JP3033852B2 - Resistor and resistor paste composition for aluminum nitride heater - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistor and a resist paste composition for an aluminum nitride heater, and more particularly to a resistor and a resist paste composition formed on an aluminum nitride sintered body as a resistive heating element for a heater. About.

[0002]

2. Description of the Related Art Aluminum nitride sintered bodies have excellent electrical insulation properties, and in particular, have a very high thermal conductivity.
For example, application to high-power hybrid ICs for laser devices, microwave transmitters, and the like, and high integration density LSI substrates is promising. In addition to the high thermal conductivity, the thermal expansion coefficient is as small as half or less of that of alumina, so that it has very high thermal shock resistance. If this property is applied, it can be used as an excellent heater structural material.

[0003]

However, when an aluminum nitride sintered body is used for a heater, even if a pattern of a resistance heating element is to be formed on the surface by a thick film printing method or the like, the glass frit component contained in the paste is reduced. The aluminum nitride is oxidized, and as a result, a strong bonding layer between the metal film and the substrate is not formed, and high adhesion strength cannot be obtained. Means for substituting the conductor paste or the resistor paste for the thick film HIC may be considered, but the former has a resistance value of 0.0
Since the resistance value was as small as less than 5 Ω / □ and the resistance value of the latter was as large as 10 Ω / □ or more, it was difficult to use it for heater applications. Therefore, it was impossible to use a heating element wire such as a nichrome wire for a heater other than winding it around the sintered body.

An object of the present invention is to provide a resistor and a resistor paste composition for an aluminum nitride heater in which a resistor layer having a large adhesive strength to an aluminum nitride sintered body is formed, overcoming the above problems.

[0005]

Means for Solving the Problems The present inventors have made intensive studies to achieve the above object, and as a result, platinum, palladium,
By mixing at least one metal powder selected from the group consisting of silver and gold and a glass frit having a crystallization temperature of 700 ° C. or more, the area resistivity after firing is 0.05 Ω / □ or more.
The present inventors have found that it is possible to form a resistor layer and a resist paste composition having a large adhesive strength to an aluminum nitride sintered body at Ω / □ or less, and have reached the present invention.

[0006]

The metal powder used in the present invention is at least one metal powder selected from the group consisting of platinum, palladium, silver and gold. When two or more metals are used, a pre-alloyed powder may be used in addition to a single mixture. Also,
In order to improve the temperature coefficient of resistance and promote sintering, a small amount of another white metal element or the like may be added.

[0007] Platinum, palladium, silver, and gold all have high oxidation resistance at high temperatures and have little deterioration over time when used as a heating resistor for a heater. The mixing ratio of these metals is arbitrary, and is appropriately selected in consideration of the desired resistance temperature characteristics and the sheet resistivity. As a crystallized glass frit having a crystallization temperature of 700 ° C. or more, for example, SiO ₂ 25-30 wt%,
Al ₂ O ₃ 7-15 wt%, CaO 15-24 wt%,
TiO ₂ 8-15 wt%, ZnO 20-30 wt%, B
Those containing at a rate of 0-5 wt% of ₂ O _{3 are} exemplified. The crystallization temperature of this crystallized glass frit is 700 ° C.
If the temperature is lower than the above range, the heater may be melted or softened during the operation of the heater at a high temperature, and cannot be put to practical use.
There is no particular limitation on the amount of the crystallized glass frit with respect to the metal powder, and the sheet resistivity increases exponentially with respect to the compounding amount.

[0008] Even if the sheet resistivity is less than 0.05Ω / □, it is 10
Not suitable for use as a heating resistor for heaters even at Ω / □ or more
Therefore, it was limited to this range. Keep the resistance within this range
To determine the amount of crystallized glass frit relative to the metal powder
Increase or decrease. In the composition of the present invention, the metal powder and the binder
In addition to the crystallized glass powder, adjust the crystallization temperature and adjust the adhesion strength.
ZnO, BiO for the purpose of further improving_Three , CdO, Sb
_Two O _Five , Sb_Two O_Three , V_Two O_Five , Cr_Two O_Three , Ti
O_Two, ZrO_Two , Nb_Two O_Five Blending inorganic oxides such as
No problem. The amount of these inorganic oxides added is particularly limited.
20 parts by weight for 100 parts by weight of metal powder
It is preferable to add in the following range.

