EP1284806A4 - Gasgehäuseaufbau, bestehend aus sorbensbasierter gasspeicherung und verteilsystem - Google Patents

Gasgehäuseaufbau, bestehend aus sorbensbasierter gasspeicherung und verteilsystem

Info

Publication number
EP1284806A4
EP1284806A4 EP01930952A EP01930952A EP1284806A4 EP 1284806 A4 EP1284806 A4 EP 1284806A4 EP 01930952 A EP01930952 A EP 01930952A EP 01930952 A EP01930952 A EP 01930952A EP 1284806 A4 EP1284806 A4 EP 1284806A4
Authority
EP
European Patent Office
Prior art keywords
sorbent
delivery system
cabinet assembly
gas storage
based gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01930952A
Other languages
English (en)
French (fr)
Other versions
EP1284806A1 (de
Inventor
Glenn M Tom
James V Mcmanus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of EP1284806A1 publication Critical patent/EP1284806A1/de
Publication of EP1284806A4 publication Critical patent/EP1284806A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
EP01930952A 2000-05-03 2001-04-27 Gasgehäuseaufbau, bestehend aus sorbensbasierter gasspeicherung und verteilsystem Withdrawn EP1284806A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US564323 2000-05-03
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
PCT/US2001/013922 WO2001083084A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (2)

Publication Number Publication Date
EP1284806A1 EP1284806A1 (de) 2003-02-26
EP1284806A4 true EP1284806A4 (de) 2006-03-15

Family

ID=24254011

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01930952A Withdrawn EP1284806A4 (de) 2000-05-03 2001-04-27 Gasgehäuseaufbau, bestehend aus sorbensbasierter gasspeicherung und verteilsystem

Country Status (6)

Country Link
EP (1) EP1284806A4 (de)
JP (1) JP2003532034A (de)
KR (1) KR100858077B1 (de)
CN (1) CN1204954C (de)
AU (1) AU2001257439A1 (de)
WO (1) WO2001083084A1 (de)

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US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
US6991671B2 (en) * 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
JP4652785B2 (ja) * 2004-11-29 2011-03-16 株式会社日立国際電気 基板処理装置
KR100675063B1 (ko) * 2005-06-27 2007-01-29 울산화학주식회사 저온액화가스의 충전방법
KR100820377B1 (ko) * 2006-07-07 2008-04-10 김재윤 질소가스충진기
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
US8499789B2 (en) * 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
EP2523744A4 (de) 2010-01-14 2017-01-11 Entegris Inc. Systeme und verfahren für belüftungsgasmanagement
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
KR20200124780A (ko) 2012-05-31 2020-11-03 엔테그리스, 아이엔씨. 배취식 침착을 위한 고 물질 플럭스를 갖는 유체의 소스 시약-기반 수송
JP2014207200A (ja) * 2013-04-16 2014-10-30 東京電力株式会社 ナトリウム−硫黄電池における火災の消火方法
CN103638890B (zh) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 高纯安全气体源的制备方法
EP3201512A4 (de) * 2014-10-03 2018-03-14 Entegris, Inc. Druckregulierter gasversorgungsbehälter
US10247363B2 (en) 2015-02-12 2019-04-02 Entegris, Inc. Smart package
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
CN107364659B (zh) * 2017-07-31 2023-06-27 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
CN107883184B (zh) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 用于航天器的高压气瓶承载装置
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
KR102040716B1 (ko) * 2018-07-10 2019-11-06 에이엠티 주식회사 가스통 자동 교체방법
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛
CN113631254B (zh) * 2019-03-27 2023-12-19 引能仕株式会社 氢气供给装置和氢气供给方法
US11527380B2 (en) * 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
KR102229474B1 (ko) * 2020-08-31 2021-03-17 서갑수 가스 공급 조절 박스
US11493909B1 (en) * 2021-04-16 2022-11-08 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
US20230313951A1 (en) * 2022-03-29 2023-10-05 Douglas C. Heiderman Method and system for optimized gas delivery with automated redundant pressure regulation safety feature
CN116371142B (zh) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 烟气低温吸附再生系统和吸附剂加热输送装置
CN116624753B (zh) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 一种三氟化氯充装方法及系统

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US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5727589A (en) * 1993-11-29 1998-03-17 Teisan K.K. Gas supply system equipped with cylinders
EP0860648A2 (de) * 1997-02-14 1998-08-26 Millipore Corporation Automatisches Verfolgungssystem für Gasflaschen
EP1067327A2 (de) * 1999-07-09 2001-01-10 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Vorrichtung und Verfahren zur gesteuerten Förderung von verflüssigten Gasen

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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
US5727589A (en) * 1993-11-29 1998-03-17 Teisan K.K. Gas supply system equipped with cylinders
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
EP0860648A2 (de) * 1997-02-14 1998-08-26 Millipore Corporation Automatisches Verfolgungssystem für Gasflaschen
EP1067327A2 (de) * 1999-07-09 2001-01-10 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Vorrichtung und Verfahren zur gesteuerten Förderung von verflüssigten Gasen

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Title
See also references of WO0183084A1 *

Also Published As

Publication number Publication date
WO2001083084A1 (en) 2001-11-08
KR20030034065A (ko) 2003-05-01
CN1452507A (zh) 2003-10-29
JP2003532034A (ja) 2003-10-28
CN1204954C (zh) 2005-06-08
KR100858077B1 (ko) 2008-09-11
EP1284806A1 (de) 2003-02-26
AU2001257439A1 (en) 2001-11-12

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Effective date: 20090123

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