EP1301712A2 - Monobloc housing for vacuum pump - Google Patents

Monobloc housing for vacuum pump

Info

Publication number
EP1301712A2
EP1301712A2 EP01958136A EP01958136A EP1301712A2 EP 1301712 A2 EP1301712 A2 EP 1301712A2 EP 01958136 A EP01958136 A EP 01958136A EP 01958136 A EP01958136 A EP 01958136A EP 1301712 A2 EP1301712 A2 EP 1301712A2
Authority
EP
European Patent Office
Prior art keywords
motor
pump
stator
pumping unit
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01958136A
Other languages
German (de)
French (fr)
Other versions
EP1301712B1 (en
Inventor
Jean-Luc Rival
Albert Cacard
François HOUZE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1301712A2 publication Critical patent/EP1301712A2/en
Application granted granted Critical
Publication of EP1301712B1 publication Critical patent/EP1301712B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies

Definitions

  • the invention relates more particularly to pumping units with vacuum pumps with double rotor, comprising a pump stator with at least one axial internal cavity in which are housed two parallel pump rotors rotatably mounted on corresponding bearings and coupled according to their first end by gears enclosed in an oil pan.
  • the first end of one of the rotors is extended by a coaxial motor shaft engaged in the rotor of a motor driving the vacuum pump.
  • the motor includes a stator having a stator winding and is enclosed in a crankcase following the oil pan of the gears.
  • Known structures of vacuum pumping units are described in EP 0 733 804, US 5,904,473, US 2,940,661, JP 60,259,791.
  • the waterproof jacket 9 has a cylindrical intermediate portion 90 which is engaged in the air gap between the motor stator 4 and the motor rotor 3, and which is connected on the one hand to the base 10 of the jacket and to a top 91.
  • a first drawback of such a known structure is its complexity, by the fact that it is necessary to assemble and provide several parts, comprising the waterproof jacket 9, and the two-part motor housing 51 and 52. This increases the cost of producing the vacuum pump.
  • a second drawback is that the presence of the cylindrical intermediate portion 90 of a sealed jacket 9 engaged in the air gap between the motor stator 4 and the motor rotor 3 requires keeping an air gap of relatively large thickness, which increases consumption electrical energy required to drive the vacuum pump 100.
  • Another disadvantage is that the presence of the waterproof jacket 9 leads to increasing the length of the motor, by moving the motor stator 4 and the motor rotor 3 away from the vacuum pump 100, increasing the carrier. engine shaft scythe; this increases the vibrations of the engine, and the noise generated by the vacuum pump 100 - engine block 200 assembly, and requires the presence of the additional bearing 15a between the gears 8 and the engine rotor 3.
  • Another disadvantage is also that the waterproof jacket, made of metal, is subjected to an alternating magnetic field in the air gap of the engine. This results in induction currents in the material forming the waterproof jacket, energy losses and additional heating of the motor. These losses increase with the frequency of the magnetic field, and become prohibitive in a four-pole motor powered at double frequency.
  • JP 07 317673 a screw pump for various fluids.
  • the drive motor is arranged in an intermediate zone of one of the rotor shafts, between the coupling gears of the shafts and the pump rotors.
  • the motor housing is separate from the housing of the coupling gears. The structure is neither intended nor adapted to solve the specific sealing problems of vacuum pumps.
  • the invention aims to eliminate the waterproof jacket 9, replacing it with other means to effectively ensure the seal opposing the migration of the oil and gases through the engine to the atmosphere.
  • a double-rotor vacuum pump pumping unit comprises a pump stator with at least one axial internal cavity in which are housed two parallel pump rotors rotatably mounted on corresponding bearings and coupled at their first end by a set of gears enclosed in an oil sump, the first end of one of the pump rotors being extended by a coaxial motor shaft engaged in the rotor of an engine block d driving the vacuum pump, the engine block having a stator winding and being enclosed in a motor housing following the oil sump;
  • stator winding of the engine block is embedded in a waterproof resin ensuring a seal preventing the exit of oil and gas to the outside along the supply conductors.
  • the one-piece common casing has an intermediate wall between a first compartment containing the motor and a second compartment containing the set of gears, with a passage for the motor shaft and with a dynamic seal to ensure the sealing around the motor shaft between the first compartment and the second compartment.
  • the one-piece common casing may advantageously include an axial end opening closed in leaktight manner by a shutter hatch.
  • a further reduction in vibrations is obtained by providing that the one-piece common casing is connected to the first end of the pump stator by means of a bearing support comprising a first bearing for guiding the motor shaft disposed closest to the engine. This reduces the overhang of one motor shaft.
  • the reduction in length and overhang is further favored by the fact that the impregnation of the motor stator in the waterproof resin allows it to be brought closer to its casing, because the isolation distances can be reduced thanks to the dielectric quality of the waterproof resin.
  • - Figure 2 is a longitudinal sectional view of an engine block structure according to an embodiment of the present invention
  • - Figure 3 is a schematic view in longitudinal section showing a vacuum pumping group according to another embodiment of the present invention.
  • FIGS. 2 to 4 is a perspective view of the motor housing and the gear housing according to an embodiment of the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • a vacuum pumping group according to the invention as illustrated in FIGS. 2 to 4 comprises a vacuum pump 100 with double rotor driven by a motor unit 200 supplied with electrical energy by a line supply 12.
  • the vacuum pump 100 comprises a pump stator 1 having at least one axial internal cavity 13 in which are housed two parallel pump rotors rotatably mounted on corresponding bearings.
  • a pump stator 1 having at least one axial internal cavity 13 in which are housed two parallel pump rotors rotatably mounted on corresponding bearings.
  • only one of the pump rotors 14 is shown, held in the pump stator 1 at its first end by a first bearing 15 and held at its second end by a second bearing 16.
  • the two pump rotors such as the pump rotor 14 are coupled at their first end by a set of gears 17 enclosed in an oil sump 18.
  • the first end of the pump rotor 14 is extended by the coaxial motor shaft 2 penetrating into the motor casing 5.
  • the motor shaft 2 is engaged in the motor rotor 3, itself mounted in rotation in the motor stator 4 contained in the motor housing 5.
  • the motor stator 4 comprises a stator winding 11 (FIG. 2).
  • the one-piece common casing comprises, between the engine casing part 5 and the oil pan part 18, an intermediate wall 23, separating the first compartment 24 containing the engine 3, 4 and the second compartment 25 containing the set of gears 17, with an axial passage for the motor shaft and with a dynamic seal 6 to ensure as much as possible a seal around the motor shaft 2 between the first compartment 24 and the second compartment 25.
  • the one-piece common casing 5, 18 is connected to the first end of the pump stator 1 by means of a bearing support 26 comprising the first bearing 15 for guiding the motor shaft 2.
  • the first bearing 15 is placed as close as possible to the motor unit 200, in order to reduce the overhang of the motor shaft 2.
  • the motor housing 5 comprises a pipe
  • the length of the motor stator, and the carrier -the resulting false can be further reduced, for an identical motor torque, by using a 3, 4 pole motor powered at double frequency 2F (in practice 200 Hz for example), instead of a motor with two poles supplied at a single frequency F (in practice 100 Hz for example). Thanks to the absence of a waterproof jacket in the air gap, the use of a four-pole motor powered at double frequency 2F is possible without creating excessive losses of performance. This was not possible with known structures with a tight jacket, since the 2F double frequency operation created excessively large losses in efficiency.