[0009]

The present invention will be described below in detail with reference to examples.
However, the present invention is naturally limited to the scope of the examples.
is not. Various types of gold were used according to the formulations shown in Tables 1 and 2.
Three rolls of genus powder and crystallized glass with organic vehicle
The paste was obtained by kneading and dispersing in a machine. However, gold
All powders of the genus have a mean particle size of 0.1 to 1.5 μm.
Was used. However, the glass powder A in the table had a crystallization temperature of 7
ZnO-B at 50 ° C_Two O_Three-SiO_Two System, glass powder B,
C is a crystallization temperature of 800 ° C. and 875 ° C., respectively._Two O
 _Three-CaO-SiO _Two Crystallized glass frit
You. This paste is applied on an aluminum nitride substrate made by Kawasaki Steel.
Printed on air, peak temperature in air 950 ° C, peak temperature maintained
Firing in a belt furnace in 7 minutes, 40 minutes from the entrance to the exit
Was. Pilot type II manufactured by Koyo Lindberg Co., Ltd.
A belt furnace was used.

A 2 mm × 2 mm pad is formed on the substrate by 10
After forming the individual pieces and performing the electroless Ni plating after the firing,
The substrate was immersed in a 4 solder bath for 5 seconds, a 0.8 mm tin-coated copper wire was soldered on each pad, and a 90 degree peel test was performed to measure the adhesive strength. The results are shown in Tables 1 and 2. The resistance value was measured at both ends of a pattern having a length of 171 mm and a width of 0.4 mm formed on the substrate by using an electronic resistance meter. In addition, a current was applied to this pattern for 2000 hours so as to consume 100 W of power, and a change in resistance value after that was examined.

As can be seen from these results, the resistor of the present invention is practical, having a strong average of 4 kg / 2 mm square or more, and has little deterioration of the resistance value after energization.

[0012]

[Table 1]

[0013]

[Table 2]

[0014]

Industrial Applicability The resistor for an aluminum nitride heater according to the present invention can be formed as a resistor having a large adhesive strength by coating and firing mainly on the surface of an aluminum nitride sintered body by printing. The value of public use is great.

──────────────────────────────────────────────────の Continued on the front page (73) Patent holder 000224798 Dowa Mining Co., Ltd. 1-8-2 Marunouchi, Chiyoda-ku, Tokyo (72) Inventor Tadashi Nakano 1 Kawasaki-cho, Chiba-shi Kawasaki Steel Corporation Research and Development Headquarters (72) Inventor Hiroshi Sato 1 Kawasaki-cho, Chiba-shi Kawasaki Steel Corporation, Technology Research Division (72) Inventor Masato Kumagai 1-Kawasaki-cho, Chiba City Kawasaki Steel Corporation Technical Research Division (72) Inventor Toshihiko Funabashi Chiba No. 1 Ichikawasakicho Kawasaki Steel Corporation (72) Inventor Masao Komatsu 3-34-2-101 Akatsuka Shinmachi, Itabashi-ku, Tokyo (72) Inventor Shuji Saeki 8-7 Yomeicho, Otsu-shi (72) Inventor Shun Okada 5-765-120 Numa, Zushi City (72) Inventor Masatoshi Suehiro 50-8 Kawashima Awatacho, Nishikyo-ku, Kyoto-shi (56) References 47878 (JP, A) JP Akira 63-81787 (JP, A) (58 ) investigated the field (Int.Cl. ^7, DB name) C04B 41/86 C03C 8/18 C04B 35/58 H05B 3/14

Claims (2)

(57) [Claims] 1. A material comprising at least one metal powder selected from the group consisting of platinum, palladium, silver and gold, and a glass frit having a crystallization temperature of 700 ° C. or more, and having a sheet resistivity of 0.2 after firing.
A resistor for an aluminum nitride heater, having a resistance of from 05 Ω / □ to 10 Ω / □. 2. A powder comprising at least one metal powder selected from the group consisting of platinum, palladium, silver and gold, and a glass frit having a crystallization temperature of 700 ° C. or more, and having a sheet resistivity of 0.2 after firing.
A resistance paste composition for aluminum nitride, having a resistance of from 05 Ω / □ to 10 Ω / □.