EP1433518A1 - Verfahren zum Entfernen schädlicher organischer Verbindungen aus einem Gas - Google Patents

Verfahren zum Entfernen schädlicher organischer Verbindungen aus einem Gas

Info

Publication number
EP1433518A1
EP1433518A1 EP03027222.3A EP03027222A EP1433518A1 EP 1433518 A1 EP1433518 A1 EP 1433518A1 EP 03027222 A EP03027222 A EP 03027222A EP 1433518 A1 EP1433518 A1 EP 1433518A1
Authority
EP
European Patent Office
Prior art keywords
gas
organometallic compounds
removing harmful
harmful
organometallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03027222.3A
Other languages
English (en)
French (fr)
Other versions
EP1452220A1 (de
Inventor
Kenji Otsuka
Takashi Kasaya
Toshio Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002376411A external-priority patent/JP4048108B2/ja
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Publication of EP1433518A1 publication Critical patent/EP1433518A1/de
Publication of EP1452220A1 publication Critical patent/EP1452220A1/de
Withdrawn legal-status Critical Current

Links

EP03027222A 2002-12-26 2003-11-28 Verfahren zum Entfernen schädlicher metallorganischer Verbindungen aus einem Gas Withdrawn EP1452220A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002376411A JP4048108B2 (ja) 2002-12-26 2002-12-26 有害ガスの浄化方法
JP2002376411 2002-12-26

Publications (2)

Publication Number Publication Date
EP1433518A1 true EP1433518A1 (de) 2004-06-30
EP1452220A1 EP1452220A1 (de) 2004-09-01

Family

ID=32463567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03027222A Withdrawn EP1452220A1 (de) 2002-12-26 2003-11-28 Verfahren zum Entfernen schädlicher metallorganischer Verbindungen aus einem Gas

Country Status (5)

Country Link
US (1) US20040129138A1 (de)
EP (1) EP1452220A1 (de)
JP (1) JP4048108B2 (de)
CN (1) CN1511616A (de)
TW (1) TW200413084A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5696348B2 (ja) 2008-08-09 2015-04-08 東京エレクトロン株式会社 金属回収方法、金属回収装置、排気系及びこれを用いた成膜装置
JP2014214060A (ja) * 2013-04-26 2014-11-17 日本パイオニクス株式会社 水素の回収方法及びそれを用いた水素の再利用方法
JP2015000842A (ja) * 2013-06-18 2015-01-05 日本パイオニクス株式会社 アンモニアの回収方法及びそれを用いたアンモニアの再利用方法
US20140322124A1 (en) * 2013-04-26 2014-10-30 Japan Pionics Co., Ltd. Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor
CN106345289A (zh) * 2016-08-28 2017-01-25 桂林市晶准测控技术有限公司 有害气体净化剂及其制备方法
US11173451B1 (en) * 2020-10-29 2021-11-16 Air Products And Chemicals, Inc. Removal of hydrogen impurity from gas streams

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
DE3869480D1 (de) * 1987-06-01 1992-04-30 Japan Pionics Verfahren zum reinigen von abgas.
DE69431615T2 (de) * 1993-03-17 2003-07-03 Nippon Oxygen Co Ltd Methoden zur entfernung und zum nachweisen einer schädlichen komponente in einem gas
US5853678A (en) * 1993-03-17 1998-12-29 Nipon Sanso Corporation Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
JP3340510B2 (ja) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 有害ガスの浄化方法
JP3347478B2 (ja) * 1994-06-13 2002-11-20 日本パイオニクス株式会社 排ガスの浄化方法
JP2998002B2 (ja) * 1996-01-11 2000-01-11 日本酸素株式会社 有機金属化合物の除害剤及び有害ガスの除害方法
GB9614848D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scrubbing of noxious substances
SG111909A1 (en) * 1999-01-21 2005-06-29 Mitsui Chemicals Inc Agent for and process of treating exhaust gas
US6447576B1 (en) * 1999-10-29 2002-09-10 Japan Pionics Co., Ltd. Cleaning agent and cleaning process of harmful gas
JP2001219033A (ja) * 1999-11-30 2001-08-14 Japan Pionics Co Ltd 有害ガスの浄化方法及び浄化装置
TW510820B (en) * 1999-11-30 2002-11-21 Japan Pionics Method of cleaning of harmful gas and cleaning apparatus
US6805728B2 (en) * 2002-12-09 2004-10-19 Advanced Technology Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

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