EP1362670B8 - Method and apparatus for chemical mechanical polishing - Google Patents

Method and apparatus for chemical mechanical polishing Download PDF

Info

Publication number
EP1362670B8
EP1362670B8 EP03011243A EP03011243A EP1362670B8 EP 1362670 B8 EP1362670 B8 EP 1362670B8 EP 03011243 A EP03011243 A EP 03011243A EP 03011243 A EP03011243 A EP 03011243A EP 1362670 B8 EP1362670 B8 EP 1362670B8
Authority
EP
European Patent Office
Prior art keywords
mechanical polishing
chemical mechanical
polishing
chemical
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP03011243A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1362670A2 (en
EP1362670B1 (en
EP1362670A3 (en
Inventor
Toshiro Doi
Takashi Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Publication of EP1362670A2 publication Critical patent/EP1362670A2/en
Publication of EP1362670A3 publication Critical patent/EP1362670A3/en
Application granted granted Critical
Publication of EP1362670B1 publication Critical patent/EP1362670B1/en
Publication of EP1362670B8 publication Critical patent/EP1362670B8/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/046—Lapping machines or devices; Accessories designed for working plane surfaces using electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
EP03011243A 2002-05-17 2003-05-16 Method and apparatus for chemical mechanical polishing Expired - Fee Related EP1362670B8 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002142632 2002-05-17
JP2002142632A JP2003332274A (ja) 2002-05-17 2002-05-17 化学的機械研磨方法及び化学的機械研磨装置

Publications (4)

Publication Number Publication Date
EP1362670A2 EP1362670A2 (en) 2003-11-19
EP1362670A3 EP1362670A3 (en) 2005-03-02
EP1362670B1 EP1362670B1 (en) 2008-07-16
EP1362670B8 true EP1362670B8 (en) 2009-11-04

Family

ID=29267831

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03011243A Expired - Fee Related EP1362670B8 (en) 2002-05-17 2003-05-16 Method and apparatus for chemical mechanical polishing

Country Status (6)

Country Link
US (2) US6969308B2 (ja)
EP (1) EP1362670B8 (ja)
JP (1) JP2003332274A (ja)
KR (1) KR20030089508A (ja)
DE (1) DE60322144D1 (ja)
TW (1) TWI258815B (ja)

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EP1594653A4 (en) * 2003-01-27 2007-07-25 Inc Inopla DEVICE AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS USING ONE OR MORE SWING LOADING AND UNLOADING SHEETS
US7421683B2 (en) * 2003-01-28 2008-09-02 Newmerix Corp£ Method for the use of information in an auxiliary data system in relation to automated testing of graphical user interface based applications
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JP2007118111A (ja) * 2005-10-26 2007-05-17 Incs Inc 物品加工装置および物品加工方法
JP2010519936A (ja) * 2007-03-05 2010-06-10 カリディアンビーシーティー、インコーポレーテッド 中空繊維バイオリアクター内における細胞の動きを制御する方法
US8309347B2 (en) * 2007-03-05 2012-11-13 Terumo Bct, Inc. Cell expansion system and methods of use
KR20100016187A (ko) * 2007-04-06 2010-02-12 카리디안비씨티, 인크. 개선된 생물반응기 표면
US8906688B2 (en) * 2007-04-13 2014-12-09 Terumo Bct, Inc. Cell expansion system and methods of use
US20110104997A1 (en) * 2009-11-03 2011-05-05 Jeong In-Kwon Apparatuses and methods for polishing and cleaning semiconductor wafers
WO2011140231A1 (en) 2010-05-05 2011-11-10 Caridianbct, Inc. Method of reseeding adherent cells grown in a hollow fiber bioreactor system
WO2012048275A2 (en) 2010-10-08 2012-04-12 Caridianbct, Inc. Configurable methods and systems of growing and harvesting cells in a hollow fiber bioreactor system
US9175259B2 (en) 2012-08-20 2015-11-03 Terumo Bct, Inc. Method of loading and distributing cells in a bioreactor of a cell expansion system
JP5927129B2 (ja) * 2013-01-31 2016-05-25 株式会社荏原製作所 研磨装置
US10513006B2 (en) * 2013-02-04 2019-12-24 Taiwan Semiconductor Manufacturing Co., Ltd. High throughput CMP platform
JP6633522B2 (ja) 2013-11-16 2020-01-22 テルモ ビーシーティー、インコーポレーテッド バイオリアクターにおける細胞増殖
WO2015148704A1 (en) 2014-03-25 2015-10-01 Terumo Bct, Inc. Passive replacement of media
US10077421B2 (en) 2014-04-24 2018-09-18 Terumo Bct, Inc. Measuring flow rate
JP6830059B2 (ja) 2014-09-26 2021-02-17 テルモ ビーシーティー、インコーポレーテッド スケジュール化された細胞フィーディング
KR101913702B1 (ko) * 2015-03-27 2018-11-01 주식회사 케이씨텍 화학 기계적 연마 장치
WO2017004592A1 (en) 2015-07-02 2017-01-05 Terumo Bct, Inc. Cell growth with mechanical stimuli
CN105483815B (zh) * 2015-12-18 2018-02-23 上海集成电路研发中心有限公司 一种电化学抛光装置及使用该装置的电化学抛光方法
WO2017205667A1 (en) 2016-05-25 2017-11-30 Terumo Bct, Inc. Cell expansion
US11104874B2 (en) 2016-06-07 2021-08-31 Terumo Bct, Inc. Coating a bioreactor
US11685883B2 (en) 2016-06-07 2023-06-27 Terumo Bct, Inc. Methods and systems for coating a cell growth surface
US11629332B2 (en) 2017-03-31 2023-04-18 Terumo Bct, Inc. Cell expansion
US11624046B2 (en) 2017-03-31 2023-04-11 Terumo Bct, Inc. Cell expansion
US10879077B2 (en) * 2017-10-30 2020-12-29 Taiwan Semiconductor Manufacturing Company Ltd. Planarization apparatus and planarization method thereof
CN109732472A (zh) * 2017-10-31 2019-05-10 上海新昇半导体科技有限公司 抛光设备及方法
CN112959010B (zh) * 2021-02-18 2022-07-15 宁波江丰电子材料股份有限公司 一种靶材与铜背板的装配方法
EP4364890A1 (en) * 2022-11-03 2024-05-08 Hangzhou Sizone Electronic Technology Inc. Electrochemical mechanical polishing and planarization equipment for processing conductive wafer substrate