Abstract

The invention concerns a pumping unit wherein the vacuum pump (100) is driven by a motor (3, 4) comprised in a common monobloc housing forming motor housing (5) and oil pan (18) containing a gear assembly (17) for coupling two parallel pump rotors (14). To complement the sealing conditions provided by a dynamic seal (6), the motor stator (4) consists of an electric coil embedded in an oil-tight and gas-tight resin, thereby not requiring other more expensive and bulky sealing means, reducing production cost and enhancing the pumping unit dependability.

Description

CARTER MONOBLOC POUR POMPE A VIDE MONOBLOCK HOUSING FOR VACUUM PUMP
DOMAINE TECHNIQUE DE L'INVENTIONTECHNICAL FIELD OF THE INVENTION
La présente invention concerne les groupes de pompage à pompes à vide sèches destinées à la réalisation d'un vide poussé, pour une utilisation notamment dans l'industrie du semi-conducteur pour abaisser la pression dans les chambres de procédé à partir deThe present invention relates to pumping units with dry vacuum pumps intended for producing a high vacuum, for use in particular in the semiconductor industry for lowering the pressure in the process chambers from
1 ' atmosphère .1 atmosphere.
L'invention concerne plus spécialement les groupes de pompage à pompes à vide à double rotor, comprenant un stator de pompe avec au moins une cavité intérieure axiale dans laquelle sont logés deux rotors de pompe parallèles montés rotatifs sur des paliers correspondants et couplés selon leur première extrémité par des engrenages enfermés dans un carter d'huile. La première extrémité de l'un des rotors est prolongée par un arbre moteur coaxial engagé dans le rotor d'un moteur d'entraînement de la pompe à vide . Le moteur comprend un stator ayant un bobinage de stator et est enfermé dans un carter moteur faisant suite au carter d'huile des engrenages. Des structures connues de groupes de pompage à vide sont décrites dans EP 0 733 804, US 5 904 473, US 2 940 661, JP 60 259791.The invention relates more particularly to pumping units with vacuum pumps with double rotor, comprising a pump stator with at least one axial internal cavity in which are housed two parallel pump rotors rotatably mounted on corresponding bearings and coupled according to their first end by gears enclosed in an oil pan. The first end of one of the rotors is extended by a coaxial motor shaft engaged in the rotor of a motor driving the vacuum pump. The motor includes a stator having a stator winding and is enclosed in a crankcase following the oil pan of the gears. Known structures of vacuum pumping units are described in EP 0 733 804, US 5,904,473, US 2,940,661, JP 60,259,791.
Dans les groupes de pompage à vide, l'une des difficultés est d'assurer une étanchéité satisfaisante dans le moteur d'entraînement de la pompe à vide, pour interdire la sortie d'huile et de gaz vers l'extérieur à travers le moteur, notamment le long des conducteurs d'alimentation du bobinage de stator du moteur. En effet, du fait de la vitesse de rotation très élevée de la pompe à vide, par exemple de l'ordre de 6 000 tours par minute, il est difficile d'assurer une étanchéité suffisante par les joints d'étanchéité dynamiques prévus autour de l'arbre moteur entre le moteur et l'engrenage. Il en résulte une tendance au passage d'huile vers l'extérieur à travers le moteur. Egalement, les pompes à vide utilisées dans les procédés industriels contiennent des gaz toxiques et polluants auxquels il faut absolument interdire le passage vers l'atmosphère environnante.In vacuum pumping groups, one of the difficulties is to ensure a satisfactory seal in the motor driving the vacuum pump, to prevent the outflow of oil and gas to the outside through the motor. , especially along the supply conductors of the stator winding of the motor. Indeed, because of the very high speed of rotation of the vacuum pump, for example of the order of 6000 revolutions per minute, it is difficult to ensure sufficient sealing by the dynamic seals provided around the motor shaft between the motor and the gear. This results in a tendency for oil to pass outward through the engine. Also, vacuum pumps used in industrial processes contain toxic and polluting gases which must absolutely be prevented from passing into the surrounding atmosphere.
Dans une pompe à vide connue, illustrée sur la figure 1, l'étanchéité est assurée par une chemise intermédiaire, étanche engagée entre le rotor et le stator du moteur. Sur la figure 1, on distingue une vue en coupe longitudinale montrant la première extrémité du stator 1 de la pompe à vide 100, avec un arbre moteur 2 prolongeant le rotor de pompe non représenté. L'arbre moteur 2 est engagé dans un bloc moteur 200 en étant solidarisé au rotor de moteur 3. Le rotor de moteur 3 est monté rotatif sur des paliers à 1 ' intérieur du stator de moteur 4 comportant un bobinage de stator 11 alimenté par des conducteurs électriques non représentés. L'ensemble stator de moteur 4 - rotor de moteur 3 est inséré dans un carter de moteur 5. Des joints d'étanchéité peuvent assurer 1 ' étanchéité autour de 1 ' arbre moteur 2 à 1 ' entrée du carter de moteur 5, pour isoler autant que possible l'atmosphère intérieure du carter de moteur 5 par rapport au compartiment amont 7 contenant un jeu d'engrenages 8 de couplage entre deux rotors parallèles de la pompe à vide 100. Le jeu d'engrenages 8 transmet le mouvement de rotation entre les deux rotors, l'un seulement des rotors étant couplé en ligne avec l'arbre moteur 2. Le compartiment amont 7 des engrenages 8 contient de l'huile de lubrification de l'engrenage. Pour assurer un guidage radial du rotor de moteur 3, et réduire les vibrations, un roulement supplémentaire 15a est placé entre les engrenages 8 et le rotor de moteur 3.In a known vacuum pump, illustrated in Figure 1, the seal is ensured by an intermediate jacket, sealed engaged between the rotor and the stator of the motor. In Figure 1, there is a longitudinal sectional view showing the first end