EP1220285A3 - Ion source in which a UV/VUV light source is used for ionization - Google Patents

Ion source in which a UV/VUV light source is used for ionization Download PDF

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Publication number
EP1220285A3
EP1220285A3 EP20010120299 EP01120299A EP1220285A3 EP 1220285 A3 EP1220285 A3 EP 1220285A3 EP 20010120299 EP20010120299 EP 20010120299 EP 01120299 A EP01120299 A EP 01120299A EP 1220285 A3 EP1220285 A3 EP 1220285A3
Authority
EP
Grant status
Application
Patent type
Prior art keywords
source
ion
used
uv
vuv
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20010120299
Other languages
German (de)
French (fr)
Other versions
EP1220285B1 (en )
EP1220285A2 (en )
Inventor
Antonius Prof. Dr. Kettrup
Fabian Mühlberger
Andreas Ulrich
Ralf Dr. Zimmermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HELMHOLTZ ZENTRUM MUENCHEN DEUTSCHES F
Original Assignee
Helmholtz Zentrum Munchen Deutsches Forschngs f Gesundh and Umwelt
GSF Forschungzentrum fur Umwelt und Gesundheit
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/16Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Abstract

Die Erfindung betrifft eine Ionenquelle, bei der die Ionen durch UV/VUV-Licht ionisiert wurden und deren Verwendung. The invention relates to an ion source in which the ions were ionized by UV / VUV light and their use.
Aufgabe der Erfindung ist es, eine Ionenquelle mit einer Lichtquelle hoher Nutzphotonendichte zur Verfügung zu stellen sowie eine vorteilhafte Verwendung anzugeben. The object of the invention is to provide an ion source with a light source of high Nutzphotonendichte available and to indicate an advantageous use.
Gelöst wird diese Aufgabe dadurch, daß die Lichtquelle entweder aus einer Deuteriumlape, einer Mikrohohlkathodenlampe, einer Mikrospitzenlampe, einer Gleichstromentladungslampe, einer Barriereentladungslampe oder einer elektronenstrahlbetriebenen UV/VUV Lampe mit folgenden Bauteilen, einer Elektronenkanone, einer Membran, welche den Raum der Elektronenkanone gegen einen Gasraum abschießt und durch den der Elektronenstrahl durchtritt, einem Edelgas bzw. einer edelgashaltigen Gasmischung in dem Gasraum, wobei der durch die Membran tretende Elektronenstrahl im Gasraum Licht erzeugt und optischen Bauelementen zum Abbilden des Licht-Emissionsvolumens in den Ionisationsraum besteht. This object is achieved in that the light source is either a Deuteriumlape, a micro-hollow cathode lamp, a microtip lamp, a DC discharge lamp, a barrier discharge lamp or an electron beam-powered UV / VUV lamp with the following components, an electron gun, a membrane which the space of the electron gun against a gas space shoots and through which the electron beam passes, a noble gas or a noble gas containing gas mixture in the gas space, wherein the passing through the membrane electron in the gas space generated light, and optical components is for imaging the light emission volume in the ionization chamber.
EP20010120299 2000-09-09 2001-08-24 Ion source in which a UV/VUV light source is used for ionization Active EP1220285B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2000144655 DE10044655A1 (en) 2000-09-09 2000-09-09 Ion source using UV/VUV light for ionisation has light source provided with electron gun separated by membrane from gas space in which light is generated by electron beam
DE10044655 2000-09-09

Publications (3)

Publication Number Publication Date
EP1220285A2 true EP1220285A2 (en) 2002-07-03
EP1220285A3 true true EP1220285A3 (en) 2005-03-16
EP1220285B1 EP1220285B1 (en) 2014-08-20

Family

ID=7655651

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010120299 Active EP1220285B1 (en) 2000-09-09 2001-08-24 Ion source in which a UV/VUV light source is used for ionization

Country Status (2)

