EP1242304A1 - Nanostrukturen, ihre anwendungen und verfahren zu ihrer herstellung - Google Patents

Nanostrukturen, ihre anwendungen und verfahren zu ihrer herstellung

Info

Publication number
EP1242304A1
EP1242304A1 EP00974609A EP00974609A EP1242304A1 EP 1242304 A1 EP1242304 A1 EP 1242304A1 EP 00974609 A EP00974609 A EP 00974609A EP 00974609 A EP00974609 A EP 00974609A EP 1242304 A1 EP1242304 A1 EP 1242304A1
Authority
EP
European Patent Office
Prior art keywords
sample
nanostructures
compounds
enclosure
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00974609A
Other languages
English (en)
French (fr)
Inventor
Thomas Laude
Bernard Jouffrey
Alain Marraud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP1242304A1 publication Critical patent/EP1242304A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/901—Manufacture, treatment, or detection of nanostructure having step or means utilizing electromagnetic property, e.g. optical, x-ray, electron beamm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber

Definitions

  • the present invention relates to a process for the preparation of nanostructures from compounds having a hexagonal crystal form.
  • It relates more particularly to a process for the preparation of ' nanobeams, nanofilaments, nanotubes, nanotube bundles, twists, nanoribbons, onions, hollow spheres, clusters, compounds of pure boron nitride or loaded with certain elements.
  • the invention also relates to the nanostructures obtained by such a process.
  • Structures and nanostructures are known which take the form of fullerenes, hollow nanospheres, or carbon nanotubes or assemblies of such nanotubes called strings or bundles. These carbon nanostructures are in fact anisotropic forms developed from graphite. It will be recalled that the carbon nanotubes are in fact one or more planes of graphene wound on themselves, with a more or less pronounced character of helicity (the latter may also be zero).
  • boron nitride has completely different physical and chemical properties from that of carbon; it will be noted in particular that the melting temperature of boron nitride is approximately 1000 ° C. lower than that of carbon. Furthermore, it is much more electrically and chemically insulating in nature more ionic than carbon, and less reactive with a certain number of elements. These differences in the physicochemical properties between these two elements make the known techniques of the prior art ineffective, such as that of using hafnium diboride as an electrode in the electric arc method for example.
  • the present invention aims to overcome the drawbacks of the processes known from the prior art, by proposing a process which makes it possible to develop nanostructures in large quantities and which exhibits, if desired, a high degree of purity.
  • the process according to the invention for developing nanostructures under controlled atmosphere, from compounds having a hexagonal crystal shape, subjected to a laser bombardment of a gas is characterized in that a sample of compound is used which is compacted and that one operates under a residual gas pressure between about 5.10 to 8.10 Pa.
  • the vacuum can be dynamic or not.
  • Figures 2 to 7 are views obtained by scanning electron microscopy or transmission illustrating geometries of nanostructures.
  • the process which is the subject of the invention consists in providing a compound having a crystal structure of hexagonal shape, such as for example zinc, zirconium, titanium, magnesium, cadmium, beryllium or boron nitride, packaged in a compacted sample within an enclosure.
  • this process could also be used for obtaining other materials, in the possible presence of a catalyst.
  • these may be transition metals such as iron, nickel, cobalt, binary compounds (WS2 1 M0S2 • •) # of lamellar compounds.
  • the sample used is subjected to a prior annealing operation, for example in the enclosure.
  • this enclosure is made hermetic by known means, is emptied, then filled with a dynamic atmosphere controlled or not.
  • the sample of compacted powder compounds is placed within this enclosure on a support advantageously made of a material similar to that of the sample.
  • boron nitride powder sample this will be positioned on a support shaped as a bar, also made of boron nitride, in order to avoid
  • the sample of compounds is not in a form with a sufficient purity index, it should then undergo a purification phase which can essentially consist in degassing the sample.
  • the sample is positioned within the enclosure, then the latter is hermetically sealed from the external environment.
  • the enclosure is then connected to a vacuum source so as to create a pressure of the order of 10 " 5 mbar (approximately • 1.10 -3 Pa), or better if desired.
  • the sample of the sintered or compacted compound is then subjected to heating by non-focused continuous illumination of a laser beam.
  • the wavelength of the laser radiation is chosen according to the type of sample and in fact corresponds to the wavelength which is best absorbed by the sample.
  • boron nitride it is possible to use a ⁇ 2 laser whose wavelength is close to 10.6 ⁇ m.
  • the energy supply necessary for heating the sample can come from another origin (heating by Joule effect, by induction, by ion bombardment or equivalent ).
  • the degassing phase is not necessarily carried out.
  • the surface quality of the heated material is involved in particular in terms of the yields of product obtained.
  • preheating for example of the order of a minute to a few minutes under
  • the residual gas pressure in the enclosure will be between 0.5 and 8-1G 4 Pa, or even more depending on the material treated.
  • a pressure of 1.10 4 Pa of nitrogen gives satisfactory results, and an increase in pressure leads to more diversified structures, with more clusters and even trees.
  • the laser beam passes through an optical device, in particular a lens, making it possible to focus said beam at a precise point of an enclosure and particularly at a determined area of the sample.
  • the radiation coming from a CO2 laser with a power of the order of 50 to 80 W approximately, or more depending on the material treated, is focused through an optical device so as to obtain a density of optimal energy.
  • a power density is of the order of 6 to 8 GW / m 2 over a diameter of 100 to 200 ⁇ m.
  • the sample is continuously bombarded in order to bring its temperature to a surface temperature higher than the dissociation temperature of said sample. For example, in the case of boron nitride, this temperature is substantially close to 2400 ° C. 'Alternatively, one can increase the amount of material treated sample or relative movement of the laser beam.
  • This process for manufacturing and developing nanostructures uses the a technique analogous to chemical vapor deposition assisted by laser.
  • the latter is used to locally heat the sample to a temperature above the dissociation temperature, the gas contained in the enclosure (nitrogen) will then help germination and growth from the surface of the sample, dissociate, combine with the compound (boron), then accumulate to lead to the formation of a growth of nanostructures on the surface of the target.
  • the overall loss of material is slow enough that the temperature gradient in the sample is stable during the growth of the structures.
  • the sample is left to cool before the enclosure is opened to the outside environment in order to avoid possible oxidation.
  • boron nitride nanostructures (cf. FIGS. 2, 3, 4 and 5) made up of entangled filaments, of diameter on the order of a nanometer to a few tens of nanometers, and of micrometric length (up to several tens of microns).
  • Figure 6 shows nanoribbons with clusters and Figure 7 a structure with trees.
  • these boron nitride nanostructures can be pure or present impurities or doping elements in more or less high concentration, such as in particular carbon, these impurities or these doping elements acting or not acting as catalyst, these impurities or these elements are present either in the sample or in the controlled atmosphere. This doping can change the conduction properties of the material.
  • the operating conditions power of the laser, duration of heating, nature of the gas constituting the residual pressure within the enclosure, etc.
  • the enclosure 1 comprising an enclosure 1 which can be hermetically closed with respect to the external environment, this enclosure 1 being provided moreover, on the one hand, with a first orifice 2 connected to a pumping source 3, and on the other hand a second orifice 4 connected to a source of controlled atmosphere 5, said enclosure 1 being further provided with an optical device 6, in particular of the lens type, making it possible to converge on a sample 7 placed inside said enclosure 1, a laser beam 8.
  • the laser is preferably a continuous laser of type ⁇ 2.
  • the boron nitride nanostructures have very high chemical inertness, even at high temperature, which can make them in particular less reactive to molten metals and very resistant to oxidation.
  • the nanostructures of the invention can also be used in field emission if a conductive or semiconductor compound is deposited on it.
  • the twisted shapes can serve as supports for other molecules and that the nanotubes can be used as nanocapacitors to detect very low charges.
  • the invention has made it possible to develop a means of annihilating the positive charges which remain under the impact of an electron beam during the observation in electron microscopies of the nanostructures of the material, and in particular of boron nitride.
  • This method will then be used in transmission or scanning electron microscopy.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Catalysts (AREA)
  • Laser Beam Processing (AREA)
  • Inorganic Fibers (AREA)
EP00974609A 1999-10-28 2000-10-30 Nanostrukturen, ihre anwendungen und verfahren zu ihrer herstellung Withdrawn EP1242304A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9913532A FR2800365B1 (fr) 1999-10-28 1999-10-28 Procede d'obtention de nanostructures a partir de composes ayant une forme cristalline hexagonale
FR9913532 1999-10-28
PCT/FR2000/003029 WO2001030689A1 (fr) 1999-10-28 2000-10-30 Nanostructures, leurs applications et leur procede d'elaboration

