EP1444495A1 - Detecteur de fuite de gaz traceur - Google Patents

Detecteur de fuite de gaz traceur

Info

Publication number
EP1444495A1
EP1444495A1 EP02787638A EP02787638A EP1444495A1 EP 1444495 A1 EP1444495 A1 EP 1444495A1 EP 02787638 A EP02787638 A EP 02787638A EP 02787638 A EP02787638 A EP 02787638A EP 1444495 A1 EP1444495 A1 EP 1444495A1
Authority
EP
European Patent Office
Prior art keywords
inlet
vacuum pump
test gas
valve
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02787638A
Other languages
German (de)
English (en)
Inventor
Werner Grosse-Bley
Thomas Boehm
Ralf Hirche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of EP1444495A1 publication Critical patent/EP1444495A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Definitions

  • the invention relates to a test gas leak detector with the features of the preamble of claim 1.
  • Leak detectors of this type are also referred to as countercurrent leak detectors, since the test gas which reaches the test gas detector via the intermediate entry into the high vacuum pump system (one or more high vacuum pump stage (s), preferably friction pump stages), flows against the conveying direction of the pump system.
  • the leak detection is carried out in such a way that the inlet of the device is connected, for example, to a test object which is sprayed with test gas from the outside. In the event of a leak, test gas penetrates the test object and is detected using the test gas detector.
  • a test chamber can also be connected to the inlet of the leak detector in which there are one or more test specimens containing test gas.
  • test gas enters the test chamber and is detected with the help of the test gas detector.
  • the vacuum leak detection described can be qualitative or quantitative be carried out. Helium has proven itself as a test gas.
  • a leak detector of the type concerned here is known from US 4,472,962.
  • a test chamber is connected to its inlet.
  • the test chamber is evacuated via the norvacuum pump, which is required for the operation of the high vacuum pump system designed as a turbomolecular vacuum pump.
  • gas to be examined for the presence of a test gas is fed to an intermediate inlet on the turbomolecular pump.
  • the present invention has for its object to improve the leak detection device according to the prior art in terms of speed and sensitivity of the leak detection.
  • this object is achieved by the characterizing features of the claims.
  • boost pump high-vacuum pump
  • the detection sensitivity remains high, since it is only determined by the high vacuum pump system and the design of its counterflow stages.
  • the evacuation time becomes short, which lent through a rel. high switching pressure on the booster pump is reached.
  • the figure shows schematically the components of the leak detector 1, the inlet of which is designated 2.
  • Two line sections 3 and 4 connect to the inlet.
  • Line section 3 is equipped with a valve 5 and is connected via the line section 6 to the inlet 7 of the fore-vacuum pump 8.
  • the line 4 there are a valve 9 and a high vacuum pump 11 (booster pump), the outlet 12 of which is connected to an intermediate inlet 14 on a second high vacuum pump 15 via a continuously open line section 13.
  • the outlet 12 of the high vacuum pump 11 is also connected via the line sections 16 - with valve 17 - and 6 to the inlet 7 of the fore vacuum pump 8.
  • the high-vacuum pump 15 is the leak detection pump through which the test gas flows, at least in sections, against its conveying direction.
  • the test gas detector 22 is connected to its inlet 21 — preferably a mass spectrometer when helium is used as the test gas. Its outlet 23 is connected via the line section 24 to the inlet 7 of the forevacuum pump 8. In the line section 24 there is a throttle 25 and a valve 26, in the direction of flow, which can also be designed as a component (eg valve with a small nominal width).
  • Two pressure measuring devices 27 and 28 provide information about the inlet pressure (device 27) and the pressure at the intermediate inlet 14 (device 28).
  • the leak detection mode is controlled using the pressure signals supplied.
  • a controller and associated lines are not shown.
  • valve 26 can be opened after a short time (inlet pressure a few mbar, depending on the properties of the pump 15). If the test specimen has a gross leak, test gas passes through valve 26, throttle 25 and high vacuum pump 15 (in countercurrent) to detector 22 and is registered.
  • valve 5 is closed and valves 9 and 17 are closed. be opened.
  • This step can be done at the point in time when the inlet pressure has approximately the value that is necessary at the intermediate inlet (14) in order to just maintain the working pressure in the test gas detector (mass spectrometer).
  • the pumping speed of the booster pump 11 is small, so it does not cause a harmful pressure increase at the intermediate inlet.
  • the pumping speed of the fore-vacuum pump 8 is even greater than the pumping speed of the booster pump 11. If the test object has minor leaks, these are recognized (fine leak detection).
  • the test object With increasing pressure decrease at the inlet 2, the pumping speed of the booster pump 11 increases, the test object is evacuated relatively quickly to low pressures. If, for example, the inlet pressure has reached a value of 10 "2 mbar, the highly sensitive leak detection begins by closing the valve 17. A test gas escaping from a test gas that may still be present and very small leaks completely into the intermediate inlet 14 and is measured by the mass spectrometer 22 registered.
  • Oil-sealed or dry (oil-free) pumps can be used as the backing pump 8, expediently with a pumping speed> 16 m 3 h (ie, relatively "large” pumps) because of the relatively large volumes of the test specimen or test chamber.
  • the throttle 25 causes the sensitivity for the leak detection, determined by K ⁇ .
  • the booster turbomolecular pump 11 should be selected such that it already has a significant pumping speed even at high inlet pressure. It applies to the leak detection pump 15 that it has a relatively high compression in the lower region in order to isolate the unstable forevacuum pump.
  • An embodiment according to the figure can be implemented particularly advantageously with a speed-controlled turbopump 11 at the inlet 2 of the leak detector 1. While in the solution with an unregulated pump speed the line 16 with the valve 17 is required in order to first discharge the increased gas flow in the so-called “cross-over" (transition to fine leak detection, opening of the valve 9) into the backing pump 8, line 16 and valve 17 can also be saved if the speed of the booster TMP 11 each. is regulated so that the maximum permissible gas flow is not exceeded. This means that the condition that the pumping speed of the pump 11 is not exceeded at the beginning of the "cross-over" is achieved by speed control.
  • the booster pump 11 runs at a low "standby" speed as long as the inlet valve 9 is closed. As soon as the inlet pressure has fallen below the casual value for the valve-less intermediate inlet 14 of the counterflow pump, valve 5 is closed and valve 9 is opened. At this moment, the effective pumping speed of the booster pump 11 must be approximately equal to the previous pumping speed. be pump 8 so that there is no pressure increase in the fore vacuum.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