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JPS62136317A (ja) 1985-12-06 1987-06-19 Inoue Japax Res Inc 電解研削加工方法
US5160590A (en) * 1989-09-06 1992-11-03 Kawasaki Steel Corp. Electrolytic processing method for electrolytically processing metal surface
JPH10199832A (ja) * 1997-01-13 1998-07-31 Disco Abrasive Syst Ltd ウェーハの研削方法
US5911619A (en) * 1997-03-26 1999-06-15 International Business Machines Corporation Apparatus for electrochemical mechanical planarization
JPH1158205A (ja) * 1997-08-25 1999-03-02 Unique Technol Internatl Pte Ltd 電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ
US6171467B1 (en) * 1997-11-25 2001-01-09 The John Hopkins University Electrochemical-control of abrasive polishing and machining rates
JPH11307481A (ja) * 1998-04-24 1999-11-05 Sony Corp 電解めっき装置および電解めっき方法
JP2000058521A (ja) * 1998-08-08 2000-02-25 Tokyo Electron Ltd プラズマ研磨装置
JP2000306874A (ja) * 1999-04-23 2000-11-02 Sony Corp 研磨装置および研磨方法
JP4513145B2 (ja) * 1999-09-07 2010-07-28 ソニー株式会社 半導体装置の製造方法および研磨方法
US6368190B1 (en) 2000-01-26 2002-04-09 Agere Systems Guardian Corp. Electrochemical mechanical planarization apparatus and method
US6478936B1 (en) * 2000-05-11 2002-11-12 Nutool Inc. Anode assembly for plating and planarizing a conductive layer
KR100470137B1 (ko) 2000-08-23 2005-02-04 주식회사 에프에스티 냉각 패드를 구비하는 연마 장치 및 이를 이용한 연마 방법
US6580053B1 (en) * 2000-08-31 2003-06-17 Sharp Laboratories Of America, Inc. Apparatus to control the amount of oxygen incorporated into polycrystalline silicon film during excimer laser processing of silicon films
JP4644926B2 (ja) * 2000-10-13 2011-03-09 ソニー株式会社 半導体製造装置および半導体装置の製造方法
JP2004515918A (ja) * 2000-12-04 2004-05-27 株式会社荏原製作所 基板処理装置及びその方法
JP2002254248A (ja) * 2001-02-28 2002-09-10 Sony Corp 電解加工装置
US6855037B2 (en) * 2001-03-12 2005-02-15 Asm-Nutool, Inc. Method of sealing wafer backside for full-face electrochemical plating
DE10229000A1 (de) * 2002-06-28 2004-01-29 Advanced Micro Devices, Inc., Sunnyvale Vorrichtung und Verfahren zum Reduzieren der Oxidation von polierten Metalloberflächen in einem chemisch-mechanischen Poliervorgang
DE10228998B4 (de) * 2002-06-28 2004-05-13 Advanced Micro Devices, Inc., Sunnyvale Vorrichtung und Verfahren zum elektrochemischen Behandeln eines Substrats bei reduzierter Metallkorrosion
US6858531B1 (en) * 2002-07-12 2005-02-22 Lsi Logic Corporation Electro chemical mechanical polishing method
US7189146B2 (en) * 2003-03-27 2007-03-13 Asm Nutool, Inc. Method for reduction of defects in wet processed layers

Also Published As

Publication number Publication date
EP1362670A2 (en) 2003-11-19
KR20030089508A (ko) 2003-11-21
TWI258815B (en) 2006-07-21
US6969308B2 (en) 2005-11-29
US7785175B2 (en) 2010-08-31
DE60322144D1 (de) 2008-08-28
JP2003332274A (ja) 2003-11-21
EP1362670B1 (en) 2008-07-16
US20050205433A1 (en) 2005-09-22
EP1362670A3 (en) 2005-03-02
US20040009738A1 (en) 2004-01-15
TW200308010A (en) 2003-12-16

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