EP1519250A1 - Thermally compensated balance-hairspring resonator - Google Patents

Thermally compensated balance-hairspring resonator Download PDF

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Publication number
EP1519250A1
EP1519250A1 EP03021787A EP03021787A EP1519250A1 EP 1519250 A1 EP1519250 A1 EP 1519250A1 EP 03021787 A EP03021787 A EP 03021787A EP 03021787 A EP03021787 A EP 03021787A EP 1519250 A1 EP1519250 A1 EP 1519250A1
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EP
European Patent Office
Prior art keywords
spiral
quartz
axis
balance
angle
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Granted
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EP03021787A
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German (de)
French (fr)
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EP1519250B1 (en
Inventor
Thierry Hessler
Rudolf Dinger
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Asulab AG
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Asulab AG
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Priority to DE60333191T priority Critical patent/DE60333191D1/en
Priority to EP03021787A priority patent/EP1519250B1/en
Priority to US10/943,855 priority patent/US7503688B2/en
Priority to TW093128448A priority patent/TWI372952B/en
Priority to KR1020040075712A priority patent/KR20050030558A/en
Priority to CNB2004100801241A priority patent/CN100483271C/en
Priority to JP2004279139A priority patent/JP4805560B2/en
Publication of EP1519250A1 publication Critical patent/EP1519250A1/en
Priority to HK05106159.9A priority patent/HK1073697A1/en
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency
    • G04B17/22—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature
    • G04B17/222—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature with balances
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B18/00—Mechanisms for setting frequency
    • G04B18/04—Adjusting the beat of the pendulum, balance, or the like, e.g. putting into beat