of the stator 1 of the vacuum pump 100, with a drive shaft 2 extending the pump rotor not shown. The motor shaft 2 is engaged in an engine block 200 while being secured to the motor rotor 3. The motor rotor 3 is rotatably mounted on bearings inside the motor stator 4 comprising a stator winding 11 supplied by electrical conductors not shown. The motor stator 4 - motor rotor 3 assembly is inserted into a motor casing 5. Seals can provide sealing around the motor shaft 2 at the inlet of the motor housing 5, to isolate as much as possible the interior atmosphere of the motor housing 5 relative to the upstream compartment 7 containing a set of gears 8 for coupling between two parallel rotors of the vacuum pump 100. The set of gears 8 transmits the rotational movement between the two rotors, only one of the rotors being coupled in line with the motor shaft 2. The upstream compartment 7 of the gears 8 contains lubricating oil for the gear. To ensure radial guidance of the motor rotor 3, and to reduce vibrations, an additional bearing 15a is placed between the gears 8 and the motor rotor 3.
L'efficacité des joints d'étanchéité est insuffisante pour s'opposer suffisamment au passage de l'huile de lubrification des engrenages 8 et au passage des gaz toxiques provenant de la pompe à vide 100 jusqu'à l'atmosphère extérieure à travers le bloc moteur 200, et notamment le long des conducteurs d'alimentation du bobinage de stator 11 du moteur. Pour interdire la migration de l'huile et des gaz vers l'atmosphère extérieure à travers le bloc moteur 200, la structure connue illustrée sur la figure 1 comprend une chemise étanche 9, en forme de cloche coaxiale, dont la base 10 est encastrée de façon étanche selon tout son pourtour entre deux parties du carter de moteur 5, à savoir une partie principale 51 et une base de fixation 52. La chemise étanche 9 comporte une portion intermédiaire cylindrique 90 qui est engagée dans l'entrefer entre le stator de moteur 4 et le rotor de moteur 3, et qui est raccordée d'une part à la base 10 de chemise et à un sommet 91. Un premier inconvénient d'une telle structure connue est sa complexité, par le fait qu'il est nécessaire d'assembler et de prévoir plusieurs pièces, comprenant la chemise étanche 9, et le carter de moteur en deux parties 51 et 52. Cela augmente le coût de réalisation de la pompe à vide.The effectiveness of the seals is insufficient to oppose sufficiently the passage of the lubricating oil of the gears 8 and the passage of toxic gases coming from the vacuum pump 100 to the outside atmosphere through the block motor 200, and in particular along the supply conductors of the stator winding 11 of the motor. To prevent the migration of oil and gases to the outside atmosphere through the engine block 200, the known structure illustrated in FIG. 1 comprises a sealed jacket 9, in the form of a coaxial bell, the base 10 of which is embedded in sealingly along its entire periphery between two parts of the motor housing 5, namely a main part 51 and a fixing base 52. The waterproof jacket 9 has a cylindrical intermediate portion 90 which is engaged in the air gap between the motor stator 4 and the motor rotor 3, and which is connected on the one hand to the base 10 of the jacket and to a top 91. A first drawback of such a known structure is its complexity, by the fact that it is necessary to assemble and provide several parts, comprising the waterproof jacket 9, and the two-part motor housing 51 and 52. This increases the cost of producing the vacuum pump.
Un second inconvénient est que la présence de la portion intermédiaire cylindrique 90 de chemise étanche 9 engagée dans l'entrefer entre le stator de moteur 4 et le rotor de moteur 3 nécessite de garder un entrefer d'épaisseur relativement grande, ce qui augmente la consommation d'énergie électrique nécessaire pour l'entraînement de la pompe à vide 100.A second drawback is that the presence of the cylindrical intermediate portion 90 of a sealed jacket 9 engaged in the air gap between the motor stator 4 and the motor rotor 3 requires keeping an air gap of relatively large thickness, which increases consumption electrical energy required to drive the vacuum pump 100.
Un autre inconvénient est que la présence de la chemise étanche 9 conduit à augmenter la longueur du moteur, en éloignant le stator de moteur 4 et le rotor de moteur 3 à 1 ' écart de la pompe à vide 100, augmentant le porte-à-faux de l'arbre moteur ; cela augmente les vibrations du moteur, et le bruit généré par l'ensemble pompe à vide 100 - bloc moteur 200, et nécessite la présence du roulement supplémentaire 15a entre les engrenages 8 et le rotor de moteur 3. Un autre inconvénient est aussi que la chemise étanche, réalisée en métal, est soumise à un champ magnétique alternatif dans l'entrefer du moteur. Il en résulte des courants d'induction dans la matière formant la chemise étanche, des pertes d'énergie et un échauffement supplémentaire du moteur. Ces pertes augmentent avec la fréquence du champ magnétique, et deviennent prohibitives dans un moteur à quatre pôles alimenté à fréquence double .Another disadvantage is that the presence of the waterproof jacket 9 leads to increasing the length of the motor, by moving the motor stator 4 and the motor rotor 3 away from the vacuum pump 100, increasing the carrier. engine shaft scythe; this increases the vibrations of the engine, and the noise generated by the vacuum pump 100 - engine block 200 assembly, and requires the presence of the additional bearing 15a between the gears 8 and the engine rotor 3. Another disadvantage is also that the waterproof jacket, made of metal, is subjected to an alternating magnetic field in the air gap of the engine. This results in induction currents in the material forming the waterproof jacket, energy losses and additional heating of the motor. These losses increase with the frequency of the magnetic field, and become prohibitive in a four-pole motor powered at double frequency.
