EP1532717A2 - Dispositif et procede de production d'impulsions laser ultracourtes - Google Patents

Dispositif et procede de production d'impulsions laser ultracourtes

Info

Publication number
EP1532717A2
EP1532717A2 EP03756431A EP03756431A EP1532717A2 EP 1532717 A2 EP1532717 A2 EP 1532717A2 EP 03756431 A EP03756431 A EP 03756431A EP 03756431 A EP03756431 A EP 03756431A EP 1532717 A2 EP1532717 A2 EP 1532717A2
Authority
EP
European Patent Office
Prior art keywords
laser
pulse
amplifier
pulses
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03756431A
Other languages
German (de)
English (en)
Inventor
Günter HOLLEMANN
Ulf Krause
Bernd Braun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik Optical Systems GmbH
Original Assignee
Jenoptik Optical Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems GmbH filed Critical Jenoptik Optical Systems GmbH
Publication of EP1532717A2 publication Critical patent/EP1532717A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0064—Anti-reflection devices, e.g. optical isolaters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers
    • H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2316—Cascaded amplifiers

Definitions

  • the invention relates to the generation of ultra-short laser pulses with pulse lengths below 100 ps, pulse repetition rates in the range from 1000 Hz to 10 MHz and pulse energies in the mJ range.
  • Ultrashort pulse lasers which are based in particular on solid-state laser technology and are diode-pumped, there is an urgent need in micromaterial processing (e.g. drilling nozzles and laser honing tribological surfaces).
  • Ultrashort pulse lasers can also be used advantageously for medical applications in the field of ophthalmology (e.g. refractive corneal surgery) and dentistry (e.g. processing of dental hard material).
  • Pulse duration of 10 ns for example, and above, is that a quasi "cold '" without erosion of the material
  • Regenerative amplifiers consist, for example, of an end-pumped laser crystal and a mirror system that is designed as a stable resonator. They use a Pockels cell as an active switching element within the resonator, which actively couples the laser pulses in and out with little loss, thereby determining the number of pulsations in the resonator.
  • a systematic disadvantage of regenerative amplifiers is the deterioration in the beam quality associated with the large number of circulations required (typically 5-100) and the associated circulation losses. Often occurs too a pulse broadening due to the large number of cycles (“gain narrowing").
  • high pulse energies and peak pulse powers arise in regenerative amplifiers, which require very high demands on the optical quality of material, surface polishing and coating of the optical components.
  • Pockels cells are principally problematic due to the high-voltage operation, since this requires complex electronics at pulse repetition rates of 1 kHz and higher.
  • Pockels cells there has so far been no technically acceptable solution for pulse repetition rates above 50 kHz. Further disadvantages concern the strong electromagnetic radiation due to the modulated high voltage.
  • the object of the invention is to reduce the deterioration in the beam quality caused by the large number of circulations required in regenerative amplifiers to avoid associated circulation losses and pulse broadening through a simpler and less expensive laser construction.
  • the aim is to provide ultrashort laser pulses with pulse repetition rates in an extended kHz range and with pulse energies in the mJ range.
  • the object is achieved by an arrangement for generating ultra-short laser pulses, comprising a solid-state laser oscillator for providing a pulse train and a downstream multi-stage laser amplifier for increasing the pulse energy of pulses, which are reduced by at least one switching element from the pulse train with a reduced pulse repetition rate Pulse sequence are selected, with the laser amplifier being resonator-free and free of active switching elements with respect to the pulse to be amplified and having at most a double passage of the pulse to be amplified. It is essential for the invention that a small signal amplification of more than 10 is provided in each amplifying stage in an amplifying laser crystal, the total small signal amplification caused by all amplifying laser crystals being more than 100.
  • the small signal amplification ensures that a pulse energy of more than 10 ⁇ J is reached.