Definitions

  • the present invention relates to a spring-balance resonator thermally compensated to reduce the diurnal temperature difference of a mechanical watch movement at a level comparable to that of a watch electronic quartz.
  • the daytime deviation of a mechanical movement depends mainly on the regulating devices, and in particular the sprung balance the frequency of oscillation can be influenced by variations in the factors outside, such as a change in temperature or the presence of a field magnetic.
  • the temperature acts in particular on the moment of inertia of the pendulum and on the elastic constant of the spiral, and modifies the frequency of the balance-spiral which is indeed a function of these two parameters.
  • the pendulum As for the pendulum, it is generally made of an alloy non-magnetic such as glucydur, making the oscillatory movement of the pendulum can not be disturbed by the proximity of magnetic materials.
  • an alloy non-magnetic such as glucydur
  • the object of the invention is to overcome the disadvantages of the aforementioned prior art in providing a balance-spring with an even smaller gap in especially because of a spiral made of a non-magnetic material whose coefficients of expansion and the thermal variation of the modulus of elasticity allow, during the manufacture, to adapt the elastic constant of said spiral to the moment of inertia of the balance.
  • E the modulus of elasticity
  • h the height of the spiral
  • e its thickness
  • L its developed length.
  • I mr 2 in which m represents the mass and r the radius of gyration, which obviously depends on the coefficient of expansion ⁇ of the pendulum.
  • the invention relates to a balance spring for mechanical horological movement in which the spiral is formed of turns of height h made from a single crystal quartz crystallographic axes x, y, z, the x axis, being the electric axis and the y axis the mechanical axis, the height h of the turns having substantially the same orientation as the crystallographic axis z. More precisely, the height h forms with the axis z an angle ⁇ which can vary between + 25 ° and -25 °, preferably between + 10 ° and -15 °, which makes it possible to vary the elastic constant of the spiral without modify the geometry.
  • quartz for the manufacture of a spiral also offers the advantage, besides its excellent thermal characteristics, to possess also excellent mechanical and chemical properties, particularly in aging, oxidation and sensitivity to magnetic fields.
  • the technique of photolithography and etching allows, on the one hand, to form in the quartz blade, together with the spiral as such, its attachment to the outside and the fastening shell in the center, on the other hand to freely choose other spiral parameters such as the thickness e of the turns or their pitch, at a point any of its development.
  • the quartz slide is cut according to a plane forming an angle ⁇ / 2 - ⁇ with respect to the crystallographic axis z, equivalent by rotating about the x axis, an angle ⁇ with respect to the direction of the height h of the spiral.
  • FIG. 1 there is shown the first step of the method of manufacturing a spiral according to the invention.
  • This step consists in taking a quartz bar 1 having for crystallographic axes xyz, and in cutting a blade 3 having for thickness the height h desired for the blade 3, for example of a few tenths millimeters.
  • the desired height h can also be obtained by cutting a blank which is then subjected in a known manner to a machining operation by chemical, physical or physicochemical means to thin the blade up to the height h .
  • This blade is cut along a plane xy 'forming an angle ⁇ with the xy plane perpendicular to the crystallographic axis z, that is to say by rotation of the xy plane by an angle ⁇ about the x axis.
  • Figure 2 also shows schematically, for an enlarged portion spiral near the curve in the center, the following steps of the process. These steps consist, according to known methods for the manufacture of micro-structures, to photolithographically form a mask for delimiting the contour 5 of the spiral, and define outside of said contour areas 7 to be eliminated to create the spiral.
  • the photolithography and etching process allows, if desired, at the same time form the clip on the outside and attach it to the center, ie a ferrule coming from material with the spiral. It also allows to freely choose other spiral parameters to improve its performance, such as the thickness of turns and / or their pitch, and this at any point of the development of the spiral.
  • the elimination of the zones 7 situated outside the contour can be carried out according to known methods, for example for the manufacture of tuning forks of electronic watches.
  • a wet etching can be carried out, in particular etching by means of a mixture of hydrofluoric acid and ammonium fluoride (HF / NH 4 F). It is also possible to carry out a dry attack, for example using the technique of reactive ion etching.
  • FIG. 4 represents a beam of curves giving the variation of running as a function of the temperature and showing how it is possible, by a simple variation of the angle ⁇ to obtain a minimum difference of market with balances having different coefficients of dilation, as shown in Table 1 below: coefficient of expansion ⁇ Angle ⁇ curve of 5.10 -6 K -1 - 14.6 ° curve e 10.10 -6 K -1 - 7 ° curve f 15.10 -6 K -1 + 7 °
  • the curve g corresponds to the tuning fork of an electronic watch taken as a reference.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Springs (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The resonator has an elastic spiral with coils and formed from a quartz mono crystal, and a balancer with a moment of inertia. The spiral is engraved in a precut plate (3) such that the height of the coils forms an angle with a cryptographic axis, after rotating around an x-axis, to adapt the thermal property of the spiral to that of the balancer. An independent claim is also included for a method of manufacturing a resonator.

Description

La présente invention à pour objet un résonateur balancier-spiral thermocompensé permettant de réduire l'écart thermique de marche diurne d'un mouvement horloger mécanique à un niveau comparable à celui d'une montre électronique à quartz.The present invention relates to a spring-balance resonator thermally compensated to reduce the diurnal temperature difference of a mechanical watch movement at a level comparable to that of a watch electronic quartz.

Il est bien connu que l'écart de marche diurne d'un mouvement mécanique dépend essentiellement des organes réglants, et notamment du balancier-spiral dont la fréquence d'oscillation peut être influencée par des variations des facteurs extérieurs, tels qu'un changement de température ou la présence d'un champ magnétique. La température agit notamment à la fois sur le moment d'inertie du balancier et sur la constante élastique du spiral, et modifie la fréquence du balancier-spiral qui est en effet fonction de ces deux paramètres.It is well known that the daytime deviation of a mechanical movement depends mainly on the regulating devices, and in particular the sprung balance the frequency of oscillation can be influenced by variations in the factors outside, such as a change in temperature or the presence of a field magnetic. The temperature acts in particular on the moment of inertia of the pendulum and on the elastic constant of the spiral, and modifies the frequency of the balance-spiral which is indeed a function of these two parameters.