Country Link
EP (1) EP1220285B1 (en)
DE (1) DE10044655A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10236344B4 (en) 2002-08-08 2007-03-29 Bruker Daltonik Gmbh Ionize at atmospheric pressure for mass spectrometric analyzes
DE102005039269B4 (en) * 2005-08-19 2011-04-14 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Method and apparatus for mass spectrometric detection of compounds
US8721836B2 (en) 2008-04-22 2014-05-13 Micron Technology, Inc. Plasma processing with preionized and predissociated tuning gases and associated systems and methods
CN102103971B (en) 2009-12-18 2012-11-07 中国科学院大连化学物理研究所 Hollow cathode discharge vacuum ultraviolet light ionization source inside minitype mass spectrograph
DE102012209324A1 (en) * 2012-06-01 2013-12-05 Helmholtz Zentrum München Light guide device for an ionization device and method for ionizing atoms and / or molecules
EP3168860A1 (en) 2015-11-16 2017-05-17 Tomas Bata University In Zlín Device and method for producing uv radiation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585487A1 (en) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Apparatus and process for photoionization and detection
EP0921393A2 (en) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method for detecting substances or classes of substances using REMPI-TOFMS
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4222130C2 (en) * 1992-07-06 1995-12-14 Heraeus Noblelight Gmbh High-power radiation
DE19820626C2 (en) * 1998-05-08 2000-09-07 Deutsch Zentr Luft & Raumfahrt Method and apparatus for the detection of sample molecules

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585487A1 (en) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Apparatus and process for photoionization and detection
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same
EP0921393A2 (en) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method for detecting substances or classes of substances using REMPI-TOFMS

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
BOBELDIJK M ET AL: "TESTING THE PERFORMANCE OF A VUV PHOTOIONIZATION SOURCE ON A DOUBLE FOCUSSING MASS SPECTROMETER USING ALKANES AND THIOPHENES", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, ELSEVIER SCIENTIFIC PUBLISHING CO. AMSTERDAM, NL, vol. 110, no. 3, 2 December 1991 (1991-12-02), pages 179 - 194, XP000247041, ISSN: 0168-1176 *
EL-HABACHI AHMED ET AL: "Emission of excimer radiation from direct current, high-pressure hollow cathode discharges", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 72, no. 1, 5 January 1998 (1998-01-05), pages 22 - 24, XP012019726, ISSN: 0003-6951 *
GELLERT B ET AL: "GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES", APPLIED PHYSICS B. PHOTOPHYSICS AND CHEMISTRY, SPRINGER VERLAG. HEIDELBERG, DE, vol. B52, no. 1, January 1991 (1991-01-01), pages 14 - 21, XP000209199 *
GENUIT W. ET AL.: "SELECTIVE ION SOURCE FOR TRACE GAS ANALSIS", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, vol. 51, 1983, AMSTERDAM, pages 207 - 213, XP009042676 *
GONTHIEZ T ET AL: "VUV laser photoionization of laser-stimulated desorbed species", APPLIED PHYSICS A: MATERIALS SCIENCE AND PROCESSING, SPRINGER VERLAG, BERLIN, DE, vol. A69, suppl, 19 July 1999 (1999-07-19), pages 171 - 173, XP002175581, ISSN: 0947-8396 *
SALVERMOSER M ET AL: "Energy flow and excimer yields in continuous wave rare gas–halogen systems", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 1, 1 July 2000 (2000-07-01), pages 453 - 459, XP012050818, ISSN: 0021-8979 *
WIESER J ET AL: "VACUUM ULTRAVIOLET RARE GAS EXCIMER LIGHT SOURCE", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 68, no. 3, March 1997 (1997-03-01), pages 1360 - 1364, XP000685060, ISSN: 0034-6748 *

Also Published As

Publication number Publication date Type
EP1220285B1 (en) 2014-08-20 grant
EP1220285A2 (en) 2002-07-03 application
DE10044655A1 (en) 2002-04-04 application

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