  • Dispensing with a regenerative amplifier and its resonator structure also has the advantage of no longer having to use the complex switching regime of active pulse coupling and decoupling after repeated circulation. Consequently, the electro-optical modulator that is mandatory in the regenerative amplifier can also be replaced by a switching element that does not have the disadvantages mentioned. The replacement switching element no longer has to meet the high requirements with regard to low transmission losses.
  • this is advantageous for a simplified structure of the switching element used to select the laser pulses.
  • This can now be arranged as a single acousto-optical modulator or as a pair thereof between the solid-state laser oscillator and the amplifier input of the laser amplifier.
  • the switching element is arranged outside the laser amplifier, in contrast to a regenerative amplifier, the laser amplifier, for which no laser resonator is provided in the present invention, no longer contains an active beam switching element.
  • the preferred used, simple and therefore inexpensive acousto-optical modulator is used exclusively as a "pulse picker".
  • the acousto-optical modulator can be triggered by a photodiode which, in conjunction with an electronic counter, determines the selection of the pulses.
  • the pulse repetition rate can be varied quasi-continuously by setting the pulses to be selected in a time unit.
  • the invention does not of course exclude that an electro-optical modulator is used as the switching element, which is arranged between the solid-state laser oscillator and the amplifier input of the laser amplifier. In contrast to an arrangement in a regenerative amplifier, however, such a switching element is only exposed to a low optical power load.
  • a Faraday isolator between the solid-state laser oscillator and the laser amplifier or to additionally provide the switching element as an optical isolator between the solid-state laser oscillator and the laser amplifier.
  • a Faraday isolator can also be provided in addition or individually in the beam path after the laser amplifier.
  • Such a protective measure also serves to rearrange a polarizer and a quarter-wave plate after the laser amplifier.
  • the invention which is preferably provided for diode-laser-pumped, mode-locked solid-state laser oscillators is not restricted to such, but is also suitable for Q-switched, high-repetition pulsed laser oscillators, for passive Q-switched laser oscillators and for microchip lasers and pulsed diode lasers.
  • auxiliary resonator for a different wavelength than that of the pulse to be amplified or the orthogonally polarized component of the pulse, which contains the laser amplifier as a laser-active element and which, with increasing inversion, oscillates in the amplifying laser crystal and this limited to a low value.
  • the laser amplifier remains quasi-resonator-free, since it is not effective for the wavelength and the polarization of the pulse to be amplified.
  • the amplifier arrangement according to the invention can also be used very advantageously for generating ultrashort laser pulses in the UV range, in that one or more nonlinear optical crystals are used for wavelength transformation.
  • the above object is further achieved according to the invention by a method for generating ultra-short laser pulses by selecting pulses with a reduced pulse repetition rate from a primary pulse sequence and by amplifying the selected pulses with a multi-stage laser amplifier which is resonant with respect to the pulse to be amplified and from which the amplified pulses are decoupled of active switching operations takes place, wherein the amplification is connected to at most a double pass through amplifying media provided in the amplifier stages and the selected pulses are amplified in each amplifier stage with a small signal amplification of more than 10, but at least with a total small signal amplification of more than 100.
  • the invention provides an industrially suitable laser beam source with a simple structure, which delivers ultrashort laser pulses in the ps range and with pulse energies in the mJ range and whose pulse repetition rates in the kHz range leave enough time between two pulses for thermal relaxation of processed material. By preventing the heat from flowing away into the workpiece, there is no undesirable thermal damage in the vicinity of the direct interaction.
  • Fig. 1 shows the overall structure of an arrangement for
  • Fig. 2 shows the structure of a mode-locked solid-state laser oscillator
  • Fig. 3 shows the structure of a laser amplifier, which is connected downstream of the mode-locked solid-state laser oscillator
  • Fig. 4 shows an arrangement for generating ultra-short laser pulses, with two acousto-optical modulators as switching elements
