00/58631 also already shows the arrangement of plasma stations on a rotating wheel and loading writes for such an arrangement a group assignment of vacuum pumps and plasma stations to support a favorable evacuation of the chambers and the interior of the bottles.
  • the coating of several containers in a common plasma station or a common cavity is mentioned.
  • container layers made of silicon oxides with the general chemical formula SiO x are used to improve the barrier properties of the thermoplastic material. Barrier layers of this type prevent oxygen from penetrating into the packaged liquids and escape of carbon dioxide in the case of liquids containing CO 2 .
  • the object of the present invention is therefore to provide a method of the type mentioned in the introduction in such a way that handling of the workpieces to be treated is supported at high speed and with great reliability.
  • This object is achieved in that the workpiece is acted upon by at least two clamping elements of the holding element that can be positioned relative to one another such that the workpiece is received by a clamping space between the clamping elements.
  • Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that simple movement kinematics of the workpieces to be treated are supported.
  • the holding element has at least two clamping elements which can be positioned relative to one another and which are arranged relative to one another with a distance providing a clamping space for receiving the workpiece.
  • the procedural sequence for handling the workpieces is such that the plasma chamber is initially opened at least to the extent that the workpieces can be transferred to the holding element for inserting the workpieces into the plasma chamber.
  • the sealing element is raised at a predeterminable point in time and thereby the interior of the workpiece is sealed relative to the interior of the plasma chamber.
  • a seal only after a partial evacuation has the advantage that an interior of the workpiece and the further interior of the plasma chamber can initially be evacuated together and that in a second evacuation step after sealing the interior of the workpiece, the negative pressure in the area of the interior of the workpiece is different Vacuum in the further interior of the plasma chamber can be specified.
  • the workpiece is transferred from the holding element to a further transfer element.
  • the transfer process is preferably carried out in such a way that the transfer element approaches the holding element, takes over the workpiece and then transports the workpiece away.
  • a favorable introduction of gravity is supported in that the positioning of the clamping elements is carried out in a horizontal direction.
  • a simple implementation of transfer operations is supported in that the workpiece is positioned by pliers-like holding arms.
  • a simple implementation in terms of device technology is also supported in that process gas is supplied through the chamber floor.
  • a quick and uniform distribution of the process gas in an interior of the workpiece can be achieved in that the process gas is fed through an lance into an interior of the workpiece.
  • a simple opening and closing of the holding element is supported in that the workpiece is positioned by pivotably mounted holding arms.
  • Inserting the workpiece into the holding element is supported in that the holding arms are pressed apart when the workpiece is inserted into the clamping space.
  • the holding arms be pulled apart when the workpiece is pulled out of the clamping space. be pressed. In particular, it is thought to cause the spreading apart by direct contact between the workpiece and the holding arms.
  • locking elements for fixing the holding arms be positioned together with the chamber wall.
  • a very secure fixation of the workpiece can be achieved by arranging a stop element for fixing the workpiece at approximately the same height level as the holding arms.
  • microwaves generated by a microwave generator be introduced into the cavity in the area of the chamber cover.
  • a typical application is that a workpiece is treated from a thermoplastic.
  • an interior of the workpiece is treated.
  • An extensive field of application is opened up by treating a container as a workpiece.
  • a high production rate with great reliability and high product quality can be achieved in that the at least one plasma station is transferred from a rotating plasma wheel from an input position to an output position.
  • An increase in production capacity with only a slightly increased expenditure on equipment can be achieved by providing several cavities from one plasma station.
  • the workpiece is fixed in a mouth area by the holding arms.
  • a typical application is defined in that a plasma coating is carried out as the plasma treatment.
  • the plasma treatment is carried out using a low pressure plasma.
  • Particularly advantageous usage properties for workpieces for packaging food can be achieved in that at least some inorganic substances are deposited by the plasma.
  • a plasma is used to deposit a substance to improve the barrier properties of the workpiece.
  • an adhesion promoter is additionally deposited to improve the adhesion of the substance on a surface of the workpiece.
  • High productivity can be supported by treating at least two workpieces simultaneously in a common cavity.