L'invention concerne un détecteur de fuite de gaz traceur (1), qui comprend un orifice d'entrée (2) pour des gaz à analyser quant à la présence de gaz traceur, un détecteur de gaz traceur (22), un système de pompe à vide poussé (15) raccordé au détecteur de gaz traceur, une entrée intermédiaire (14) sur le système de pompe à vide poussé (15) servant à amener les gaz à analyser quant à la présence de gaz traceur, une pompe de prévidage (8) raccordée au système de pompe à vide poussé (15), ainsi qu'un segment de conduite (3, 6) situé entre l'orifice d'entrée (2) et la pompe de prévidage (8) et équipé d'une soupape (5). L'invention vise à rendre un détecteur de fuite de ce type plus rapide et plus sensible. A cet effet, on place, entre l'orifice d'entrée (2) et l'entrée intermédiaire (14), une autre pompe à vide poussé (11) dont la sortie (12) est raccordée à l'entrée (7) de la pompe de prévidage (8) par l'intermédiaire d'un segment de conduite équipé d'une soupape (17).
EP02787638A 2001-11-15 2002-11-12 Detecteur de fuite de gaz traceur Withdrawn EP1444495A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10156205A DE10156205A1 (de) 2001-11-15 2001-11-15 Testgaslecksuchgerät
DE10156205 2001-11-15
PCT/EP2002/012601 WO2003042651A1 (fr) 2001-11-15 2002-11-12 Detecteur de fuite de gaz traceur

Publications (1)

Publication Number Publication Date
EP1444495A1 true EP1444495A1 (fr) 2004-08-11

Family

ID=7705902

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02787638A Withdrawn EP1444495A1 (fr) 2001-11-15 2002-11-12 Detecteur de fuite de gaz traceur

Country Status (5)

Country Link
US (1) US7082813B2 (fr)
EP (1) EP1444495A1 (fr)
JP (1) JP4164030B2 (fr)
DE (1) DE10156205A1 (fr)
WO (1) WO2003042651A1 (fr)

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DE10156205A1 (de) * 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
WO2005031169A1 (fr) * 2003-09-26 2005-04-07 The Boc Group Plc Detection de contaminants dans un fluide pompe par une pompe a vide
US20070240493A1 (en) * 2006-04-18 2007-10-18 Shane Conlan Sprayer-sniffer probe
DE102006034735A1 (de) * 2006-07-27 2008-01-31 Inficon Gmbh Lecksuchgerät
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
US8230722B1 (en) 2010-03-16 2012-07-31 Sandia Corporation Residual gas analysis device
DE102011107334B4 (de) * 2011-07-14 2023-03-16 Leybold Gmbh Lecksucheinrichtung sowie Verfahren zum Überprüfen von Gegenständen auf Dichtigkeit mittels einer Lecksucheinrichtung
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102014223841A1 (de) * 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
DE102016210701A1 (de) * 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
CN107327324B (zh) * 2017-07-25 2023-03-14 航天推进技术研究院 一种设置有泄漏检测装置的orc发电机组的泄漏检测方法
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
KR102016944B1 (ko) * 2018-04-24 2019-09-03 한국에너지기술연구원 고압반응기의 기체 누설량 측정장치 및 측정방법

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Also Published As

Publication number Publication date
WO2003042651A1 (fr) 2003-05-22
JP4164030B2 (ja) 2008-10-08
DE10156205A1 (de) 2003-06-05
JP2006515666A (ja) 2006-06-01
US7082813B2 (en) 2006-08-01
US20050066708A1 (en) 2005-03-31

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Inventor name: GROSSE-BLEY, WERNER

Inventor name: BOEHM, THOMAS

Inventor name: HIRCHE, RALF

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