EP1100092A3 - Vorrichtung zur Führung von Röntgenstrahlen - Google Patents

Vorrichtung zur Führung von Röntgenstrahlen Download PDF

Info

Publication number
EP1100092A3
EP1100092A3 EP00123501A EP00123501A EP1100092A3 EP 1100092 A3 EP1100092 A3 EP 1100092A3 EP 00123501 A EP00123501 A EP 00123501A EP 00123501 A EP00123501 A EP 00123501A EP 1100092 A3 EP1100092 A3 EP 1100092A3
Authority
EP
European Patent Office
Prior art keywords
guiding device
ray guiding
ray
slit
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00123501A
Other languages
English (en)
French (fr)
Other versions
EP1100092A2 (de
EP1100092B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmut Fischer GmbH and Co
Original Assignee
Helmut Fischer GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmut Fischer GmbH and Co filed Critical Helmut Fischer GmbH and Co
Publication of EP1100092A2 publication Critical patent/EP1100092A2/de
Publication of EP1100092A3 publication Critical patent/EP1100092A3/de
Application granted granted Critical
Publication of EP1100092B1 publication Critical patent/EP1100092B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Radiation-Therapy Devices (AREA)
  • X-Ray Techniques (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

Vorrichtung zur Führung von Röntgenstrahlen von einer Strahlenquelle zu einem Meßobjekt (16) mit zumindest zwei einen Spalt bildenden Reflexionsflächen (18).
EP00123501A 1999-11-12 2000-10-27 Vorrichtung zur Führung von Röntgenstrahlen Expired - Lifetime EP1100092B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19954520 1999-11-12
DE19954520A DE19954520A1 (de) 1999-11-12 1999-11-12 Vorrichtung zur Führung von Röntgenstrahlen

Publications (3)

Publication Number Publication Date
EP1100092A2 EP1100092A2 (de) 2001-05-16
EP1100092A3 true EP1100092A3 (de) 2003-03-26
EP1100092B1 EP1100092B1 (de) 2006-07-19

Family

ID=7928847

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00123501A Expired - Lifetime EP1100092B1 (de) 1999-11-12 2000-10-27 Vorrichtung zur Führung von Röntgenstrahlen

Country Status (7)

Country Link
US (1) US6438209B1 (de)
EP (1) EP1100092B1 (de)
JP (1) JP2001201599A (de)
CN (1) CN1202416C (de)
AT (1) ATE333702T1 (de)
DE (2) DE19954520A1 (de)
HK (1) HK1035400A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60035876T2 (de) 2000-09-27 2008-05-08 Euratom Mikrostrahl-Kollimator für Hochauflösungs-Röntgenstrahl-Beugungsanalyse mittels konventionellen Diffraktometern
JP2007304063A (ja) * 2006-05-15 2007-11-22 Shimadzu Corp ソーラスリット
JP2013528804A (ja) * 2010-05-19 2013-07-11 シルヴァー，エリック，エイチ ハイブリッドｘ線光学機器および方法
EP3115809B1 (de) * 2015-07-06 2021-04-28 Exruptive A/S Verfahren zur sicherheitsabtastung von handgepäckstücken und sicherheitsabtastsystem von handgepäckstücken
US10765383B2 (en) * 2015-07-14 2020-09-08 Koninklijke Philips N.V. Imaging with enhanced x-ray radiation
DE102022105838B3 (de) 2022-03-14 2023-08-17 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Justiereinheit für eine Röntgenoptik in einem Röntgenfluoreszenzgerät sowie Röntgenfluoreszenzgerät

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2217036A (en) * 1988-03-11 1989-10-18 Rosser Roy J Saddle-toriod mirrors.
US5101422A (en) * 1990-10-31 1992-03-31 Cornell Research Foundation, Inc. Mounting for X-ray capillary
JPH06283583A (ja) * 1993-03-25 1994-10-07 Towa Kagaku Kk 表面異物分析用ウエハ及びウエハ表面の金属不純物の評価方法
EP0724150A1 (de) * 1994-07-08 1996-07-31 Muradin Abubekirovich Kumakhov Vorrichtung zur erzeugung eines bildes von einem objekt unter der verwendung eines stromes von neutralen oder geladenen teilchen und einer linse zum konvertierten des stromes von neutralen oder geladenen teilchen
JPH10221500A (ja) * 1997-02-03 1998-08-21 Olympus Optical Co Ltd 軟ｘ線検査装置
EP0873565A2 (de) * 1996-01-10 1998-10-28 Bastian Niemann Kondensor-monochromator-anordnung für röntgenstrahlung
JPH11132970A (ja) * 1997-11-01 1999-05-21 Horiba Ltd 螢光ｘ線分析装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02501338A (ja) * 1986-08-15 1990-05-10 コモンウェルス　サイエンティフィック　アンド　インダストリアル　リサーチ　オーガナイゼイション Ｘ線ビームもしくは中性子ビーム調節用計装装置
US4958363A (en) * 1986-08-15 1990-09-18 Nelson Robert S Apparatus for narrow bandwidth and multiple energy x-ray imaging
US5001737A (en) * 1988-10-24 1991-03-19 Aaron Lewis Focusing and guiding X-rays with tapered capillaries

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2217036A (en) * 1988-03-11 1989-10-18 Rosser Roy J Saddle-toriod mirrors.
US5101422A (en) * 1990-10-31 1992-03-31 Cornell Research Foundation, Inc. Mounting for X-ray capillary
JPH06283583A (ja) * 1993-03-25 1994-10-07 Towa Kagaku Kk 表面異物分析用ウエハ及びウエハ表面の金属不純物の評価方法
EP0724150A1 (de) * 1994-07-08 1996-07-31 Muradin Abubekirovich Kumakhov Vorrichtung zur erzeugung eines bildes von einem objekt unter der verwendung eines stromes von neutralen oder geladenen teilchen und einer linse zum konvertierten des stromes von neutralen oder geladenen teilchen
EP0873565A2 (de) * 1996-01-10 1998-10-28 Bastian Niemann Kondensor-monochromator-anordnung für röntgenstrahlung
JPH10221500A (ja) * 1997-02-03 1998-08-21 Olympus Optical Co Ltd 軟ｘ線検査装置
JPH11132970A (ja) * 1997-11-01 1999-05-21 Horiba Ltd 螢光ｘ線分析装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 01 28 February 1995 (1995-02-28) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 10 31 August 1999 (1999-08-31) *

Also Published As

Publication number Publication date
JP2001201599A (ja) 2001-07-27
ATE333702T1 (de) 2006-08-15
DE19954520A1 (de) 2001-05-17
HK1035400A1 (en) 2001-11-23
EP1100092A2 (de) 2001-05-16
CN1202416C (zh) 2005-05-18
EP1100092B1 (de) 2006-07-19
CN1296178A (zh) 2001-05-23
DE50013184D1 (de) 2006-08-31
US6438209B1 (en) 2002-08-20

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