On connaît par ailleurs du JP 07 317673 une pompe à vis pour fluides divers. Le moteur d'entraînement est disposé selon une zone intermédiaire de l'un des arbres de rotor, entre les engrenages de couplage des arbres et les rotors de pompe. Le carter moteur est distinct du carter des engrenages de couplage. La structure n'est ni prévue ni adaptée pour résoudre les problèmes spécifiques d'étanchéité des pompes à vide.We also know from JP 07 317673 a screw pump for various fluids. The drive motor is arranged in an intermediate zone of one of the rotor shafts, between the coupling gears of the shafts and the pump rotors. The motor housing is separate from the housing of the coupling gears. The structure is neither intended nor adapted to solve the specific sealing problems of vacuum pumps.
On connaît aussi du US 6 002 185 un moteur destiné à être couplé à une vanne pour commander son ouverture . Le bobinage du moteur est noyé dans la masse constituant le carter du moteur, de façon à éviter des craquelures susceptibles de laisser former une humidité corrosive sur le stator du moteur.Also known from US 6,002,185 is a motor intended to be coupled to a valve for controlling its opening. The motor winding is embedded in the mass constituting the motor casing, in order to avoid cracks likely to allow corrosive humidity to form on the motor stator.
EXPOSE DE L'INVENTIONSTATEMENT OF THE INVENTION
La présente invention a notamment pour objet d'éviter les inconvénients des structures connues de pompes à vide, en proposant une nouvelle structure de groupe de pompage à pompe à vide à double rotor associée à un moteur dont l'étanchéité soit à la fois plus simple, moins onéreuse, et plus efficace.The object of the present invention is in particular to avoid the drawbacks of known structures of vacuum pumps, by proposing a new structure of pumping group with vacuum pump with double rotor associated with a motor whose sealing is both simpler. , less expensive, and more effective.
L'invention vise à supprimer la chemise étanche 9, en la remplaçant par d'autres moyens pour assurer efficacement 1 ' étanchéité s ' opposant à la migration de 1 ' huile et des gaz à travers le moteur vers l'atmosphère.The invention aims to eliminate the waterproof jacket 9, replacing it with other means to effectively ensure the seal opposing the migration of the oil and gases through the engine to the atmosphere.
Pour atteindre ces objets ainsi que d'autres, un groupe de pompage à pompe à vide à double rotor selon l'invention comprend un stator de pompe avec au moins une cavité intérieure axiale dans laquelle sont logés deux rotors de pompe parallèles montés rotatifs sur des paliers correspondants et couplés à leur première extrémité par un jeu d'engrenages enfermé dans un carter d'huile, la première extrémité de l'un des rotors de pompe étant prolongé par un arbre moteur coaxial engagé dans le rotor d'un bloc moteur d'entraînement de la pompe à vide, le bloc moteur ayant un bobinage de stator et étant enfermé dans un carter de moteur faisant suite au carter d'huile ; selon l'invention :To achieve these and other objects, a double-rotor vacuum pump pumping unit according to the invention comprises a pump stator with at least one axial internal cavity in which are housed two parallel pump rotors rotatably mounted on corresponding bearings and coupled at their first end by a set of gears enclosed in an oil sump, the first end of one of the pump rotors being extended by a coaxial motor shaft engaged in the rotor of an engine block d driving the vacuum pump, the engine block having a stator winding and being enclosed in a motor housing following the oil sump; according to the invention:
- le carter de moteur et le carter d'huile forment un carter commun monobloc raccordé à la première extrémité du stator de pompe de la pompe à vide,- the engine casing and the oil pan form a common monobloc casing connected to the first end of the pump stator of the vacuum pump,
- à 1 ' intérieur du carter commun monobloc le bobinage de stator du bloc moteur est noyé dans une résine étanche assurant une étanchéité interdisant la sortie d'huile et de gaz vers l'extérieur le long des conducteurs d'alimentation.- 1 inside the one-piece common housing the stator winding of the engine block is embedded in a waterproof resin ensuring a seal preventing the exit of oil and gas to the outside along the supply conductors.
On évite ainsi le recours à des moyens d'étanchéité plus encombrants et plus onéreux, de sorte que le coût de production est réduit et la fiabilité du groupe de pompage est améliorée.This avoids the use of more bulky and more expensive sealing means, so that the production cost is reduced and the reliability of the pumping unit is improved.
On évite également les pertes résultant des courants d'induction qui sont inévitablement générés dans la masse de matière constituant une chemise étanche engagée dans l'entrefer entre rotor et stator du moteur. Selon une réalisation avantageuse, le carter commun monobloc comporte une paroi intermédiaire entre un premier compartiment contenant le moteur et un second compartiment contenant le jeu d'engrenages, avec un passage pour l'arbre moteur et avec un joint d'étanchéité dynamique pour assurer l'étanchéité autour de 1 ' arbre moteur entre le premier compartiment et le second compartiment .Losses resulting from the induction currents which are inevitably generated in the mass of material constituting a sealed jacket engaged in the air gap between the rotor and the stator of the motor are also avoided. According to an advantageous embodiment, the one-piece common casing has an intermediate wall between a first compartment containing the motor and a second compartment containing the set of gears, with a passage for the motor shaft and with a dynamic seal to ensure the sealing around the motor shaft between the first compartment and the second compartment.