Publications (1)

Publication Number Publication Date
EP1242304A1 true EP1242304A1 (de) 2002-09-25

Family

ID=9551500

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00974609A Withdrawn EP1242304A1 (de) 1999-10-28 2000-10-30 Nanostrukturen, ihre anwendungen und verfahren zu ihrer herstellung

Country Status (5)

Country Link
US (1) US6586093B1 (de)
EP (1) EP1242304A1 (de)
JP (1) JP2003512192A (de)
FR (1) FR2800365B1 (de)
WO (1) WO2001030689A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6515325B1 (en) * 2002-03-06 2003-02-04 Micron Technology, Inc. Nanotube semiconductor devices and methods for making the same
US7509961B2 (en) * 2003-10-27 2009-03-31 Philip Morris Usa Inc. Cigarettes and cigarette components containing nanostructured fibril materials
US20050112048A1 (en) * 2003-11-25 2005-05-26 Loucas Tsakalakos Elongated nano-structures and related devices
US8206674B2 (en) * 2007-05-15 2012-06-26 National Institute Of Aerospace Associates Boron nitride nanotubes
US20090226361A1 (en) * 2008-03-05 2009-09-10 Jessica Campos-Delgado Cvd-grown graphite nanoribbons
US20100192535A1 (en) * 2009-02-04 2010-08-05 Smith Michael W Boron nitride nanotube fibrils and yarns
EP3880603A4 (de) * 2018-11-16 2022-08-24 The University Of Western Australia Bornitrid-nanostrukturen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3168579B2 (ja) * 1990-11-20 2001-05-21 松下電器産業株式会社 レーザーアブレーション装置
JP3508247B2 (ja) * 1993-10-19 2004-03-22 ソニー株式会社 カーボンチューブの製造方法
JPH09139209A (ja) * 1995-11-15 1997-05-27 Sony Corp カーボン材料の構造制御方法
JPH09320793A (ja) * 1996-05-27 1997-12-12 Nikon Corp Ｘ線発生装置及びｘ線装置
JP3365475B2 (ja) * 1997-03-27 2003-01-14 三菱化学株式会社 単原子層カーボンナノチューブの製造方法
JPH11273551A (ja) * 1998-03-23 1999-10-08 Nec Corp 窒化ホウ素を用いた電子放出素子及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0130689A1 *

Also Published As

Publication number Publication date
FR2800365A1 (fr) 2001-05-04
US6586093B1 (en) 2003-07-01
WO2001030689A1 (fr) 2001-05-03
FR2800365B1 (fr) 2003-09-26
JP2003512192A (ja) 2003-04-02

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