EP1183133B1 - Jet spray tool and device containing a jet spray tool - Google Patents

Abstract

The invention relates to a jet spray tool (2) and to a device for treating, especially for cleaning, surfaces (1) using a CO2 snow stream (5). According to the invention, the jet spray tool (2) comprises a first nozzle (49) for producing a CO2 snow stream and has a second nozzle (51) for producing a support or pressure stream, whereby the second nozzle (51) surrounds the first nozzle (49) in a concentric manner, and whereby a supersonic stream of a pressure/support gas is produced by the second nozzle (51).

Description

The present invention relates to a jet tool and to a device for the treatment, in particular for the cleaning of surfaces by means of a CO ₂ snow jet. Such blasting tools and devices are used in the optical industry, medical technology, the pharmaceutical industry, painting technology, micro-and precision engineering for the treatment of surfaces, including the treatment of soft surface coatings, gels and the like. The basis of this treatment or cleaning process is the cleaning by means of CO ₂ -iscrystals. The method is also used for the dry local cleaning of particulate and cinematic impurity of structured and composed of elements of different materials surfaces to the submicron range.

A jet tool according to the preamble of Claim 1 is at US-A-5,681,206 known.

The progressive miniaturization with simultaneous hybridization of assemblies requires a cleaning process that allows local cleaning of functional surfaces without contaminating adjacent areas by cross-contamination. The use of conventional cleaning methods, such as ultrasound or the use of aggressive chemicals is due to material incompatibilities only rarely possible. Blasting with CO ₂ particles is an interesting alternative here.

CO ₂ ice cleaning is a dry, deep-cold, residue-free blasting process with a wide range of applications. In principle, dry ice blasting can be divided into two different processes - cleaning with airborne dry ice pellets and cleaning with CO ₂ snow.

The blasting with dry ice pellets is since 1987 to Paint stripping and cleaning of aircraft components and Aircraft used. Especially because of the property of dry ice during the cleaning process to sublimate and thus no contaminated To leave cleaning agents, parts could built-in condition and cleaning costs be reduced on aircraft up to 50%.

Today, the blasting with dry ice pellets already has in many areas such. B. the Entlackung aircraft, facade cleaning or removal coarse dirt on machines enforced. Its strength of residue-free cleaning it plays especially in the assembly cleaning already installed systems.

The cleaning effect is fundamentally based on three mechanisms. On the one hand, when the CO ₂ crystals impinge on the surface, the contamination or the coating on the surface is strongly supercooled, as a result of which they shrink and become brittle. Due to the different thermal expansion of the base material and contamination or coating stresses arise so that the connection between the pollution and the base material is loosened or dissolved. Furthermore, the embrittled impurity is further released and mechanically removed by the impulse transmitted by the CO ₂ pellets. Finally, the material removed by the dry ice pellets is held in suspension by the sublimated CO ₂ and possibly further supporting gas and transported away from the cleaning zone.

The blasting process using dry ice pellets is for example in "edged or round, metal salts and carbon dioxide pellets are exotic agents in blasting technology "by Reinhold Schäfer in Maschinenmarkt Würzburg 98 (1992).

A disadvantage of the blasting technique using dry ice pellets is that the cooling during and after the cleaning carried out a recontamination of the surface by deposition previously contained in the air and remaining during the drying of the CO ₂ ice film remaining substances. In particular, the ambient moisture precipitates on the cooled surface following the radiation, so that the object to be cleaned becomes moist.

Alternatively, instead of dry ice pellets, dry ice crystals can also be used as blasting agents. In this case, a jet of CO ₂ snow is generated, which is blasted at high speed onto the surface to be cleaned.