Pour la commodité de montage, le carter commun monobloc peut avantageusement comporter une ouverture axiale d'extrémité obturée de manière étanche par une trappe d'obturation.For mounting convenience, the one-piece common casing may advantageously include an axial end opening closed in leaktight manner by a shutter hatch.
Une réduction supplémentaire des vibrations est obtenue en prévoyant que le carter commun monobloc est raccordé à la première extrémité du stator de pompe par l'intermédiaire d'un support de roulement comprenant un premier palier de guidage de l'arbre moteur disposé au plus près du moteur. On réduit ainsi le porte-à-faux de 1 ' arbre moteur . La réduction de longueur et de porte-à-faux est encore favorisée par le fait que l'imprégnation du stator de moteur dans la résine étanche autorise à le rapprocher plus près de son carter, car les distances d'isolement peuvent être réduites grâce à la qualité diélectrique de la résine étanche.A further reduction in vibrations is obtained by providing that the one-piece common casing is connected to the first end of the pump stator by means of a bearing support comprising a first bearing for guiding the motor shaft disposed closest to the engine. This reduces the overhang of one motor shaft. The reduction in length and overhang is further favored by the fact that the impregnation of the motor stator in the waterproof resin allows it to be brought closer to its casing, because the isolation distances can be reduced thanks to the dielectric quality of the waterproof resin.
DESCRIPTION SOMMAIRE DES DESSINS D'autres objets, caractéristiques et avantages de la présente invention ressortiront de la description suivante de modes de réalisation particuliers, faite en relation avec les figures jointes, parmi lesquelles:SUMMARY DESCRIPTION OF THE DRAWINGS Other objects, characteristics and advantages of the present invention will emerge from the following description of particular embodiments, made in relation to the attached figures, among which:
- la figure 1 est une vue en coupe longitudinale d'un bloc moteur selon une structure connue ;- Figure 1 is a longitudinal sectional view of an engine block according to a known structure;
- la figure 2 est une vue en coupe longitudinale d'une structure de bloc moteur selon un mode de réalisation de la présente invention ; - la figure 3 est une vue schématique en coupe longitudinale montrant un groupe de pompage à vide selon un autre mode de réalisation de la présente invention ; et- Figure 2 is a longitudinal sectional view of an engine block structure according to an embodiment of the present invention; - Figure 3 is a schematic view in longitudinal section showing a vacuum pumping group according to another embodiment of the present invention; and
- la figure 4 est une vue en perspective du carter de moteur et du carter d'engrenage selon un mode de réalisation de la présente invention. DESCRIPTION DES MODES DE REALISATION PREFERES Un groupe de pompage à pompe à vide selon 1 ' invention tel qu'illustré sur les figures 2 à 4 comprend une pompe à vide 100 à double rotor entraînée par un bloc moteur 200 alimenté en énergie électrique par une ligne d'alimentation 12.- Figure 4 is a perspective view of the motor housing and the gear housing according to an embodiment of the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENTS A vacuum pumping group according to the invention as illustrated in FIGS. 2 to 4 comprises a vacuum pump 100 with double rotor driven by a motor unit 200 supplied with electrical energy by a line supply 12.
La pompe à vide 100 comprend un stator de pompe 1 ayant au moins une cavité intérieure 13 axiale dans laquelle sont logés deux rotors de pompe parallèles montés rotatifs sur des paliers correspondants. Sur les figures, on a représenté seulement l'un des rotors de pompe 14, tenu dans le stator de pompe 1 à sa première extrémité par un premier palier 15 et tenu à sa seconde extrémité par un second palier 16.The vacuum pump 100 comprises a pump stator 1 having at least one axial internal cavity 13 in which are housed two parallel pump rotors rotatably mounted on corresponding bearings. In the figures, only one of the pump rotors 14 is shown, held in the pump stator 1 at its first end by a first bearing 15 and held at its second end by a second bearing 16.
Les deux rotors de pompe tels que le rotor de pompe 14 sont couplés à leur première extrémité par un jeu d'engrenages 17 enfermé dans un carter d'huile 18.The two pump rotors such as the pump rotor 14 are coupled at their first end by a set of gears 17 enclosed in an oil sump 18.
La première extrémité du rotor de pompe 14 est prolongée par 1 ' arbre moteur 2 coaxial pénétrant dans le carter de moteur 5. L'arbre moteur 2 est engagé dans le rotor de moteur 3, lui-même monté en rotation dans le stator de moteur 4 contenu dans le carter de moteur 5. Le stator de moteur 4 comprend un bobinage de stator 11 (figure 2) .The first end of the pump rotor 14 is extended by the coaxial motor shaft 2 penetrating into the motor casing 5. The motor shaft 2 is engaged in the motor rotor 3, itself mounted in rotation in the motor stator 4 contained in the motor housing 5. The motor stator 4 comprises a stator winding 11 (FIG. 2).
