EP1197470A3 - Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons - Google Patents

Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons Download PDF

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Publication number
EP1197470A3
EP1197470A3 EP01124511A EP01124511A EP1197470A3 EP 1197470 A3 EP1197470 A3 EP 1197470A3 EP 01124511 A EP01124511 A EP 01124511A EP 01124511 A EP01124511 A EP 01124511A EP 1197470 A3 EP1197470 A3 EP 1197470A3
Authority
EP
European Patent Office
Prior art keywords
electron beams
electron
thermal expansion
film
windows transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01124511A
Other languages
German (de)
English (en)
Other versions
EP1197470A2 (fr
Inventor
Klaus Dr. Bachmann
Manfred Beckmann
Peter Flisikowski
Geoffrey Harding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Intellectual Property and Standards GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Intellectual Property and Standards GmbH, Koninklijke Philips Electronics NV filed Critical Philips Intellectual Property and Standards GmbH
Publication of EP1197470A2 publication Critical patent/EP1197470A2/fr
Publication of EP1197470A3 publication Critical patent/EP1197470A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles

Landscapes

  • X-Ray Techniques (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Measurement Of Radiation (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
EP01124511A 2000-10-13 2001-10-12 Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons Withdrawn EP1197470A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10050810 2000-10-13
DE10050810A DE10050810A1 (de) 2000-10-13 2000-10-13 Verfahren zur Herstellung eines elektronenstrahltransparenten Fensters sowie elektronenstrahltransparentes Fenster

Publications (2)

Publication Number Publication Date
EP1197470A2 EP1197470A2 (fr) 2002-04-17
EP1197470A3 true EP1197470A3 (fr) 2004-12-01

Family

ID=7659685

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01124511A Withdrawn EP1197470A3 (fr) 2000-10-13 2001-10-12 Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons

Country Status (4)

Country Link
US (1) US6580781B2 (fr)
EP (1) EP1197470A3 (fr)
JP (1) JP2002197973A (fr)
DE (1) DE10050810A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0008051D0 (en) * 2000-04-03 2000-05-24 De Beers Ind Diamond Composite diamond window
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
DE10210045C1 (de) * 2002-03-07 2003-05-08 Philips Corp Intellectual Pty Lichtquelle und Verfahren zur Herstellung einer Folie für die Lichtquelle
WO2005034167A2 (fr) * 2003-10-07 2005-04-14 Koninklijke Philips Electronics N.V. Procede de fabrication d'une fenetre transparente aux electrons dans un faisceau d'electrons, emis notamment par une source de rayons x
WO2005055269A2 (fr) * 2003-12-01 2005-06-16 Mbda Uk Limited Ameliorations apportees ou relatives a un canon electronique et une fenetre de faisceau d'electrons
DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004015590B4 (de) * 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
EP1670017A1 (fr) * 2004-12-03 2006-06-14 Mbda Uk Limited Fenêtre transparente aux électrons, ensemble de fenêtre et canon à électrons
US8300770B2 (en) 2010-07-13 2012-10-30 Varian Medical Systems, Inc. Liquid metal containment in an x-ray tube
US11170965B2 (en) * 2020-01-14 2021-11-09 King Fahd University Of Petroleum And Minerals System for generating X-ray beams from a liquid target

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1199876A (en) * 1967-07-11 1970-07-22 Matsushita Electric Ind Co Ltd Cathode Ray Tubes
EP0059249A2 (fr) * 1981-03-03 1982-09-08 Siemens Aktiengesellschaft Fenêtre transparente pour rayons
EP0476827A1 (fr) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited Fenêtre à rayons X et procédé pour fabriquer celle-ci
EP0480732A2 (fr) * 1990-10-12 1992-04-15 Kabushiki Kaisha Toshiba Fenêtre perméable aux faisceaux d'électrons
US5478266A (en) * 1993-04-12 1995-12-26 Charged Injection Corporation Beam window devices and methods of making same
WO1996021238A1 (fr) * 1995-01-05 1996-07-11 American International Technologies, Inc. Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee
EP0957506A1 (fr) * 1998-05-15 1999-11-17 Philips Patentverwaltung GmbH Source à rayons X avec cible à métal liquide
WO2001075500A1 (fr) * 2000-04-03 2001-10-11 De Beers Industrial Diamonds (Proprietary) Limited Fenetre composite en diamant

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3127511B2 (ja) * 1991-09-19 2001-01-29 株式会社日立製作所 露光装置および半導体装置の製造方法
GB9920384D0 (en) * 1999-08-28 1999-11-03 De Beers Ind Diamond Joining of cvd diamond bodies to metal structures

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1199876A (en) * 1967-07-11 1970-07-22 Matsushita Electric Ind Co Ltd Cathode Ray Tubes
EP0059249A2 (fr) * 1981-03-03 1982-09-08 Siemens Aktiengesellschaft Fenêtre transparente pour rayons
EP0476827A1 (fr) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited Fenêtre à rayons X et procédé pour fabriquer celle-ci
EP0480732A2 (fr) * 1990-10-12 1992-04-15 Kabushiki Kaisha Toshiba Fenêtre perméable aux faisceaux d'électrons
US5478266A (en) * 1993-04-12 1995-12-26 Charged Injection Corporation Beam window devices and methods of making same
WO1996021238A1 (fr) * 1995-01-05 1996-07-11 American International Technologies, Inc. Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee
EP0957506A1 (fr) * 1998-05-15 1999-11-17 Philips Patentverwaltung GmbH Source à rayons X avec cible à métal liquide
WO2001075500A1 (fr) * 2000-04-03 2001-10-11 De Beers Industrial Diamonds (Proprietary) Limited Fenetre composite en diamant

Also Published As

Publication number Publication date
EP1197470A2 (fr) 2002-04-17
US6580781B2 (en) 2003-06-17
DE10050810A1 (de) 2002-04-18
US20020048344A1 (en) 2002-04-25
JP2002197973A (ja) 2002-07-12

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