In order to prevent the held by resublimation the humidity during the cleaning icing of the surface through which a further cleaning action of the CO ₂ snow crystals difficult to be prevented, two methods are known in the prior art. On the one hand, a heated plate is used as a base for the items to be cleaned, in order to reheat the items as quickly as possible after sweeping the dry ice jet. The effectiveness of this method as an individual measure is partially greatly impaired by the material, the geometry and the size of the cleaning material or not at all. Alternatively, the CO ₂ snow jet may be surrounded by a sheath jet that is heated. Thus, when passing over a surface by the CO ₂ beam immediately thereafter, the surface is reheated by the support beam, so that the condensation of the humidity is reduced or prevented. However, this method causes an undesirable heating of the CO ₂ ice jet by the warm support beam, so that the effectiveness of the blasting process is impaired. Such a method is described in US 5,725,154.

A disadvantage of the blasting method using CO ₂ -snow crystals is that they have a much lower pulse than the dry ice pellets with a diameter of several millimeters, so that the cleaning effect compared to dry ice pellets is considerably lower.

In US Pat. No. 5,725,154, it is proposed to generate an inductive magnetic field in order to compensate for the charging of the incoming liquid CO ₂ . The ionization due to charge separation during the expansion of the CO ₂ and the crystallization of the CO ₂ snow is not compensated.

The problem with all these prior art processes is the cross-contamination of surface areas due to the erosion produced elsewhere by the CO ₂ ice jet.

Object of the present invention is a Blasting tool and a jet device containing this to provide with the surfaces easy and reliable without recondensation treated by water or cross-contamination, in particular can be radiated.

This object is achieved by the jet tool according to claim 1 and the device according to claim 19 solved. Advantageous developments of the invention Blasting tool and the device according to the invention are given in the dependent claims. According to the invention can the jet tool according to the invention and the inventive device as in the Claims 35 to 38, can be used.

By the jet tool according to the invention were the following Improvements achieved:

On the one hand, there is a very high jet velocity achieved by using a Laval nozzle, so that the very small ice crystals due to the on cleaning surface forming gas cushion shot can be. Furthermore, the static charge of solid carbon dioxide snow, which is a problem the cleaning of electronic components, means the ionization device lifted. Farther is through the nozzle and by the invention Device of the cleaning device a Laminar flow generated in the cleaning chamber, so that no dirt nests within the cleaning system be formed. In particular, the beam diameter extremely low, so that he can apply in microsystem or precision engineering and the plant flexible in the production of microsystems can be used. The jet tool is fully mobile and the cleaning process is without further automatable. Overall, a result high efficiency with a short cleaning time.

By the suction device according to the invention is advantageously the radiated, sublimated CO ₂ and the high-volume support or pressure jet, which flows without further deflection from the sample table, collected and then sucked from there, whereby a cross-contamination of other surface areas is reliably minimized. The suction device according to the invention also does not generate any whirl or the like outside of the suction device itself, so that the laminar flow of the inflowing air is not disturbed and its purity is reliably maintained.

Overall, a very high efficiency results short treatment period using the inventive Device and the invention Beam tool. Further advantageous properties are a simple, compact device design, a high Equipment safety, low equipment, - operational and Maintenance costs, a high degree of automation, good Reproducibility of the cleaning result as well a simple handling of the device and the Beam tool.

Overall, a fast and icing-free cleaning of components during production is possible with the elimination of complicated and expensive cleaning preparations. The Trokkeneisstrahlverfahren invention, a variety of materials can be cleaned, provided that they withstand the short-term temperature shock. There are only minor limitations to the structures involved, as dry ice blasting, as with all blasting processes, is a line of sight process. Therefore, only surfaces can be cleaned, which lie in the beam direction. The cleaning of blind undercuts is not possible or only very limited. The same applies to depressions with a relatively large aspect ratio, which fill relatively quickly with sublimed CO ₂ and thus impede or even prevent the further penetration of the ice crystals.

The following is an example of an inventive Blasting tool and an inventive Device described. It will be in all Figures like parts with the same reference numerals.

Fig. 1 das erfindungsgemäße Strahlverfahren;

Fig. 2 eine erfindungsgemäße Vorrichtung;

Fig. 3 ein erfindungsgemäßes Strahlwerkzeug;

Fig. 4 eine erfindungsgemäße Absaugvorrichtung;

Fig. 5 einen Schnitt durch die erfindungsgemäße Absaugvorrichtung nach Fig. 4;

Fig. 6 ein Reinigungsergebnis nach dem erfindungsgemäßen Verfahren; und

Fig. 7 ein weiteres Reinigungsergebnis nach dem erfindungsgemäßen Verfahren.