  • Another area of application is that plasma sterilization is carried out as the plasma treatment.
  • a surface activation of the workpiece is carried out as a plasma treatment.
  • a resilient provision of the spring forces can take place in that the spring tensions are provided by leg springs.
  • the spring forces can also be generated by compression springs.
  • the holding arms be provided with locking webs in the area of their extension facing away from the fixing projections.
  • a simple mechanical implementation can be achieved in that the locking webs of locking elements can be fixed.
  • the locking elements be made of a hardened material.
  • a further improvement in the positioning reliability of the workpiece can be brought about in that the holding element is provided with a stop element for the workpiece.
  • stop element and the fixing projections are arranged at a height level for loading a bottle-shaped workpiece between its support ring and its shoulder area.
  • Fig. 1 is a schematic diagram of a plurality of plasma chambers, which are arranged on a rotating plasma wheel and in which the plasma wheel is coupled to input and output wheels.
  • FIG. 2 shows an arrangement similar to FIG. 1, in which the plasma station is each equipped with two plasma chambers, 3 is a perspective view of a plasma wheel with a plurality of plasma chambers,
  • FIG. 4 is a perspective view of a plasma station with a cavity
  • FIG. 5 shows a front view of the device according to FIG. 4 with the plasma chamber closed
  • FIG. 7 shows a representation corresponding to FIG. 5 with the plasma chamber open
  • FIG. 9 is an enlarged view of the plasma chamber with the bottle to be coated according to FIG. 6,
  • connection element 10 is a further enlarged view of a connection element for holding the workpiece in the plasma chamber
  • FIG. 11 shows a schematic representation of a positioning of a bottle-shaped workpiece within the plasma chamber using a forceps-like holding element
  • FIG. 12 is a plan view of the holding element according to FIG. 11 without showing the workpiece
  • 13 is a perspective view of the holding element according to FIG. 12 and
  • FIG. 14 shows a perspective illustration of the holding element according to FIG. 13 with inserted bottle-like workpiece and positioned locking elements.
  • FIG. 1 shows a plasma module (1), which is provided with a rotating plasma wheel (2).
  • a plurality of plasma stations (3) are arranged along a circumference of the plasma wheel (2).
  • the plasma stations (3) are provided with cavities (4) or plasma chambers (17) for receiving workpieces (5) to be treated.
  • the workpieces to be treated (5) are the plasma module
  • the plasma stations (3) each have two cavities (4) or plasma chambers (17).
  • two workpieces (5) can be treated simultaneously.
  • Fig. 3 shows a perspective view of a plasma module (1) with a partially constructed plasma wheel (2).
  • the plasma stations (3) are arranged on a support ring (14) which is designed as part of a rotary connection and is mounted in the area of a machine base (15).
  • the plasma stations (3) each have a station frame (16) which holds plasma chambers (17).
  • the plasma chambers (17) have cylindrical chamber walls (18) and microwave generators (19).
  • a rotary distributor (20) is arranged in a center of the plasma wheel (2), via which the plasma stations (3) are supplied with operating resources and energy. Ring lines (21) in particular can be used for the distribution of operating resources.
  • the workpieces (5) to be treated are shown below the cylindrical chamber walls (18). Lower parts of the plasma chambers (17) are not shown for the sake of simplicity.
  • Fig. 4 shows a plasma station (3) in perspective. It can be seen that the station frame (16) is provided with guide rods (23) on which a slide (24) for holding the cylindrical chamber wall (18) is guided. Fig. 4 shows the carriage (24) with the chamber wall (18) in a raised state, so that the workpiece (5) is released.
  • the microwave generator (19) is arranged in the upper region of the plasma station (3).
  • the microwave generator (19) is connected via a deflection (25) and an adapter (26) to a coupling channel (27) which opens into the plasma chamber (17).
  • the microwave generator (19) can be coupled both directly in the area of the chamber lid (31) and via a spacer element to the chamber lid (31) with a predeterminable distance to the chamber lid (31) and thus in a larger surrounding area of the chamber lid (31). to be ordered.
  • the adapter (26) has the function of a transition element and the coupling channel (27) is designed as a coaxial conductor.
  • a quartz glass window is arranged in the region of a junction of the coupling channel (27) in the chamber cover (31).
  • the deflection (25) is designed as a waveguide.
  • FIG. 5 shows a front view of the plasma station (3) according to FIG. 3 in a closed state of the plasma chamber (17).
  • the carriage (24) with the cylindrical chamber wall (18) is lowered compared to the positioning in FIG. 4, so that the chamber wall (18) has moved against the chamber bottom (29).
  • the plasma coating can be carried out in this positioning state.
  • FIG. 6 shows the arrangement according to FIG. 5 in a vertical sectional view.
  • the coupling channel (27) opens into a chamber cover (31) which has a laterally projecting flange (32).
  • a seal (33) is arranged in the area of the flange (32) and is acted upon by an inner flange (34) of the chamber wall (18).
