EP1220285A3 - Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird - Google Patents

Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird Download PDF

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Publication number
EP1220285A3
EP1220285A3 EP01120299A EP01120299A EP1220285A3 EP 1220285 A3 EP1220285 A3 EP 1220285A3 EP 01120299 A EP01120299 A EP 01120299A EP 01120299 A EP01120299 A EP 01120299A EP 1220285 A3 EP1220285 A3 EP 1220285A3
Authority
EP
European Patent Office
Prior art keywords
lamp
space
gas
light
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01120299A
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English (en)
French (fr)
Other versions
EP1220285B1 (de
EP1220285A2 (de
Inventor
Andreas Ulrich
Fabian Mühlberger
Ralf Dr. Zimmermann
Antonius Prof. Dr. Kettrup
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmholtz Zentrum Muenchen Deutsches F
Original Assignee
Helmholtz Zentrum Muenchen Deutsches Forschungszentrum fuer Gesundheit und Umwelt GmbH
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Publication of EP1220285A2 publication Critical patent/EP1220285A2/de
Publication of EP1220285A3 publication Critical patent/EP1220285A3/de
Application granted granted Critical
Publication of EP1220285B1 publication Critical patent/EP1220285B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Abstract

Die Erfindung betrifft eine Ionenquelle, bei der die Ionen durch UV/VUV-Licht ionisiert wurden und deren Verwendung.
Aufgabe der Erfindung ist es, eine Ionenquelle mit einer Lichtquelle hoher Nutzphotonendichte zur Verfügung zu stellen sowie eine vorteilhafte Verwendung anzugeben.
Gelöst wird diese Aufgabe dadurch, daß die Lichtquelle entweder aus einer Deuteriumlape, einer Mikrohohlkathodenlampe, einer Mikrospitzenlampe, einer Gleichstromentladungslampe, einer Barriereentladungslampe oder einer elektronenstrahlbetriebenen UV/VUV Lampe mit folgenden Bauteilen, einer Elektronenkanone, einer Membran, welche den Raum der Elektronenkanone gegen einen Gasraum abschießt und durch den der Elektronenstrahl durchtritt, einem Edelgas bzw. einer edelgashaltigen Gasmischung in dem Gasraum, wobei der durch die Membran tretende Elektronenstrahl im Gasraum Licht erzeugt und optischen Bauelementen zum Abbilden des Licht-Emissionsvolumens in den Ionisationsraum besteht.
EP01120299.1A 2000-09-09 2001-08-24 Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird Expired - Lifetime EP1220285B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000144655 DE10044655A1 (de) 2000-09-09 2000-09-09 Ionenquelle bei der UV-VUV-Licht zur Ionisation verwendet wird
DE10044655 2000-09-09

Publications (3)

Publication Number Publication Date
EP1220285A2 EP1220285A2 (de) 2002-07-03
EP1220285A3 true EP1220285A3 (de) 2005-03-16
EP1220285B1 EP1220285B1 (de) 2014-08-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP01120299.1A Expired - Lifetime EP1220285B1 (de) 2000-09-09 2001-08-24 Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird

Country Status (2)

Country Link
EP (1) EP1220285B1 (de)
DE (1) DE10044655A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107014892A (zh) * 2017-05-15 2017-08-04 清华大学 一种基于真空紫外激光的微米级空间分辨质谱成像系统