Show it

Fig. 1, the blasting process according to the invention;

2 shows a device according to the invention;

3 shows a blasting tool according to the invention;

4 shows a suction device according to the invention;

5 shows a section through the suction device according to the invention according to Fig. 4.

6 shows a cleaning result according to the method of the invention; and

Fig. 7 shows a further cleaning result according to the inventive method.

Fig. 1 shows schematically the inventive method. A surface of an object 1, for example a sample table, is irradiated with CO ₂ ice crystals (CO ₂ snow) 3 from a spray nozzle 2. The CO ₂ snow thereby forms a CO ₂ beam 5, which emits an impurity 4 from the surface of the object 1. There are two mechanisms of action. With a, a mechanism of action is described, in which a CO ₂ crystal 3 impinges on the surface of the object 1 and thereby the impurity 4 is broken off. With b another mechanism is described, in which the CO ₂ snow crystal impinges on the surface of the object 1 and sublimated there. In this sublimation, the contaminant 4 is released from the surface of the object 1 by the gas pressure and is carried along by the effluent CO ₂ .

Fig. 2 shows a device according to the invention for Treating, in particular for radiating Surfaces.

This device according to the invention has a cleaning chamber 36, in which a sample table 1 and a jet tool 2 for generating a CO ₂ snow jet 5 are arranged and are surrounded by laminar flowing air. The gas jet 5, which is usually aligned perpendicular to the sample carrier 1, out of the jet tool 2 is deflected by 90 ° on the mostly flat cleaning objects or on the sample table 1 itself and flows radially from the point of impingement and parallel to the sample table 1. Due to the high flow velocity and the resulting gas volume, it is not possible to suck off the loosened material locally at the site of action. The extraction of the process gases is therefore outside the sample table 1 by means of the flow trap 21, which is arranged laterally to the sample table 1 in the plane of its surface and the sample table completely surrounding. This flow trap 21 catches the CO ₂ flowing off as surface flow 35, which is generated by the CO ₂ snow jet 5 on the surface of the sample table 1, laterally.

The sample table 1 is movable in all three dimensions, heated by a heater 22 and is of below via a valve 24 and a vacuum connection 23 connected to a vacuum line. The sample table 1 consists of a metal perforated plate, so that to be radiated by means of this negative pressure objects fixed on the surface of the sample table 1 can be. Furthermore, a controller 25 for the Heating 22 of the sample table 1 provided to this to bring to a constant temperature.

In the sample chamber, a laminar flow 6 is generated which flows along the walls 36 of the cleaning chamber and in the direction of the CO ₂ snow jet 5.

The jet tool 2 is supplied via a cooler 26, a filter 27 and a high-pressure valve 28 liquid CO ₂ from a CO ₂ tank 34. In the same way, the jet device _{2 is} supplied via a valve with pressure reducer 32, a high pressure valve 30 and a further valve 31 gaseous N ₂ from a N ₂ tank 33. The two high pressure valves 28 and 30 are connected to a controller 29.

1. Eine mit Reinstluft durchströmte Reinigungskammer 36 (z.B. Reinheitsklasse 1 gemäß VDI 2083 Blatt 1, Strömungsgeschwindigkeit 0,4 m/s),

2. ein Strahlwerkzeug 2 mit einer Beschleunigungsund Mischdüse sowie einer Ionisierungseinheit (nicht gezeigt),

3. der Absaugvorrichtung 21,

4. einer Aufbereitungsanlage (nicht gezeigt) für das von der Absaugvorrichtung 21 abgesogene Gas, und

5. einem beheizten Probentisch 1.