  • the chamber wall (18) is thereby sealed relative to the chamber cover (31).
  • Another seal (35) is arranged in a lower region of the chamber wall (18) in order to ensure a seal relative to the chamber bottom (29) here too.
  • the chamber wall (18) encloses the cavity (4), so that both an interior of the cavity (4) and an interior of the workpiece (5) can be evacuated.
  • a hollow lance (36) is arranged in the area of the chamber base (30) and can be moved into the interior of the workpiece (5).
  • the lance (36) is positioned by a lance slide (37) which can be positioned along the guide rods (23).
  • a process gas channel (38) runs inside the lance slide (37) and, in the raised position shown in FIG. 6, is coupled to a gas connection (39) of the chamber base (30) is. This arrangement avoids hose-like connecting elements on the lance slide (37).
  • FIGS. 7 and 8 show the arrangement according to FIGS. 5 and 6 in a raised state of the chamber wall (18). In this position of the chamber wall (18), it is possible to remove the treated workpiece (5) from the area of the plasma station (3) and to insert a new workpiece (5) to be treated.
  • the chamber wall (18) shown in the drawings in an open state of the plasma chamber (17) achieved by displacement upwards it is also possible to carry out the opening process by displacing a structurally modified sleeve-shaped chamber wall in the vertical direction downwards.
  • the coupling channel (27) has a cylindrical design and is arranged essentially coaxially with the chamber wall (18).
  • FIG. 9 shows the vertical section according to FIG. 6 in an enlarged partial illustration in the vicinity of the chamber wall (18).
  • the lance (36) is guided through a recess (40) in the holding element (28).
  • the positioning of the workpiece (5) in the area of the sealing element (28) can be seen in the enlarged illustration in FIG. 10.
  • the sealing element (28) is inserted into a guide sleeve (41) which is provided with a spring chamber (42).
  • a Compression spring (43) used, which braces an outer flange (44) of the sealing element (28) relative to the guide sleeve (41).
  • a thrust plate (45) mounted on the lance (36) is guided against the outer flange (44) and presses the sealing element (28) into its upper end position.
  • an interior of the workpiece (5) is insulated from the interior of the cavity (4).
  • the compression spring (43) displaces the sealing element (28) relative to the guide sleeve (41) in such a way that a connection between the interior of the workpiece (5) and the interior of the cavity (4) is created.
  • Fig. 11 shows the positioning of the workpiece (5) within the plasma chamber (17) with the aid of a holding element (46).
  • the holding element (46) is designed like pliers and has two pivotably mounted holding arms (47, 48).
  • the holding arms (47, 48) are pivotable relative to axes of rotation (49, 50).
  • the holding arms (47, 48) of springs (51, 52) are pressed into a respective holding position.
  • leg springs (51, 52) is preferably considered.
  • FIG. 12 shows a top view of the holding element (46) according to FIG. 11 after removal of the workpiece (5). It can be seen in particular that a clamping space (54) for receiving the workpiece (5) is arranged between the holding arms (47, 48). The holding arms (47, 48) protrude into the clamping space (54) with fixing projections (55, 56).
  • the holding arms (47, 48) have locking webs (57, 58) which face away from the fixing projections (55, 56) and which are arranged in one by locking elements (59, 60), which can preferably be positioned together with the chamber wall (18) Locking position can be fixed.
  • the holding element (46) has a stop element (61).
  • the stop element (6) limits maximum insertion of the workpiece (5) into the clamping space (54).
  • the workpiece (5) is pressed against the stop element (61) by the fixing projections (55, 56).
  • the stop element (61) and the fixing projections (55, 56) are thereby arranged at approximately the same height level.
  • Fig. 12 additionally shows the sealing element (28) and the lance (36) at a lower level than the holding element (46) due to the selected viewing direction with respect to the plane of the drawing.
  • FIG. 13 shows the holding element (46) according to FIG. 12 in a perspective illustration and without depicting the locking elements (59, 60). It can be seen in particular that the holding element (46) has a base plate (62) from which the holding arms (47, 48) and the further components are carried.
  • the base plate (62) can be elements (63, 64) and connecting elements (65, 66) in the area of the station frame (16). In particular, it is intended to be mounted on the chamber base (30).
  • Fig. 13 also shows that the fixing projections (55, 56) are each provided with insertion bevels (67) and outlet bevels (68).
  • the workpiece (5) When the workpieces (5) are inserted into the clamping space (54), the workpiece (5) first comes into contact with the insertion bevels (67) and presses the holding arms (47, 48) apart against the forces of the springs (51, 52). After the workpiece (5) has been completely inserted into the clamping space (54), the holding arms (47, 48) automatically return to the locking position due to the forces of the springs (51, 52) and press the workpiece (5) against the stop element (61 ). The workpiece (5) is thereby fixed within the plasma chamber (17).