  • Fig. 5 shows the structure of an auxiliary resonator
  • Fig. 6 shows an arrangement for generating ultra-short laser pulses with protective devices against returning radiation
  • an acousto-optical modulator 3 is arranged between a mode-locked solid-state laser oscillator 1 and the amplifier input of a laser amplifier 2 as a preferred switching element for selecting pulses from a pulse sequence provided by the solid-state laser oscillator 1.
  • the beam 4 diffracted into the first order when the acousto-optical modulator is switched on is coupled into the laser amplifier 2.
  • the rising edges of, for example, 10 ns that can be achieved with commercially available modulators are sufficient to select a single pulse from a pulse train at pulse repetition rates up to 100 MHz (pulse interval 10 ns). If another acousto-optical modulator (Fig. 4) is used, this leads to a reduction in the power within the modulator, to a sharper focus and to even shorter switching times.
  • the acousto-optic modulator 3 used as a “pulse picker” can be triggered by a fast photodiode, which detects the pulse train and uses fast electronics, for example, to count every 100th or every 100th pulse and synchronize the time window for this pulse a quasi-continuous variation of the pulse repetition rate is possible because the number of selected pulses per unit of time can be freely selected.
  • the "pulse picker” is suitable for performing the optical isolation function, since it closes again after the pulse selection.
  • the pulse repetition rate can be changed within limits with constant average power. For example, with Nd: YV0 4, the average power only decreases by 5% if the pulse repetition rate is reduced from 500 kHz to 50 kHz.
  • the solid-state laser oscillator 1 shown in FIG. 2 contains an Nd: YV0 laser crystal 5 which is diode-pumped with the aid of a diode laser 6 with associated pump optics 7.
  • the solid-state laser oscillator 1 is folded several times by deflecting mirrors 8 and works with a saturable semiconductor absorber 9 and an end mirror 10.
  • deflecting mirrors 8 In the construction according to FIG. 2, there are various possibilities for coupling out the beam. So between the laser crystal 5 and the pump optics 7 z. B. a dichroic mirror can be arranged.
  • YV0 4 oscillator used in the present exemplary embodiment, with a pulse repetition rate of 30 MHz (pulse spacing 33 ns), an output power of 5 W and a pulse duration of 8 ps, a pulse energy of 170 nJ results.
  • the acousto-optical modulator 3 whose pulse rise time is 10 ns, selects every 500th pulse with a diffraction efficiency of more than 80%, so that one average input power at the amplifier input of laser amplifier 2 is greater than 5 mW at 60 kHz pulse repetition rate.
  • the laser amplifier shown in Fig. 3 the individual amplifier stages have already been described in detail in DE 100 43 269 AI and to which reference is made here, consists of six such amplifier stages with a serial arrangement of six laser crystals 12-17 as the amplifying media are pumped by the same number of respectively associated high-power diode lasers (hidden in FIG. 3).
  • the amplifier stages of the laser amplifier used in the invention have no resonator structure.
  • the pump radiation emerging from the high-power diode lasers is first collimated and then focused into the laser crystals 12-17, which are Nd: YV0 4 crystals in order to achieve a high stimulated emission cross section in the present exemplary embodiment.
  • Nd YV0 4 crystals
  • Gd YV0 4 crystals or other Nd-doped crystals.
  • a emerging from the solid-state laser oscillator 1 round laser beam 18 passes through a Faraday isolator 19 with, for..., To avoid reactions from the laser amplifier into the solid-state laser oscillator 1.
  • B. 30 - 60 dB attenuation and transmits mode-adjusted through a lens combination 20 in a zigzag path one after the other all six laser crystals 12 - 17.
  • the laser beam 18 is further adjusted to the strongly elliptical pump focus by means of cylindrical lenses 21, 22 in the laser crystals 12-17 focuses so that the laser beam 18 collimated in the tangential plane passes through the laser crystals 12-17 in the sagittal plane with a strongly elliptical focus.
  • the present laser amplifier is divided into two parts, the two parts being optically connected via a periscope 23.
  • the laser beam 18 is again collimated in the sagittal plane with the same elliptical cross section as before the first passage through the cylindrical lenses 21, 22.