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10236344B4 (de) 2002-08-08 2007-03-29 Bruker Daltonik Gmbh Ionisieren an Atmosphärendruck für massenspektrometrische Analysen
DE102005039269B4 (de) 2005-08-19 2011-04-14 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Verfahren und Vorrichtung zum massenspektrometrischen Nachweis von Verbindungen
US8721836B2 (en) 2008-04-22 2014-05-13 Micron Technology, Inc. Plasma processing with preionized and predissociated tuning gases and associated systems and methods
CN102103971B (zh) * 2009-12-18 2012-11-07 中国科学院大连化学物理研究所 微型质谱仪中空心阴极放电真空紫外光电离源
DE102012209324A1 (de) * 2012-06-01 2013-12-05 Helmholtz Zentrum München Lichtleitervorrichtung für ein Ionisierungsgerät und Verfahren zum Ionisieren von Atomen und/oder Molekülen
CZ2015815A3 (cs) 2015-11-16 2017-03-15 Univerzita Tomáše Bati ve Zlíně Zařízení pro generování UV záření a způsob generování tohoto záření
CN111929354B (zh) * 2020-07-02 2021-09-17 东华理工大学 一种稀土矿样顺次电离分析仪器

Citations (3)

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EP0585487A1 (de) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Vorrichtung und Verfahren zur Photoionisation und Detektion
EP0921393A2 (de) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Verfahren zum Nachweis von Substanzen und Substanzklassen mittels REMPI-TOFMS
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same

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DE4222130C2 (de) * 1992-07-06 1995-12-14 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE19820626C2 (de) * 1998-05-08 2000-09-07 Deutsch Zentr Luft & Raumfahrt Verfahren und Vorrichtung zum Nachweis von Probenmolekülen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585487A1 (de) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Vorrichtung und Verfahren zur Photoionisation und Detektion
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same
EP0921393A2 (de) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Verfahren zum Nachweis von Substanzen und Substanzklassen mittels REMPI-TOFMS

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Title
BOBELDIJK M ET AL: "TESTING THE PERFORMANCE OF A VUV PHOTOIONIZATION SOURCE ON A DOUBLE FOCUSSING MASS SPECTROMETER USING ALKANES AND THIOPHENES", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, ELSEVIER SCIENTIFIC PUBLISHING CO. AMSTERDAM, NL, vol. 110, no. 3, 2 December 1991 (1991-12-02), pages 179 - 194, XP000247041, ISSN: 0168-1176 *
EL-HABACHI AHMED ET AL: "Emission of excimer radiation from direct current, high-pressure hollow cathode discharges", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 72, no. 1, 5 January 1998 (1998-01-05), pages 22 - 24, XP012019726, ISSN: 0003-6951 *
GELLERT B ET AL: "GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES", APPLIED PHYSICS B. PHOTOPHYSICS AND CHEMISTRY, SPRINGER VERLAG. HEIDELBERG, DE, vol. B52, no. 1, January 1991 (1991-01-01), pages 14 - 21, XP000209199 *
GENUIT W. ET AL.: "SELECTIVE ION SOURCE FOR TRACE GAS ANALSIS", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, vol. 51, 1983, AMSTERDAM, pages 207 - 213, XP009042676 *
GONTHIEZ T ET AL: "VUV laser photoionization of laser-stimulated desorbed species", APPLIED PHYSICS A: MATERIALS SCIENCE AND PROCESSING, SPRINGER VERLAG, BERLIN, DE, vol. A69, suppl, 19 July 1999 (1999-07-19), pages 171 - 173, XP002175581, ISSN: 0947-8396 *
SALVERMOSER M ET AL: "Energy flow and excimer yields in continuous wave rare gas–halogen systems", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 1, 1 July 2000 (2000-07-01), pages 453 - 459, XP012050818, ISSN: 0021-8979 *
WIESER J ET AL: "VACUUM ULTRAVIOLET RARE GAS EXCIMER LIGHT SOURCE", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 68, no. 3, March 1997 (1997-03-01), pages 1360 - 1364, XP000685060, ISSN: 0034-6748 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107014892A (zh) * 2017-05-15 2017-08-04 清华大学 一种基于真空紫外激光的微米级空间分辨质谱成像系统
CN107014892B (zh) * 2017-05-15 2019-06-18 清华大学 一种基于真空紫外激光的微米级空间分辨质谱成像系统

Also Published As

Publication number Publication date
EP1220285B1 (de) 2014-08-20
DE10044655A1 (de) 2002-04-04
EP1220285A2 (de) 2002-07-03

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