EP1185143A4 - Hot plate and conductor paste - Google Patents

Hot plate and conductor paste

Info

Publication number
EP1185143A4
EP1185143A4 EP20000922933 EP00922933A EP1185143A4 EP 1185143 A4 EP1185143 A4 EP 1185143A4 EP 20000922933 EP20000922933 EP 20000922933 EP 00922933 A EP00922933 A EP 00922933A EP 1185143 A4 EP1185143 A4 EP 1185143A4
Authority
EP
European Patent Office
Prior art keywords
hot plate
conductor paste
paste
conductor
hot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20000922933
Other languages
German (de)
French (fr)
Other versions
EP1185143A9 (en
EP1185143A1 (en
Inventor
Yanling Zhou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Publication of EP1185143A1 publication Critical patent/EP1185143A1/en
Publication of EP1185143A9 publication Critical patent/EP1185143A9/en
Publication of EP1185143A4 publication Critical patent/EP1185143A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
EP20000922933 1999-05-07 2000-05-01 Hot plate and conductor paste Withdrawn EP1185143A4 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP12697399 1999-05-07
JP12697399 1999-05-07
JP32306199 1999-11-12
JP32306199 1999-11-12
JP2000126786A JP2001203066A (en) 1999-05-07 2000-04-27 Hot plate and conductive paste
JP2000126786 2000-04-27
PCT/JP2000/002874 WO2000069218A1 (en) 1999-05-07 2000-05-01 Hot plate and conductor paste

Publications (3)

Publication Number Publication Date
EP1185143A1 EP1185143A1 (en) 2002-03-06
EP1185143A9 EP1185143A9 (en) 2002-05-15
EP1185143A4 true EP1185143A4 (en) 2005-03-07

Family

ID=27315433

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20000922933 Withdrawn EP1185143A4 (en) 1999-05-07 2000-05-01 Hot plate and conductor paste

Country Status (3)

Country Link
EP (1) EP1185143A4 (en)
JP (1) JP2001203066A (en)
WO (1) WO2000069218A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090266409A1 (en) * 2008-04-28 2009-10-29 E.I.Du Pont De Nemours And Company Conductive compositions and processes for use in the manufacture of semiconductor devices
KR101013793B1 (en) * 2010-08-26 2011-02-14 오길수 Ih sensing composition for heat-resistance ceramic
WO2017141984A1 (en) * 2016-02-17 2017-08-24 ナミックス株式会社 Conductive paste
CN110085346B (en) * 2019-04-30 2021-04-30 东莞珂洛赫慕电子材料科技有限公司 Heating resistor slurry adaptive to silicon nitride substrate and preparation method and application thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1278411A (en) * 1968-03-11 1972-06-21 Johnson Matthey Co Ltd Improvements in and relating to heater elements
GB1528166A (en) * 1975-09-17 1978-10-11 Shoei Chem Inc Process for manufacturing resistor compositions
JPS5714141A (en) * 1980-06-30 1982-01-25 Matsushita Electric Ind Co Ltd Container with electric heater
JPH0496201A (en) * 1990-08-05 1992-03-27 Yamamura Glass Co Ltd Heating element composition
DE19754235A1 (en) * 1997-07-01 1999-01-07 Fct Systeme Der Strukturkerami Cooking hob

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5790593U (en) * 1980-11-22 1982-06-03
JP3033852B2 (en) * 1991-03-27 2000-04-17 川崎製鉄株式会社 Resistor and resistor paste composition for aluminum nitride heater
JP3463320B2 (en) * 1993-06-03 2003-11-05 株式会社村田製作所 Multilayer ceramic capacitors
JPH08138835A (en) * 1994-03-28 1996-05-31 Yamamura Glass Co Ltd Heater element composition
JP3297531B2 (en) * 1994-06-27 2002-07-02 京セラ株式会社 Conductive paste
JPH1140440A (en) * 1997-07-18 1999-02-12 Mitsumi Electric Co Ltd Transformer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1278411A (en) * 1968-03-11 1972-06-21 Johnson Matthey Co Ltd Improvements in and relating to heater elements
GB1528166A (en) * 1975-09-17 1978-10-11 Shoei Chem Inc Process for manufacturing resistor compositions
JPS5714141A (en) * 1980-06-30 1982-01-25 Matsushita Electric Ind Co Ltd Container with electric heater
JPH0496201A (en) * 1990-08-05 1992-03-27 Yamamura Glass Co Ltd Heating element composition
DE19754235A1 (en) * 1997-07-01 1999-01-07 Fct Systeme Der Strukturkerami Cooking hob

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 006, no. 074 (M - 127) 11 May 1982 (1982-05-11) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 324 (E - 1234) 15 July 1992 (1992-07-15) *
See also references of WO0069218A1 *

Also Published As

Publication number Publication date
WO2000069218A1 (en) 2000-11-16
EP1185143A9 (en) 2002-05-15
JP2001203066A (en) 2001-07-27
EP1185143A1 (en) 2002-03-06

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20011115

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

A4 Supplementary search report drawn up and despatched

Effective date: 20050307

RIC1 Information provided on ipc code assigned before grant

Ipc: 7H 05B 3/16 B

Ipc: 7H 05B 3/74 B

Ipc: 7H 05B 3/14 A

Ipc: 7H 05B 3/68 B

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20050801