  • the laser crystals 12 - 17 are thus penetrated by mode-adapted rays of the pump radiation and the laser radiation 18 to be amplified, a thermal lens of different strength being formed in mutually perpendicular planes as a result of the incident elliptical pump radiation.
  • the laser radiation 18, focused in the plane with a strong thermal lens, is directed into each of the laser crystals 12-17, with a beam waist being formed in the region of the thermal lens.
  • folding mirrors 24-29 are used, which can also be used to adjust the beam dimensions in the slow axis direction. Further deflection elements 30 - 34 serve to build up a compact arrangement.
  • the laser beam 18 is after it emerges from the laser amplifier by means of a lens arrangement, not shown, consisting of z. B. cylindrical lenses, the desired beam parameters adapted for the intended application.
  • the lifetime of the excited metastable laser level of Nd: YV0 4 is 90 ⁇ sec, which corresponds to a pulse energy of over 1.3 mJ.
  • the pulse length remains unchanged since there is no "gain narrowing" in the laser amplifier for relatively long pulses of 8 ps pulse duration.
  • the peak pulse power is therefore 160 MW.
  • the gain in saturation decreases depending on the pulse repetition rate, analogous to Q-switched lasers and laser amplifiers of Q-switched oscillators with pulse lengths in the ns range.
  • the table below shows the laser amplifier shown in FIG. 3 in comparison to a pump arrangement with fiber-coupled diode laser (N. Hodgson, D. Dudley, L. Gruber, W. Jordan, H. Hoffmann, “Diode end-pumped, TEM 00 Nd: YV0 laser with output power greater than 12 W at 355 nm ", CLEO 2001, Optical Society of America, Techn. Digest, 389, (2001)) of the pump beam cross sections that can be obtained.
  • the pump beam cross sections and thus the achievable pump power density are crucial prerequisites to achieve high small signal amplification (W. Koechner, "Solid-State Laser Engineering", Fifth Edition, Springer Series in Optical Sciences, Springer, Berlin, 1999).
  • the effective averaged cross section is the effective averaged weighted cross section along the absorption length in the laser crystal. To simplify matters, a factor of 2 compared to the minimum cross-sectional area was assumed.
  • the solid-state laser oscillator 1 In the arrangement of a further embodiment of the invention shown in FIG. 4, which uses two acousto-optical modulators 35, 36 as switching elements, the solid-state laser oscillator 1 generates a pulse train with a pulse repetition rate of, for example, 200 MHz.
  • the first acousto-optic modulator 35 cuts the pulse train in the pulse packets with a Pulsunwiederholrate of for example 200 kHz, each pulse packet comprises 10 pulses'.
  • the optical average power for the second acousto-optical modulator 36 is reduced to 1%, so that the focus can be made very small and this enables fast switching edges for cutting out a single pulse.
  • an auxiliary resonator is provided, which, however, is not effective for the wavelength ⁇ i of the oscillator beam intended for further use.
  • the auxiliary resonator contains two dichroic beam splitters 37, 38 which are adjacent to the laser amplifier 2 and which are transmissive for the wavelength ⁇ i and have a highly reflective effect for a second wavelength ⁇ 2 (or for another polarization) which can also be amplified with the laser amplifier 2.
  • two resonator mirrors 39, 40 forming the auxiliary resonator for example, one resonator mirror 39 is highly reflective for the wavelength ⁇ 2 and the other resonator mirror 40 serves as a decoupler for the wavelength ⁇ 2 .
  • the auxiliary resonator oscillates when the amplification in the amplifying medium of the laser amplifier 2 reaches a critical value and thus limits the maximum small signal amplification.
  • ASE spontaneous emission
  • the laser radiation of wavelength ⁇ 2 emerging from the auxiliary resonator is generally not directly usable and can be collected, for example, in a beam trap 41.
  • the auxiliary resonator can also be used to suppress the disruptive excess of the first pulse, which is also due to the inversion in the laser-active medium that is raised compared to stationary operation.
  • Protective devices according to FIG. 6 can be provided to protect the reinforcing elements in the laser amplifier 2 and the solid-state laser oscillator 1 from radiation coming back from an application.
  • a suitable measure is e.g. B. a lambda quarter plate 42 with a polarizer 43 placed behind the amplifier output.
  • a solid-state laser oscillator 1 as already contained in FIG. 3, with a Faraday isolator 44 which also offers protection against returning radiation from the laser amplifier 2.