En ce qui concerne le balancier, il est généralement réalisé un alliage amagnétique tels que le glucydur, faisant que le mouvement oscillatoire du balancier ne peut pas être perturbé par la proximité de matériaux magnétiques. Pour minimiser l'influence de la température sur le moment d'inertie du balancier, c'est-à-dire en fait sur la variation de son rayon de giration, de très nombreux dispositifs ont été proposés dès les années 1900, ces dispositifs étant essentiellement basés sur le principe du balancier bimétallique coupé.As for the pendulum, it is generally made of an alloy non-magnetic such as glucydur, making the oscillatory movement of the pendulum can not be disturbed by the proximity of magnetic materials. To minimize the influence of the temperature on the moment of inertia of the pendulum, that is to say in fact on the variation of its radius of gyration, very numerous devices have been as early as the 1900s, these devices being essentially based on the principle of the bimetallic pendulum cut.

Ces dispositifs ne seront pas décrits plus avant, étant donné que l'invention ne concerne pas des caractéristiques géométriques du balancier en tant que tel.These devices will not be described further, since the invention does not concern the geometrical characteristics of the balance as such.

En ce qui concerne le spiral, on a déjà depuis longtemps, d'une façon encore considérée comme satisfaisante, minimisé les écarts de marche dus aux variations de température en les fabriquant dans des alliages dont l'élasticité reste pratiquement constante dans la gamme de températures usuelles d'utilisation. Il s'agit notamment d'alliages fer-nickel contenant également du chrome et du titane comme durcissants ainsi que divers autres éléments (C, Mo, Be, etc). De tels alliages, bien connus sous les dénominations telles que l'"Elinvar" permettent, dans la meilleure qualité d'obtenir un écart de marche de ± 0,6 seconde par degré en 24h, mais peuvent encore être sensibles à l'effet d'un champs magnétique. De plus leur fabrication fait appel à des procédés métallurgiques complexes ne permettant pas de garantir une reproductibilité parfaite des caractéristiques recherchées, de sorte qu'il est encore nécessaire de procéder à l'appairage du balancier et du spiral lors du montage.As far as the hairspring is concerned, we have already for a long time considered satisfactory, minimized the differences due to variations in temperature by manufacturing them in alloys whose elasticity remains practically constant in the usual temperature range of use. These include iron-nickel alloys also containing chromium and titanium as hardeners as well as various other elements (C, Mo, Be, etc.). Such alloys, well known under denominations such as "Elinvar" allow, in the best quality to obtain a deviation of ± 0.6 seconds per degree in 24 hours, but can still be sensitive to the effect of a magnetic field. Moreover, their manufacture uses Complex metallurgical processes do not guarantee reproducibility characteristics sought, so that it is still necessary to proceed with the pairing of the balance and the hairspring during assembly.

L'invention a pour but de pallier aux inconvénients de l'art antérieur précité en procurant un balancier-spiral présentant un écart de marche encore plus faible en raison notamment d'un spiral réalisé en un matériau amagnétique dont les coefficients de dilatation et la variation thermique du module d'élasticité permettent, lors de la fabrication, d'adapter la constante élastique dudit spiral au moment d'inertie du balancier.The object of the invention is to overcome the disadvantages of the aforementioned prior art in providing a balance-spring with an even smaller gap in especially because of a spiral made of a non-magnetic material whose coefficients of expansion and the thermal variation of the modulus of elasticity allow, during the manufacture, to adapt the elastic constant of said spiral to the moment of inertia of the balance.

On rappellera que la constante élastique du spiral, autrement désignée par "couple unitaire du spiral" répond à la formule I : C = Ehe 3 12L dans laquelle E est le module d'élasticité, h la hauteur du spiral, e son épaisseur et L sa longueur développée. La fréquence du balancier-spiral peut être reliée à la formule I par la formule II : f = 12π C I dans laquelle I représente le moment d'inertie du balancier, correspondant à la formule III : I = mr 2 dans laquelle m représente la masse et r le rayon de giration qui dépend évidemment du coefficient de dilatation α du balancier.It will be recalled that the elastic constant of the spiral, otherwise referred to as "unitary pair of the spiral" corresponds to the formula I: VS = ehe 3 12 The in which E is the modulus of elasticity, h the height of the spiral, e its thickness and L its developed length. The frequency of the sprung balance can be connected to the formula I by the formula II: f = 1 2π VS I in which I represents the moment of inertia of the balance, corresponding to formula III: I = mr 2 in which m represents the mass and r the radius of gyration, which obviously depends on the coefficient of expansion α of the pendulum.

A cet effet l'invention concerne un balancier-spiral pour mouvement horloger mécanique dans lequel le spiral est formé de spires de hauteur h réalisées à partir d'un monocristal de quartz d'axes cristallographiques x, y, z, l'axe x, étant l'axe électrique et l'axe y l'axe mécanique, la hauteur h des spires ayant sensiblement la même orientation que l'axe cristallographique z. Plus précisément la hauteur h forme avec l'axe z un angle  qui peut varier entre + 25° et - 25°, de préférence entre + 10° et - 15°, ce qui permet de faire varier la constante élastique du spiral sans en modifier la géométrie.For this purpose, the invention relates to a balance spring for mechanical horological movement in which the spiral is formed of turns of height h made from a single crystal quartz crystallographic axes x, y, z, the x axis, being the electric axis and the y axis the mechanical axis, the height h of the turns having substantially the same orientation as the crystallographic axis z. More precisely, the height h forms with the axis z an angle  which can vary between + 25 ° and -25 °, preferably between + 10 ° and -15 °, which makes it possible to vary the elastic constant of the spiral without modify the geometry.

Grâce à cette conception du spiral, il est ainsi possible d'adapter très simplement la constante élastique dudit spiral (formule I) au coefficient de dilatation linéaire α du balancier, qui modifie le moment d'inertie (formule III) dudit balancier, afin que la fréquence (formule II) du résonateur balancier-spiral soit thermocompensée.Thanks to this design of the spiral, it is possible to adapt very simply the elastic constant of said spiral (formula I) at the coefficient of expansion linear α of the balance, which modifies the moment of inertia (formula III) of said balance, so that the frequency (formula II) of the balance-spring resonator is temperature-compensated.

L'utilisation du quartz pour la fabrication d'un spiral offre également l'avantage, outre ses excellentes caractéristiques thermiques, de posséder aussi d'excellentes propriétés mécaniques et chimiques, en particulier au niveau du vieillissement, de l'oxydation et de la sensibilité aux champs magnétiques. The use of quartz for the manufacture of a spiral also offers the advantage, besides its excellent thermal characteristics, to possess also excellent mechanical and chemical properties, particularly in aging, oxidation and sensitivity to magnetic fields.

L'invention concerne également un procédé de fabrication d'un tel spiral consistant à :

  • découper dans un barreau de quartz d'axes cristallographiques x y z une lame dont l'épaisseur sera éventuellement amincie à une hauteur h désirée pour les spires ;
  • former par photolithographie à la surface de la lame un masque dont le contour délimite la forme désirée pour le spiral,
  • effectuer une gravure par voie humide ou par voie sèche pour éliminer le quartz se trouvant à l'extérieur du contour créé, et libérer le spiral.
The invention also relates to a method of manufacturing such a spiral consisting of:
  • cutting into a quartz bar of crystallographic axes xyz a blade whose thickness will eventually be thinned to a height h desired for the turns;
  • photolithographically form on the surface of the blade a mask whose outline delimits the desired shape for the hairspring,
  • perform a wet or dry etching to remove the quartz outside the created contour, and release the hairspring.

La technique de photolithographie et gravure permet, d'une part de former dans la lame de quartz, en même temps que le spiral en tant que tel, son attache à l'extérieur et la virole de fixation au centre, d'autre part de choisir librement d'autres paramètres du spiral tels que l'épaisseur e des spires ou leur pas, en un point quelconque de son développement.The technique of photolithography and etching allows, on the one hand, to form in the quartz blade, together with the spiral as such, its attachment to the outside and the fastening shell in the center, on the other hand to freely choose other spiral parameters such as the thickness e of the turns or their pitch, at a point any of its development.

Pour modifier le couple élastique du spiral et l'adapter au coefficient de dilatation linéaire d'un balancier donné, la lame de quartz est découpée selon un plan formant un angle π/2 -  par rapport à l'axe cristallographique z, soit de façon équivalente en formant par rotation autour de l'axe x, un angle  par rapport à la direction de la hauteur h du spiral.To modify the elastic torque of the spiral and adapt it to the coefficient of linear expansion of a given balance, the quartz slide is cut according to a plane forming an angle π / 2 -  with respect to the crystallographic axis z, equivalent by rotating about the x axis, an angle  with respect to the direction of the height h of the spiral.

D'autres caractéristiques et avantages de la présente invention apparaítront dans la description qui suit, faite à titre illustratif et non limitatif en référence aux dessins annexés dans lesquels :

  • les figures 1 et 2 représentent les étapes essentielles du procédé de fabrication d'un spiral en quartz selon l'invention;
  • la figure 3 est un graphique représentant l'écart de marche en fonction de la température d'un spiral en quartz selon l'invention, avec une courbe de comparaison, et
  • la figure 4 est un graphique comparable à celui de la figure 3 dans lequel le spiral est réalisé à partir de lames de quartz découpées selon différents angles de coupe.
Other characteristics and advantages of the present invention will appear in the description which follows, given by way of illustration and not limitation with reference to the accompanying drawings in which:
  • Figures 1 and 2 show the essential steps of the method of manufacturing a quartz spiral according to the invention;
  • FIG. 3 is a graph showing the operating gap as a function of the temperature of a quartz hairspring according to the invention, with a comparison curve, and
  • Figure 4 is a graph comparable to that of Figure 3 wherein the spiral is made from quartz blades cut at different cutting angles.

A la figure 1 on a représenté la première étape du procédé de fabrication d'un spiral selon l'invention. Cette étape consiste à prendre un barreau de quartz 1 ayant pour axes cristallographiques x y z, et à découper une lame 3 ayant pour épaisseur la hauteur h désirée pour la lame 3, par exemple de quelques dixièmes millimètres. La hauteur h désirée précise peut également être obtenue en découpant une ébauche qu'on soumet ensuite de façon connue à une opération d'usinage par des moyens chimiques, physiques ou physico-chimiques pour amincir la lame jusqu'à la hauteur h. Cette lame est découpée selon un plan x y' formant un angle  avec le plan x y perpendiculaire à l'axe cristallographique z, c'est-à-dire par rotation du plan x y d'un angle  autour de l'axe x.In Figure 1 there is shown the first step of the method of manufacturing a spiral according to the invention. This step consists in taking a quartz bar 1 having for crystallographic axes xyz, and in cutting a blade 3 having for thickness the height h desired for the blade 3, for example of a few tenths millimeters. The desired height h can also be obtained by cutting a blank which is then subjected in a known manner to a machining operation by chemical, physical or physicochemical means to thin the blade up to the height h . This blade is cut along a plane xy 'forming an angle  with the xy plane perpendicular to the crystallographic axis z, that is to say by rotation of the xy plane by an angle  about the x axis.

Comme on peut le voir sur la figure 2 représentant une portion de cette même lame 3 à plat, la direction de la hauteur h selon l'axe z' forme un angle  avec l'axe cristallographique z.As can be seen in Figure 2 showing a portion of the same blade 3 flat, the direction of the height h along the axis z 'forms an angle  with the crystallographic axis z.

La figure 2 représente également schématiquement, pour une portion agrandie de spiral près de la courbe au centre, les étapes suivantes du procédé. Ces étapes consistent, selon des procédés connus pour la fabrication de micro-structures, à former par photolithographie un masque permettant de délimiter le contour 5 du spiral, et de définir à l'extérieur dudit contour des zones 7 devant être éliminées pour créer le spiral.Figure 2 also shows schematically, for an enlarged portion spiral near the curve in the center, the following steps of the process. These steps consist, according to known methods for the manufacture of micro-structures, to photolithographically form a mask for delimiting the contour 5 of the spiral, and define outside of said contour areas 7 to be eliminated to create the spiral.

Le procédé de photolithographie et gravure permet, si on le souhaite, de former en même temps l'attache à l'extérieur et l'attache au centre, c'est-à-dire une virole venant de matière avec le spiral. Il permet aussi de choisir librement d'autres paramètres du spiral pour en améliorer ses performances, tels que l'épaisseur des spires et/ou leur pas, et ceci en un point quelconque du développement du spiral.The photolithography and etching process allows, if desired, at the same time form the clip on the outside and attach it to the center, ie a ferrule coming from material with the spiral. It also allows to freely choose other spiral parameters to improve its performance, such as the thickness of turns and / or their pitch, and this at any point of the development of the spiral.

L'élimination des zones 7 situées à l'extérieur du contour peut être effectuée selon des procédés connus, par exemple pour la fabrication des diapasons des montres électroniques. On peut effectuer une attaque par voie humide en particulier une attaque chimique au moyen d'un mélange d'acide fluorhydrique et de fluorure d'ammonium (HF/NH4F). On peut également effectuer une attaque par voie sèche, en faisant par exemple appel à la technique de gravure ionique réactive.The elimination of the zones 7 situated outside the contour can be carried out according to known methods, for example for the manufacture of tuning forks of electronic watches. A wet etching can be carried out, in particular etching by means of a mixture of hydrofluoric acid and ammonium fluoride (HF / NH 4 F). It is also possible to carry out a dry attack, for example using the technique of reactive ion etching.

En se référant maintenant à la figure 3, on a représenté l'écart de marche en secondes par jour en fonction de la température pour un spiral en quartz (courbe a) lorsque le balancier est réalisé en un matériau ayant un coefficient de dilatation α = 14 10-6 K-1 et un diapason de montre électronique (courbe b), tous les deux fabriqués avec un angle  = 2°. On a également représenté par des traits verticaux la gamme de températures à retenir à fin de comparaison selon les normes COSC (Contrôle Officiel Suisse des Chronomètres), à savoir entre + 8°C et + 38°C. On peut observer que les courbes a et b sont très proches l'une de l'autre dans la gamme COSC, l'écart maximum à partir du point de retournement 10 ayant respectivement pour valeurs Δa = 0,5s/j et Δb = 1,2s/j.Referring now to FIG. 3, the running gap in seconds per day as a function of the temperature is shown for a quartz spiral (curve a) when the balance is made of a material having a coefficient of expansion α = 14 10 -6 K -1 and a tuning fork (curve b), both made with an angle  = 2 °. The range of temperatures to be retained for comparison purposes according to the COSC (Swiss Official Chronometer Testing) standards, namely between + 8 ° C. and + 38 ° C., has also been represented by vertical lines. It can be observed that the curves a and b are very close to each other in the COSC range, the maximum deviation from the turning point 10 having Δa values = 0.5s / d and Δb = 1 respectively. , 2s / d.

La figure 4 représente un faisceau de courbes donnant l'écart de marche en fonction de la température et montrant comment il est possible, par une simple variation de l'angle  d'obtenir un écart de marche minimum avec des balanciers ayant différents coefficients de dilatation, comme indiqué dans le tableau 1 ci-après : coefficient de dilatation α Angle  courbe d 5.10-6 K-1 - 14,6° courbe e 10.10-6 K-1 - 7° courbe f 15.10-6 K-1 + 7° La courbe g correspond au diapason d'une montre électronique pris comme référence.FIG. 4 represents a beam of curves giving the variation of running as a function of the temperature and showing how it is possible, by a simple variation of the angle  to obtain a minimum difference of market with balances having different coefficients of dilation, as shown in Table 1 below: coefficient of expansion α Angle  curve of 5.10 -6 K -1 - 14.6 ° curve e 10.10 -6 K -1 - 7 ° curve f 15.10 -6 K -1 + 7 ° The curve g corresponds to the tuning fork of an electronic watch taken as a reference.

On peut observer que, dans la gamme COSC couvrant 30°C, l'écart maximum est d'environ Δmax = -0,6s/j, soit encore de l'ordre de 0,02 seconde par degré en 24h, valeur très inférieure à celle qu'on peut obtenir avec un spiral métallique de la meilleure qualité.It can be seen that in the COSC range covering 30 ° C the maximum deviation is approximately Δmax = -0.6s / d, that is still of the order of 0.02 seconds per degree in 24h, much lower value than can be obtained with a metal hairspring of the best quality.