  • the workpiece (5) is gripped by a transfer element and pulled against the outlet bevels (68).
  • the outlet bevel (68) is preferably curved and is designed with a curvature course corresponding to an outer contour of the workpiece (5) in the contact area.
  • the holding arms (47, 48) are thereby brought apart again and release the workpiece (5).
  • the controlled pliers arms enable the workpieces (5) to be gripped actively and support the application of compressive and tensile forces to the insertion bevels (67) and the outlet bevels (68).
  • the controlled pliers of the transfer elements at a substantially same height level to act as the holding arms (47, 48) or at a slightly lower or higher level on the workpiece (5).
  • the introduction of tilting forces into the workpiece (5) is avoided or greatly reduced.
  • FIG. 14 shows the arrangement according to FIG. 13 after inserting a bottle-like workpiece (5) which is acted upon by the holding arms (47, 48) between a support ring (69) and a shoulder region (70). Holding such a bottle-like workpiece (5) in the neck region shown leads to a very stable fixation of the workpiece (5).
  • the locking elements (59, 60) are also shown in FIG. 14. The locking elements (59, 60) are positioned together with the chamber wall (18). In the arrangement shown, the locking elements (59, 60) block a movement of the holding arms (47, 48), so that an uncontrolled opening of the holding element (46) is reliably prevented.
  • a typical treatment process is explained below using the example of a coating process and carried out in such a way that the workpiece (5) is first transported to the plasma wheel (2) using the input wheel (11) and that the sleeve-like chamber wall (18) is inserted in a pushed-up state of the workpiece (5) into the plasma station (3).
  • the workpiece (5) is first inserted into the clamping space (54) by a transfer element.
  • the controlled holding pliers of the transfer element open and release the workpiece (5).
  • the chamber wall (18) is lowered into its sealed position and initially simultaneously an evacuation of both the cavity (4) and an interior of the workpiece (5) is carried out.
  • the lance (36) is moved into the interior of the workpiece (5) and the sealing of the interior of the workpiece (5) from the interior of the workpiece (5) is sealed off by a displacement of the sealing element (28). 4) performed. It is also possible to move the lance (36) into the workpiece (5) synchronously with the beginning of the evacuation of the interior of the cavity. The pressure inside the workpiece (5) is then further reduced. In addition, the positioning movement of the lance (36) is at least partially already carried out parallel to the positioning of the chamber wall (18). After reaching a sufficiently low vacuum, process gas is introduced into the interior of the workpiece (5) and the plasma is ignited with the aid of the microwave generator (19). In particular, it is intended to use the plasma to deposit both an adhesion promoter on an inner surface of the workpiece (5) and the actual barrier layer made of silicon oxides.
  • the lance (36) is removed from the interior of the workpiece (5) and the plasma chamber (17) and the interior of the workpiece (5) are ventilated.
  • the chamber wall (18) is raised again in order to remove the coated workpiece (5) and to enter a new workpiece (5) to be coated.
  • the sealing element (28) is replaced at least in some areas move into the chamber base (3).
  • a transfer element with a controlled pliers is again positioned in the area of the holding element (46) and the controlled pliers of the transfer element access the workpiece (5).
  • the workpiece held in this way is then pulled out of the holding element (46), the holding arms (47, 48) being pressed apart against the forces of the springs (51, 52).
  • the holding element (46) in the case of bottle-like workpieces (5) grips the workpiece (5) preferably in the threaded area or at a short distance from the mouth opening.
  • the chamber wall (18), the sealing element (28) and / or the lance (36) can be positioned using different drive units.
  • the use of pneumatic drives and / or electrical drives, in particular in one embodiment as a linear motor, is conceivable.
  • the curve control can be designed, for example, in such a way that control curves are arranged along a circumference of the plasma wheel (2), along which curve rollers are guided.
  • the cam rollers are coupled to the components to be positioned.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un procédé et un dispositif pour le traitement au plasma de pièces (5). Selon l'invention, la pièce est introduite dans une chambre (17) d'une station de traitement (3), chambre dans laquelle un vide au moins partiel peut être créé, puis la pièce est maintenue en position à l'intérieur de la station de traitement par un élément de maintien (46). La pièce est soumise à l'action d'au moins deux éléments de blocage (47,48), pouvant être placés dans une certaine position l'un par rapport à l'autre, de l'élément de maintien, de sorte qu'elle est reçue dans une zone de blocage (54) située entre les éléments de blocage.
PCT/DE2003/001503 2002-05-24 2003-05-09 Procede et dispositif pour le traitement au plasma de pieces WO2003100117A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003233771A AU2003233771A1 (en) 2002-05-24 2003-05-09 Method and device for plasma treating workpieces

