JP3874430B2 - Screw fluid machinery - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a screw fluid machine in which a rotor meshes with two parallel shafts in a non-contact state and rotates synchronously, and both ends of both rotary shafts are rotatably supported by bearings.
[0002]
[Prior art]
In such a conventional screw fluid machine, the timing gear is provided in the middle of both bearings of both rotating shafts.
[0003]
Moreover, the motor stator chamber was opened to the rotor side.
[0004]
[Problems to be solved by the invention]
Therefore, in order to set the timing of both rotors, it is necessary to set the rotor on the rotating shaft and set the rotating shaft in a normal state with both bearings. Setting work was difficult.
[0005]
Further, when a corrosive gas such as a semiconductor manufacturing apparatus is sucked as a vacuum pump, the corrosive gas may enter the motor stator chamber and the motor windings may be corroded.
[0006]
An object of the present invention is to provide a screw fluid machine that facilitates timing setting work and prevents corrosion of motor windings.
[0007]
[Means for Solving the Problems]
According to the present invention, the rotor meshes with the two parallel shafts in a non-contact state and rotates synchronously, and both rotary shafts (6A, 6B) are the upper bearing (8A, 8B) and the lower bearing (9A, 9B), respectively. The upper bearings (8A, 8B) and the lower bearings (9A, 9B) are in the same position in the axial direction of the rotary shafts (6A, 6B). Yes, a rotor (5A, 5B) is fixed to one shaft end of each of the rotating shafts (6A, 6B), and a timing gear (7A, 7B) is fixed to the other shaft end, respectively, A motor rotor (10) is fixed between the upper bearing (8A) and the lower bearing (9A) of the rotating shaft (6A), and the upper bearings (8A, 8B) of the rotating shafts (6A, 6B) are Provided in the central casing (2) Central casing (2) of the upper part the rotor (5A, 5B) rotor casing (1) is provided to cover the, the lower portion of the central casing (2) of the deployed scanned structure around the motor rotor (10) A lower casing (3) covering the motor stator (11) and a bottom cover (4) covering the timing gears (7A, 7B) are sequentially provided.
[0008]
Further, according to the present invention, the motor rotor chamber ( C ) and the motor stator chamber (D) are partitioned by the can (13).
[0010]
[Action]
In the screw fluid machine configured as described above, the rotor can be set on both rotating shafts, both rotating shafts can be supported in a normal state by both bearings, and the timing can be easily set and the timing gear can be attached. it can.
[0011]
In addition, the motor stator casing can be easily made into a can structure, and the motor stator chamber can be isolated from the motor chamber and opened to the atmosphere. Intrusion of corrosive gas can be prevented.
[0012]
【Example】
Embodiments of the present invention will be described below with reference to the drawings.
[0013]
1 and 2, the casing of the screw fluid machine, that is, the screw pump as a whole, is composed of a rotor casing 1, a central casing 2, a lower casing 3, and a bottom cover 4. A motor stator casing 12 of a motor stator 11 containing a motor rotor 10 is detachably attached to a part of the lower surface of the central casing 2 with bolts 20 (see FIG. 3). In the central casing 2 and the motor stator casing 12, the rotating shaft 6A is rotatably supported by the upper bearing 8A and the lower bearing 9A, and the oil that has lubricated the bearing by the shaft seal device 18A enters the pump chamber B. To prevent that. On the other hand, the rotating shaft 6B having the same shape as the rotating shaft 6A is rotatably supported by the central casing 2 and the lower casing 3 by the upper bearing 8B and the lower bearing 9B, and the oil that has lubricated the bearing by the shaft seal device 18B is pump chamber. Intrusion into B is prevented.
[0014]
The rotors 5A and 5B are fixed to the upper ends of the rotary shafts 6A and 6B in an overhanging manner so as to mesh with each other in a non-contact manner. On the other hand, timing gears 7A and 7B meshing with each other are fixed to the lower ends of the rotary shafts 6A and 6B so as to be overhanging and covered with the bottom cover 4. A motor rotor 10 is fixed between one rotating shaft 6A, the upper bearing 8A, and the lower bearing 9A.
[0015]
Further, the motor stator chamber D is opened to the atmosphere by the passage 17, and the lead wire 15 is drawn out. In addition, the code | symbol 13 in a figure shows a can and the motor rotor chamber C and the motor stator chamber D are divided. Reference numeral 14 denotes a water cooling chamber using water flow.
[0016]
Next, the operation will be described.
[0017]
At the time of assembly, first, the rotating shaft 6A to which the motor rotor 10 is fixed is attached to the central casing 2 via the bearing 8A, and then the motor stator casing 12 is fixed to the central casing 2 from below with bolts and the bearing 9A. After the rotating shaft 6A is supported in a normal state via the rotor, the rotor 5A is attached.
[0018]
On the other hand, after the rotating shaft 6B is attached to the central casing 2 via the bearing 8B, the lower casing 3 is attached to the central casing 2, and the rotating shaft 6B is supported by the bearing 9B to attach the rotor 5B. In this state, the timing gears 7A and 7B are attached to the lower ends of the rotating shafts 6A and 6B, and the timing gears 7A and 7B are fixed by adjusting the rotors 5A and 5B to engage with each other with an appropriate gap. At this time, the timing gears 7A and 7B are exposed at the shaft end, and there are no parts that hinder the timing setting operation in the surrounding area, so that the setting can be performed very easily.
[0019]
Thereafter, the rotor casing 1 and the bottom cover 4 are attached to finish the assembly.
[0020]
The motor rotor chamber C is sealed from the pump chamber B by the shaft seal devices 18A and 18B, but corrosive gas in the pump chamber B enters the motor rotor chamber C when the pressure in the pump chamber B fluctuates due to operating conditions. It is possible to do. However, since the motor stator chamber D is isolated from the pump chamber B by the can structure, the motor winding can be protected from corrosion. In addition, since the motor stator casing 12 is a detachable separate body from the pump casing, it can be easily manufactured in a can structure.
[0021]
When there is a possibility of corrosion of the motor rotor 10 due to corrosive gas, the motor rotor 10 may also be covered with a can.
[0022]
Moreover, since both the rotating shafts 6A and 6B are formed in the same shape even though the motor rotor is fixed to only one of them, the cost can be reduced due to the mass production effect.
[0023]
【The invention's effect】
Since the present invention is configured as described above, the following effects can be obtained.
[0024]
(1) Timing setting work can be easily performed.
[0025]
(2) The motor stator casing can be easily manufactured in the can structure, the corrosive gas can be prevented from entering the motor stator chamber, and the winding can be prevented from corroding.
[0026]
(3) The cost of both rotating shafts can be reduced by mass production.
[Brief description of the drawings]
FIG. 1 is a side sectional view showing an embodiment of the present invention.
FIG. 2 is a side sectional view showing a lead wire lead-out portion.
3 is a mounting diagram of a motor stator casing as viewed in the MM direction of FIG.
[Explanation of symbols]
A ... Pump casing B ... Pump chamber C ... Motor rotor chamber D ... Motor stator chamber 1 ... Rotor casing 2 ... Center casing 3 ... Lower casing 4 ... Bottom cover 5A 5B ... rotor 6A, 6B ... rotating shafts 7A, 7B ... timing gears 8A, 8B ... upper bearings 9A, 9B ... lower bearings 10 ... motor rotor 11 ... motor stator 12 ... Motor stator casing 13 ... Can 14 ... Water cooling chamber 15 ... Lead wire 16 ... Seal member 17 ... Passages 18A, 18B ... Shaft seal device 20 ... Motor stator casing Mounting bolts