Abstract

La présente invention concerne un dispositif et un procédé de production d'impulsions laser ultracourtes. L'objet de la présente invention est d'éviter la détérioration de la qualité du faisceau provoquée, dans des amplificateurs régénératifs, par la pluralité des passages nécessaires, ainsi que par les pertes de passage et l'élargissement des impulsions associés, à l'aide d'un laser à structure plus simple et moins onéreuse, et d'obtenir des impulsions laser ultracourtes à taux de répétition dans la plage des kHz. Dans une structure constituée d'un oscillateur de laser solide, d'un amplificateur laser à plusieurs étages monté en aval et destiné à augmenter l'énergie des impulsions et d'au moins un élément de commutation pour la sélection d'impulsions dans une suite d'impulsions fournie par l'oscillateur de laser solide, un gain pour des signaux faibles de plus de 10 est prévu à chaque étage d'amplification dans un cristal laser d'amplification, le gain total pour des signaux faibles provoqué par tous les cristaux laser d'amplification étant supérieur à 100. Il est ainsi possible de produire des impulsions laser ultracourtes à longueur d'impulsion inférieure à 20 ps, à taux de répétition dans la plage de 1000 Hz à 10 MHz et à énergie d'impulsion dans la plage des mJ, qui peuvent être utilisées de préférence dans les domaines du traitement des micromatériaux et de la médecine.
EP03756431A 2002-08-30 2003-08-29 Dispositif et procede de production d'impulsions laser ultracourtes Withdrawn EP1532717A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10240599 2002-08-30
DE10240599A DE10240599A1 (de) 2002-08-30 2002-08-30 Anordnung und Verfahren zur Erzeugung ultrakurzer Laserimpulse
PCT/DE2003/002899 WO2004021528A2 (fr) 2002-08-30 2003-08-29 Dispositif et procede de production d'impulsions laser ultracourtes

Publications (1)

Publication Number Publication Date
EP1532717A2 true EP1532717A2 (fr) 2005-05-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP03756431A Withdrawn EP1532717A2 (fr) 2002-08-30 2003-08-29 Dispositif et procede de production d'impulsions laser ultracourtes

Country Status (5)

Country Link
US (1) US20050254533A1 (fr)
EP (1) EP1532717A2 (fr)
AU (1) AU2003293919A1 (fr)
DE (1) DE10240599A1 (fr)
WO (1) WO2004021528A2 (fr)

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EP1462206A1 (fr) * 2003-03-26 2004-09-29 Lasag Ag dispositif laser pour percer des trous dans des composants d'un dispositif d'injection d'un fluide
US7386019B2 (en) * 2005-05-23 2008-06-10 Time-Bandwidth Products Ag Light pulse generating apparatus and method
DE102008005053A1 (de) * 2008-01-18 2009-07-30 Rowiak Gmbh Laserkorrektur von Sehfehlern an der natürlichen Augenlinse
DE102009011599B4 (de) * 2009-03-08 2023-06-07 Keming Du Oszillator-Verstärker-Anordnungen mit Amplituden-Einstellung
DE102009042003B4 (de) * 2009-09-21 2011-12-08 Friedrich-Schiller-Universität Jena Gütegeschalteter Laser
US8462425B2 (en) * 2010-10-18 2013-06-11 Cymer, Inc. Oscillator-amplifier drive laser with seed protection for an EUV light source
DE102012002958A1 (de) * 2012-01-27 2013-08-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Erzeugung von Lichtpulsen
TWI473373B (zh) * 2012-11-30 2015-02-11 Ind Tech Res Inst 間隔時間可調脈衝序列產生裝置

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GB9309006D0 (en) * 1993-04-30 1993-06-16 Laser Ecosse Ltd High power laser amplifier
EP0792530B1 (fr) * 1994-11-15 2004-01-21 Jmar Technology Company Laser a milieu amplicateur solide, de haute luminosite, de puissance moyenne elevee et de faible cout
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Also Published As

Publication number Publication date
WO2004021528A3 (fr) 2004-12-29
US20050254533A1 (en) 2005-11-17
WO2004021528A2 (fr) 2004-03-11
AU2003293919A1 (en) 2004-03-19
DE10240599A1 (de) 2004-03-18

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