Thus, the device according to the invention described in the core consists of the following components:

1. A cleaning chamber 36 through which clean air flows (eg cleanliness class 1 in accordance with VDI 2083 Part 1, flow rate 0.4 m / s),

2. a jet tool 2 with an acceleration and mixing nozzle and an ionization unit (not shown),

3. the suction device 21,

4. a treatment plant (not shown) for the sucked from the suction device 21 gas, and

5. a heated sample table. 1

This device according to the invention generates a low-turbulence Pure air flow in the cleaning chamber 36, which is directed so that the jet tool 2 in front of the sample table 1 and the sample table 1 is flowed perpendicular bouncing. In combination with the suction device 21 is therefore a by the injection effect of the cleaning jet taking place uncontrollable pollution from the air avoided. At the same time it is prevented that with the Time dirt nests in the area of the entire plant form.

The jet tool 2 is composed essentially of two nozzles integrated into one another: Firstly, a capillary, through which the carbon dioxide liquefied under high pressure is passed, as the first nozzle. At the flared end of the capillary liquid carbon dioxide exits, with about 55% of the mass evaporated by expansion and about 45% solidifies by resublimation into small crystals, the CO ₂ ice snow. The amount of effluent CO ₂ can be adjusted by variation and the capillary diameter.

On the other hand, the jet tool 2 has a second nozzle which concentrically surrounds the first nozzle and the capillary. This second nozzle is a Laval nozzle which discharges ultrapure, dry compressed gas (N ₂ ) at room temperature. By this compressed gas on the one hand, the dry ice snow beam is supported and further bundled and accelerated to a parallel beam.

This pressure or support beam can be started or terminated with a time delay to the CO ₂ snow jet, so that when switching on the CO ₂ snow jet after the start of the compressed gas jet, the ambient air is kept away from the cleaning point. Thus, the condensation of humidity at the cooled by the cleaning jet cleaning point is successfully prevented. For the same purpose, the support beam can be switched off only after the CO ₂ snow jet.

The support jet of dry compressed gas continues to lead to ensure that the substrate surface after Cleaning quickly reheated at the cleaning point becomes.

Fig. 3 shows a cross section through an inventive Blasting tool, which will now be described in more detail shall be.

The jet tool is composed essentially of two nozzles integrated into one another: a capillary 42, through which the CO ₂ liquefied under high pressure is passed and at whose conically widened end 49 the CO ₂ expands. This produces a mixture of gas and dry ice snow. The proportion of snow is approximately 45% of the total mass flowing out. The amount of effluent CO ₂ can be adjusted by varying the diameter of the capillary 42.

Furthermore, the capillary 42 is concentric with a special Laval nozzle 51 enclosed from the over a line 56 supplied, dry compressed gas (Pure air or pure nitrogen) supersonic fast flows. This compressed gas jet bundles the steel from dry ice snow to a parallel jet and accelerated this. In addition, through this Pressurized gas jet the ambient air from the cleaning point kept away and the substrate surface warmed up again quickly after cleaning. The condensation of humidity is thus successfully prevented.

The Laval nozzle 51 is through the outer contour of a nozzle needle 45, which contains the capillary 42 and through the inner contour of a nozzle head 46 is formed. The Laval nozzle 51 can by changing the minimum Cross section by moving the nozzle needle 45th relative to the nozzle head 46 finely adjusted and optimal be set. The fixation then takes place Inserting suitable spacers between a arranged on the nozzle needle 45 flange 43rd and the nozzle head 46.

Both the liquid CO ₂ and the compressed gas is supplied via the nozzle needle 45. The compressed gas then flows to calm over four inlet side of the Laval nozzle 51 arranged star-shaped holes in the antechamber of the Laval nozzle 51. From the Laval nozzle, the pressurized gas flows with supersonic, twist-free and symmetrical.

The CO ₂ is supplied via the capillary 42, which is guided in the channel of the nozzle needle 45. A plug 48 at the lower end of the nozzle needle 45 centers the capillary 42 and at the same time seals the compressed gas channel downwards. At the upper end of the compressed gas channel is closed by the CO _{2 line} 40 and the screw 41.