Selon l'invention, le carter de moteur 5 et le carter d'huile 18 forment un carter commun monobloc, avantageusement réalisé en métal et solidarisé à la première extrémité du stator de pompe 1. A l'intérieur du carter commun monobloc, le bobinage de stator 11 du bloc moteur 200 est noyé dans une résine étanche 19 (figure 2), qui assure une étanchéité aux huiles et aux gaz, interdisant la sortie d'huile et de gaz vers l'extérieur le long des conducteurs de la ligne d'alimentation 12 du moteur. Dans la réalisation illustrée sur les figures 2 et 3, le carter commun monobloc 5, 18 comporte une ouverture axiale d'extrémité 20, obturée de manière étanche par une trappe d'obturation 21 avec interposition d'un joint annulaire d'étanchéité 22. Le carter commun monobloc comporte, entre la partie carter de moteur 5 et la partie carter d'huile 18, une paroi intermédiaire 23, séparant le premier compartiment 24 contenant le moteur 3, 4 et le second compartiment 25 contenant le jeu d'engrenages 17, avec un passage axial pour l'arbre moteur et avec un joint d'étanchéité dynamique 6 pour assurer autant que possible une étanchéité autour de l'arbre moteur 2 entre le premier compartiment 24 et le second compartiment 25.According to the invention, the motor casing 5 and the oil pan 18 form a one-piece common casing, advantageously made of metal and secured to the first end of the pump stator 1. Inside the one-piece common casing, the winding of the stator 11 of the engine block 200 is embedded in a waterproof resin 19 (FIG. 2), which seals against oils and gases, preventing the outflow of oil and gas out along the conductors of line d '12 motor supply. In the embodiment illustrated in FIGS. 2 and 3, the one-piece common casing 5, 18 has an axial end opening 20, closed in leaktight manner by a shutter hatch 21 with the interposition of an annular seal 22. The one-piece common casing comprises, between the engine casing part 5 and the oil pan part 18, an intermediate wall 23, separating the first compartment 24 containing the engine 3, 4 and the second compartment 25 containing the set of gears 17, with an axial passage for the motor shaft and with a dynamic seal 6 to ensure as much as possible a seal around the motor shaft 2 between the first compartment 24 and the second compartment 25.
Dans la réalisation avantageuse illustrée sur les figures 3 et 4, le carter commun monobloc 5, 18 est raccordé à la première extrémité du stator de pompe 1 par l'intermédiaire d'un support de roulement 26 comprenant le premier palier 15 de guidage de l'arbre moteur 2. Le premier palier 15 est placé au plus près du bloc moteur 200, pour réduire le porte-à-faux de l'arbre moteur 2.In the advantageous embodiment illustrated in FIGS. 3 and 4, the one-piece common casing 5, 18 is connected to the first end of the pump stator 1 by means of a bearing support 26 comprising the first bearing 15 for guiding the motor shaft 2. The first bearing 15 is placed as close as possible to the motor unit 200, in order to reduce the overhang of the motor shaft 2.
Sur la figure 3, on distingue également l'entrée d'aspiration 27 et la sortie de refoulement 28 de la pompe à vide 100. Egalement, le carter de moteur 5 comporte une canalisationIn FIG. 3, a distinction is also made between the suction inlet 27 and the discharge outlet 28 of the vacuum pump 100. Also, the motor housing 5 comprises a pipe
29 de conduction de fluide de refroidissement.29 for coolant conduction.
La structure selon 1 ' invention assure simultanément un meilleur refroidissement de la partie de stator de pompe 1 proche du bloc moteur 200, grâce à la structure métallique continue formée par le carter commun monobloc 5, 18, distincte de la résine étanche qui est confinée à l'intérieur dudit carter commun monobloc 5, 18. Egalement, en raccourcissant le porte-à-faux de l'arbre moteur 2, on évite les vibrations et on réduit le bruit généré par le groupe de pompage à vide. Il devient ainsi possible d'éviter le recours à un roulement supplémentaire (15a, Figure 1) entre les engrenages 17 et le rotor de moteur 3. En d'autres termes, comme représenté sur la figure 3, l'arbre moteur 2 est alors en porte-à-faux à partir du premier palier 15 de guidage, c'est-à-dire selon le tronçon d'arbre moteur 2 portant le rotor de moteur 3 et les engrenages 17. La longueur du stator moteur, et le porte-à-faux qui en résulte, peuvent encore être réduits, pour un couple moteur identique, en utilisant un moteur 3, 4 à quatre pôles alimenté à fréquence double 2F (en pratique 200 Hz par exemple) , à la place d'un moteur à deux pôles alimenté à fréquence simple F (en pratique 100 Hz par exemple) . Grâce à l'absence de chemise étanche dans l'entrefer, l'utilisation d'un moteur à quatre pôles alimenté à fréquence double 2F est possible sans créer de pertes exagérées de rendement. Cela n'était pas possible avec les structures connues à chemise étanche, car le fonctionnement à fréquence double 2F créait des pertes de rendement trop importantes .The structure according to the invention simultaneously ensures better cooling of the pump stator part 1 close to the engine block 200, thanks to the continuous metallic structure formed by the one-piece common housing 5, 18, distinct from the waterproof resin which is confined to the interior of said one-piece common housing 5, 18. Also, by shortening the overhang of the motor shaft 2, vibrations are avoided and the noise generated by the vacuum pumping group is reduced. It thus becomes possible to avoid the need for an additional bearing (15a, FIG. 1) between the gears 17 and the motor rotor 3. In other words, as shown in FIG. 3, the motor shaft 2 is then cantilevered from the first guide bearing 15, that is to say along the motor shaft section 2 carrying the motor rotor 3 and the gears 17. The length of the motor stator, and the carrier -the resulting false, can be further reduced, for an identical motor torque, by using a 3, 4 pole motor powered at double frequency 2F (in practice 200 Hz for example), instead of a motor with two poles supplied at a single frequency F (in practice 100 Hz for example). Thanks to the absence of a waterproof jacket in the air gap, the use of a four-pole motor powered at double frequency 2F is possible without creating excessive losses of performance. This was not possible with known structures with a tight jacket, since the 2F double frequency operation created excessively large losses in efficiency.
La présente invention n'est pas limitée aux modes de réalisation qui ont été explicitement décrits, mais elle en inclut les diverses variantes et généralisations qui sont à la portée de l'homme du métier. The present invention is not limited to the embodiments which have been explicitly described, but it includes the various variants and generalizations which are within the reach of those skilled in the art.