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10223288 2002-05-24
DE10223288.1 2002-05-24
DE10224547.9A DE10224547B4 (de) 2002-05-24 2002-05-31 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10224547.9 2002-05-31

Publications (1)

Publication Number Publication Date
WO2003100117A1 true WO2003100117A1 (fr) 2003-12-04

Family

ID=29585308

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/001503 WO2003100117A1 (fr) 2002-05-24 2003-05-09 Procede et dispositif pour le traitement au plasma de pieces

Country Status (2)

Country Link
AU (1) AU2003233771A1 (fr)
WO (1) WO2003100117A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024033045A1 (fr) * 2022-08-08 2024-02-15 Khs Gmbh Dispositif de positionnement et scellement pour maintenir et sceller une pièce dans une chambre à plasma d'un appareil de revêtement par plasma

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (fr) * 1994-02-16 1995-08-24 The Coca-Cola Company Recipients creux a revetement interieur inerte ou impermeable applique par reaction superficielle au plasma ou polymerisation superficielle
DE29713510U1 (de) * 1997-07-30 1998-08-27 Krones Ag Hermann Kronseder Maschinenfabrik, 93073 Neutraubling Rotationsfüller
WO1999017334A1 (fr) * 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Procede et appareil pour le traitement de la surface interieure de bouteilles en plastique, dans un procede active par plasma
WO2000058631A1 (fr) * 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) * 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (fr) * 1994-02-16 1995-08-24 The Coca-Cola Company Recipients creux a revetement interieur inerte ou impermeable applique par reaction superficielle au plasma ou polymerisation superficielle
DE29713510U1 (de) * 1997-07-30 1998-08-27 Krones Ag Hermann Kronseder Maschinenfabrik, 93073 Neutraubling Rotationsfüller
WO1999017334A1 (fr) * 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Procede et appareil pour le traitement de la surface interieure de bouteilles en plastique, dans un procede active par plasma
WO2000058631A1 (fr) * 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) * 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024033045A1 (fr) * 2022-08-08 2024-02-15 Khs Gmbh Dispositif de positionnement et scellement pour maintenir et sceller une pièce dans une chambre à plasma d'un appareil de revêtement par plasma

Also Published As

Publication number Publication date
AU2003233771A1 (en) 2003-12-12

Similar Documents

Publication Publication Date Title
DE10224547B4 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
EP1507886B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507890B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507893B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
WO2012089196A9 (fr) Procédé de traitement plasma de pièces et pièce comportant une couche barrière aux gaz
EP1507723A1 (fr) Procede et dispositif pour la manipulation de pieces
EP2630273B1 (fr) Procédé de traitement au plasma de pièces
WO2011153993A1 (fr) Dispositif de traitement de pièces au plasma
EP1507889B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507885B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP2721192A1 (fr) Procédé de traitement de pièces par plasma ainsi que pièce présentant une couche barrière aux gaz
DE102008016923A1 (de) Vorrichtung zur Plasmabehandlung von Werkstücken
WO2003100117A1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507884B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
DE10225609A1 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
EP1507891A1 (fr) Procede et dispositif pour le traitement au plasma de pieces
WO2003100118A2 (fr) Procede et dispositif pour traiter des pieces
DE10300734A1 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
EP1537254A1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP2198447A2 (fr) Dispositif de traitement plasma de pieces

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP