EP1463933A1 - Sensorelement - Google Patents
SensorelementInfo
- Publication number
- EP1463933A1 EP1463933A1 EP02806306A EP02806306A EP1463933A1 EP 1463933 A1 EP1463933 A1 EP 1463933A1 EP 02806306 A EP02806306 A EP 02806306A EP 02806306 A EP02806306 A EP 02806306A EP 1463933 A1 EP1463933 A1 EP 1463933A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- heater
- feed line
- sensor element
- heater feed
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 238000002485 combustion reaction Methods 0.000 claims abstract description 3
- 230000000704 physical effect Effects 0.000 claims abstract 4
- 238000009413 insulation Methods 0.000 claims description 36
- 239000007784 solid electrolyte Substances 0.000 claims description 14
- 238000007650 screen-printing Methods 0.000 claims description 5
- 238000009429 electrical wiring Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 31
- 239000007789 gas Substances 0.000 description 12
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000007639 printing Methods 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Definitions
- the invention is based on a sensor element according to the preamble of claim 1.
- a gas sensor with such a sensor element is known for example from DE 198 57 468 AI for use in exhaust gas analysis of internal combustion engines.
- the elongated, planar sensor element is arranged in a manner known to those skilled in the art in a housing which can be fastened in a measurement opening of an exhaust pipe.
- the sensor element has a measuring device which comprises an electrochemical cell with a first electrode, a second electrode and a solid electrolyte arranged between the first and second electrodes.
- the first electrode is arranged in a reference gas region introduced into the sensor element.
- the second electrode is applied to an outer surface of the sensor element and is in contact with the exhaust gas via a porous protective layer.
- a heating device is provided for heating the measuring device.
- the heating device has a meandering heater (resistance heater), to which a first and a second heater feed line are led.
- the heater arranged at the measuring end of the sensor element is electrically connected to contact surfaces which are provided on a connection-side end opposite the measuring end of the sensor element and via which the heater is electrically connected to an electrical circuit arranged outside the gas sensor.
- the heater and the two heater feed lines are arranged in a layer plane of the sensor element.
- the two heater feed lines run parallel to the longitudinal axis of the sensor element.
- the heating device is electrically insulated from the surrounding elements by insulating layers.
- the heater is operated in the usual way by applying a voltage between the two heater leads through the electrical wiring.
- the first heater supply line is at a constant potential, for example earth potential. It is known, for example, to determine the temperature within the measuring device by means of a resistance measurement and to regulate the heating device by means of the electrical circuit so that a predetermined temperature value is present within the measuring device. Due to the potential changes in the second heater supply line connected with the control, the function of the measuring device can be disturbed by coupling.
- An electron-conducting intermediate layer for example made of platinum, is therefore provided between the heating device and the measuring device and is at a constant electrical potential.
- the sensor element according to the invention with the characterizing features of the independent claim has the advantage over the prior art that a layered structure is realized with which the impairment of a measuring device by coupling is reduced or completely avoided in a material-saving and simple manner.
- a first heater supply line which is at an at least almost constant potential, is arranged in a layer plane between a second heater supply line and the measuring device.
- the first heater supply line thus serves as a connecting line for the heater and at the same time shields the measuring device against coupling in of a second heater supply line, which result from changes in the potential of the second heater supply line that occur during operation.
- the measuring device is shielded particularly effectively against the second heater feed line.
- the first heater feed line can form a lattice structure.
- the first heater feed line is advantageously arranged such that the vertical projection of the second heater feed line onto the layer plane of the first heater feed line lies at least in regions on the first heater feed line.
- the following layers are particularly advantageously applied to a carrier film by screen printing in the order given: a second insulation layer through which the second heater feed line and the heater from the Carrier film is insulated, the heater and the second heater lead, a first insulation layer, through which the first heater lead is isolated from the second heater lead, the first heater lead, and optionally a third insulation layer, which covers the first heater lead.
- the first heater supply line is printed directly on a contact area of the heater and thus electrically connected to the heater. A recess is therefore provided in the contact area of the heater in the first insulation layer.
- the carrier film is laminated with one or more solid electrolyte films of the measuring device and then sintered.
- the second insulation layer, the heater and the second heater supply line can be applied to the carrier film by screen printing.
- the first heater supply line and optionally the third insulation layer are screen-printed onto an insulation film.
- the first heater supply line is electrically connected to the heater by means of a plated-through hole in the insulation film.
- the carrier film, the insulation film and one or more solid electrolyte films of the measuring device are laminated after printing and then sintered.
- FIG. 1 shows an exploded drawing of a partial area of a first exemplary embodiment of a sensor element according to the invention
- FIG. 2 shows a cross section through the first exemplary embodiment of the sensor element according to the invention along the line II-II in FIG. 1
- FIG. 3 shows an exploded drawing of a partial area of a second exemplary embodiment of a sensor element according to the invention.
- FIG. 1 and Figure 2 show a first embodiment of the sensor element according to the invention.
- the sensor element 10 has a heating device 21 applied to a carrier film 20 and a measuring device 22.
- the measuring device 22 of the sensor element 10 is not shown.
- the measuring device 22 which is arranged on a measurement-side end 26 of the sensor element 10 exposed to the exhaust gas, has a first solid electrolyte foil 61 and a second solid electrolyte foil 62.
- first solid electrolyte film 61 In the first solid electrolyte film
- a reference gas region 63 is introduced, which contains a reference gas.
- the reference gas region 63 is connected to the atmospheric air via a channel in a supply region 25 of the sensor element 10.
- the reference gas area 63 is on the second
- Solid electrolyte film 62 applied a first electrode 64. Opposite the first electrode 64, a second electrode 65 is provided on the outer surface of the second solid electrolyte film 62, which is covered with a porous protective layer 66 and is exposed to the exhaust gas.
- the voltage that forms in the Nernst cell between the electrodes 64, 65 can be used to infer the oxygen partial pressure in the exhaust gas.
- the invention is not limited to a sensor element which has a measuring device with the structure described above.
- the measuring device can also comprise a pump cell, a combination of pump and Nernst cell (broadband lambda probe) or another combination of electrochemical cells.
- the measuring device can also have a structure which is a other measurement method, for example a resistive measurement, realized.
- the measuring device 22 is heated by the heating device 21 and kept at a constant temperature.
- the heating device 21 is regulated by an electrical circuit arranged outside the sensor element 10 on the basis of a temperature in the sensor element 10 determined with the measuring device 22.
- the heating device 21 contains a heater 30, which is designed as a meandering resistance heater, and a first and a second one in the supply area 25 of the sensor element 10 arranged heater lead 31, 32, which are electrically connected to the heater 30.
- the first and second heater feed lines 31, 32 connect the heater 30 to the electrical circuitry via a first and a second plated-through hole 51, 52 in the carrier film 20 and via a contact surface (not shown) applied to an outer surface of the carrier film 20.
- a voltage is applied between the first and the second heater feed lines 31, 32 by the electrical circuitry.
- the first heater feed line 31 is constantly at ground potential, the heater 30 is switched on and off by changing the potential of the second heater feed line 32.
- the first heater feed line 31 is arranged in a layer plane between the second heater feed line 32 and the measuring device 22.
- the first heater feed line 31 is drawn in the feed area 25 over the entire large area of the sensor element 10.
- the width of the second heater feed line 32 is smaller than the corresponding width of the sensor element 10.
- the first heater feed line 31 is electrically connected to the heater 30 at a contact point 45, in the area of which the first insulation layer 41 has a cutout.
- the heating device 21 is electrically insulated from the carrier film 20 by a second insulation layer 42 and from the measuring device 22 by a third insulation layer 43.
- the sensor element is manufactured using screen printing technology.
- the second insulation layer 42, the heater 30 with contact point 45 and the second heater feed line 32, the first insulation layer 41, the first heater feed line 31 and the third insulation layer 43 are printed on the carrier film 20 (in this order).
- the electrical connection of the heater 30 to the first heater feed line 31 takes place by printing one end of the first heater feed line 31 directly onto the contact point 45 of the heater 30.
- a recess is provided in the first insulation layer 41 in this area.
- the printed carrier film 20 is laminated together with the solid electrolyte films 61, 62 of the measuring device 22 and then sintered.
- FIG. 3 shows a second embodiment of the sensor element according to the invention, in which corresponding elements have been identified with the same reference numerals as in Figure 1.
- the embodiment differs from the first embodiment shown in FIG. 1 in that it is not a printed first insulation layer 41 that is used for the insulation of the first heater supply line 31, 32, but an insulation film 44 similar to the carrier film 20.
- the first heater feed line 31 is thus separated from the heater 30 and the second heater feed line 32 by the insulation film 44.
- the insulation film 44 extends over the entire large area of the sensor element. The contacting of the heater 30 with the first heater supply line 31 takes place via a third through-contact 53 introduced into the insulation film 44.
- the second insulation layer 42, the heater 30 with the second heater feed line 32 is printed on the carrier film 20 (in this order) (screen printing technology).
- the first heater lead 31 and the third insulation layer 43 are printed on the insulation film 44.
- the carrier film 20 and the insulating film 44 are laminated together with the solid electrolyte films 61, 62 of the measuring device 22 and then sintered.
- the first heater feed line 31 can also extend into the area of the heater 30 or over the entire large area of the sensor element 10.
- the heater can be arranged in the same layer level as the first heater supply line which is at a constant potential and / or can form a coherent conductor track with the first heater supply line. while the second heater supply line is provided in a layer plane on the side of the first heater supply line facing away from the measuring device. For contacting the second heater feed line with the heater, a contact point or a via is provided, as in the embodiments shown in the figures.
- the heater 30 and the first and second heater feed lines 31, 32 have, for example, platinum with a ceramic component.
- the first, second and third insulation layers 41, 42, 43 have, for example, aluminum oxide as the main component.
- the first and second solid electrolyte films 61, 62 essentially consist of zirconium oxide stabilized with yttrium.
- the carrier film 20 and the insulation film 44 have zirconium oxide and / or aluminum oxide stabilized with yttrium, for example. If the carrier film 20 consists of aluminum oxide, the second insulation layer 42 can be omitted.
- the first heater supply line 31 is at a largely constant potential, for example earth potential. However, it is at the discretion of the person skilled in the art to set the first heater supply line 31 to another largely constant potential, for example if this is more favorable in terms of circuitry.
- a largely constant potential of the first heater supply line 31 is to be understood in the sense of the invention as a potential which, compared to the potential of the second heater supply line 32, is only subject to slow and / or slight changes and thus causes no or only slight coupling into the measuring device 22.
- the coupling into the measuring device 22 due to potential changes in the first heater supply line 31 should therefore be significantly less than the coupling due to the potential changes in the second Heater supply line 32 would occur if this were not shielded by the first heater supply line 31, which is at least almost constant potential.
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10200052 | 2002-01-03 | ||
DE10200052A DE10200052A1 (de) | 2002-01-03 | 2002-01-03 | Sensorelement |
PCT/DE2002/003975 WO2003060502A1 (de) | 2002-01-03 | 2002-10-22 | Sensorelement |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1463933A1 true EP1463933A1 (de) | 2004-10-06 |
Family
ID=7711455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02806306A Withdrawn EP1463933A1 (de) | 2002-01-03 | 2002-10-22 | Sensorelement |
Country Status (5)
Country | Link |
---|---|
US (1) | US7628900B2 (de) |
EP (1) | EP1463933A1 (de) |
JP (1) | JP2005515437A (de) |
DE (1) | DE10200052A1 (de) |
WO (1) | WO2003060502A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10345143B4 (de) * | 2003-09-29 | 2006-08-24 | Robert Bosch Gmbh | Sensorelement |
DE102005018438A1 (de) * | 2005-04-21 | 2006-10-26 | Robert Bosch Gmbh | Beheizter amperometrischer Sensor sowie Verfahren zu seinem Betrieb |
JP4659889B2 (ja) * | 2008-04-02 | 2011-03-30 | 日本特殊陶業株式会社 | ガスセンサ |
DE102008043932A1 (de) * | 2008-11-20 | 2010-05-27 | Robert Bosch Gmbh | Sensorelement mit Trägerelement |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4839019A (en) * | 1986-11-20 | 1989-06-13 | Fuji Electric Co., Ltd. | Oxygen sensor |
JP2535372B2 (ja) * | 1988-03-09 | 1996-09-18 | 日本碍子株式会社 | セラミック・ヒ―タ及び電気化学的素子並びに酸素分析装置 |
JP3110974B2 (ja) | 1995-05-16 | 2000-11-20 | 日本特殊陶業株式会社 | メタライズ発熱層を有するアルミナ質セラミックヒータ |
JPH1123516A (ja) | 1997-06-30 | 1999-01-29 | Denso Corp | セラミックヒータ |
DE19833453C2 (de) | 1998-07-24 | 2000-06-15 | Siemens Ag | Vorrichtung und Betriebsverfahren an/in geheizten Gassensoren zur Minimierung von Leckstrom-Einflüssen |
JP3835022B2 (ja) | 1998-11-04 | 2006-10-18 | 株式会社デンソー | ガスセンサ素子 |
DE19857468A1 (de) * | 1998-12-14 | 2000-06-15 | Bosch Gmbh Robert | Elektrochemischer Meßfühler für die Bestimmung von Gaskonzentrationen in Gasen |
EP1234172A2 (de) * | 1999-10-20 | 2002-08-28 | Delphi Technologies, Inc. | Methode und verfahren zum pumpen von sauerstoff in einem gassensor |
JP2001183334A (ja) | 1999-12-27 | 2001-07-06 | Ngk Spark Plug Co Ltd | ヒータ付きガスセンサ素子の絶縁検査方法 |
DE10115872A1 (de) * | 2001-03-30 | 2002-10-17 | Bosch Gmbh Robert | Gassensor |
-
2002
- 2002-01-03 DE DE10200052A patent/DE10200052A1/de not_active Ceased
- 2002-10-22 WO PCT/DE2002/003975 patent/WO2003060502A1/de active Application Filing
- 2002-10-22 JP JP2003560548A patent/JP2005515437A/ja active Pending
- 2002-10-22 US US10/500,661 patent/US7628900B2/en not_active Expired - Fee Related
- 2002-10-22 EP EP02806306A patent/EP1463933A1/de not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
See references of WO03060502A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2005515437A (ja) | 2005-05-26 |
US7628900B2 (en) | 2009-12-08 |
US20050161324A1 (en) | 2005-07-28 |
WO2003060502A1 (de) | 2003-07-24 |
DE10200052A1 (de) | 2003-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20040803 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: SPRINGHORN, CARSTEN Inventor name: KANTERS, JOHANNES Inventor name: DIEHL, LOTHAR |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: KANTERS, JOHANNES Inventor name: SPRINGHORN, CARSTEN Inventor name: DIEHL, LOTHAR |
|
17Q | First examination report despatched |
Effective date: 20090213 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20110503 |