Since the CO ₂ due to pressure change within the geometry of the Laval nozzle 51 would change the state of aggregation, the two nozzles, the Laval nozzle 41 and formed at the end of the capillary 42 snow nozzle 49 are arranged so that the supporting gas until the finished dry ice snow beam is mixed. Otherwise, the function of the jet tool would not be guaranteed.

Sealed the whole system by two seals, namely a pack 44 with flange 43 as well a thin metal foil between the nozzle head 46 and a connection plate 55.

At the nozzle end, a metal ring 50 with three ionization tips is isolated by an insulator 47, which is connected via a high voltage cable 53 to a rotatable ionizer. Via the ionization peaks of the metal ring 50, the strongly negative charge of the CO ₂ jet during crystallization of the CO ₂ at the outlet of the capillary 42 is compensated by continuous deionization.

Furthermore, the capillary 42 is grounded by means of a ground cable, so that the charge separation in the peripheral layer of flowing through the capillary liquid CO _{2 is} raised in mind.

The extraction of the material detached from the dry ice jet directly at the impact site, is due the high flow rate and the resulting Gas volume with a conventional suction device not possible. Therefore, an inventive Suction device 21 used.

FIG. 4 shows a cross section through the plane of the sample table 1. The sample table 1 is completely surrounded by a suction tube 65 of the suction device 21 in the plane of the sample table 1. The gas jet 5, which is usually aligned perpendicularly to the sample carrier, is deflected by 90 ° on the mostly flat cleaning objects or on the sample table itself and flows radially from the point of impact on the surface of the object or the sample table as a laminar flow 35. The extraction of the process gases takes place in the suction device 21 according to the invention therefore only outside the sample table. As can be seen in FIG. 5, the suction tube 65 has a kidney-shaped cross section with indentations in the plane of the sample table 1. On the side of the sample table 1, this indentation is opened as a gas inlet opening. The effluent from the sample table 1 gas 35 thus hits the inner wall of the suction ring 65 and is, supported by the center bend 66 due to the kidney-shaped constriction in the plane of the sample table 1, up or down deflected. Due to the geometry of this flow trap 21, the process gas 35 (compressed gas, CO ₂ gas, abraded particles 4) flowing off the sample table 1 at high speed is transferred into a swirl flow 63 flowing to the corners of the suction ring 65. In the corners of the suction ring 65 are fans 61, which communicate with the suction ring 65 via suction openings 64. These fans generate a suction volume flow through a suction channel 60 which assists in the flow of this jet flow and prevents backflow to the sample carrier.

The openings 64 between the suction ring 65 and the Suction channel 60 are located above and below of the center crease 66 so that the vertebrae formed 63 are sucked off.

The suction volume of the fans 61 is continuously adapted via a speed control the sum of laminar supply air gas stream 6 (see FIG. 2) and cleaning gas stream 5. The supply air flow is determined by the free cross-sectional area of the suction ring 65 and the supply air velocity (velocity of the high purity gas stream 6). The calculation of the cleaning gas stream 5 is essentially based on the diameter of the capillary 42 of the CO ₂ supply, the geometry of the Laval nozzle 51 and the form of the pressure / supporting gas in a conventional manner.

The extracted gas is then removed by the fans 61 blown to a process exhaust system 62, where the extracted air cleaned, treated and / or can be recycled.

With this system have already been different parts from microsystem or precision engineering successful cleaned. These include, for example, contact surfaces of micro switches, nozzle elements of printing technology, on a ceramic carrier built microchips and stampings for the construction of switching elements. Both particulate deposits and biotic and / or abiotic coating such as Fingerprints or thin layers of paint away.

As a further advantageous embodiment, the CO ₂ supply is designed so that short CO ₂ beam bursts can be generated. These are much more effective compared to a continuous CO ₂ jet, since higher thermal stresses are generated here compared to the longer exposure time of the dry ice jet.

Fig. 6 shows an example of a cleaning with the Device according to the invention. Above are encrusted Nozzles of an ink jet printhead are shown, the were purified according to the invention. In the lower part of the Illustration is a microchip on a ceramic carrier shown, its scaling on the right side you can see. On the left side in this picture is the to recognize the cleaned area.