Claims

REVENDICATIONS
1 - Groupe de pompage à pompe à vide (100) à double rotor, comprenant un stator de pompe (1) avec au moins une cavité intérieure (13) axiale dans laquelle sont logés deux rotors de pompe (14) parallèles montés rotatifs sur des paliers correspondants (15, 16) et couplés à leur première extrémité par un jeu d'engrenages (17) enfermé dans un carter d'huile (18), la première extrémité de l'un des rotors de pompe (14) étant prolongée par un arbre moteur (2) coaxial engagé dans le rotor (3) d'un bloc moteur (200) d'entraînement de la pompe à vide (100), le bloc moteur (200) ayant un bobinage de stator (11) et étant enfermé dans un carter de moteur (5) faisant suite au carter d'huile (18) , caractérisé en ce que :1 - Vacuum pump pumping unit (100) with double rotor, comprising a pump stator (1) with at least one axial internal cavity (13) in which are housed two parallel pump rotors (14) rotatably mounted on corresponding bearings (15, 16) and coupled at their first end by a set of gears (17) enclosed in an oil sump (18), the first end of one of the pump rotors (14) being extended by a coaxial motor shaft (2) engaged in the rotor (3) of a motor unit (200) driving the vacuum pump (100), the motor unit (200) having a stator winding (11) and being enclosed in an engine crankcase (5) following the oil sump (18), characterized in that:
- le carter de moteur (5) et le carter d'huile (18) forment un carter commun monobloc raccordé à la première extrémité du stator de pompe (1) de la pompe à vide (100) ,- the engine casing (5) and the oil sump (18) form a one-piece common casing connected to the first end of the pump stator (1) of the vacuum pump (100),
- à 1 ' intérieur du carter commun monobloc le bobinage de stator (11) du bloc moteur (200) est noyé dans une résine étanche (19) assurant une étanchéité interdisant la sortie d'huile et de gaz vers l'extérieur.- 1 inside the one-piece common housing the stator winding (11) of the engine block (200) is embedded in a waterproof resin (19) ensuring a seal preventing the exit of oil and gas to the outside.
2 - Groupe de pompage selon la revendication 1, caractérisé en ce que le carter commun monobloc (5, 18) comporte une paroi intermédiaire (23) entre un premier compartiment (24) contenant le moteur (3, 4) et le second compartiment (25) contenant le jeu d'engrenages (17), avec un passage pour l'arbre moteur (2) et avec un joint d'étanchéité dynamique (6) pour assurer l'étanchéité autour de l'arbre moteur (2) entre le premier compartiment (24) et le second compartiment (25) .2 - Pumping unit according to claim 1, characterized in that the one-piece common casing (5, 18) has an intermediate wall (23) between a first compartment (24) containing the motor (3, 4) and the second compartment ( 25) containing the set of gears (17), with a passage for the motor shaft (2) and with a dynamic seal (6) to seal around the motor shaft (2) between the first compartment (24) and the second compartment (25).
3 - Groupe de pompage selon l'une des revendications 1 ou 2, caractérisé en ce que le carter commun monobloc (5, 18) comporte une ouverture axiale d'extrémité (20) obturée de manière étanche par une trappe d'obturation (21) .3 - Pumping unit according to one of claims 1 or 2, characterized in that the one-piece common casing (5, 18) has an axial end opening (20) closed in leaktight manner by a shutter hatch (21 ).
4 - Groupe de pompage selon l'une quelconque des revendications 1 à 3, caractérisé en ce que le carter commun monobloc (5, 18) est raccordé à la première extrémité du stator de pompe (1) par l'intermédiaire d'un support de roulement (26) comprenant un premier palier (15) de guidage de l'arbre moteur (2) disposé au plus près du bloc moteur (200) .4 - Pumping unit according to any one of claims 1 to 3, characterized in that the one-piece common casing (5, 18) is connected to the first end of the pump stator (1) via a support bearing (26) comprising a first bearing (15) for guiding the motor shaft (2) disposed as close as possible to the motor unit (200).
5 - Groupe de pompage selon la revendication 4, caractérisé en ce que l'arbre moteur (2) est en porte-à-faux à partir du premier palier (15) de guidage.5 - Pumping unit according to claim 4, characterized in that the motor shaft (2) is cantilevered from the first bearing (15) guide.
6 - Groupe de pompage selon l'une quelconque des revendications 1 à 5, caractérisé en ce que le moteur (3, 4) est un moteur à quatre pôles alimenté à fréquence double (2F) . 6 - Pumping unit according to any one of claims 1 to 5, characterized in that the motor (3, 4) is a four-pole motor supplied at double frequency (2F).
EP01958136A 2000-07-18 2001-07-17 Monobloc housing for vacuum pump Expired - Lifetime EP1301712B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0009401 2000-07-18
FR0009401A FR2812040B1 (en) 2000-07-18 2000-07-18 MONOBLOCK HOUSING FOR VACUUM PUMP
PCT/FR2001/002314 WO2002006675A2 (en) 2000-07-18 2001-07-17 Monobloc housing for vacuum pump

Publications (2)

