EP1218947A4 - FORCE SENSOR DEVICES HAVING FILLED AND / OR EMPTY MULTIPLE CHANNELS AND OTHER ATTRIBUTES - Google Patents
FORCE SENSOR DEVICES HAVING FILLED AND / OR EMPTY MULTIPLE CHANNELS AND OTHER ATTRIBUTESInfo
- Publication number
- EP1218947A4 EP1218947A4 EP00991370A EP00991370A EP1218947A4 EP 1218947 A4 EP1218947 A4 EP 1218947A4 EP 00991370 A EP00991370 A EP 00991370A EP 00991370 A EP00991370 A EP 00991370A EP 1218947 A4 EP1218947 A4 EP 1218947A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro
- channel
- tip
- materials
- force sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000446 fuel Substances 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 239000000126 substance Substances 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims abstract description 8
- 239000007787 solid Substances 0.000 claims abstract description 7
- 239000011343 solid material Substances 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims abstract 3
- 238000000034 method Methods 0.000 claims description 29
- 238000005516 engineering process Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 4
- 210000001519 tissue Anatomy 0.000 claims 4
- 239000013626 chemical specie Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 239000013307 optical fiber Substances 0.000 claims 2
- 210000002381 plasma Anatomy 0.000 claims 2
- 239000011540 sensing material Substances 0.000 claims 2
- 239000000523 sample Substances 0.000 abstract description 8
- 239000004020 conductor Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 3
- 238000007429 general method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000007496 glass forming Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/56—Labware specially adapted for transferring fluids
- B01L3/561—Tubes; Conduits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/028—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples using microstructures, e.g. made of silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0832—Geometry, shape and general structure cylindrical, tube shaped
- B01L2300/0838—Capillaries
Definitions
- This invention is a general method for forming force sensing devices with multiple isolated channels in which two or more materials (solid, liquid or gas) can be isolated one from another. These devices have various attributes that result from this technology that can produce such devices that are either straight or cantilevered.
- the resulting structures, either cantilevered or uncantilevered, can be tapered to a small tip and should allow for the ability to sense surface forces while using one or multiple channels of the structure for another function.
- probes that could have multiple attributes such as chemical sensors in one channel with gas in another channel, micro vacuum devices with single channels that could suck up materials and air in a second channel to release such materials, unique nanometric thermocouples, micro voltage, micro capacitance, micro inductive, micromagnetic devices depending on electrical isolation or contact at the tip of electrically conducting materials, microlight detectors if the conductors in the channels are covered with photodetecting materials, microlight sources if the channels of conducting material are coated with electroluminescent materials, multiple channel fountain pens, multiple channel tips for multiple electrochemical and/or optical measurements, micro heating elements, stable micro devices for annealing, soldering, cutting, etc., Peltier microcooling devices, microdynamic cavitation bubble forming devices, generating devices with two isolated electrodes with appropriate electrical inputs, etc.
- the invention is a method to produce a type of probe based on multiple channels of isolated materials that can, if so desired, be cantilevered.
- the structures and the variety of applications that they provide are a result of the ability of these devices to sense surface forces and thus permit the control of these probes at or above specified surfaces in order to accomplish specific applications.
- Figure 1 illustrates an example of a multiple channel tapered structure that is part of this invention
- Figure 2 illustrates a structure similar to Figure 1 which is cantilevered
- Figure 3 illustrates another example of a multichannel structure as described herein:
- Figure 4 illustrates an example of a structure produced by the glass forming technology approach described herein.
- the invention is a general method and the resulting devices in which multiple channels (1.1 and 1.2) in Figure 1 can be formed into a tapered (illustrated at 1.3) or untapered structure (1.4) such that two or more materials (solid, liquid or gas) of either the same or different chemical composition are isolated from one another by a solid material, or till, (1.5) in the tip of the structure. At this tip the two materials can either be connected or left unconnected, depending on the application that is desired.
- Such structures can have force constants both as straight or cantilevered devices (see Figure 2 with channels 2.1 and 2.2 in a cantilevered, tapered structure 2.3) that allow for force sensing applications.
- multiple channels can also be produced that mix many of the attributes that are described above.
- An example of such a tapered structure (3.0) is shown in Figure 3, where three multiple channels are illustrated at 3.1, 3.2 and 3.3 in a straight (non-cantilevered) emulation. Nonetheless, this does not limit these structures to three channels and such structures can be made with more than three channels.
- the three channel structures and structures with additional channels can be cantilevered as shown in Figure 2.
- a two-wire cantilevered structure that can be used for thermal resistance when the two isolated materials are metal and of the same composition, and can be used as a thermocouple or a Peltier cooler when the two materials are of different metallic composition.
- the two channels together with two metal wires in the channels produce a structure that has two tapered wires isolated by glass that can be either left straight or can be cantilevered.