Fig. 7 shows a paint layer, with the inventive Device was treated. The representation in Fig. 7 is enlarged 50 times. How to recognize is, the lacquer layer is partially with the inventive Procedure has been removed. Clear is cracking and blasting from the base material to recognize.

Claims (45)

1. Jet spray tool (2) for the generating of a jet consisting of CO₂ foam with a CO₂ container (34) and a pressure gas supply (33) as well as a first nozzle (49) for the generating of a CO₂ foam jet and a second nozzle (51) for the generating of a supporting, i.e. a pressure jet, whereby the second nozzle (51) consists of a nozzle for the generating of a supersonic jet, characterised in that the first nozzle (49) is connected with the CO₂ container (34), and in that the second nozzle (51) is connected with the pressure gas supply, as well as in that the second nozzle (51) encloses the first nozzle (49).
2. Jet spray tool (2) according to the preceding Claim, characterised in that the second nozzle consists of a Laval nozzle (51).
3. Jet spray tool (2) according to one of the preceding Claims, characterised in that the second nozzle (51) is formed in such a way that the same bundles the jet of the first nozzle, preferably parallel, and/or accelerates the same.
4. Jet spray tool (2) according to one of the preceding Claims, characterised in that the first nozzle (49) is connected with a capillary (42) representing the supply line.
5. Jet spray tool (2) according to one of the preceding Claims, characterised in that the capillary (42) is electrically earthed.
6. Jet spray tool (2) according to one of the preceding Claims, characterised in that the first nozzle (49) takes the form of the conic expansion of the capillary (42).
7. Jet spray tool (2) according to one of the preceding Claims, characterised in that the second nozzle (51) concentrically encloses the first nozzle (49).
8. Jet spray tool (2) according to one of the preceding Claims, characterised in that the said jet spray tool (2) incorporates a nozzle pin (45) and a nozzle head (46) enclosing the same, whereby the first nozzle (49) is positioned within the nozzle pin (45).
9. Jet spray tool (2) according to the preceding Claim, characterised in that the second nozzle (51) takes the form of an interim space between the nozzle pin (45) and the nozzle head (46).
10. Jet spray nozzle (2) according to the preceding Claim, characterised in that the contour of the second nozzle (51) is formed by the outer contour of the nozzle pin (45) and/or by the inner contour of the nozzle head (46).
11. Jet spray tool (2) according to the preceding Claims 8 to 10, characterised in that the nozzle pin (45) is longitudinally reciprocable in relation to the nozzle head (46).
12. Jet spray tool (2) according to one of the preceding Claims 7 to 11, characterised in that a means for the centring of the bearingly positioned nozzle pin (45) within the nozzle head (46) is located at the lower end of the nozzle pin (45).
13. Jet spray tool (2) according to one of the preceding Claims, characterised in that the second nozzle (51) incorporates several star-shaped bores in the direction of the gas supply within its inlet.
14. Jet spray tool (2) according to one of the preceding Claims, characterised in that a means (50) for the deionisation of the CO₂ foam jet is located behind the first nozzle (49) in the direction of the jet.
15. Jet spray tool (2) according to one of the preceding Claims, characterised in that the means (50) for the deionisation incorporates a concentric metal ring leading in the direction of the first nozzle (49).
16. Jet spray tool (2) according to one of the preceding Claims, characterised in that the metal ring incorporates at least one ionisation tip projecting in the direction of the jet.
17. Jet spray tool (2) according to one of the preceding Claims 14 to 16, characterised in that the means (50) for the deionisation is connected with an ioniser via a high voltage cable (53).
18. Jet spray tool (2) according to the preceding Claim, characterised in that the ioniser is controllable.
19. Means for the treatment, for example for the cleaning of the surface of an object (1), for example a workpiece or a sample table through the blasting of the said surface with CO₂ foam, characterised in that the same uses a jet spray tool (2) for the generating of a jet consisting of CO₂ foam according to one of the preceding Claims.
20. Means according to the preceding Claim, characterised in that the jet spray tool (2) and the object (1) are located within a cleaning chamber (36).
21. Means according to the preceding Claim, characterised in that pure air (6) flows through the cleaning chamber (36).
22. Means according to one of the two preceding Claims, characterised in that pure air (6) flows quasilaminarily and with low turbulence through the cleaning chamber (36).