Claims (12)

Résonateur balancier-spiral pour mouvement horloger mécanique comportant un spiral de constante élastique C et un balancier de moment d'inertie I, caractérisé en ce que le spiral est formé de spires de hauteur h réalisées à partir d'un monocristal de quartz.Spiral balance resonator for mechanical horological movement comprising a spring constant spring C and a momentum of inertia balance I, characterized in that the spiral is formed of turns of height h made from a quartz monocrystal. Résonateur balancier-spiral selon la revendication 1, caractérisé en ce que le quartz est sous forme cristallisée selon des axes cristallographiques x y z, l'axe x étant l'axe électrique et y l'axe mécanique.Spiral balance resonator according to Claim 1, characterized in that the quartz is in crystalline form along crystallographic axes xyz, the x axis being the electric axis and y the mechanical axis. Résonateur balancier-spiral selon la revendication 2, caractérisé en ce que la direction z' selon la hauteur h des spires forme un angle  avec l'axe de cristallisation z du quartz, après rotation autour de l'axe x.Spiral balance resonator according to Claim 2, characterized in that the direction z 'according to the height h of the turns forms an angle  with the crystallization axis z of the quartz, after rotation about the x axis. Résonateur balancier-spiral selon la revendication 3, caractérisé en ce que l'angle  a une valeur comprise entre + 25° et - 25°, de préférence entre +10° et -15°.Spiral balance resonator according to Claim 3, characterized in that the angle  has a value between + 25 ° and -25 °, preferably between + 10 ° and -15 °. Résonateur balancier-spiral selon la revendication 4, caractérisé en ce que les valeurs limites de l'angle  permettent d'adapter la constante élastique dudit spiral au coefficient de dilatation du balancier.Spiral balance resonator according to claim 4, characterized in that the limit values of the angle  make it possible to adapt the elastic constant of said spring to the coefficient of expansion of the balance. Résonateur balancier-spiral selon la revendication 3, caractérisé en ce que l'appairage de la constante élastique C du spiral et du moment d'inertie I du balancier, en ce qui concerne leurs caractéristiques thermiques, est effectué en choisissant une valeur appropriée de l'angle .Spiral balance resonator according to Claim 3, characterized in that the pairing of the elastic constant C of the spiral and the moment of inertia I of the balance, with regard to their thermal characteristics, is performed by selecting an appropriate value of the 'angle . Procédé de fabrication d'un résonateur balancier-spiral comportant un spiral dont la courbe au centre est assujettie par une virole à un balancier, caractérisé en ce que le spiral de hauteur h est obtenu en effectuant les étapes consistant à : découper dans un monocristal de quartz d'axes cristallographiques x y z, l'axe x étant l'axe électrique et y l'axe mécanique, une lame d'axes x y' z', amincie si nécessaire à la hauteur h; former par photolithographie à la surface de la lame un masque permettant de délimiter le contour désiré pour le spiral; et effectuer une gravure pour éliminer le quartz se trouvant à l'extérieur du contour du spiral, et libérer le spiral. A method of manufacturing a sprung balance resonator comprising a spiral whose center curve is secured by a ferrule to a balance, characterized in that the hairspring h is obtained by performing the steps of: to cut into a quartz monocrystal of crystallographic axes xyz, the x axis being the electric axis and y the mechanical axis, a xy axis blade x ', thinned if necessary at the height h ; photolithographically form on the surface of the blade a mask for delimiting the desired contour for the hairspring; and perform an etching to remove the quartz outside the spiral outline, and release the hairspring. Procédé selon la revendication 7, caractérisé en ce que la lame dans laquelle est formé le spiral est découpée dans le quartz selon un plan x y' z' formant un angle  par rapport au plan défini par les axes cristallographiques x y z du quartz par rotation autour de l'axe x, ledit angle  pouvant