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EP1301712A2 true EP1301712A2 (en) 2003-04-16
EP1301712B1 EP1301712B1 (en) 2009-02-25

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US (1) US6644942B2 (en)
EP (1) EP1301712B1 (en)
JP (1) JP2004504537A (en)
AT (1) ATE423906T1 (en)
DE (1) DE60137772D1 (en)
FR (1) FR2812040B1 (en)
WO (1) WO2002006675A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0208742D0 (en) 2002-04-17 2002-05-29 Bradford Particle Design Ltd Particulate materials
JP2003269345A (en) * 2002-03-13 2003-09-25 Aisin Seiki Co Ltd Motor-driven oil pump
JP4085969B2 (en) * 2003-11-27 2008-05-14 株式会社豊田自動織機 Electric roots type compressor
JPWO2006001342A1 (en) * 2004-06-28 2008-04-17 松下電器産業株式会社 Air pump
JP2006077699A (en) * 2004-09-10 2006-03-23 Yamaha Marine Co Ltd Lubricating structure for supercharging device
JP2006083713A (en) * 2004-09-14 2006-03-30 Yamaha Marine Co Ltd Lubricating structure of supercharger
JP4614853B2 (en) 2005-09-26 2011-01-19 ヤマハ発動機株式会社 Turbocharger mounting structure
JP2008025477A (en) * 2006-07-21 2008-02-07 Jtekt Corp Electric pump
PL2425820T3 (en) 2007-02-11 2015-08-31 Map Pharmaceuticals Inc Method of therapeutic administration of dhe to enable rapid relief of migraine while minimizing side effect profile
JP4762301B2 (en) * 2008-12-19 2011-08-31 三菱電機株式会社 Electric motor for compressor, compressor and refrigeration cycle apparatus
FR2943744A1 (en) * 2009-03-24 2010-10-01 Inergy Automotive Systems Res ROTARY PUMP
CN103107647B (en) * 2011-11-11 2015-06-03 中国科学院沈阳科学仪器股份有限公司 Motor for dry-type vacuum pump
WO2014095291A1 (en) * 2012-12-20 2014-06-26 Sulzer Pumpen Ag Multiphase pump with separator, wherein the process fluid lubricates and cools the pump
US9394314B2 (en) 2012-12-21 2016-07-19 Map Pharmaceuticals, Inc. 8′-hydroxy-dihydroergotamine compounds and compositions
EP3597922A1 (en) * 2018-07-19 2020-01-22 Agilent Technologies, Inc. (A Delaware Corporation) Vacuum pumping system having an oil-lubricated vacuum pump
CN111963427B (en) * 2019-05-20 2022-06-14 复盛实业(上海)有限公司 Screw compressor

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2940661A (en) * 1957-01-14 1960-06-14 Heraeus Gmbh W C Vacuum pumps
JPS57189246U (en) * 1981-05-26 1982-12-01
JPS60259791A (en) * 1984-06-04 1985-12-21 Hitachi Ltd Oilfree screw vacuum pump
JPS63277885A (en) * 1987-05-06 1988-11-15 Kobe Steel Ltd Oil-free screw type vacuum pump
FR2637655B1 (en) * 1988-10-07 1994-01-28 Alcatel Cit SCREW PUMP TYPE ROTARY MACHINE
JPH0515101A (en) * 1991-06-28 1993-01-22 Asmo Co Ltd Resin-molded type rotating electric machine
JPH05240181A (en) * 1991-07-09 1993-09-17 Ebara Corp Multistage vacuum pump device
JPH0587076A (en) * 1991-09-27 1993-04-06 Ebara Corp Screw type vacuum pump
JPH0569389U (en) * 1992-02-21 1993-09-21 セイコー精機株式会社 Dry vacuum pump
IT1259848B (en) * 1992-11-27 1996-03-28 Hydor Srl SYNCHRONOUS ELECTRIC MOTOR, PARTICULARLY FOR IMMERSIBLE PUMPS AND INCORPORATING PUMP SUCH MOTOR
JP3874430B2 (en) * 1994-05-25 2007-01-31 株式会社荏原製作所 Screw fluid machinery
JPH08100779A (en) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd Vacuum pump
KR100382308B1 (en) * 1995-03-20 2003-07-10 가부시키 가이샤 에바라 세이사꾸쇼 Vacuum pump
JP3315581B2 (en) * 1995-03-20 2002-08-19 株式会社荏原製作所 Vacuum pump
DK0834017T3 (en) * 1995-06-21 2000-04-25 Sterling Ind Consult Gmbh vacuum pump
JPH1155923A (en) * 1997-07-30 1999-02-26 Mitsuba Corp Brushless motor
JPH11356022A (en) * 1998-06-03 1999-12-24 Mitsubishi Electric Corp Molded motor
JP2000170680A (en) * 1998-09-30 2000-06-20 Aisin Seiki Co Ltd Vacuum pump
JP4185598B2 (en) * 1998-10-02 2008-11-26 株式会社日立産機システム Oil-cooled screw compressor
US6069421A (en) * 1999-08-30 2000-05-30 Electric Boat Corporation Electric motor having composite encapsulated stator and rotor
JP3562763B2 (en) * 2000-01-31 2004-09-08 東芝テック株式会社 In-line pump
US6457950B1 (en) * 2000-05-04 2002-10-01 Flowserve Management Company Sealless multiphase screw-pump-and-motor package

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0206675A2 *

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US20020150484A1 (en) 2002-10-17
JP2004504537A (en) 2004-02-12
US6644942B2 (en) 2003-11-11
FR2812040B1 (en) 2003-02-07
ATE423906T1 (en) 2009-03-15
FR2812040A1 (en) 2002-01-25
EP1301712B1 (en) 2009-02-25
DE60137772D1 (en) 2009-04-09
WO2002006675A2 (en) 2002-01-24
WO2002006675A3 (en) 2002-03-14

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