23. Means according to one of the three preceding Claims, characterised in that the cleaning chamber (36) incorporates a sample table (1) for the installation of a workpiece that is to treated or cleaned.
24. Means according to the preceding Claim, characterised in that the sample table (1) can be heated.
25. Means according to the preceding Claim, characterised in that the sample table (1) can be heated electrically.
26. Means according to one of the preceding Claims 19 to 25, characterised in that the sample table (1) incorporates a flat metal plate for the affixing of the workpiece to be treated or cleaned.
27. Means according to the preceding Claim, characterised in that the metal plate incorporates several bores, and that a vacuum pump (23) for the applying of a vacuum to the same bores is envisaged.
28. Means according to one of the preceding Claims 21 to 27, characterised in that the object is positioned within the cleaning chamber (36) in such a way that pure air (6) flows vertically and parallel across the surface of the same.
29. Means according to one of the preceding Claims 19 to 28, characterised in that a suction means (21) for the suctioning of air from the surface of the object (1) possibly located within the cleaning chamber (36) incorporates a suction pipe (65) which completely encloses the surface of the object (1) and which further incorporates gas entry ports along its inner circumference.
30. Means according to the preceding Claim, characterised in that the cross-section of the suction pipe (65) is formed in such a way that the suctioned air forms a maelstrom within the pipe (65) along the cross-section of the same.
31. Means according to one of the two preceding Claims, characterised in that the suction pipe (65) incorporates a kidney-shaped cross-section with an indentation along its outer circumference.
32. Means according to the preceding Claim, characterised in that the suction pipe (65) is open along the indentation along its inner circumference in the form of a gas inlet port.
33. Means according to one of the two preceding Claims, characterised in that the indentation located along the outer circumference of the suction pipe (65) incorporates a central fold (66) in the form of an edge extending towards the inside which tapers to a point.
34. Means according to one of the preceding Claims 29 to 33, characterised in that the suction pipe (65) is connected with at least one ventilator (61) for the suctioning of air from the suction pipe (65).
35. Means according to the preceding Claim, characterised in that the rotation speed of the minimum of one ventilator (61) is controllable.
36. Means according to one of the two preceding Claims, characterised in that the minimum of one ventilator (61) is connected with the suction pipe (65) via ports (64), whereby the same are located upon the upper and/or lower side of the suction pipe (65).
37. Means according to one of the three preceding Claims, characterised in that the minimum of one ventilator (61) is connected with the suction pipe (65) via ports (64), whereby the same are located to the side of the central fold (66).
38. Means according to one of the preceding Claims 29 to 37, characterised in that the suction pipe (65) is formed in an annular fashion.
39. Means according to one of the preceding Claims 29 to 37, characterised in that the suction pipe (65) takes the form of a polygon.
40. Means according to the preceding Claim, characterised in that the suction pipe (65) is formed in an arcuate fashion between two adjacent comers in the direction of the object (1).
41. Means according to one of the two preceding Claims, characterised in that a preferably controllable ventilator (61) according to one of the preceding Claims 34 to 37 is located in every comer of the polygon.
42. Means according to one of the preceding Claims 29 to 41, characterised in that a preparation system for suctioned air and particles possibly contained therein is envisaged.
43. Use of a jet spray tool (2) and/or a means for the treatment, specially the cleaning, of surfaces according to one of the preceding Claims, i.e. for the cleaning of surfaces and/or the removal of coatings within a branch of the optical industry, medical technology, pharmaceutical industry, lacquer technology, micro technology and/or micro processing technology and others.
44. Use according to the preceding Claim for the treatment of soft surfaces, i.e. the removal of particulate, biological and/or non-biological coatings and/or deposits and/or the removal of lacquer layers.
45. Use according to one of the two preceding Claims for the treatment of surfaces within the sub-µm range.

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