varier entre + 25° et -25°, de préférence entre +10° et -15°. Process according to Claim 7, characterized in that the blade in which the spiral is formed is cut in the quartz in a plane xy 'z' forming an angle  with respect to the plane defined by the crystallographic axes xyz of the quartz by rotation around the x axis, said angle  can vary between + 25 ° and -25 °, preferably between + 10 ° and -15 °. Procédé selon la revendication 7, caractérisé en ce que l'attaque permettant d'éliminer le quartz situé à l'extérieur du contour du spiral est effectuée par voie humide, de préférence par attaque chimique au moyen d'un mélange HF/NH4F.Process according to Claim 7, characterized in that the etching action for removing the quartz located outside the spiral outline is carried out wet, preferably by chemical etching using a HF / NH 4 F mixture. . Procédé selon la revendication 7, caractérisé en ce que l'attaque permettant d'éliminer le quartz situé à l'extérieur du contour du spiral est effectuée par voie sèche, telle que par gravure ionique réactive.Process according to Claim 7, characterized in that the etching action for removing the quartz located outside the spiral outline is carried out by the dry method, such as by reactive ion etching. Procédé selon la revendication 7, caractérisé en ce que les étapes de photolithographie et gravure permettent de former en même temps que le spiral son attache à l'extérieur, la virole de fixation au centre et de choisir d'autres paramètres de construction tels que l'épaisseur des spires ou leur pas.Process according to Claim 7, characterized in that the photolithography and etching steps make it possible to form, at the same time as the hairspring, its attachment to the outside, the fixing shell in the center and to choose other construction parameters such as the thickness of the turns or their pitch. Procédé selon la revendication 8, caractérisé en ce que les valeurs limites de l'angle de coupe  permettent d'adapter la constante élastique du spiral obtenu au coefficient de dilatation d'un balancier.Method according to claim 8, characterized in that the limit values of the cutting angle  make it possible to adapt the elastic constant of the spiral obtained to the coefficient of expansion of a beam.
EP03021787A 2003-09-26 2003-09-26 Thermally compensated balance-hairspring resonator Expired - Lifetime EP1519250B1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE60333191T DE60333191D1 (en) 2003-09-26 2003-09-26 Spiral spring balance resonator with thermal compensation
EP03021787A EP1519250B1 (en) 2003-09-26 2003-09-26 Thermally compensated balance-hairspring resonator
TW093128448A TWI372952B (en) 2003-09-26 2004-09-20 Thermoregulated sprung balance resonator
US10/943,855 US7503688B2 (en) 2003-09-26 2004-09-20 Thermoregulated sprung balance resonator
KR1020040075712A KR20050030558A (en) 2003-09-26 2004-09-22 Thermoregulated sprung balance resonator
CNB2004100801241A CN100483271C (en) 2003-09-26 2004-09-23 Thermoregulated sprung balance resonator
JP2004279139A JP4805560B2 (en) 2003-09-26 2004-09-27 Spring balance resonator adjusted for temperature change
HK05106159.9A HK1073697A1 (en) 2003-09-26 2005-07-21 Thermoregulated sprung balance resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03021787A EP1519250B1 (en) 2003-09-26 2003-09-26 Thermally compensated balance-hairspring resonator

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EP1519250A1 true EP1519250A1 (en) 2005-03-30
EP1519250B1 EP1519250B1 (en) 2010-06-30

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EP (1) EP1519250B1 (en)
JP (1) JP4805560B2 (en)
KR (1) KR20050030558A (en)
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DE (1) DE60333191D1 (en)
HK (1) HK1073697A1 (en)
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JP4805560B2 (en) 2011-11-02
DE60333191D1 (en) 2010-08-12
CN100483271C (en) 2009-04-29
US20050068852A1 (en) 2005-03-31
EP1519250B1 (en) 2010-06-30
TW200512553A (en) 2005-04-01
JP2005106819A (en) 2005-04-21
CN1601402A (en) 2005-03-30
HK1073697A1 (en) 2005-10-14
TWI372952B (en) 2012-09-21
US7503688B2 (en) 2009-03-17
KR20050030558A (en) 2005-03-30

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