Claims (2)

The rotor meshes with the two parallel shafts in a non-contact state and rotates synchronously, and both rotary shafts (6A, 6B) are rotatably supported by upper bearings (8A, 8B) and lower bearings (9A, 9B), respectively. In the screw fluid machine, the upper bearings (8A, 8B) and the lower bearings (9A, 9B) are in the same position in the axial direction of the rotary shafts (6A, 6B), respectively. The rotor (5A, 5B) is fixed to one shaft end of each of 6A, 6B), the timing gear (7A, 7B) is fixed to the other shaft end, and the rotation shaft (6A) of one rotating shaft (6A) is fixed. A motor rotor (10) is fixed between the upper bearing (8A) and the lower bearing (9A), and the upper bearings (8A, 8B) of the rotary shafts (6A, 6B) are attached to the central casing (2). Central casing provided Said rotor (5A on the top of 2), rotor casing (1) is provided to cover the 5B), the lower part of the central casing (2) motor stator arranged scanned structure around the motor rotor (10) ( 11) A screw fluid machine, wherein a lower casing (3) covering 11) and a bottom cover (4) covering the timing gears (7A, 7B) are provided in this order. The screw fluid machine according to claim 1, wherein the motor rotor chamber ( C ) and the motor stator chamber (D) are partitioned by a can (13).

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