WO2001027581A2 - Force sensing devices with multiple filled and/or empty channels and other attributes - Google Patents

Force sensing devices with multiple filled and/or empty channels and other attributes Download PDF

Info

Publication number
WO2001027581A2
WO2001027581A2 PCT/US2000/021978 US0021978W WO0127581A2 WO 2001027581 A2 WO2001027581 A2 WO 2001027581A2 US 0021978 W US0021978 W US 0021978W WO 0127581 A2 WO0127581 A2 WO 0127581A2
Authority
WO
WIPO (PCT)
Prior art keywords
micro
channel
tip
materials
force sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/021978
Other languages
English (en)
French (fr)
Other versions
WO2001027581A3 (en
WO2001027581A9 (en
Inventor
Aaron Lewis
Galina Fish
Rima Glazer Dekhter
Sophia Kokotov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANOPTICS Inc
Nanoptics Ltd
Original Assignee
NANOPTICS Inc
Nanoptics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANOPTICS Inc, Nanoptics Ltd filed Critical NANOPTICS Inc
Priority to JP2001530545A priority Critical patent/JP2003511690A/ja
Priority to EP00991370A priority patent/EP1218947A4/en
Priority to US10/048,980 priority patent/US6737331B1/en
Publication of WO2001027581A2 publication Critical patent/WO2001027581A2/en
Publication of WO2001027581A3 publication Critical patent/WO2001027581A3/en
Anticipated expiration legal-status Critical
Publication of WO2001027581A9 publication Critical patent/WO2001027581A9/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/56—Labware specially adapted for transferring fluids
    • B01L3/561—Tubes; Conduits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/028—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples using microstructures, e.g. made of silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0832—Geometry, shape and general structure cylindrical, tube shaped
    • B01L2300/0838—Capillaries

Definitions

  • probes that could have multiple attributes such as chemical sensors in one channel with gas in another channel, micro vacuum devices with single channels that could suck up materials and air in a second channel to release such materials, unique nanometric thermocouples, micro voltage, micro capacitance, micro inductive, micromagnetic devices depending on electrical isolation or contact at the tip of electrically conducting materials, microlight detectors if the conductors in the channels are covered with photodetecting materials, microlight sources if the channels of conducting material are coated with electroluminescent materials, multiple channel fountain pens, multiple channel tips for multiple electrochemical and/or optical measurements, micro heating elements, stable micro devices for annealing, soldering, cutting, etc., Peltier microcooling devices, microdynamic cavitation bubble forming devices, generating devices with two isolated electrodes with appropriate electrical inputs, etc.

Landscapes

  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
PCT/US2000/021978 1999-09-23 2000-09-21 Force sensing devices with multiple filled and/or empty channels and other attributes Ceased WO2001027581A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001530545A JP2003511690A (ja) 1999-09-23 2000-09-21 複数の充填及び／又は空きチャンネルと、他の属性とを備える力測定装置
EP00991370A EP1218947A4 (en) 1999-09-23 2000-09-21 FORCE SENSOR DEVICES HAVING FILLED AND / OR EMPTY MULTIPLE CHANNELS AND OTHER ATTRIBUTES
US10/048,980 US6737331B1 (en) 1999-09-23 2000-09-21 Force sensing devices with multiple filled and/or empty channels and other attributes

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL132021 1999-09-23
IL13202199 1999-09-23

Publications (3)

Publication Number Publication Date
WO2001027581A2 true WO2001027581A2 (en) 2001-04-19
WO2001027581A3 WO2001027581A3 (en) 2001-11-22
WO2001027581A9 WO2001027581A9 (en) 2002-09-12

Family

ID=11073270

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/021978 Ceased WO2001027581A2 (en) 1999-09-23 2000-09-21 Force sensing devices with multiple filled and/or empty channels and other attributes

Country Status (3)

Country Link
EP (1) EP1218947A4 (enExample)
JP (1) JP2003511690A (enExample)
WO (1) WO2001027581A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408327A3 (en) * 2002-10-09 2004-04-21 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006106818A1 (ja) * 2005-03-31 2006-10-12 Japan Science And Technology Agency 走査型プローブ顕微鏡用カンチレバー及びそれを具備する走査型プローブ顕微鏡
JP6359331B2 (ja) * 2014-05-02 2018-07-18 株式会社中原光電子研究所 プローブ、光モジュール及びプローブの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2608722A (en) * 1950-09-06 1952-09-02 Otmar M Stuetzer Process for making microspacers
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
US5264698A (en) * 1988-07-17 1993-11-23 Raoul Kopelman Nanometer dimension optical device with microimaging and nanoillumination capabilities
US5185922A (en) * 1990-08-17 1993-02-16 Cornell Research Foundation, Inc. Method of making submicrometer microelectrodes
IL113551A0 (en) * 1995-04-30 1995-07-31 Fish Galina Tapered structure suitable for microthermocouples microelectrodes field emission tips and micromagnetic sensors with force sensing capabilities
US5986261A (en) * 1996-04-29 1999-11-16 Nanoptics, Inc. Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408327A3 (en) * 2002-10-09 2004-04-21 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method

Also Published As

Publication number Publication date
EP1218947A2 (en) 2002-07-03
WO2001027581A3 (en) 2001-11-22
EP1218947A4 (en) 2007-05-30
JP2003511690A (ja) 2003-03-25
WO2001027581A9 (en) 2002-09-12

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