- MEMs micro electro mechanical
- these structures could act as probes that could have multiple attributes such as chemical sensors in one channel with gas in another channel, can be micro vacuum devices with a single channel that could suck up materials and air and a second channel to release such materials, can be unique nanometric thermocouples, thermoresistors, micro voltage, micro capacitance, micro inductive, and micromagnetic devices, depending on electrical isolation or contact at the tip of electrically conducting materials, can be microlight detectors if the conductors in the channels are covered with photodetecting materials, microlight sources if the channels of conducting material are coated with electroluminescent materials, multiple channel fountain pens, multiple channel tips for multiple electrochemical and/or optical measurements, micro heating elements, can be stable micro devices for annealing, soldering, cutting, etc., or can be Peltier microcooling devices, microdynamic cavitation bubble forming devices, micro plasma generating devices with two isolated electrodes with appropriate electrical inputs, etc. In the past, some of these applications were attempted with single
Landscapes
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Radiology & Medical Imaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IL13202199 | 1999-09-23 | ||
| IL13202199 | 1999-09-23 | ||
| PCT/US2000/021978 WO2001027581A2 (en) | 1999-09-23 | 2000-09-21 | Force sensing devices with multiple filled and/or empty channels and other attributes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1218947A2 EP1218947A2 (en) | 2002-07-03 |
| EP1218947A4 true EP1218947A4 (en) | 2007-05-30 |
Family
ID=11073270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP00991370A Withdrawn EP1218947A4 (en) | 1999-09-23 | 2000-09-21 | FORCE SENSOR DEVICES HAVING FILLED AND / OR EMPTY MULTIPLE CHANNELS AND OTHER ATTRIBUTES |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1218947A4 (enExample) |
| JP (1) | JP2003511690A (enExample) |
| WO (1) | WO2001027581A2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6680617B2 (en) * | 2000-09-20 | 2004-01-20 | Neocera, Inc. | Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| JP5172331B2 (ja) * | 2005-03-31 | 2013-03-27 | 独立行政法人科学技術振興機構 | 走査型プローブ顕微鏡用カンチレバー及びそれを具備する走査型プローブ顕微鏡 |
| JP6359331B2 (ja) * | 2014-05-02 | 2018-07-18 | 株式会社中原光電子研究所 | プローブ、光モジュール及びプローブの製造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2608722A (en) * | 1950-09-06 | 1952-09-02 | Otmar M Stuetzer | Process for making microspacers |
| EP0185782A1 (en) * | 1984-12-28 | 1986-07-02 | International Business Machines Corporation | Waveguide for an optical near-field microscope |
| US5185922A (en) * | 1990-08-17 | 1993-02-16 | Cornell Research Foundation, Inc. | Method of making submicrometer microelectrodes |
| US5264698A (en) * | 1988-07-17 | 1993-11-23 | Raoul Kopelman | Nanometer dimension optical device with microimaging and nanoillumination capabilities |
| WO1996035225A1 (en) * | 1995-04-30 | 1996-11-07 | Aaron Lewis | Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5986261A (en) * | 1996-04-29 | 1999-11-16 | Nanoptics, Inc. | Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
-
2000
- 2000-09-21 EP EP00991370A patent/EP1218947A4/en not_active Withdrawn
- 2000-09-21 JP JP2001530545A patent/JP2003511690A/ja active Pending
- 2000-09-21 WO PCT/US2000/021978 patent/WO2001027581A2/en not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2608722A (en) * | 1950-09-06 | 1952-09-02 | Otmar M Stuetzer | Process for making microspacers |
| EP0185782A1 (en) * | 1984-12-28 | 1986-07-02 | International Business Machines Corporation | Waveguide for an optical near-field microscope |
| US5264698A (en) * | 1988-07-17 | 1993-11-23 | Raoul Kopelman | Nanometer dimension optical device with microimaging and nanoillumination capabilities |
| US5185922A (en) * | 1990-08-17 | 1993-02-16 | Cornell Research Foundation, Inc. | Method of making submicrometer microelectrodes |
| WO1996035225A1 (en) * | 1995-04-30 | 1996-11-07 | Aaron Lewis | Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
Non-Patent Citations (5)
| Title |
|---|
| "Collins English Dictionary - 21st Century Edition", 2000, HARPERCOLLINS PUBLISHERS, ISBN: 0-00-472532-8, XP002429605 * |
| FISH G ET AL: "ULTRAFAST RESPONSE MICROPIPETTE-BASED SUBMICROMETER THERMOCOUPLE", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 66, no. 5, 1 May 1995 (1995-05-01), pages 3300 - 3306, XP000507819, ISSN: 0034-6748 * |
| HANSMA P K ET AL: "THE SCANNING ION-CONDUCTANCE MICROSCOPE", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE,, US, 1989, pages 641 - 643, XP000914510, ISSN: 0036-8075 * |
| LIEBERMAN K ET AL: "Multifunctional, micropipette based force cantilevers for scanned probe microscopy", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 65, no. 5, 1 August 1994 (1994-08-01), pages 648 - 650, XP002329223, ISSN: 0003-6951 * |
| SHMUEL SHALOM ET AL: "A MICROPIPETTE FORCE PROBE SUITABLE FOR NEAR-FIELD SCANNING OPTICAL MICROSCOPY", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 63, no. 9, 1 September 1992 (1992-09-01), pages 4061 - 4065, XP000311659, ISSN: 0034-6748 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1218947A2 (en) | 2002-07-03 |
| WO2001027581A2 (en) | 2001-04-19 |
| WO2001027581A3 (en) | 2001-11-22 |
| WO2001027581A9 (en) | 2002-09-12 |
| JP2003511690A (ja) | 2003-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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| 17P | Request for examination filed |
Effective date: 20020419 |
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| AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
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| RBV | Designated contracting states (corrected) |
Designated state(s): AT BE CH CY DE FR GB LI |
|
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20070502 |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: B01L 3/00 20060101ALI20070420BHEP Ipc: H01L 35/28 20060101ALI20070420BHEP Ipc: G01N 13/04 20060101ALI20070420BHEP Ipc: G01N 13/10 20060101ALI20070420BHEP Ipc: H01L 35/34 20060101AFI20020508BHEP Ipc: G12B 21/02 20060101ALI20070420BHEP Ipc: H01J 1/304 20060101ALI20070420BHEP Ipc: G01K 7/02 20060101ALI20070420BHEP Ipc: G01N 35/10 20060101ALI20070420BHEP |
|
| 17Q | First examination report despatched |
Effective date: 20080314 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 20110531 |